JPS63303754A - Ink jet head substrate - Google Patents

Ink jet head substrate

Info

Publication number
JPS63303754A
JPS63303754A JP14039787A JP14039787A JPS63303754A JP S63303754 A JPS63303754 A JP S63303754A JP 14039787 A JP14039787 A JP 14039787A JP 14039787 A JP14039787 A JP 14039787A JP S63303754 A JPS63303754 A JP S63303754A
Authority
JP
Japan
Prior art keywords
substrate
nozzle
flow path
nozzle part
round holes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14039787A
Other languages
Japanese (ja)
Inventor
Shinji Iizawa
飯沢　信次
Yoshinori Ubusaka
生坂　芳則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP14039787A priority Critical patent/JPS63303754A/en
Publication of JPS63303754A publication Critical patent/JPS63303754A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B41J2/1634—Manufacturing processes machining laser machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14362—Assembling elements of heads

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To enable easy fabrication of round holes in a nozzle part and thereby improve a response frequency by constituting a jet head substrate by junction of a substrate having a flow path pattern other than a nozzle part and a substrate having a nozzle part. CONSTITUTION:Sheet glass, plastic board or metal plate is used as a material for a substrate having a flow path 10 and a lid board 12. The lid board 12 and substrate 10 are joint with fusing agent or adhesive. A nozzle substrate 13 has a nozzle 14 and a groove 15, and is made of materials such as sheet glass, plastic board, metal plate and crystal plate, as is the case with the substrate having a flow path. The round holes of the nozzle part 14 are fabricated by processing means such as drilling, laser electron beam, discharge or etching. Since the thickness of the nozzle substrate is equivalent to the length of the nozzle, it is possible to fabricate so many holes at the same time and finish the thickness easily with high precision in the order of a few mu. The same is true about fabrication of the groove 15. Thus round holes of the nozzle part can be easily fabricated and a response frequency be improve.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明はインクジェットプリンター等に用いるインクジ
ェットヘッド基板の構造に関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to the structure of an inkjet head substrate used in an inkjet printer or the like.

〔従来の技術〕[Conventional technology]

従来のインクジェットヘッド基板の構造をｆＪ２図に示
す。The structure of a conventional inkjet head substrate is shown in Figure fJ2.

第２図ｔａ＋は従来の流路基板の平面図、第２図ｔｂｌ
は同じくの断面図である。１はフォトエツチング加工、
射出成形、プレス加工等により流路を形成した基板であ
り一般にはガラス板、プラスチック板又は金属板が用い
られる。Figure 2 ta+ is a plan view of a conventional channel board, Figure 2 tbl
is the same sectional view. 1 is photo etching processing,
It is a substrate on which a flow path is formed by injection molding, press working, etc., and generally a glass plate, a plastic plate, or a metal plate is used.

２は蓋板であり同じくガラス板、プラスチック板又は金
属板が用いられ、基板１と蓋板２とは融着又は接着剤等
により接合される。Reference numeral 2 denotes a lid plate, which is similarly made of a glass plate, a plastic plate, or a metal plate, and the substrate 1 and the lid plate 2 are joined by fusion, adhesive, or the like.

３はインクの流路であり、ノズル４からインクが噴射す
る。又、ノズル４の近傍にはインク溜まり状態を一定に
し、インク飛行方向を安定させるために満５を設けであ
る。3 is an ink flow path, and ink is ejected from a nozzle 4. In addition, in the vicinity of the nozzle 4, there are provided 5 holes in order to keep the ink accumulation state constant and to stabilize the direction of ink flight.

〔発明が解決しようとする間履点〕[Intermediate points that the invention attempts to solve]

しかし、従来のインクジェットヘッド基板は、ノズル部
から流路部までを一体で加工するためノズル部の形状は
半月形状又は四角形状が一般的であり、応答周波数を上
げようとすると液体固育の特性により安定噴射を妨げ応
答周波数を低く押さえてしまうという欠点を有していた
。またノズル部の長さ寸度が印字品質に影響するため精
度良（加工することが必要であるが、それには多大な工
数を必要とした。さらにはノズル周辺のインク溜まりを
均一化するために溝入加工を行なっているが、同様に多
大な工数を必要とし、又加工中の不良も発生していた。However, in conventional inkjet head substrates, the nozzle part is generally formed into a half-moon or square shape because the nozzle part and the flow path part are processed as one piece. This has the drawback of hindering stable injection and keeping the response frequency low. In addition, since the length of the nozzle affects the printing quality, it is necessary to process the nozzle with high precision, which requires a large amount of man-hours. Although grooving is performed, it also requires a large number of man-hours and also causes defects during processing.

ここで本発明はかかる従来の問題点を解決するものでそ
の目的とするところは、ノズル形状を丸穴形状にするこ
とにより応答周波数を向上させ、又、ノズル長さ寸度加
工及び溝入れ加工を容易にし、安価で品質のすぐれたイ
ンクジェットヘッドを提供することである。The present invention is intended to solve these conventional problems, and its purpose is to improve the response frequency by making the nozzle shape into a round hole shape, and to process the nozzle length and groove. The purpose of the present invention is to provide an inexpensive and high-quality inkjet head.

〔問題点を解決するための手段〕[Means for solving problems]

本発明のインクジェットヘッドは、ノズル部以外の流路
パターンを形成した基板とノズル部を形成した基板との
接合によりヘッド基板を構成することを特徴とする。The inkjet head of the present invention is characterized in that the head substrate is formed by joining a substrate on which a flow path pattern other than the nozzle portion is formed and a substrate on which the nozzle portion is formed.

〔作用〕[Effect]

本発明の上記の構成によれば、ノズル部を別個に加工す
ることにより、ノズル部の九大形状加工が容易となり、
応答周波数が向上する。又、ノズル長さ寸度加工及び溝
入れ加工時に発生していたワレ・クラックの発生がなく
なる。According to the above configuration of the present invention, by separately processing the nozzle part, it becomes easy to process the nozzle part into the nine major shapes,
Improves response frequency. In addition, cracks and cracks that occur during nozzle length machining and grooving are eliminated.

〔実施例〕〔Example〕

本発明の実施例をｍ１図（ａｌ、（ｂｌ、（Ｃ１、ｔｄ
）、（ｅ）、ｆｆｌ、Ｉｇ）を用いて説明する。Examples of the present invention are shown in m1 diagram (al, (bl, (C1, td
), (e), ffl, Ig).

１０は流路を形成した基板、１２は蓋板であり材質とし
てガラス板、プラスチック板、又は金属板が一般には用
いられる。１０の流路基板にはノズル部は形成されてい
ない、１１は流路であり、一般にはエツチング加工によ
り形成され、１２の蓋板と１０の基板とは融着又は接着
剤等を用いて接合される。１３はノズル基板であり、ノ
ズル１４と満１５を形成している。材質としては流路形
成基板と同様にガラス板、プラスチック板、金属板及び
水晶板等が用いられる。Reference numeral 10 indicates a substrate having a flow path formed therein, and reference numeral 12 indicates a cover plate, which is generally made of a glass plate, a plastic plate, or a metal plate. No nozzle part is not formed on the flow path substrate 10, and 11 is a flow path, which is generally formed by etching, and the cover plate 12 and the substrate 10 are bonded by fusion or adhesive. be done. A nozzle substrate 13 forms a nozzle 14 and a nozzle 15. As for the material, a glass plate, a plastic plate, a metal plate, a quartz plate, etc. are used like the flow path forming substrate.

１４の丸穴加工はドリル加工、レーザー加工、電子ビー
ム加工、放電加工、エツチング加工等により行なうが、
穴形状の円滑さにおいてはエツチング加工がすぐれてい
る。水晶Ｚ板、感光性ガラス等を用いれば方向性エツチ
ングが可能である。14 round hole machining is performed by drilling, laser machining, electron beam machining, electrical discharge machining, etching machining, etc.
Etching is superior in terms of the smoothness of the hole shape. Directional etching is possible by using a crystal Z plate, photosensitive glass, or the like.

又従来の方式においては印字品質に影響するノズル長さ
の加工は一品一品多大な工数をかけて加工していたが、
本方式ではノズル基板の厚みがノズル長さに相当するた
め、多数個同時加工を行ない厚み精度も容易に数μの高
精度で仕上げることができる。さらには１５の溝加工に
ついても機械加工、エツチング加工等が考えられるが、
エツチング加工方式を採用すれば、ノズル穴加工と同時
に溝加工が可能となり工数上非常に育利である。In addition, in conventional methods, machining the nozzle length, which affects print quality, required a large amount of man-hours for each product.
In this method, since the thickness of the nozzle substrate corresponds to the nozzle length, multiple pieces can be processed simultaneously and the thickness can be easily finished with a high accuracy of several microns. Furthermore, machining, etching, etc. can be considered for the 15 grooves, but
If the etching method is adopted, it is possible to simultaneously process the nozzle hole and groove, which is extremely beneficial in terms of man-hours.

又、第１図ｔｇ）に示す様にインク溜りをより安定させ
、印字品質を向上させるために、ノズル間に溝を設ける
こともエツチング加工等により容易に可能となる。流路
を形成した流路基板１０とノズル基板１３との接合は接
着剤接合、融雪、低融点金ｒｌＡ接合等の方法により、
ノズル部と流路部の位置精度を確保しながら行なう。Further, as shown in FIG. 1 (tg), in order to further stabilize the ink pool and improve printing quality, grooves can be easily provided between the nozzles by etching or the like. The channel substrate 10 with the channel formed thereon and the nozzle substrate 13 are bonded by adhesive bonding, snow melting, low melting point metal RLA bonding, etc.
This is done while ensuring the positional accuracy of the nozzle section and flow path section.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、流路を形成した基板とノズル基板とを
別々に加工することにより、ノズルの丸穴形状加工を容
易に実現し、応答周波数が向上するという効果を有する
。さらには、ノズル長さ寸度加工と溝入加工の多数個同
時加工がｆａ度良く行なえるため、ヘッドのコストダウ
ンが図れると共に加工精度向上に伴なう印字品質向上が
可１１級となるという効果を打する。According to the present invention, by separately processing the substrate on which the flow path is formed and the nozzle substrate, it is possible to easily process the round hole shape of the nozzle, and the response frequency is improved. Furthermore, since it is possible to simultaneously process multiple nozzle length dimensions and grooves with good fa, it is possible to reduce the cost of the head and improve the printing quality by improving the processing accuracy to level 11. Hit the effect.

【図面の簡単な説明】[Brief explanation of drawings]

第１図＋ａ）は本発明による流路基板の平面図。 １０・・・・・・流路基板 １１・・・・・・流路 第１図１ｃＩは本発明の流路形成基板の断面図。 １２・・・・・・蓋板 第１図１ｃＩは本発明のノズル基板の平面図。 １３・・・・・・ノズル基板 １４・・・・・・ノズル １５・・・・・・溝 第１図（（１）は本発明のノズル基板の右側面図。 １５・・・・・・溝 第１図＋ｅ）は本発明のノズル穴加工の断面図。 第１図（「）は本発明の流路形成基板とノズル基板との
接合図。 、第１図ｔｇ＋は本発明のノズル間にも溝を設けた応用
例を示す図である。 １６・・・・・・ノズル間溝 第２図（ａ）は、従来の流路形成基板の平面図である。 １・・・・・・基板 ３・・・・・・流路 ４・・・・・・ノズル 第２図ｔｂ＋は従来の流路形成基板の断面図。 ２・・・・・・蓋板 ５・・・・・・溝 第２図（Ｃ１は従来のノズル部断面図。 以　　上 出願人　セイコーエプソン株式会社 代理人　弁理士　最　上　　務　他１名ｖＪ１図　（ａ
） 箋１図　（ｂ） 属１図（Ｃ） 第１図（ｅ） 箋１図　（１） 冗１図　（ｇ） 第２図　（ａ） 第２図　（ｂ） 第２図　（Ｃ）FIG. 1+a) is a plan view of a channel substrate according to the present invention. 10... Channel substrate 11... Channel 1 FIG. 1cI is a sectional view of the channel forming substrate of the present invention. 12...Lid plate 1. FIG. 1cI is a plan view of the nozzle substrate of the present invention. 13... Nozzle board 14... Nozzle 15... Groove FIG. 1 ((1) is a right side view of the nozzle board of the present invention. 15... Groove FIG. 1+e) is a sectional view of the nozzle hole machining according to the present invention. FIG. 1 ( ) is a diagram of the connection between the flow path forming substrate and the nozzle substrate of the present invention. FIG. 1 tg+ is a diagram showing an application example in which grooves are also provided between the nozzles of the present invention. ...Groove between nozzles Fig. 2(a) is a plan view of a conventional flow path forming substrate.1...Substrate 3...Flow path 4...・Nozzle Figure 2 tb+ is a sectional view of a conventional flow path forming substrate. 2... Lid plate 5... Groove Figure 2 (C1 is a sectional view of a conventional nozzle part. Person Seiko Epson Co., Ltd. Representative Patent attorney Tsutomu Mogami and 1 other person vJ1 diagram (a
) Figure 1 (b) Figure 1 (C) Figure 1 (e) Figure 1 (1) Figure 1 (g) Figure 2 (a) Figure 2 (b) Figure 2 (C)

Claims (2)

【特許請求の範囲】[Claims] （１）流路パターンの中にノズル部を含まない基板とノ
ズル部を形成した基板との接合によりヘッド基板を構成
することを特徴とするインクジェットヘッド基板。(1) An inkjet head substrate characterized in that the head substrate is constructed by joining a substrate whose flow path pattern does not include a nozzle portion and a substrate on which a nozzle portion is formed. （２）オンデマンド方式における上記第１項記載のイン
クジェットヘッド基板。(2) The inkjet head substrate according to item 1 above in an on-demand system.
JP14039787A 1987-06-04 1987-06-04 Ink jet head substrate Pending JPS63303754A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14039787A JPS63303754A (en) 1987-06-04 1987-06-04 Ink jet head substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14039787A JPS63303754A (en) 1987-06-04 1987-06-04 Ink jet head substrate

Publications (1)

Publication Number Publication Date
JPS63303754A true JPS63303754A (en) 1988-12-12

Family

ID=15267840

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14039787A Pending JPS63303754A (en) 1987-06-04 1987-06-04 Ink jet head substrate

Country Status (1)

Country Link
JP (1) JPS63303754A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5588597A (en) * 1993-09-03 1996-12-31 Microparts Gmbh Nozzle plate for a liquid jet print head
US6668454B2 (en) * 1997-12-10 2003-12-30 Canon Kabushiki Kaisha Method for manufacturing a liquid-discharging recording head
JP2008006809A (en) * 2006-05-31 2008-01-17 Konica Minolta Holdings Inc Manufacturing method of silicon nozzle plate and manufacturing method of inkjet head
JP2011084061A (en) * 2009-09-15 2011-04-28 Ricoh Co Ltd Liquid ejection head, manufacturing method thereof, and image forming apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5588597A (en) * 1993-09-03 1996-12-31 Microparts Gmbh Nozzle plate for a liquid jet print head
US6668454B2 (en) * 1997-12-10 2003-12-30 Canon Kabushiki Kaisha Method for manufacturing a liquid-discharging recording head
JP2008006809A (en) * 2006-05-31 2008-01-17 Konica Minolta Holdings Inc Manufacturing method of silicon nozzle plate and manufacturing method of inkjet head
JP2011084061A (en) * 2009-09-15 2011-04-28 Ricoh Co Ltd Liquid ejection head, manufacturing method thereof, and image forming apparatus

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