JPH01288454A - Fabrication of ink jet recording head - Google Patents
Fabrication of ink jet recording headInfo
- Publication number
- JPH01288454A JPH01288454A JP11958488A JP11958488A JPH01288454A JP H01288454 A JPH01288454 A JP H01288454A JP 11958488 A JP11958488 A JP 11958488A JP 11958488 A JP11958488 A JP 11958488A JP H01288454 A JPH01288454 A JP H01288454A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- board
- flow path
- ink
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 13
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 239000007788 liquid Substances 0.000 claims abstract description 10
- 238000005530 etching Methods 0.000 claims abstract description 9
- 238000000034 method Methods 0.000 claims description 19
- 239000000853 adhesive Substances 0.000 claims description 3
- 230000001070 adhesive effect Effects 0.000 claims description 3
- 239000000463 material Substances 0.000 abstract description 2
- 229910001220 stainless steel Inorganic materials 0.000 abstract description 2
- 239000010935 stainless steel Substances 0.000 abstract description 2
- 230000006835 compression Effects 0.000 abstract 2
- 238000007906 compression Methods 0.000 abstract 2
- 230000005684 electric field Effects 0.000 description 5
- 238000005520 cutting process Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 241001590997 Moolgarda engeli Species 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000004033 diameter control Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003628 erosive effect Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 230000003068 static effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は複数のオリフィスから画像情報に応じてインク
滴を吐出するインクジェット記録ヘッドの製造方法に関
する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a method of manufacturing an inkjet recording head that ejects ink droplets from a plurality of orifices according to image information.
プリンタやファクシミリなどの記録装置の1形式として
インクジェット記録装置がある。An inkjet recording device is one type of recording device such as a printer or a facsimile.
インクジェット記録装置は、種々のエネルギー作用方式
でオリフィスから記録液(インク)の小液滴を飛翔させ
、これを用紙やプラスチック薄板などの記録媒体(記録
シート)に付着させて記録を行なうものである。Inkjet recording devices perform recording by ejecting small droplets of recording liquid (ink) from an orifice using various energy application methods, and attaching the droplets to a recording medium (recording sheet) such as paper or a thin plastic plate. .
本発明はこのような記録装置に使用される記録ヘッドの
製造方法に関する。The present invention relates to a method of manufacturing a recording head used in such a recording apparatus.
インクジェット記録ヘッドでのインク液滴の形成ないし
はこれを飛翔させるためのエネルギー作用方式としては
、例えば、オリフィス(インク吐出口)付近に配置した
電極で電界を生成し、インりに電界を加えて静電的にイ
ンクを吐出飛翔させる電界制御方式、オリフィス付近に
電気機械変換素子を配設し、外部信号に応じて電気機械
変換素子の機械振動をインクに作用させることによりイ
ンク滴を吐出飛翔させるオンデマンドピエゾ方式、ある
いは、オリフィス付近に発熱体く電気熱交換体)を設け
、外部信号に応じて該発熱体に通電してその41近のイ
ンクを気化させ、その時に発生ずる圧力によってインク
滴を吐出飛翔させるサーマルインクジェット(バブルシ
ャフト)7j式などがある。As an energy application method for forming ink droplets or making them fly in an inkjet recording head, for example, an electric field is generated with an electrode placed near an orifice (ink ejection opening), and an electric field is applied to the ink to generate static electricity. An electric field control method that electrically ejects and flies ink. An electromechanical transducer is placed near the orifice, and the mechanical vibration of the electromechanical transducer acts on the ink in response to an external signal to eject and fly ink droplets. A demand piezo system or a heating element (electric heat exchanger) is installed near the orifice, and the heating element is energized in response to an external signal to vaporize the ink near it, and the pressure generated at that time causes ink droplets to form. There is a thermal inkjet (bubble shaft) 7j type that causes ejection to fly.
しかし、従来の電界制御方式の記録ヘッドにおいては、
オリフィス付近の電極簀の構成が複雑となり、記録ヘッ
ドが大型になリコストも高くなるという問題があった。However, in the conventional electric field control type recording head,
There was a problem that the structure of the electrode cage near the orifice was complicated, the recording head became large, and the cost of manufacturing increased.
また、従来のサーマルインクジェット方式においては、
エネルギー発生体として発熱体を用いるため、他のオン
デマンド方式や電界制御方式に比べ、吐出耐久性能が劣
るという問題があった。In addition, in the conventional thermal inkjet method,
Since a heating element is used as the energy generator, there is a problem in that the ejection durability is inferior to other on-demand methods or electric field control methods.
ドツト制御機能は高画質化にとって重要な技術であるが
、サーマルインクジェット方式においては、他のオンデ
マンド方式に比べ、ドラ1−径制御時のドツト径可変範
囲が狭いという問題があった。Although the dot control function is an important technology for improving image quality, the thermal inkjet method has a problem in that the range of dot diameter variation during driver 1-diameter control is narrower than other on-demand methods.
本発明の目的は、上記従来技術の問題点を解決でき、比
較的簡単な構成で、低コスト化および小型化が可能なイ
ンクジェット記録ヘッドの製造方法を提供することであ
る。SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing an inkjet recording head that can solve the problems of the prior art described above, has a relatively simple structure, and is capable of reducing cost and size.
本発明は、複数のオリフィスから画像情報に応じてイン
ク滴を吐出するインクジェット記録ヘッドの製造方法に
おいて、基板と、各オリフィスに連通ずる複数の圧力室
、各圧力室に連通ずる複数のインク流路並びに各インク
流路に連通ずる共通液室を同一のプレート内にエツチン
グにて形成した構造の流路板と、天板と、インク滴を吐
出させるためのエネルギー発生体である複数の電気機械
変換体と、各電気機械変換体の位置決め用の開口を同一
のプレー・ト内にエツチングにて形成した構造の位置決
めとを備え、基板上に流路板を配置し、該流路板上に天
板を配置し、該天板上に位置決め板と複数の電気機械変
換体とを配置し、基板と流路板と天板と位置決め板とを
高温圧着で結合し、複数の電気機械変換体を天板上に位
置決めして接着する構成のインクジェット記録ヘッドに
より、上記目的を達成するものである。The present invention provides a method for manufacturing an inkjet recording head that ejects ink droplets from a plurality of orifices according to image information, including a substrate, a plurality of pressure chambers communicating with each orifice, and a plurality of ink channels communicating with each pressure chamber. In addition, there is a channel plate with a structure in which a common liquid chamber communicating with each ink channel is formed by etching in the same plate, a top plate, and multiple electromechanical transducers that are energy generators for ejecting ink droplets. A channel plate is arranged on the substrate, and a ceiling is placed on the channel plate. A board is arranged, a positioning plate and a plurality of electromechanical transducers are arranged on the top plate, and the board, a channel plate, a top plate, and a positioning plate are joined by high-temperature pressure bonding, and the plurality of electromechanical transducers are placed on the top plate. The above object is achieved by an inkjet recording head configured to be positioned and adhered onto a top plate.
以下図面を参照して本発明を具体的に説明する。 The present invention will be specifically described below with reference to the drawings.
第1図は本発明の一実施例に係るインクジェット記録ヘ
ッドの組立て前の分解斜視図である。FIG. 1 is an exploded perspective view of an inkjet recording head according to an embodiment of the present invention before assembly.
第1図において、インクジェット記録ヘッドは、基板1
1と、流路板12と、天板13と、複数の電気機械変換
体14と、位置決め板20とを組付けて構成されている
。In FIG. 1, the inkjet recording head includes a substrate 1
1, a channel plate 12, a top plate 13, a plurality of electromechanical transducers 14, and a positioning plate 20.
基板11には外部からインクを導入するためのインク供
給口となる孔15が形成されている。A hole 15 is formed in the substrate 11 and serves as an ink supply port for introducing ink from the outside.
流路板12は、インクを吐出する小孔を形成する部分と
なる複数のオリフィス部16と、各オリフィス部に連通
しこれらに圧力波を伝搬するための複数の圧力室部17
と、各圧力室部に連通しこれらにインクを供給する複数
のインク流路部18と、各インク流路部に連通ずる共通
液室21とを同一のプレート内にエツチング法、すなわ
ちパターン腐蝕による型抜き法で形成した構造になって
いる。The flow path plate 12 includes a plurality of orifice sections 16 that form small holes for ejecting ink, and a plurality of pressure chamber sections 17 that communicate with each orifice section and propagate pressure waves thereto.
A plurality of ink passages 18 communicating with each pressure chamber and supplying ink thereto, and a common liquid chamber 21 communicating with each ink passage are formed in the same plate by an etching method, that is, by pattern erosion. The structure is formed using a die cutting method.
天板は平滑板であり、流路板12の上下に天板13およ
び基板11を接合し、オリフィス部16前端を削除する
ことにより、その内部にオリフィス、圧力室、インク流
路および共通液室が形成される。The top plate is a smooth plate, and by joining the top plate 13 and the substrate 11 above and below the flow path plate 12 and removing the front end of the orifice portion 16, an orifice, a pressure chamber, an ink flow path, and a common liquid chamber are formed inside the top plate. is formed.
位置決め板20は、各電気機械変換体14を位置決めす
るための複数の開口19を同一のプレート内にエツチン
グ(パターン腐蝕による型抜き)にて形成した構造にな
っている。The positioning plate 20 has a structure in which a plurality of openings 19 for positioning each electromechanical transducer 14 are formed in the same plate by etching (cutting out by pattern corrosion).
以上の基板11、流路板12、天板】3および位置決め
板20は、積重ね状態で高温圧着にて互いに固着される
ものであり、これらの材質は例えばニッケルあるいはス
テンレスなどの同一材質にすることが好ましい。The above-mentioned substrate 11, channel plate 12, top plate 3, and positioning plate 20 are stacked and fixed to each other by high-temperature pressure bonding, and these should be made of the same material, such as nickel or stainless steel. is preferred.
複数の電気機械変換体14は、インク滴を形成しこれを
吐出させるためのエネルギー発生体であり、例えば、電
圧パルスを受けて収縮膨張する圧電素子などで構成され
る。The plurality of electromechanical transducers 14 are energy generators for forming ink droplets and ejecting them, and are composed of, for example, piezoelectric elements that contract and expand in response to voltage pulses.
各電気機械変換体14は、天板13上面に対し、位置決
め板20の各開口19内に嵌め込んで位置決めした状態
で、エポキシ樹脂等の接着剤で結合固着される。Each electromechanical transducer 14 is fitted and positioned in each opening 19 of the positioning plate 20 on the upper surface of the top plate 13, and is bonded and fixed with an adhesive such as epoxy resin.
以上の各部品を組付けることにより、複数のオリフィス
(インク吐出口)を有するインクジェット記録ヘッドが
構成される。By assembling the above-mentioned parts, an inkjet recording head having a plurality of orifices (ink ejection ports) is constructed.
第2図は、基板11と流路板12と天板13と位置決め
板20とを高温圧着で結合するとともに、複数の(圧力
室17に対応した数の)電気機械変換体14を天板13
の上面に対暇位置決め板20の開口19で位置決めして
接着した状態であり、かつ、インク滴吐出用のオリフィ
ス部16が未だ密閉されている状態を示す斜視図である
。In FIG. 2, a substrate 11, a channel plate 12, a top plate 13, and a positioning plate 20 are bonded together by high-temperature pressure bonding, and a plurality of electromechanical transducers 14 (the number corresponding to the pressure chambers 17) are attached to the top plate 13.
FIG. 2 is a perspective view showing a state in which the ink droplet is positioned and adhered to the upper surface of the positioning plate 20 by the opening 19 of the positioning plate 20, and the orifice portion 16 for ejecting ink droplets is still sealed.
第3図は、第2図の状態から、ヘッド前面、すなわちオ
リフィス部16の前側のインク滴吐出方向に垂直な面を
、所定厚さ研磨または切断で削除することにより、複数
のオリフィス24を開口させた状態を示す斜視図である
。FIG. 3 shows that a plurality of orifices 24 are opened by removing the front surface of the head, that is, the front surface of the orifice section 16 perpendicular to the ink droplet ejection direction by polishing or cutting a predetermined thickness from the state shown in FIG. FIG.
この前面削除工程により、オリフィス24を開口させる
他に、基板11、流路板12、天板13および位置決め
板20の寸法誤差または組付は誤差によるオリフィス面
の段差を解消することができる。In addition to opening the orifice 24, this front surface removal step can eliminate steps on the orifice surface due to dimensional errors or assembly errors in the substrate 11, channel plate 12, top plate 13, and positioning plate 20.
以上の構造および組付は工程によって、本発明によるイ
ンクジェット記録ヘッドの製造方法、すなわち、複数の
オリフィス24から画像情報に応じてインク滴を吐出す
るインクジェット記録ヘッドの製造方法において、基板
11と、各オリフィス24に連通ずる複数の圧力室17
、各圧力室17に連通ずる複数のインク流路1日並びに
各インク流路18に連通する共通液室21を同一のプレ
ート内にエツチングにて形成した構造の流路板12と、
天板13と、インク滴を吐出させるためのエネルギー発
生体である複数の電気機械変換体14と、各電気機械変
換体14の位置決め用の開口19を同一のプレート内に
エツチングにて形成した構造の位置決め板20とを備え
、基板11上に流路板12を配置し、該流路板12上に
天板13を配置し、該天板13上に位置決め板20と複
数の電気機械変換体14とを配置し、基板11と流路板
12と天板13と位置決め坂20とを高温圧着で結合し
、複数の電気機械変換体を天板13上に接着剤で固定す
る各工程から成る、複数のオリフィス24を有するイン
クジェット記録ヘッドの製造方法が得られる。The above structure and assembly are performed according to the steps of the substrate 11, each A plurality of pressure chambers 17 communicating with the orifice 24
, a channel plate 12 having a structure in which a plurality of ink channels communicating with each pressure chamber 17 and a common liquid chamber 21 communicating with each ink channel 18 are formed in the same plate by etching;
A structure in which a top plate 13, a plurality of electromechanical transducers 14 that are energy generators for ejecting ink droplets, and openings 19 for positioning each electromechanical transducer 14 are formed in the same plate by etching. A channel plate 12 is arranged on the substrate 11, a top plate 13 is arranged on the channel plate 12, and the positioning plate 20 and a plurality of electromechanical transducers are arranged on the top plate 13. 14, bonding the substrate 11, channel plate 12, top plate 13, and positioning slope 20 by high-temperature pressure bonding, and fixing a plurality of electromechanical transducers on the top plate 13 with adhesive. , a method for manufacturing an inkjet recording head having a plurality of orifices 24 is obtained.
以上説明した実施例によれば、次のような効果が得られ
た。According to the embodiment described above, the following effects were obtained.
(i)板状の部品を高温圧着で接合するとともに電気機
械変換体を表面に接着するだけの簡単な工程で組立てる
ことができ、低コス、トのインクジェット記録ヘッドを
実現することができた。(i) A low-cost inkjet recording head could be realized by assembling the plate-like parts by a simple process of joining them together by high-temperature pressure bonding and adhering the electromechanical transducer to the surface.
(11)簡単な構成でオリフィス24の数を容易に増大
させることができ、高品質の画像を高速印字しうるイン
クジェット記録ヘッドを容易に製作できるようになった
。(11) The number of orifices 24 can be easily increased with a simple configuration, and an inkjet recording head capable of printing high-quality images at high speed can now be easily manufactured.
(iii )板状の部品を積層する構造のため、小型化
および薄型化が容易であり、記録ヘッドおよびそれを使
用する記録装置の小型軽量化を図ることができた。(iii) Because of the structure in which plate-shaped parts are stacked, it is easy to make the recording head smaller and thinner, and the recording head and the recording apparatus using it can be made smaller and lighter.
第4図は、本発明によって製造されたインクジェット記
録ヘッドを搭載したインクジェット記録装置のヘッド周
辺部の模式的斜視図である。FIG. 4 is a schematic perspective view of the head periphery of an inkjet recording apparatus equipped with an inkjet recording head manufactured according to the present invention.
第4図において、記録シート31を搬送するプラテンロ
ーラ32の前方に平行にガイド軸33が設置され、該ガ
イド軸33に沿って往復動するキャリッジ34上にイン
クジェット記録ヘッド35が搭載されている。In FIG. 4, a guide shaft 33 is installed in parallel in front of a platen roller 32 that conveys a recording sheet 31, and an inkjet recording head 35 is mounted on a carriage 34 that reciprocates along the guide shaft 33.
インクジェット記録ヘッド35に対しては、インクタン
ク36からインク供給チェーブ37を通してインク(記
録液)が送給される。Ink (recording liquid) is supplied to the inkjet recording head 35 from an ink tank 36 through an ink supply tube 37 .
以上の説明から明らかなごとく、本発明のインクジェッ
トの記録ヘッドの製造方法によれば、複数のオリフィス
に連通ずる複数の圧力室、各圧力室に連通ずる複数のイ
ンク流路並びに各インク流路に連通ずる共通室を形成す
る開口が形成された流路板の両面に天板および基板を高
温圧着するとともに、前記天板上に複数の電気機械変換
体を位置決め板を用いて位置決め接着するので、構造が
簡単で小型化1、薄型化が可能であり、組立工数を低減
することができ、低コスト化を達成しうるインクシエン
ド記録ヘッドの製造方法が得られる。As is clear from the above description, according to the method for manufacturing an inkjet recording head of the present invention, a plurality of pressure chambers communicating with a plurality of orifices, a plurality of ink channels communicating with each pressure chamber, and a plurality of ink channels communicating with each pressure chamber are provided. A top plate and a substrate are bonded at high temperature to both sides of a channel plate in which openings forming a communicating common chamber are formed, and a plurality of electromechanical transducers are positioned and bonded onto the top plate using a positioning plate. A method for manufacturing an ink-side recording head that has a simple structure, can be made smaller and thinner, can reduce the number of assembly steps, and can achieve lower costs can be obtained.
第1図は本発明の一実施例によるインクジェット記録ヘ
ッドの組付は前の分解斜視図、第2図は第1図の記録ヘ
ッドを組付けた状態でかつオリフィスを開口させる前の
状態を示す斜視図、第3図は第2図の状態からオリフィ
スを開口させた後の状態を示す斜視図、第4図は本発明
によって製造した記録ヘッドを用いるに好適ケインク・
ジェット記録装置の模式的斜視図である。
11−・・−・−基板、12−−一一一一一一流路板、
13・・−−m=〜−−・−天板、14 ・−一−−−
−−〜電気機械変換体、16−・・・・−オリフィス部
、17−・−一一一一〜−−圧力室、18 ・・−一−
−−−−−−インク流路、19−一一一〜・−・・−開
口、20−・−・・−位置決め板、21−・・−・−共
通液室、24 ・・−一一一一−−−−オリフィス(イ
ンク吐出1コ)a代理人 弁理士 大 音 康 毅
図面の浄舎(内容に変更なし)
第3図
手続補正書(方式)
%式%
2、発明の名称 インクジェット記録ヘッドの製
造方法3、補正をする者
事件との関係 特許出願人
住所 東京都大田区下丸子3丁目30番2号氏 名
(100)キャノン株式会社イ侭者賀来釦瑯
4、代理人 〒101
住所 東京都千代田区神田鍛冶町3丁目3番9号5、補
正命令の81寸(全送日)
(1)図面中の「第3図」を本書添付の「第3図」と差
替える(内容に変更なし)FIG. 1 is an exploded perspective view of the inkjet recording head according to an embodiment of the present invention before it is assembled, and FIG. 2 is a diagram showing the recording head of FIG. 1 assembled and before the orifice is opened. FIG. 3 is a perspective view showing the state after the orifice is opened from the state shown in FIG. 2, and FIG.
FIG. 1 is a schematic perspective view of a jet recording device. 11---board, 12--11111 circuit board,
13・・−−m=〜−−・−Top plate, 14・−1−−
---Electromechanical converter, 16--orifice section, 17--1111--pressure chamber, 18--1-
-------Ink flow path, 19-111~...-Opening, 20-...-Positioning plate, 21-...-Common liquid chamber, 24...-11 11--- Orifice (1 ink discharge) a Agent Patent attorney Yasushi Ooto Takeshi Oto's drawing (no change in content) Figure 3 Procedural amendment (method) % formula % 2. Name of the invention Inkjet Recording head manufacturing method 3, relationship with the amended case Patent applicant address 3-30-2 Shimomaruko, Ota-ku, Tokyo Name
(100) Kanro Kaku 4, Canon Co., Ltd. Agent 101 Address 3-3-9-5 Kanda Kajicho, Chiyoda-ku, Tokyo, 81-sun of the amendment order (all date of delivery) (1) In the drawing Replace "Figure 3" with "Figure 3" attached to this book (no change in content)
Claims (1)
を吐出するインクジェット記録ヘッドの製造方法におい
て、基板と、各オリフィスに連通する複数の圧力室、各
圧力室に連通する複数のインク流路並びに各インク流路
に連通する共通液室を同一のプレート内にエッチングに
て形成した構造の流路板と、天板と、インク滴を吐出さ
せるためのエネルギー発生体である複数の電気機械変換
体と、各電気機械変換体の位置決め用の開口を同一プレ
ート内にエッチングにて形成した構造の位置決め板とを
備え、基板上に流路板を配置し、該流路板上に天板を配
置し、該天板上に位置決め板と複数の電気機械変換体と
を配置し、基板と流路板と天板と位置決め板とを高温圧
着で結合し、複数の電気機械変換体を天板上に接着剤で
固定することを特徴とするインクジェット記録ヘッドの
製造方法。(1) A method for manufacturing an inkjet recording head that ejects ink droplets from a plurality of orifices according to image information, which includes a substrate, a plurality of pressure chambers communicating with each orifice, a plurality of ink channels communicating with each pressure chamber, and a plurality of ink flow paths communicating with each pressure chamber. A channel plate having a structure in which a common liquid chamber communicating with each ink channel is formed by etching in the same plate, a top plate, and a plurality of electromechanical transducers that are energy generators for ejecting ink droplets. and a positioning plate having a structure in which openings for positioning each electromechanical transducer are formed by etching in the same plate, a flow path plate is placed on the substrate, and a top plate is placed on the flow path plate. Then, a positioning plate and a plurality of electromechanical transducers are arranged on the top plate, and the substrate, the channel plate, the top plate, and the positioning plate are bonded together by high-temperature pressure bonding, and the plurality of electromechanical transducers are placed on the top plate. A method of manufacturing an inkjet recording head, the method comprising: fixing the head with an adhesive.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11958488A JPH01288454A (en) | 1988-05-17 | 1988-05-17 | Fabrication of ink jet recording head |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP11958488A JPH01288454A (en) | 1988-05-17 | 1988-05-17 | Fabrication of ink jet recording head |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH01288454A true JPH01288454A (en) | 1989-11-20 |
Family
ID=14764981
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP11958488A Pending JPH01288454A (en) | 1988-05-17 | 1988-05-17 | Fabrication of ink jet recording head |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH01288454A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2676022A1 (en) * | 1991-01-28 | 1992-11-06 | Fuji Electric Co Ltd | RECORDING HEAD WITH INK JET. |
JPH0592561A (en) * | 1990-11-09 | 1993-04-16 | Seiko Epson Corp | Ink jet recording head |
KR100859090B1 (en) * | 2001-05-04 | 2008-09-17 | 휴렛-팩커드 컴퍼니(델라웨어주법인) | Plate, method of manufacturing orifice plates and method of manufacturing an inkjet cartridge |
-
1988
- 1988-05-17 JP JP11958488A patent/JPH01288454A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0592561A (en) * | 1990-11-09 | 1993-04-16 | Seiko Epson Corp | Ink jet recording head |
FR2676022A1 (en) * | 1991-01-28 | 1992-11-06 | Fuji Electric Co Ltd | RECORDING HEAD WITH INK JET. |
KR100859090B1 (en) * | 2001-05-04 | 2008-09-17 | 휴렛-팩커드 컴퍼니(델라웨어주법인) | Plate, method of manufacturing orifice plates and method of manufacturing an inkjet cartridge |
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