JPH01288452A - Fabrication of ink jet recording head - Google Patents
Fabrication of ink jet recording headInfo
- Publication number
- JPH01288452A JPH01288452A JP11958288A JP11958288A JPH01288452A JP H01288452 A JPH01288452 A JP H01288452A JP 11958288 A JP11958288 A JP 11958288A JP 11958288 A JP11958288 A JP 11958288A JP H01288452 A JPH01288452 A JP H01288452A
- Authority
- JP
- Japan
- Prior art keywords
- ink
- recording head
- plate
- flow path
- orifice
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 13
- 239000000758 substrate Substances 0.000 claims abstract description 11
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 239000000853 adhesive Substances 0.000 claims abstract description 8
- 230000001070 adhesive effect Effects 0.000 claims abstract description 8
- 238000000034 method Methods 0.000 claims description 18
- 238000005530 etching Methods 0.000 claims description 7
- 239000000463 material Substances 0.000 abstract description 3
- 229920006332 epoxy adhesive Polymers 0.000 abstract description 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- 230000006835 compression Effects 0.000 abstract 2
- 238000007906 compression Methods 0.000 abstract 2
- 230000005684 electric field Effects 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000004033 diameter control Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005498 polishing Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 238000005304 joining Methods 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は複数のオリフィスから画像情報に応じてインク
滴を吐出するインクジェット記録ヘッドの製造方法に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an inkjet recording head that ejects ink droplets from a plurality of orifices according to image information.
プリンタやファクシミリなどの記録装置の1型式として
インクジェット記録装置がある。An inkjet recording device is one type of recording device such as a printer or a facsimile.
インクジェット記録装置は、種々のエネルギー作用方式
でオリフィスから記録液(インク)の小液滴を飛翔させ
、これを用紙やプラスチック薄板などの記録媒体(記録
シート)に付着させて記録を行なうものである。Inkjet recording devices perform recording by ejecting small droplets of recording liquid (ink) from an orifice using various energy application methods, and attaching the droplets to a recording medium (recording sheet) such as paper or a thin plastic plate. .
本発明はこのような記録装置に使用される記録ヘッドの
製造方法に関する。The present invention relates to a method of manufacturing a recording head used in such a recording apparatus.
インクジェット記録ヘッドでのインク液滴の形成ないし
これを飛翔させるためのエネルギー作用方式としては、
例えば、オリフィス(インク吐出口)付近に配置した電
極で電界を生成し、インクに電界を加えて静電的にイン
クを吐出飛翔させる電界制御方式、オリフィス付近に電
気機械変換素子を配設し、外部信号に応じて電気機械変
換素子の機械振動をインクに作用させることによりイン
ク滴を吐出飛翔させるオンデマンドピエゾ、l、あるい
ば、オリフィス付近に発熱体(電気熱交換体)を設け、
外部信号に応じて該発熱体に通電してその付近のインク
を気化させ、その時に発生ずる圧力によってインク滴を
吐出飛翔させるす・−マルインクジェット(バブルシャ
フト)方式などがある。The energy application method for forming ink droplets or making them fly in an inkjet recording head is as follows:
For example, an electric field control method generates an electric field with an electrode placed near an orifice (ink ejection opening), applies the electric field to the ink, and electrostatically ejects the ink, and an electromechanical conversion element is placed near the orifice. An on-demand piezo is used to eject and fly ink droplets by applying mechanical vibration of an electromechanical transducer to the ink in response to an external signal, or a heating element (electrothermal exchanger) is provided near the orifice.
There is a bubble shaft type ink jet (bubble shaft) system in which the heating element is energized in response to an external signal to vaporize the ink in the vicinity, and the pressure generated at that time causes ink droplets to be ejected into the air.
しかし、従来の電界制御方式の記録ヘッドにおいては、
オリフィス付近の電極等の構成が複雑となり、記録ヘッ
ドが大型になリコストも高くなるという問題があった。However, in the conventional electric field control type recording head,
There is a problem in that the configuration of electrodes and the like near the orifice becomes complicated, the recording head becomes large, and the cost of recycling increases.
また、従来のサーマルインクジェット方式においては
、エネルギー発生体として発熱体を用いるため、他のオ
ンデマンド方式や電界制御方式に比べ、吐出耐久性能が
劣るという問題があった。Further, in the conventional thermal inkjet method, since a heating element is used as an energy generator, there is a problem in that the ejection durability is inferior to other on-demand methods or electric field control methods.
ドツト径制御機能は高画質化にとって重要な技術である
が、サーマルインクジェット方式においては、他のオン
デマンド方式に比べ、ドツト径制御時のドツト径可変範
囲が狭いという問題があった。Although the dot diameter control function is an important technology for achieving high image quality, the thermal inkjet method has a problem in that the dot diameter variable range during dot diameter control is narrower than other on-demand methods.
本発明の目的は、」二足従来技術の問題点を解決でき、
比較的簡単な構成で、低コスト化および小型化が可能な
インクジェット記録ヘッドの製造方法を提供することで
ある。The purpose of the present invention is to solve the problems of the two-legged prior art;
It is an object of the present invention to provide a method for manufacturing an inkjet recording head that has a relatively simple configuration and is capable of reducing cost and size.
本発明は、複数のオリフィスから画像情報に応じてイン
ク滴を吐出するインクジェット記録へ・ラドの製造方法
において、基板と、各オリフィスに連通ずる複数の圧力
室、各圧力室に連通ずる複数のインク流路並びに各イン
ク流路に連通ずる共通液室を同一のプレート内Cごエツ
チングにて形成した構造の流路板と、インク滴を吐出さ
せるためのエネルギー発生体である複数の電気機械変換
体と、各電気機械変換体の位置決め用の溝を同一のブレ
・−1・上にハーフエツチングにて形成した構造の天板
とを備え、基板と流路板と天板とを該流路板を挟んで高
温圧着にて結合し、天板と複数の電気機械変換体とを接
着剤で結合する各工程から成るインクジェット記録−・
ラドの製造方法により、上記目的を達成するものである
。The present invention relates to inkjet recording in which ink droplets are ejected from a plurality of orifices according to image information.In a manufacturing method of RAD, a substrate, a plurality of pressure chambers communicating with each orifice, and a plurality of ink droplets communicating with each pressure chamber are provided. A flow path plate having a structure in which a flow path and a common liquid chamber communicating with each ink flow path are formed by C etching in the same plate, and a plurality of electromechanical transducers that are energy generators for ejecting ink droplets. and a top plate having a structure in which grooves for positioning each electromechanical transducer are formed by half-etching on the same brake. Inkjet recording consists of the steps of sandwiching and bonding the top plate with multiple electromechanical transducers using adhesive, and bonding the top plate and multiple electromechanical transducers with adhesive.
The above object is achieved by the method for producing Rad.
C実施例〕 以下図面を参照して本発明を具体的に説明する。C Example] The present invention will be specifically described below with reference to the drawings.
第1図は本発明の一実施例に係るインクジェット記録ヘ
ッドの組立て前の分解斜視図である。FIG. 1 is an exploded perspective view of an inkjet recording head according to an embodiment of the present invention before assembly.
第1図において、インクジェット記録ヘッドは、基板1
1と、流路板12と、天板13と、複数の電気機械変換
体14とを組付けて構成されCいる。In FIG. 1, the inkjet recording head includes a substrate 1
1, a channel plate 12, a top plate 13, and a plurality of electromechanical transducers 14 are assembled.
基板11には外部からインクを導入するためのインク供
給口となる孔15が形成されている。A hole 15 is formed in the substrate 11 and serves as an ink supply port for introducing ink from the outside.
流路板12は、インクを吐出する小孔を形成する部分と
なる複数のオリフィス部16と、各オリフィス部に連通
しこれらに圧力波を伝搬するための複数の圧力室部17
と、各圧力室部に達通しこれらにインクを供給する複数
のインク流路部18と、各インク流路部に連通ずる共通
液室部21とを同一のプレート内にエツチング法すなわ
ちパターン腐蝕による型抜き法で形成した構造になって
いる。The flow path plate 12 includes a plurality of orifice sections 16 that form small holes for ejecting ink, and a plurality of pressure chamber sections 17 that communicate with each orifice section and propagate pressure waves thereto.
A plurality of ink passages 18 that reach each pressure chamber and supply ink thereto, and a common liquid chamber 21 that communicates with each ink passage are formed in the same plate by an etching method, that is, by pattern erosion. The structure is formed using a die cutting method.
天板13は、各電気機械変換体14を位置決め固定する
ための複数の位置決め用の四部または溝22を、同一の
プレート上面にハーフエツチング法すなわちパターン腐
蝕による彫り込み法で形成した構造になっている。The top plate 13 has a structure in which a plurality of four positioning parts or grooves 22 for positioning and fixing each electromechanical transducer 14 are formed on the top surface of the same plate by a half-etching method, that is, an engraving method using pattern corrosion. .
以上の基板11、流路板12および天板13は、該流路
板12を挟んで高温圧着で互いに固定的に結合されるも
のであり、これらの材質としては例えばニッケルあるい
はステンレス鋼などの同一材質にすることが好ましい。The substrate 11, channel plate 12, and top plate 13 described above are fixedly bonded to each other by high-temperature pressure bonding with the channel plate 12 in between, and are made of the same material such as nickel or stainless steel. It is preferable to use the material.
複数の電気機械変換体14は、インク滴を形成し吐出さ
せるためのエネルギー発生体であり、例えば、電圧パル
スを受けて収縮膨張する)I:型素子などで構成される
。The plurality of electromechanical transducers 14 are energy generators for forming and ejecting ink droplets, and are composed of, for example, I type elements (which contract and expand in response to voltage pulses).
これらの電気機械変換体14は天板13上の各溝22内
にエポキシ接着剤等の接着剤で位置決め固定される。These electromechanical transducers 14 are positioned and fixed in each groove 22 on the top plate 13 with an adhesive such as an epoxy adhesive.
以」−の各部品を組(=Jけることにより、複数のオリ
フィス(インク吐出口)を有するインクジェット記録ヘ
ッドが構成される。By assembling the following parts, an inkjet recording head having a plurality of orifices (ink ejection ports) is constructed.
第2図は、基板11と流路板12と天板13とを高温圧
着で結合するとともに、複数の電気機械変換体14を天
板13に接着剤で結合した状態であり、かつ、インク滴
吐出用のオリフィス部16が未だ密閉されている状態を
示す斜視図である。FIG. 2 shows a state in which the substrate 11, channel plate 12, and top plate 13 are bonded together by high-temperature pressure bonding, and a plurality of electromechanical transducers 14 are bonded to the top plate 13 with adhesive, and ink droplets are bonded to the top plate 13. FIG. 3 is a perspective view showing a state in which the discharge orifice portion 16 is still sealed.
第3図は、第2図の状態から、ヘッド前面、すなわちオ
リフィス部16の近傍のインク滴吐出方向に垂直な面を
所定の厚さ分研摩または切断して複数のオリフィス24
を開口させた状態を示す斜視図である。FIG. 3 shows a state in which a plurality of orifices 24 are formed by polishing or cutting the front surface of the head, that is, a surface perpendicular to the ink droplet ejection direction near the orifice portion 16 to a predetermined thickness, from the state shown in FIG.
FIG.
この研摩または切断工程により、オリフィス24を開口
させる他に、基板111流路板12および天板13の寸
法誤差または組付は誤差によるオリフィス面の11を除
去することができる。By this polishing or cutting step, in addition to opening the orifice 24, it is also possible to remove the orifice surface 11 due to dimensional errors or assembly errors in the substrate 111, channel plate 12, and top plate 13.
以上の構造および組付は工程によって、本発明によるイ
ンクジェット記録ヘッドの製造方法、すなわち、複数の
オリフィス24から画像情報に応じてインク滴を吐出す
る記録ヘッドの製造方法であって、基板11と、各オリ
フィス24に連通ずる複数の圧力室17、各圧力室17
に連通ずる複数のインク流路18並びに各インク流路1
8に連通ずる共通液室21を同一のプレート内にエツチ
ングにて形成した構造の流路板12と、インク滴を吐出
させるためのエネルギー発生体である複数の電気機械変
換体14と、各電気機械変換体14の位置決め用の溝2
2を同一プレート上にハーフエツチングにて形成した構
造の天板13とを備え、基板11と流路板12と天板1
3とを該流路板12を挟んで高温圧着にて結合し、天板
13と複数の電気機械変換体14とを接着剤で結合する
各工程から成る複数のオリフィス24を有するインクジ
ェット記録ヘッドの製造方法が提供される。The above structure and assembly are performed according to the steps of the method for manufacturing an inkjet recording head according to the present invention, that is, the method for manufacturing a recording head that ejects ink droplets from a plurality of orifices 24 according to image information. A plurality of pressure chambers 17 communicating with each orifice 24, each pressure chamber 17
A plurality of ink channels 18 and each ink channel 1 communicate with each other.
8, a flow path plate 12 having a structure in which a common liquid chamber 21 is formed by etching in the same plate, a plurality of electromechanical transducers 14 which are energy generating bodies for ejecting ink droplets, and each electric Groove 2 for positioning the mechanical converter 14
2 on the same plate by half-etching.
An inkjet recording head having a plurality of orifices 24 consisting of the steps of bonding the top plate 13 and a plurality of electromechanical transducers 14 with an adhesive, and bonding the top plate 13 and a plurality of electromechanical transducers 14 with an adhesive. A manufacturing method is provided.
以上説明した実施例によれば、次のような効果が得られ
た。According to the embodiment described above, the following effects were obtained.
(i)板状の部品を高温圧着で接合するとともに電気機
械変換体を表面に接着するだけの簡単な工程で組立てる
ことができ、低コストのインクジェット記録ヘッドを実
現することができた。(i) A low-cost inkjet recording head could be realized because it could be assembled through a simple process of joining plate-shaped parts by high-temperature pressure bonding and adhering an electromechanical transducer to the surface.
(ii)簡単な構成でオリフィス24の数を容易に増大
させることができ、高画質画像を高速で印字しうるイン
クジェット記録ヘッドを容易に製作できるようになった
。(ii) The number of orifices 24 can be easily increased with a simple configuration, and an inkjet recording head that can print high-quality images at high speed can now be easily manufactured.
(iii )板状の部品を積層す、る構造のため、小型
化および薄型化が容易であり、記録ヘッドおよびそれを
使用する記録装置の小型軽量化を図ることができた。(iii) Because of the structure in which plate-shaped parts are laminated, it is easy to reduce the size and thickness of the recording head and the recording apparatus using it, making it possible to reduce the size and weight.
第4図は、本発明によって製造されたインクジェット記
録ヘッドを搭載したインクジェット記録装置のヘッド周
辺部の模式的斜視図である。FIG. 4 is a schematic perspective view of the head periphery of an inkjet recording apparatus equipped with an inkjet recording head manufactured according to the present invention.
第4図において、記録シート31を搬送するプラテンロ
ーラ32の前方に平行にガイド軸33が設置され、該ガ
イド軸33に沿って往復動するキャリッジ34上にイン
クジェット記録ヘッド35が搭載されている。In FIG. 4, a guide shaft 33 is installed in parallel in front of a platen roller 32 that conveys a recording sheet 31, and an inkjet recording head 35 is mounted on a carriage 34 that reciprocates along the guide shaft 33.
インクジェット記録ヘッド35に対しては、インクタン
ク36からインク供給チューブ37を通してインク(記
録液)が供給される。Ink (recording liquid) is supplied to the inkjet recording head 35 from an ink tank 36 through an ink supply tube 37 .
以上の発明から明らかなごとく、本発明のインクジェッ
トの記録ヘッドの製造方法によれば、複数のオリフィス
に連通ずる複数の圧力室、各圧力室に連通ずる複数のイ
ンク流路並びに各インク流路に連通ずる共通液室を形成
する開口が形成された流路板の両面に天板および基板を
高温圧着するとともに、前記天板に複数の電気機械変換
体を位置決め接着するので、構造が簡単で小型化を図る
とともに、組立工数を低減することができ、低コスト化
を達成しうるインクジェット記録ヘッドの製造方法が得
られる。As is clear from the above invention, according to the method of manufacturing an inkjet recording head of the present invention, a plurality of pressure chambers communicating with a plurality of orifices, a plurality of ink channels communicating with each pressure chamber, and a plurality of ink channels communicating with each pressure chamber are provided. A top plate and a substrate are bonded at high temperature to both sides of a channel plate in which openings are formed to form a common liquid chamber that communicates with each other, and a plurality of electromechanical transducers are positioned and bonded to the top plate, resulting in a simple and compact structure. A method for manufacturing an inkjet recording head can be obtained, which can reduce the number of assembly steps and reduce costs.
第1図は本発明の一実施例によるインクジェット記録ヘ
ッドの組付は前の分解斜視図、第2図は第1図の記録ヘ
ッドを組付けた状態でかつオリフィスを開口させる前の
状態を示す斜視図、第3図は第2図の状態からオリフィ
スを開口させた後の状態を示す斜視図、第4図は本発明
によって製造した記録ヘッドを用いるのに好適なインク
ジェット記録装置の模式的斜視図である。
11−・−・−・・−・一基板、■2 ・−・・・−m
−〜−−・流路板、13−−−−−・−・・・−・天板
、14 ・・・・−・−−−−−・電気機械変換体、1
6 −一一一−−・−オリフィス部、17−・−・−・
・・−圧力室、18−・−−一一一−−インク流路、2
1−・・・−m−−−・共通液室、22 −一一一−−
・・−・−溝、24 −−−−−−−・・−オリフィス
(インク吐出口)。
代理人 弁理士 大 音 康 毅
第1図FIG. 1 is an exploded perspective view of the inkjet recording head according to an embodiment of the present invention before it is assembled, and FIG. 2 is a diagram showing the recording head of FIG. 1 assembled and before the orifice is opened. FIG. 3 is a perspective view showing the state after the orifice is opened from the state shown in FIG. 2, and FIG. 4 is a schematic perspective view of an inkjet recording apparatus suitable for using the recording head manufactured according to the present invention. It is a diagram. 11-・-・-・・−・1 board, ■2 ・−・・−m
-~---・Channel plate, 13---・Covering plate, 14 ・・・・・Electromechanical converter, 1
6 -111---orifice part, 17-----
...-Pressure chamber, 18---111--Ink channel, 2
1-...-m----・Common liquid chamber, 22 -111--
...-- Groove, 24 --------- Orifice (ink ejection opening). Agent Patent Attorney Yasushi OotoFigure 1
Claims (1)
を吐出するインクジェット記録ヘッドの製造方法におい
て、基板と、各オリフィスに連通する複数の圧力室、各
圧力室に連通する複数のインク流路並びに各インク流路
に連通する共通液室を同一のプレート内にエッチングに
て形成した構造の流路板と、インク滴を吐出させるため
のエネルギー発生体である複数の電気機械変換体と、各
電気機械変換体を位置決め用の溝を同一のプレート上に
ハーフエッチングにて形成した構造の天板とを備え、基
板と流路板と天板とを該流路板を挟んで高温圧着にて結
合し、天板と複数の電気機械変換体とを接着剤で結合す
ることを特徴とするインクジェット記録ヘッドの製造方
法。(1) A method for manufacturing an inkjet recording head that ejects ink droplets from a plurality of orifices according to image information, which includes a substrate, a plurality of pressure chambers communicating with each orifice, a plurality of ink channels communicating with each pressure chamber, and a plurality of ink flow paths communicating with each pressure chamber. A channel plate has a structure in which a common liquid chamber that communicates with each ink channel is etched into the same plate, a plurality of electromechanical transducers that are energy generators for ejecting ink droplets, and each electrical Equipped with a top plate with a structure in which grooves for positioning the mechanical converter are formed by half-etching on the same plate, and the substrate, channel plate, and top plate are bonded by high-temperature pressure bonding with the channel plate in between. A method of manufacturing an inkjet recording head, comprising: bonding a top plate and a plurality of electromechanical transducers with an adhesive.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11958288A JPH01288452A (en) | 1988-05-17 | 1988-05-17 | Fabrication of ink jet recording head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11958288A JPH01288452A (en) | 1988-05-17 | 1988-05-17 | Fabrication of ink jet recording head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01288452A true JPH01288452A (en) | 1989-11-20 |
Family
ID=14764929
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11958288A Pending JPH01288452A (en) | 1988-05-17 | 1988-05-17 | Fabrication of ink jet recording head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01288452A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6132761A (en) * | 1984-07-25 | 1986-02-15 | Nec Corp | Jet head |
-
1988
- 1988-05-17 JP JP11958288A patent/JPH01288452A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6132761A (en) * | 1984-07-25 | 1986-02-15 | Nec Corp | Jet head |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPH0230543A (en) | Ink jet head | |
JP3776317B2 (en) | On-demand dropping ink jet printing apparatus and ink jet printing method | |
JP3452129B2 (en) | Ink jet recording head and ink jet recording apparatus | |
US6188416B1 (en) | Orifice array for high density ink jet printhead | |
JPH0970966A (en) | Ink jet recording head | |
JP3231523B2 (en) | On-demand type inkjet head | |
JPH02187352A (en) | Ink jet head | |
WO1999001283A1 (en) | Ink jet recording head and method of manufacturing the same | |
JP3311514B2 (en) | Ink jet head and method of manufacturing the same | |
JPH09300609A (en) | Ink-jet head | |
JPH06188472A (en) | Micro-actuator and ink jet head based on its application | |
JPH01288454A (en) | Fabrication of ink jet recording head | |
JP3460722B2 (en) | Ink jet recording head and ink jet recording apparatus | |
JPH01288452A (en) | Fabrication of ink jet recording head | |
JP3589108B2 (en) | Ink jet recording head and ink jet recording apparatus | |
JPH01288453A (en) | Fabrication of ink jet recording head | |
JP3070625B2 (en) | Ink jet recording head and driving method thereof | |
JP3412156B2 (en) | Inkjet recording head | |
JP3491193B2 (en) | Ink jet recording head and ink jet recording apparatus | |
JP2000301714A (en) | Ink jet recording head and ink jet recorder | |
JP2000108348A (en) | Ink jet recording head and imaging apparatus employing it | |
JP2000071449A (en) | Ink jet head and ink jet recording device | |
JP2001010065A (en) | Ink-jet recording head, ink-jet recording apparatus, production of nozzle plate, and production of ink-jet recording head | |
JP3381791B2 (en) | Method for manufacturing pressure generating unit of laminated ink jet recording head | |
JPH04126258A (en) | Ink jet recording head |