JPS62256659A - Preparation of ink jet recording head - Google Patents

Preparation of ink jet recording head

Info

Publication number
JPS62256659A
JPS62256659A JP10016886A JP10016886A JPS62256659A JP S62256659 A JPS62256659 A JP S62256659A JP 10016886 A JP10016886 A JP 10016886A JP 10016886 A JP10016886 A JP 10016886A JP S62256659 A JPS62256659 A JP S62256659A
Authority
JP
Japan
Prior art keywords
substrate
ink
recording head
heat generators
jet recording
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10016886A
Other languages
Japanese (ja)
Other versions
JP2638780B2 (en
Inventor
Nobumasa Abe
信正 阿部
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP61100168A priority Critical patent/JP2638780B2/en
Publication of JPS62256659A publication Critical patent/JPS62256659A/en
Application granted granted Critical
Publication of JP2638780B2 publication Critical patent/JP2638780B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1623Manufacturing processes bonding and adhesion
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1601Production of bubble jet print heads
    • B41J2/1603Production of bubble jet print heads of the front shooter type
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41JTYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01Ink jet
    • B41J2/135Nozzles
    • B41J2/16Production of nozzles
    • B41J2/1621Manufacturing processes
    • B41J2/1632Manufacturing processes machining

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

PURPOSE:To prepare a stable thermal ink jet recording head capable of performing high speed response, by a method wherein a substrate having a large number of heat generators arranged thereto so as to form a row is fixed to a plate material and cut in the row direction of the heat generators to form a groove which is, in turn, used as a recording ink supply passage. CONSTITUTION:A substrate 1 having heat generators 5 and electrodes 7 formed to the surface thereof in a membrane form is adhered to a resin or metal base 2 equipped with an ink sump and an ink supply pipe 8 by an adhesive. Next, the substrate 1 is subjected to cutting processing, by a dicing saw to form an ink supply groove 11. Further, a gap plate 3 is bonded to the surface of the substrate 1 and a nozzle plate 4 is bonded to the gap plate 3 and, thereafter, a seal part 10 is closed by a thermosetting sealer to prepare a thermal ink jet recording head. Because the substrate 1 is cut after bonded to the base 2, the mutual positional relation between the heat generators 5 when membranes are formed does not change. As a result, positional matching becomes unnecessary and the positional matching of the heat generators 5 with the ink emitting orifices 6 of the nozzle plate 4 becomes also easy and manufacture can be simplified.

Description

【発明の詳細な説明】 [産業上の利用分野] 本発明は記録インクの加熱状態変化によりインク滴な吐
出させるインクジェット(以下、熱インクジェットと呼
ぶ。)記録に用いるインクシェツト記録ヘッドの製造方
法に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an ink jet recording head used for inkjet (hereinafter referred to as thermal inkjet) recording in which ink droplets are ejected by changing the heating state of the recording ink.

[従来の技術] 熱インクジェット記録ヘッドの従来例として、米国HE
WLETT−PACKARD社ジャーナル1985年5
月号に記録ヘッドの構造が詳細に紹介されており、簡便
な構造で高速・高密度記録が可能なインクジェット記録
ヘッドを実現するのに有効な手段である。
[Prior Art] As a conventional example of a thermal inkjet recording head, the US HE
WLETT-PACKARD Journal 1985 5
The structure of the printhead is introduced in detail in the monthly issue, and is an effective means for realizing an inkjet printhead that has a simple structure and is capable of high-speed, high-density printing.

[発明が解決しようとする問題点] しかしながら、上記文献に紹介されている熱インクジェ
ット記録ヘッドは2631血ピツチで1列12個のイン
ク吐出部を有するのみで、 1001+mピッチ程度の
高密度記録が可能なヘッドを実現するには複数個のヘッ
ドを用いるか、単一のヘッドで多数のインク吐出部を多
列配置する必要がある。
[Problems to be Solved by the Invention] However, the thermal inkjet recording head introduced in the above-mentioned document only has 12 ink ejection sections in one row at 2631 blood pitches, and is capable of high-density recording on the order of 1001+m pitch. In order to realize such a head, it is necessary to use a plurality of heads or to arrange a large number of ink ejection sections in multiple rows in a single head.

前者の場合はヘッド相互の位置関係の調整が非常に微妙
で製造がむずかしい。後者の場合、発;−41体を有・
する基板を複数で構成したのでは前者と同様に基板相互
の位置関係の調整が困難になり、また、単一基板上に複
数列の発熱体を設けた場C1には、高速応答させた時に
インク供給口から遠いインク吐出部がインク吐出不良を
起こしやすい。ざらに、高速応答を実現するには発熱体
を有する基板に例えば、ガラス、アルミナ、シリコン等
の熱伝導性の悪い材料をもちいる必要があるが、これら
の材質が極めて脆いために、インク供給口の加工がむず
かしく、超音波加工等により穴加工した場合に基板を破
損しやすく分留りの低下を招く。
In the former case, the adjustment of the mutual positional relationship between the heads is very delicate and manufacturing is difficult. In the latter case, there are -41 bodies.
If a plurality of substrates are used, it will be difficult to adjust the positional relationship between the substrates, and if multiple rows of heating elements are provided on a single substrate, it will be difficult to adjust the positional relationship between the substrates. Ink ejection parts that are far from the ink supply port are likely to cause ink ejection failure. Generally speaking, in order to achieve high-speed response, it is necessary to use materials with poor thermal conductivity, such as glass, alumina, and silicon, for the substrate containing the heating element, but since these materials are extremely brittle, it is difficult to supply ink. Machining of the opening is difficult, and when holes are processed by ultrasonic processing, the substrate is likely to be damaged, leading to a decrease in fractionation.

[問題点を解決するための手段] 本発明はかかる問題点を解決するものであり、列状に配
置された複数の発熱体を有する基板を板材に固着させた
後、前記発熱体の列方向に前記基板を例えばダイシング
ソー等で切断して形成した溝を記録インク供給路として
用いることを特徴とする。
[Means for Solving the Problem] The present invention solves the problem, and after fixing a substrate having a plurality of heating elements arranged in a row to a plate material, the direction of the row of the heating elements is fixed. A groove formed by cutting the substrate with, for example, a dicing saw is used as a recording ink supply path.

[作用] 本発明によれば、列状に配置された複数の発熱体の位置
合わせが不要となり、発熱体の列方向に設けた溝を記録
インク供給路とするため、全てのインク吐出部に均等に
記録インクを供給できる。
[Function] According to the present invention, there is no need to align the plurality of heating elements arranged in a row, and since the grooves provided in the row direction of the heating elements are used as the recording ink supply path, all the ink ejection parts Recording ink can be supplied evenly.

:[た、irt来、基板f:1■音波加工して形7i!
 シていたインク供給口をグイシングツ−等の切断加工
に置き換えられる。
: [Since IRT, board f: 1 ■ Sonic processing and shape 7i!
The previously used ink supply port can be replaced with a cutting process such as a cutting tool.

[実施例コ 本発明を実施例に基づき詳細に説明する。[Example code] The present invention will be explained in detail based on examples.

第1図は本発明のインクジェット記録ヘッド製造方法に
より作成した熱インクジェット記録ヘッドの一実施例で
あり、第2図は第1図の断面図である。
FIG. 1 shows an embodiment of a thermal ink jet recording head manufactured by the ink jet recording head manufacturing method of the present invention, and FIG. 2 is a sectional view of FIG. 1.

第1図および第2図で各部の動作を簡単に説明する。第
1図において、基板1はベース2に接合され、基板lの
中央にインク供給r1! 11を設け、基板1の上には
ギャップ板3とノズル板4がそれぞれ接合されている。
The operation of each part will be briefly explained with reference to FIGS. 1 and 2. In FIG. 1, a substrate 1 is joined to a base 2, and an ink supply r1! is provided at the center of the substrate l. 11 is provided, and a gap plate 3 and a nozzle plate 4 are respectively bonded onto the substrate 1.

第2図のインク供給バイブ8から供給される記録インク
はインク供N舒i111を通り、基板1とノズル板4の
間隙に供給される。第1図に戻り、発熱体5には電極7
を通し;てスイッチング素子SWにより電力が供給され
てジュール熱が生じ、発熱体5の表面に接する記録イン
クが急激な膜沸騰を起こすことによって発生する圧力変
化で第2図のようにインク吐出口6よりインク滴な吐出
するものである。
Recording ink supplied from the ink supply vibrator 8 shown in FIG. 2 passes through the ink supply pipe 111 and is supplied to the gap between the substrate 1 and the nozzle plate 4. Returning to FIG. 1, the heating element 5 has an electrode 7
Power is supplied by the switching element SW to generate Joule heat, and the recording ink in contact with the surface of the heating element 5 undergoes rapid film boiling, resulting in a pressure change that causes the ink discharge port to open as shown in Figure 2. This type of ink ejects larger ink droplets than 6.

次に、本発明のインクジェット記録ヘッド製造方法を説
明する。まず、第3図のようにインク溜め12およびイ
ンク供給バイブ8を備えた樹脂または金属性のベース2
に発熱体5、電極7などの薄膜を表面に形成した基板1
を接着等により接合する。第二に、第4図に示す如くダ
イシングソー9でインク供給溝11を切断加工して形成
する。ざらに、基板1の表面へギャップ板3を、ギャッ
プ板3の表面へノズル板4を接合した後に第6図に示す
封止部10を熱硬化性封止剤等で塞ぎ、第1図の熱イン
クシェツト記録ヘッドを製造するものてJ’)る。
Next, a method for manufacturing an inkjet recording head according to the present invention will be explained. First, as shown in FIG.
A substrate 1 on which thin films such as a heating element 5 and an electrode 7 are formed.
are joined by gluing or the like. Second, as shown in FIG. 4, the ink supply grooves 11 are formed by cutting with a dicing saw 9. After roughly bonding the gap plate 3 to the surface of the substrate 1 and the nozzle plate 4 to the surface of the gap plate 3, the sealing portion 10 shown in FIG. A company that manufactures thermal ink jet recording heads.

本発明のインクジェット記録ヘッド製造方法によれば、
基板1をベース2に接合した後に切断するので薄膜形成
した際の発熱体5の相互の位置関係が変わらないので位
1を合わせが不要てあり、発熱体5とノズル板4のイン
ク吐出口6との位置8・わせも容Uとなり、製造が簡素
化できた。また、基板1とノズル板4の間隙の均一性も
向上し、発熱体5の近傍で、かつ、どの発熱体からも均
等な距離にインク供給溝11があるので、どのインク吐
出部にも同一条件で記録インクの供給が可能となった。
According to the inkjet recording head manufacturing method of the present invention,
Since the substrate 1 is cut after being bonded to the base 2, the mutual positional relationship of the heating elements 5 does not change when a thin film is formed, so there is no need to align the heating elements 5 and the ink ejection ports 6 of the nozzle plate 4. The position 8 and the sash also became U, simplifying manufacturing. In addition, the uniformity of the gap between the substrate 1 and the nozzle plate 4 is improved, and since the ink supply grooves 11 are located near the heating element 5 and at an equal distance from each heating element, the same ink is distributed to all ink ejection parts. It became possible to supply recording ink under certain conditions.

そのため、従来では2KHz程度の駆動周波数でしか安
定したインク吐出状態が得られなかったが、4KIIz
でもドツト抜けや、インク量の不均一・等がない良好な
吐出状態を得ることができた。また一方、基板のインク
供給口の加工を切削加工することにより多数個取りでの
加工が可能となり、従来の超音波加工よりも効率良く加
工でき、分留りも向上させることができた。
Therefore, in the past, stable ink ejection conditions could only be obtained with a drive frequency of about 2KHz, but with 4KIIz
However, we were able to obtain good ejection conditions with no missing dots or non-uniformity of ink amount. On the other hand, by machining the ink supply port of the substrate, it became possible to process multiple pieces, which enabled more efficient processing than conventional ultrasonic processing, and improved fractionation.

ざらに、本発明はカラーインクジェット記録ヘッドの製
造にも適応が可能である。第7図に実施例を示す。製造
過程は第3図から第6図と同様である。第7図の実施例
によれば、一枚の基板からイエロー、マゼンダ、シアン
、ブラックの4区のヘッドが製造できるので従来のカラ
ーインクジェット記録ヘッドで問題となっていた、良好
な混色状態を得るための各邑インク吐出部の位置合わせ
を不要にすることかできる。
In general, the present invention can also be applied to the manufacture of color inkjet recording heads. An example is shown in FIG. The manufacturing process is similar to that shown in FIGS. 3 to 6. According to the embodiment shown in FIG. 7, four heads of yellow, magenta, cyan, and black can be manufactured from a single substrate, thereby achieving good color mixing, which has been a problem with conventional color inkjet recording heads. This eliminates the need for positioning of each ink ejecting section.

[発明の効果] 以上述べたように、本発明のインクシェツト記録ヘッド
の製造方法によれば、列状に配置された発熱体の相互の
位置合わぜが不要となり、ノズル板の位置合わせも簡素
化できるので製造方法が簡便になる上、安定した高速応
答が可能な熱、インクジェット記録ヘッドが製造できる
[Effects of the Invention] As described above, according to the method of manufacturing an inksheet recording head of the present invention, mutual alignment of heating elements arranged in a row is not required, and alignment of nozzle plates is also simplified. This not only simplifies the manufacturing method, but also enables the manufacture of thermal and inkjet recording heads that are capable of stable and high-speed response.

また、カラーインクジェット記録J\ツドを製造する際
には上記効果がさらに発揮でき、従来のカラーインクシ
糧ット記録ヘッドの製造上の問題であった各色相互のイ
ンク吐出部位置合わせが不要になる。
In addition, when manufacturing color inkjet recording heads, the above effects can be further demonstrated, eliminating the need to align the ink ejection parts of each color, which was a problem in manufacturing conventional color inkjet recording heads. Become.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明のインクジェット記録ヘッド製造方法に
より製造した熱インクシェツト記録ヘッドの構造を示す
斜視図。第2図は第1の[01面1/1゜第3図、第4
図、第5図、第6図は本発明のインクジェット記録ヘッ
ド製造方法の製造過程を示す斜視図。第7図は本発明を
カラーインクジェット記録ヘッドに適応した実施例を示
す斜視図。 1・・・基板 2・・・ベース 3・・・キャップ板 4・・・ノズル板 以上 出願人 セイコーエプソン株式会社 第1図 第2図 第3図
FIG. 1 is a perspective view showing the structure of a thermal ink jet recording head manufactured by the ink jet recording head manufacturing method of the present invention. Figure 2 shows the first [01 side 1/1° Figure 3, 4
5 and 6 are perspective views showing the manufacturing process of the inkjet recording head manufacturing method of the present invention. FIG. 7 is a perspective view showing an embodiment in which the present invention is applied to a color inkjet recording head. 1... Substrate 2... Base 3... Cap plate 4... Nozzle plate and above Applicant: Seiko Epson Corporation Figure 1 Figure 2 Figure 3

Claims (1)

【特許請求の範囲】[Claims] 記録インクの加熱状態変化によりインク滴を吐出させる
インクジェット記録ヘッドにおいて、列状に配置された
複数の発熱体を有する基板を板材に固着させた後、前記
発熱体の列方向に前記基板を切断して形成した溝を記録
インク供給路として用いることを特徴とするインクジェ
ット記録ヘッドの製造方法。
In an inkjet recording head that ejects ink droplets by changing the heating state of recording ink, a substrate having a plurality of heating elements arranged in a row is fixed to a plate material, and then the substrate is cut in the direction of the rows of the heating elements. 1. A method of manufacturing an inkjet recording head, characterized in that a groove formed by the method is used as a recording ink supply path.
JP61100168A 1986-04-30 1986-04-30 Inkjet recording head Expired - Lifetime JP2638780B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61100168A JP2638780B2 (en) 1986-04-30 1986-04-30 Inkjet recording head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61100168A JP2638780B2 (en) 1986-04-30 1986-04-30 Inkjet recording head

Publications (2)

Publication Number Publication Date
JPS62256659A true JPS62256659A (en) 1987-11-09
JP2638780B2 JP2638780B2 (en) 1997-08-06

Family

ID=14266786

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61100168A Expired - Lifetime JP2638780B2 (en) 1986-04-30 1986-04-30 Inkjet recording head

Country Status (1)

Country Link
JP (1) JP2638780B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4942408A (en) * 1989-04-24 1990-07-17 Eastman Kodak Company Bubble ink jet print head and cartridge construction and fabrication method
JPH07266563A (en) * 1995-03-31 1995-10-17 Ricoh Co Ltd Liquid jet recording head
EP1084038A1 (en) * 1998-06-03 2001-03-21 Lexmark International, Inc. Ink jet cartridge structure

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61181727U (en) * 1985-05-01 1986-11-13
JPS62134268A (en) * 1985-12-06 1987-06-17 Yokogawa Hewlett Packard Ltd Thermal ink jet printing head
JPS62249747A (en) * 1986-04-24 1987-10-30 Seiko Epson Corp Ink jet recording head

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61181727U (en) * 1985-05-01 1986-11-13
JPS62134268A (en) * 1985-12-06 1987-06-17 Yokogawa Hewlett Packard Ltd Thermal ink jet printing head
JPS62249747A (en) * 1986-04-24 1987-10-30 Seiko Epson Corp Ink jet recording head

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4942408A (en) * 1989-04-24 1990-07-17 Eastman Kodak Company Bubble ink jet print head and cartridge construction and fabrication method
JPH07266563A (en) * 1995-03-31 1995-10-17 Ricoh Co Ltd Liquid jet recording head
EP1084038A1 (en) * 1998-06-03 2001-03-21 Lexmark International, Inc. Ink jet cartridge structure
EP1084038A4 (en) * 1998-06-03 2001-09-19 Lexmark Int Inc Ink jet cartridge structure

Also Published As

Publication number Publication date
JP2638780B2 (en) 1997-08-06

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