JPH01105747A - Ink jet head - Google Patents
Ink jet headInfo
- Publication number
- JPH01105747A JPH01105747A JP26409487A JP26409487A JPH01105747A JP H01105747 A JPH01105747 A JP H01105747A JP 26409487 A JP26409487 A JP 26409487A JP 26409487 A JP26409487 A JP 26409487A JP H01105747 A JPH01105747 A JP H01105747A
- Authority
- JP
- Japan
- Prior art keywords
- glass
- plate
- flow path
- point glass
- ink
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011521 glass Substances 0.000 claims abstract description 59
- 230000004927 fusion Effects 0.000 claims abstract description 7
- 239000000758 substrate Substances 0.000 abstract description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 2
- CDBYLPFSWZWCQE-UHFFFAOYSA-L Sodium Carbonate Chemical compound [Na+].[Na+].[O-]C([O-])=O CDBYLPFSWZWCQE-UHFFFAOYSA-L 0.000 abstract description 2
- 238000005530 etching Methods 0.000 abstract description 2
- 238000000034 method Methods 0.000 abstract 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 abstract 1
- 229960002050 hydrofluoric acid Drugs 0.000 abstract 1
- 239000007787 solid Substances 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 6
- 239000002184 metal Substances 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 150000002739 metals Chemical class 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000007639 printing Methods 0.000 description 2
- 238000007789 sealing Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 238000005566 electron beam evaporation Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
Abstract
Description
【発明の詳細な説明】
〔概要〕
インクジェットプリンタに用いられるインクジェットヘ
ッドに関し、
ガラス板を熱融着により一体化する場合であっても、イ
ンク流路形状、流路面状態がよいインクジェットヘッド
を得ることを目的とし、ガラス板にインクの通路を構成
する凹部を形成した流路板と、該流路板の凹部の表面を
薄いガラス板の振動板で被覆してなるインクジェットヘ
ッドであって、前記流路板と前記振動板は高軟化点ガラ
スを用い、これらガラスの接合面となる少なくとも一方
の表面に、低軟化点ガラス層を形成し、これらガラス同
士を熱融着により一体に固定して構成する。[Detailed Description of the Invention] [Summary] To obtain an inkjet head used in an inkjet printer that has good ink flow path shape and flow path surface condition even when glass plates are integrated by heat fusion. An inkjet head comprising a channel plate in which a concave portion constituting an ink passage is formed in a glass plate, and a surface of the concave portion of the channel plate is covered with a diaphragm made of a thin glass plate. The road plate and the diaphragm are constructed by using high softening point glass, forming a low softening point glass layer on at least one surface that becomes the bonding surface of these glasses, and fixing these glasses together by heat fusion. do.
本発明はインクジェットプリンタに用いられるインクジ
ェットヘッドに関する。The present invention relates to an inkjet head used in an inkjet printer.
インクジェットプリンタは、極めて低騒音で、高速印字
が可能の他、安価な普通紙が使え、現像定着等を必要と
せず、漢字、図形等の記録が行える。Inkjet printers are extremely low-noise, capable of high-speed printing, use inexpensive plain paper, do not require development and fixing, and can record kanji, figures, etc.
インクジェットプリンタは、印刷原理からしてノズルか
らインクが噴射され印字されるので、ノズルから噴射さ
れるインク粒子は、安定している必要がある。そこで、
安定したインク粒子を噴射させるインクジェットヘッド
が要望される。Since inkjet printers print by ejecting ink from nozzles based on the printing principle, the ink particles ejected from the nozzles need to be stable. Therefore,
An inkjet head that ejects stable ink particles is desired.
圧電素子を用い、その変位をもってインク室内のインク
を、選択的に噴射して記録媒体に記録を行うドロップ・
オン・デマンド型インクジェット記録装置において、
例えば、特開昭６１−１０４８５９号公報に提案されて
いる第４図（ａ）（ｂ）に示すインクジェットヘッドが
ある。A drop printer that uses a piezoelectric element to selectively eject ink in the ink chamber using the displacement of the piezoelectric element to record on a recording medium.
In an on-demand type inkjet recording apparatus, for example, there is an inkjet head shown in FIGS. 4(a) and 4(b) proposed in Japanese Patent Application Laid-open No. 104859/1983.
図において、１はガラス板、２は表面、３は裏面、４は
インク液室、５はノズル、６はガラス板、７は圧電素子
、８は導電層、９はインク供給口、１１．１２は治具で
ある。In the figure, 1 is a glass plate, 2 is a front surface, 3 is a back surface, 4 is an ink chamber, 5 is a nozzle, 6 is a glass plate, 7 is a piezoelectric element, 8 is a conductive layer, 9 is an ink supply port, 11.12 is a jig.
ガラス板１の表面２と裏面３に多数のインク液室４とこ
れらに連通ずるノズル５が千鳥状に配列している。この
ガラス板ｌの表裏面（２，３）に同種のガラスの薄いガ
ラス板６を重ね、その上下面から治具１１．１２をもっ
て、適当な圧力で加圧した上、図示しない電気炉で熱融
着してヘッドを構成している。A large number of ink chambers 4 and nozzles 5 communicating with these chambers are arranged in a staggered manner on the front surface 2 and rear surface 3 of the glass plate 1. Thin glass plates 6 made of the same type of glass are stacked on the front and back surfaces (2, 3) of this glass plate 1, and after applying appropriate pressure from the top and bottom using jigs 11 and 12, heat is applied in an electric furnace (not shown). They are fused together to form the head.
ところが、インクジェットヘッドは、同一ガラスを使用
しているので、ガラス板を熱融着により一体化しようと
すると、ガラス自体が軟化しているため、元の形状（低
温時の形状）を保つことは難しい。例えば、インク通路
は狭いところでは、数十〜数百μｍのオーダのサイズで
ある。However, inkjet heads use the same glass, so if you try to integrate the glass plates by heat-sealing, the glass itself will have softened, so it will not be possible to maintain the original shape (shape at low temperatures). difficult. For example, the ink passage has a size on the order of tens to hundreds of micrometers at its narrowest point.
こ、のため、流路形状、流路面状態を損わず製造するこ
とは難しかった。For this reason, it has been difficult to manufacture without damaging the flow path shape and flow path surface condition.
そこで、本発明はガラス板を熱融着により一体化する場
合であっても、インク流路形状、流路面状態が劣化する
ことのないインクジェットヘッドを得ることを目的とす
る。SUMMARY OF THE INVENTION Therefore, an object of the present invention is to obtain an inkjet head in which the shape of the ink flow path and the condition of the flow path surface do not deteriorate even when the glass plates are integrated by heat fusion.
前記問題点は、第１図、第２図に示されるようにガラス
板にインクの通路を構成する凹部１７を形成した流路板
１５と、該流路板１５の凹部１７の表面を薄いガラス板
の振動板１５で被覆してなるインクジェットヘッドであ
って、前記流路板１３と前記振動板１５は高軟化点ガラ
スを用い、これらガラスの接合面となる少なくとも一方
の表面に、低軟化点ガラス層２０を形成し、これらガラ
ス同士を熱融着により一体に固定した本発明のインクジ
ェットヘッドによって解決される。The problem is that, as shown in FIGS. 1 and 2, there is a channel plate 15 in which a concave portion 17 forming an ink passage is formed in a glass plate, and a surface of the concave portion 17 of the channel plate 15 is made of thin glass. The inkjet head is coated with a plate diaphragm 15, in which the channel plate 13 and the diaphragm 15 are made of glass with a high softening point, and at least one surface of the glasses, which becomes the bonding surface, is coated with a glass with a low softening point. This problem is solved by the inkjet head of the present invention in which a glass layer 20 is formed and these glasses are fixed together by heat fusion.
即ち、インク通路を構成する凹部を形成したガラス板と
、この凹部を被覆する薄いガラス板とが高軟化点ガラス
であり、これらガラスの接合面に低軟化点ガラス層を形
成しているので、熱融着の時に、低軟化点ガラスのみを
溶かすことができ、高軟化点ガラスの両者を一体に固定
できる。That is, the glass plate in which the concave portion constituting the ink passage is formed and the thin glass plate covering the concave portion are made of high softening point glass, and a low softening point glass layer is formed on the joint surface of these glasses. During heat fusion, only the low softening point glass can be melted, and both the high softening point glasses can be fixed together.
従って、極く薄い低軟化点ガラスのみが軟化（溶融）す
るので、流路板のインク通路を損うことなく、ヘッドを
製造することができる。Therefore, since only the extremely thin low softening point glass is softened (melted), the head can be manufactured without damaging the ink passages in the channel plate.
第１図（ａ）〜（ｄ）は本発明の一実施例を説明する図
、第２図（ａ）（ｂ）は本発明を適用したインクジェッ
トヘッドの構造図である。FIGS. 1(a) to 1(d) are diagrams illustrating an embodiment of the present invention, and FIGS. 2(a) and 2(b) are structural diagrams of an inkjet head to which the present invention is applied.
第２図（ａ）（ｂ）を用いて、本発明を説明する。イン
クジェットヘッドは、インク流路となる凹部１７及び凹
部１７に連通するノズル１８を形成した流路板１３、こ
の上、下を圧電素子１４を貼り付ける振動板１５と基板
１６から基本的に構成されている。The present invention will be explained using FIGS. 2(a) and 2(b). The inkjet head basically consists of a flow path plate 13 in which a recess 17 serving as an ink flow path and a nozzle 18 communicating with the recess 17 are formed, a vibration plate 15 and a substrate 16 on which a piezoelectric element 14 is attached above and below. ing.
このヘッド構成のＡ−Ａ断面で本発明を、第１図に示し
ながら説明する。The present invention will be described with reference to the AA cross section of this head configuration as shown in FIG.
図（ａ）では、振動板１５、流路板１３、基板１６を高
軟化点ガラス１９とする。例えば石英ガラス等を用いる
。In Figure (a), the diaphragm 15, the channel plate 13, and the substrate 16 are made of high softening point glass 19. For example, quartz glass or the like is used.
図（ｂ）は、流路板１３表面（表裏両面）に低軟化点ガ
ラス２０としてソーダガラスを電子ビーム蒸着により２
〜１０μｍの薄層を形成する。In Figure (b), soda glass is deposited on the surface of the channel plate 13 (both front and back surfaces) as a low softening point glass 20 by electron beam evaporation.
A thin layer of ~10 μm is formed.
図（ｃ）は、流路板１３にフン酸等のエツチングにより
凹部１７を形成する。In Figure (c), a recess 17 is formed in the channel plate 13 by etching with hydrochloric acid or the like.
図（ｄ ’）は、３枚の板１５．１３．１６を重ね合わ
せ、荷重をかけ、７００℃〜１０００℃に昇温し低軟化
点ガラス２０のみを融かし、その後室温に冷却し、三枚
の板の接合を終える。In Figure (d'), three plates 15, 13, and 16 are stacked, a load is applied, the temperature is raised to 700°C to 1000°C to melt only the low softening point glass 20, and then cooled to room temperature. Finish joining the three boards.
この後、第２図のノズル１８面を仕上げ、圧電素子１４
、インク供給部２６等を取付ける。After this, the nozzle 18 surface shown in FIG. 2 is finished, and the piezoelectric element 14
, install the ink supply section 26, etc.
これにより、従来金属をエツチングし流路を形成し、金
属同士を重ね合ね、１０００℃付近に保ち拡散接合で製
造すると、金属面表面が結晶粒界の成長により粗になり
、流路にインクを流した時に空気が残りやすく、空気を
残さずインクを充填することが難しかったことが、解決
される。As a result, when metals are conventionally etched to form flow channels, metals are stacked on top of each other, and the metals are kept at around 1000°C and manufactured by diffusion bonding, the metal surface becomes rough due to the growth of grain boundaries, and ink is formed in the flow channels. This solves the problem that air tends to remain when the ink is flushed, making it difficult to fill the ink without leaving any air behind.
また、従来の一種類ガラス同士の接合では、ガラス自身
が変形し、流路形状が損われると云う問題も解決される
。Furthermore, the problem that conventional bonding of one type of glass causes the glass itself to deform and damage the flow path shape is also solved.
従って、本実施例による製造では、流路形状も損なわず
、流路面状態を良好に保つことができる。Therefore, in the production according to this embodiment, the flow path shape is not impaired and the flow path surface condition can be maintained in good condition.
なお、本発明は第２図（ａ）（ｂ）の構造に限らず、第
３図（ａ）（ｂ）の多の構造にも適用できる。即ち、流
路板１３′の両面に低融点ガラスの薄層を蒸着し、３枚
の板１３’、１６．２０を重ね合わせ、荷重をかけて熱
融着して、インクジェットヘッドを構成する。なお、１
６は基板、１８′はノズル、２０はノズル板、２１は圧
力室、２２．２３は共通インク室、２４は供給口、２５
は排出口である。Note that the present invention is applicable not only to the structures shown in FIGS. 2(a) and 2(b) but also to the structures shown in FIGS. 3(a) and 3(b). That is, a thin layer of low-melting glass is deposited on both sides of the channel plate 13', and the three plates 13' and 16.20 are stacked and heat-sealed under a load to form an inkjet head. In addition, 1
6 is a substrate, 18' is a nozzle, 20 is a nozzle plate, 21 is a pressure chamber, 22.23 is a common ink chamber, 24 is a supply port, 25
is the outlet.
以上説明したように本発明によれば、インク通路を構成
する凹部を形成する流路板と、その凹部を被覆するガラ
ス板を高軟化点ガラスとし、そのガラス接合面に低軟化
点ガラス層を形、成し熱融着することにより、インク通
路形状、流路面状態を損わずに、ヘッドが製造できる。As explained above, according to the present invention, the channel plate forming the recesses constituting the ink passages and the glass plate covering the recesses are made of high softening point glass, and the glass bonding surface is provided with a low softening point glass layer. By shaping, forming, and heat-sealing, the head can be manufactured without damaging the shape of the ink passage or the surface condition of the flow passage.
第１図（ａ）〜（ｄ ）は本発明の一実施例を説明する
図、
第２図（ａ）（ｂ）は本発明を適用したインクジェット
ヘッド の構造図、
第３図（ａ） （ｂ）は本発明を適用した別のインク
ジェットヘッドの構造図、
第４図（ａ）（ｂ）は従来のインクジェットヘッドを説
明する図である。
図において、
１３は流路板、
１５は振動板、
１６は基板、
１７は凹部
１８はノズル、
１９は高軟化点ガラス、
２０は低軟化点ガラス、
２１は圧力室、
２２．２３は共通インク室、
２４は供給口、
２５は排出口を示す。
／Ａ−ＺＺＺ二】＝コ
放Ｈ＝乙二り】＝Ｚｚ
不発明の一大施ｆ７１ ｉ説明マる図
券 １ 図
全発明−ｇ適−■した別のイン７ジと・外ヘゾドのａ午
ふ１図＄ ３ し］Figures 1 (a) to (d) are diagrams explaining one embodiment of the present invention, Figures 2 (a) and (b) are structural diagrams of an inkjet head to which the present invention is applied, and Figure 3 (a) ( b) is a structural diagram of another inkjet head to which the present invention is applied, and FIGS. 4(a) and 4(b) are diagrams illustrating a conventional inkjet head. In the figure, 13 is a channel plate, 15 is a diaphragm, 16 is a substrate, 17 is a recess 18 is a nozzle, 19 is a high softening point glass, 20 is a low softening point glass, 21 is a pressure chamber, 22.23 is a common ink 24 is a supply port, and 25 is a discharge port. /A-ZZZ2】=Ko-release H=Otsujiri】=Zz A great use of non-invention f71 a pm 1 fig $ 3 shi]
Claims (1)
した流路板（１３）と、該流路板（１３）の凹部（１７
）の表面を薄いガラス板の振動板（１５）で被覆してな
るインクジェットヘッドであって、前記流路板（１３）
と前記振動板（１５）は高軟化点ガラスを用い、これら
ガラスの接合面となる少なくとも一方の表面に、低軟化
点ガラス層（２０）を形成し、これらガラス同士を熱融
着により一体に固定したことを特徴とするインクジェッ
トヘッド。A flow path plate (13) in which a recess (17) forming an ink path is formed in a glass plate, and a recess (17) in the flow path plate (13).
) is covered with a diaphragm (15) made of a thin glass plate, the flow path plate (13)
The diaphragm (15) is made of high softening point glass, and a low softening point glass layer (20) is formed on at least one surface of these glasses that will be the bonding surface, and these glasses are bonded together by heat fusion. An inkjet head characterized by being fixed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26409487A JPH01105747A (en) | 1987-10-20 | 1987-10-20 | Ink jet head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26409487A JPH01105747A (en) | 1987-10-20 | 1987-10-20 | Ink jet head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH01105747A true JPH01105747A (en) | 1989-04-24 |
Family
ID=17398427
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26409487A Pending JPH01105747A (en) | 1987-10-20 | 1987-10-20 | Ink jet head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH01105747A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100436760B1 (en) * | 2001-12-20 | 2004-06-23 | 삼성전자주식회사 | Head of ink jet printer and method for manufacturing head of ink jet printer |
| JP2010058333A (en) * | 2008-09-02 | 2010-03-18 | Fujifilm Corp | Liquid jet head and method of manufacturing the same |
-
1987
- 1987-10-20 JP JP26409487A patent/JPH01105747A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100436760B1 (en) * | 2001-12-20 | 2004-06-23 | 삼성전자주식회사 | Head of ink jet printer and method for manufacturing head of ink jet printer |
| JP2010058333A (en) * | 2008-09-02 | 2010-03-18 | Fujifilm Corp | Liquid jet head and method of manufacturing the same |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JPH06218917A (en) | Ink jet head | |
| US6412918B1 (en) | Back-shooting inkjet print head | |
| JP3166268B2 (en) | Ink jet print head and method of manufacturing the same | |
| US6368515B1 (en) | Method of manufacturing ink-jet printer head | |
| JPH01105747A (en) | Ink jet head | |
| JPH04158044A (en) | Manufacture of print head for ink jey printer | |
| JPS6135966A (en) | Ink jet recording head | |
| JPS63265647A (en) | Manufacture of on-demand type ink jet printer head | |
| JP2638780B2 (en) | Inkjet recording head | |
| JPH0687213A (en) | Ink-jet printer head | |
| JP2607308B2 (en) | Ink jet printer head and method of manufacturing the same | |
| JPH05162318A (en) | Production of ink jet printing head | |
| JPH04353459A (en) | Ink jet printing head | |
| JPS63303754A (en) | Ink jet head substrate | |
| JP3335736B2 (en) | Ink jet recording head | |
| JPH03121850A (en) | Ink jet printer head and its manufacture | |
| JP3232915B2 (en) | Inkjet head | |
| JPH0999560A (en) | Manufacture of a long array high density nozzle plate | |
| JPS6087056A (en) | Ink jet head | |
| JPH02281955A (en) | Manufacture of liquid jet recording head | |
| JP3275600B2 (en) | Inkjet recording head | |
| JP2001018392A (en) | Liquid discharge head and its manufacture | |
| JPH08142339A (en) | Production of liquid jet recording head in ink jet recording apparatus | |
| JP2001277504A (en) | Ink jet head and method for manufacturing the same | |
| JPH08309987A (en) | Ink jet head, ink jet apparatus using the same and production of ink jet head |