JPS6132761A - Jet head - Google Patents

Abstract

PURPOSE:To form fine nozzles each generating no clogging, by integrating a base plate having guide grooves each larger than each of fine nozzles and an upper plate by diffusion bonding and thermally bonding a resin film to the end surfaces of both plates in the guide groove side under pressure while forming fine nozzles by high energy beam. CONSTITUTION:A base plate 1 and an upper plate 6 are superposed so that a pipeline groove 3 and a locating groove 7 are matched and both plates are integrated by diffusion bonding while end surfaces 9, 9 of both plates are subjected to finishing processing so as to be flushed to each other. A resin film 10 is fixed to the end surface 9 of the base plate 1 and fine nozzles 11 are formed to the film 10 at the positions corresponding to the center of each of the guide grooves by high energy beam such as laser.

Description

DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to an ejection head for an inkjet printer that ejects ink from fine nozzles to print on recording paper.

(Prior Art and its Problems) The ejection head has a structure in which ink is pressurized by minute displacement energy by a piezoelectric element attached to the outside of an ink supplying groove, and the ink is ejected from minute nozzles. Generally speaking, the fine nozzle can be formed by using a drawn fine tube or by electroforming, but it is difficult to realize the fine nozzle in terms of accuracy with either method. A practical method is to form etched fine grooves on the substrate, overlay the upper plate thereon, and perform diffusion bonding.

According to this method, it is possible to reliably supply fine grooves with high precision and complicated shapes. In order to improve the ink jetting characteristics of the joined jet head, it is necessary to mirror-finish the end surfaces of the fine grooves. This is to prevent "curvature" or "bleeding" in the ink ejection direction due to the formation of a step directly at the end of the head during bonding. However, in mirror finishing, the fine grooves are extremely small (e.g. 80 μm x 50 μm).
), it is essential that clogging occurs. For this reason,
Methods such as filling the fine grooves with a filler and polishing them, and discharging air or water from the fine grooves for polishing have been used, but these methods are not perfect. That is, in the former case, it is difficult to completely remove the filler after polishing, and in the latter case, it is not possible to completely eliminate clogging.

(Object of the Invention) In order to eliminate such drawbacks, the present invention forms a bonding head by diffusion bonding a substrate having a slightly larger guide groove than a fine nozzle and an upper plate, and forms a bonding head on the guide groove side end surface of the head. The object of the present invention is to provide a reliable head without clogging by fixing a resin film to the head by thermocompression bonding and forming fine nozzles on this film using a high-energy beam such as a laser beam.

(Structure of the Invention) According to the present invention, an etching guide groove, a conduit groove, an inlet, and a tank hole are formed in a substrate, and an upper plate having a positioning groove thereon is formed by diffusion bonding the substrate and the upper plate. , a bonding head is formed, a resin film is fixed to the guide groove side end surface of the bonding head by thermocompression bonding,
An ejection head is obtained in which a fine nozzle is formed using a high-energy beam at a position corresponding to the center of the guide groove of the film, and a piezoelectric element is pasted to the positioning groove.

(Embodiment) FIG. 1 is an exploded view of a jetting head showing an embodiment of the present invention.
FIG. 2 is a sectional view of the stacked layers.

In the figure, reference numeral 1 indicates a substrate, a guide groove 2, and a conduit groove. Reference numeral 6 denotes an upper plate having etched positioning grooves 7. The substrate 1 and the upper plate 6 are placed one on top of the other so that the conduit grooves 3 and the positioning grooves 7 are aligned, and the two are diffusion bonded. Since the end face 9 of the diffusion-bonded welding head 80 on the guide groove 2 side has a slight step, it is finished flush.

In addition, since the female guide groove 2 is larger than the conventional one (100 μm or more) during finishing processing, there is no risk of clogging, and even if it occurs, it can be easily removed.

Next, a resin film 10 is fixed to the finished end surface 9 by thermocompression bonding. A suitable material for the resin film 10 is a fluorine-based resin that has a water-repellent effect to prevent ink bleeding. A fine nozzle #11 is formed at a position corresponding to the center of the guide groove 2 of the film 1 using a high energy beam such as a laser beam. At this time, by making the film 10 transparent,
Since the guide groove 2 can be easily checked using a microscope or the like, highly accurate positioning can be achieved.

In addition, a method can be considered in which the processing film IOK of the fine nozzle 11 is performed in advance and then thermocompression bonded to the end face 9, but positioning is extremely difficult. Therefore, fine nozzle 1
It is better to perform the process 1 after thermocompression bonding. The size of the fine nozzle 11 can be freely changed by adjusting the high-energy beam, and a desired size and shape can be reliably obtained. Finally, by attaching the piezoelectric element 12 to the positioning groove 7,
A reliable jetting head can be provided.

(Effect of the invention) As described above, according to the present invention, the fine nozzle 11
Instead of polishing the end face with
1, it is possible to supply a high-quality ejection head. In addition, the surface of the film 100 is extremely good and has a high water-repellent effect, so it can improve ink jetting characteristics and prevent ink bleeding, so it can be widely applied to similar nozzle processing.

[Brief explanation of drawings]

FIG. 1 is an exploded view of an ejection head showing an embodiment of the present invention;
FIG. 2 is a sectional view of the stacked layers.

Claims (1)

[Claims] By forming an etching guide groove, a conduit groove, an inlet, and a tank hole on the substrate, and forming an upper plate having a positioning groove thereon, by diffusion bonding the substrate and the upper plate,
A welding head is formed, the end face of the welding head on the guide groove side is finished flush, a resin film is fixed to the end face of the guide groove by thermocompression bonding, and a high energy beam is applied to the center of the guide groove of this film. 1. An ejection head characterized in that a fine nozzle is formed by a method, and a piezoelectric element is attached to the positioning groove.