JPH11320882A - Ink jet recording head and ink jet recording apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To certainly prevent the contact of a flexible cable with a piezoelectric vibrator and to provide an ink jet recording apparatus capable of being easily connected in a reduced space. SOLUTION: In an ink jet recording head, the flexible cable 17 connecting a driving integrated circuit 30 for driving a pressure generating means 300 to the pressure generating means 300 has a mounting part 17a for mounting the driving integrated circuit 30 on the area opposed to the pressure generating means 300 and the support part 17c supporting both end parts of the mounting part 17a to be provided so as to straddle the pressure generating means 300 and the support part 17c supports the mounting part 17a so as to form an interval of a degree not obstructing the motion of the pressure generating means 300 between the pressure generating means 300 and the mounting part 17a. By this constitution, the contact of the flexible cable 17 with the pressure generating means 300 can be prevented.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet type recording apparatus comprising a pressure generating chamber communicating with a nozzle opening for discharging ink droplets, and pressure generating means for generating a pressure for discharging ink in the pressure generating chamber. The present invention relates to a head and an ink jet recording apparatus.

[0002]

2. Description of the Related Art An ink jet recording head which generates pressure in a pressure generating chamber by a piezoelectric vibrator or a heating element and discharges ink droplets from a nozzle opening by the pressure is used as a pressure generating means by a driving signal in the pressure generating chamber. A bubble jet type equipped with a resistance wire that generates Joule heat, and a part of the pressure generating chamber composed of a diaphragm, which is deformed by a piezoelectric vibrator and ejects ink droplets from nozzle openings It is roughly divided into two types of vibration type. In addition, two types of piezoelectric vibrating ink jet recording heads are available, one using a longitudinal vibration mode piezoelectric vibrator that expands and contracts in the axial direction of the piezoelectric vibrator, and the other using a flexural vibration mode piezoelectric vibrator. Has been put to practical use.

In the former method, the volume of the pressure generating chamber can be changed by bringing the end face of the piezoelectric vibrator into contact with the vibrating plate, so that a head suitable for high-density printing can be manufactured. A complicated process of cutting the piezoelectric vibrators into a comb-tooth shape in accordance with the arrangement pitch of the nozzle openings, and a work of positioning and fixing the separated piezoelectric vibrators in the pressure generating chambers, which complicates the manufacturing process. There is.

On the other hand, in the latter, a piezoelectric vibrator can be formed on a diaphragm by a relatively simple process of sticking a green sheet of a piezoelectric material according to the shape of a pressure generating chamber and firing the green sheet. However, due to the use of flexural vibration, a certain area is required, and there is a problem that high-density arrangement is difficult.

On the other hand, in order to solve the latter disadvantage of the recording head, a uniform piezoelectric material layer is formed by a film forming technique over the entire surface of the diaphragm as disclosed in Japanese Patent Application Laid-Open No. 5-286131. A proposal has been made in which this piezoelectric material layer is cut into a shape corresponding to the pressure generating chambers by lithography, and a piezoelectric vibrator is formed so as to be independent for each pressure generating chamber.

[0006] According to this, the work of attaching the piezoelectric vibrator to the diaphragm is not required, and the precision of the lithography method is used.
In addition to the fact that the piezoelectric vibrator can be manufactured by a simple and simple method, there is an advantage that the thickness of the piezoelectric vibrator can be reduced and high-speed driving is possible.

In such a recording head, the individual electrodes of the piezoelectric vibrator are connected to an external device via a flexible cable in order to receive an external drive signal.

[0008]

However, a flexible cable for supplying a signal from the outside straddles a plurality of rows of piezoelectric vibrators formed on the surface of an actuator unit, and has terminals connected to individual electrodes at both ends. Since the flexible cable is stretched loosely or when an external force is applied to the flexible cable, the flexible cable contacts the piezoelectric vibrator and hinders the vibration of the piezoelectric vibrator. There are problems such as adversely affecting print quality and damaging the piezoelectric vibrator.

Further, if the flexible cable is fixed in a fixed shape so as not to contact the piezoelectric vibrator, there is a problem that high precision is required in order to securely adhere to the terminal.

In view of such circumstances, the present invention provides an ink jet type recording head and an ink jet type recording apparatus which can surely prevent the contact between a flexible cable and a piezoelectric vibrator, and which can be easily joined in a space-saving manner. Make it an issue.

[0011]

According to a first aspect of the present invention, there is provided a flow path forming substrate defining pressure generating chambers each communicating with a nozzle opening; And a flexible cable connecting the pressure generating means and a driving integrated circuit for driving the pressure generating means, wherein the flexible cable has the pressure A mounting section in which the driving integrated circuit is mounted in a region facing the generating section and a supporting section supporting both ends of the mounting section are provided so as to straddle the pressure generating section, and the supporting section is An ink jet type recording apparatus that supports the mounting section by forming a gap between the pressure generating section and the mounting section so as not to hinder the movement of the pressure generating section. In the head.

In the first aspect, the mounting portion is supported by the supporting portion above the pressure generating means so as not to contact the pressure generating means, and space is saved without obstructing driving of the pressure generating means.

According to a second aspect of the present invention, in the first aspect, the support portion is fixed to a surface of the flow path forming substrate, and extends in a direction substantially perpendicular to the fixed portion. An ink jet recording head including a step portion connected to the mounting portion.

In the second aspect, the mounting portion is supported by the step portion extending in a direction substantially perpendicular to the fixing portion.

According to a third aspect of the present invention, in the first or second aspect, the flexible cable comprises a heat-resistant insulating film laminated with a solderable metal foil,
A window for fixing the driving integrated circuit to the mounting portion,
An ink jet recording head is connected to the driving integrated circuit by connection means formed in the window.

According to the third aspect, a flexible cable on which the driving integrated circuit is mounted can be easily formed.

According to a fourth aspect of the present invention, in any one of the first to third aspects, at least a periphery of the driving integrated circuit is molded on the flexible cable with a polymer material. In the recording head.

According to the fourth aspect, the driving integrated circuit can be easily and reliably mounted on the flexible cable.

According to a fifth aspect of the present invention, in any one of the second to fourth aspects, one end of the flow path forming substrate corresponding to the fixing portion of the flexible cable is connected to the pressure generating means. Wiring is arranged, and a wiring for connecting the wiring and the mounting portion is provided on a surface of the fixing portion corresponding to the flow path forming substrate. is there.

In the fifth aspect, the pressure generating means and the driving integrated circuit are connected by fixing the flexible cable to the flow path forming substrate.

According to a sixth aspect of the present invention, in any one of the first to fifth aspects, the pressure generating means includes a piezoelectric vibrator disposed on a diaphragm provided on one surface of the pressure generating chamber. And an ink jet recording head characterized in that the recording head is an ink jet recording head.

In the sixth aspect, by driving the piezoelectric vibrator, ink droplets can be ejected.

According to a seventh aspect of the present invention, in the sixth aspect, the flow path forming substrate is formed of ceramics, and each layer of the piezoelectric vibrator is formed by pasting or printing a green sheet. Ink-jet recording head.

In the seventh aspect, the head can be easily manufactured.

According to an eighth aspect of the present invention, in the sixth aspect, the flow path forming substrate comprises a silicon single crystal substrate,
The ink jet recording head is characterized in that the pressure generating chamber is formed by anisotropic etching, and each layer of the piezoelectric vibrator is formed by a thin film and a lithography method.

In the eighth aspect, an ink jet recording head having high-density nozzle openings can be manufactured in a large amount and relatively easily.

According to a ninth aspect of the present invention, in any one of the first to fifth aspects, the pressure generating means is a heating element provided in the pressure generating chamber. It is in.

In the ninth aspect, the heating element is heated by the signal of the driving circuit mounted on the flexible cable to discharge the ink droplet.

According to a tenth aspect of the present invention, there is provided an ink jet recording apparatus comprising the ink jet recording head according to any one of the first to ninth aspects.

According to the tenth aspect, since the contact between the flexible cable and the piezoelectric vibrator is reliably prevented, an ink jet recording apparatus with improved reliability can be realized.

[0031]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail based on one embodiment.

(Embodiment 1) FIG. 1 is an exploded perspective view of an ink jet recording head according to Embodiment 1 of the present invention, and FIG. 2 is a sectional view thereof.

As shown in the figure, a flow path forming substrate (hereinafter, referred to as a spacer) 10 serving as a substrate for forming a pressure generating chamber 11 is
For example, zirconia having a thickness of about 150 μm (Z
It is formed of a ceramic plate such as rO ₂ ) by forming a through hole serving as the pressure generating chamber 11.

One surface of the spacer 10 has, for example, a thickness of 1
Sealed by an elastic plate 12 made of a thin plate of zirconia of 0 μm, a lower electrode film 13 is formed on the surface of the elastic plate 12. Further, on the lower electrode film 13, the pressure generating chamber 11 is provided.
Each time, the piezoelectric film 14 is fixed independently. The piezoelectric film 14 is formed by attaching a green sheet made of a piezoelectric material, sputtering the piezoelectric material, or the like. Further, an upper electrode film 15 is formed on the surface of each piezoelectric film 14, and a piezoelectric vibrator 300 is formed for each pressure generating chamber 11. In addition, the pressure generating chamber 1
On the elastic plate 12 near the end of the peripheral wall 1, for example, a terminal 16 formed of an anisotropic conductive film or the like and connected to an end of each upper electrode film 15 is provided. The terminal portion 16 is connected to a wiring 35 of the flexible cable 17 described later. Although not shown, the terminal section 16 includes a terminal connected to one end of the lower electrode film 13.

The other surface of the spacer 10 is provided near one end of the pressure generating chamber 11 in the longitudinal direction, and is provided with a supply communication hole 18 for communicating the pressure generating chamber 11 with a reservoir described later.
A pressure generating chamber bottom plate 20 having a nozzle communication hole 19 provided near the other end of the pressure generating chamber 11 and communicating with a nozzle opening 28 of a nozzle plate 29 described later is fixed.

The spacer 10, the elastic plate 12, and the pressure generating chamber bottom plate 20 are formed by molding a clay-like ceramic material, a so-called green sheet, to a predetermined thickness and, for example, having a through hole serving as a supply communication hole 18 or the like. After piercing in place, it is laminated and fired, so that the actuator unit 1 can be assembled without requiring an adhesive.

On the bottom plate 20 of the pressure generating chamber, a thickness 8
An ink supply port forming substrate 21 made of a 0 μm stainless steel plate is formed. The ink supply port forming substrate 21
A nozzle communication hole 22 for connecting the nozzle opening 28 and the pressure generation chamber 11 and an ink supply port 23 for connecting the reservoir and the pressure generation chamber 11 together with the supply communication hole 18 are formed. And an ink inlet 24 for supplying ink from an external ink tank.

Further, a reservoir forming substrate 25 is formed on the ink supply port forming substrate 21. The reservoir forming substrate 25 receives ink supplied from an external ink tank to a plate material having a corrosion resistance of, for example, 150 μm stainless steel, which is suitable for forming an ink flow path. Reservoir 26 that supplies
And a nozzle communication hole 27 communicating the pressure generating chamber 11 and the nozzle opening 28. The surface of the reservoir forming substrate 25 opposite to the spacer 10 is sealed by a nozzle plate 29 having nozzle openings 28 formed at the same arrangement pitch as the pressure generating chambers 11.

The ink supply port forming substrate 21, the reservoir forming substrate 25, and the nozzle plate 29 are fixed to each other by an adhesive layer made of a heat-sealing film, an adhesive or the like, and are put together in the flow path unit 2. Thus, a recording head is formed by fixing the actuator unit 1 with a heat welding film, an adhesive or the like.

In the recording head thus formed, a driving integrated circuit 30 that receives a signal from the outside and outputs a driving signal for driving each of the piezoelectric vibrators 300 is provided.
It is connected to the piezoelectric vibrator 300 via a wiring 35 provided on the flexible cable 17.

In this embodiment, the flexible cable 1
Reference numeral 7 denotes a drive integrated circuit 30 mounted thereon, provided so as to straddle all the piezoelectric vibrators 300 on the elastic plate 12 in the longitudinal direction, and fixed to the terminal portion 16.

More specifically, the flexible cable 17 has a mounting portion 17 a in a region facing the piezoelectric vibrator 300, on which the driving integrated circuit 30 is mounted substantially parallel to the surface of the flow path forming substrate 10. In a region substantially at the center of the mounting portion 17a, a window 17b is formed so that the signal terminal of the driving integrated circuit 30 can be exposed to face the piezoelectric vibrator 300. Inside the window 17b, a lead 31 formed by exposing a metal foil to the window 17b side in accordance with the arrangement of the signal terminals of the driving integrated circuit 30 is provided. After the signal output terminals are soldered, the driving integrated circuit 30 is fixed to the flexible cable 17 by sealing at least the periphery of the driving integrated circuit 30 with the resin 32.

Further, a support portion 17c is connected to both ends of the mounting portion 17a, and an interval which does not hinder the movement of the piezoelectric vibrator 300, for example, the piezoelectric vibrator 30 in the present embodiment.
An interval h between the number 0 and the mounting portion 17a is secured. The support portion 17c has a fixing portion 33 fixed to the surface of the flow path forming substrate 10 and a step portion 34 extending in a direction substantially perpendicular to the fixing portion 33 and connecting the fixing portion 33 and the mounting portion 17a.
And That is, the flexible cable 17 is bent substantially at right angles in the same direction at both ends of the mounting portion 17a to form the step portion 34, and the step portion 3 is formed.
The fixing portion 33 is formed by bending both end portions of the base member 4 in the opposite direction at substantially right angles.

A piezoelectric vibrator 300 is provided on the surface of the fixing portion 33 of the flexible cable 17 facing the spacer 10.
Upper electrode film 15 and lower electrode film 13 and driving integrated circuit 3
A wiring 35 for connecting to 0 is provided. Therefore, by fixing the fixing portion 33 to the terminal portion 16 provided on the elastic plate 12, the flexible cable 17 is fixed.
Is connected to the terminal section 16, and as a result, each piezoelectric vibrator 300 is connected to the driving integrated circuit 30.

A wiring portion 17d connected to an external device for supplying print data is provided at a substantially central portion of an end of the mounting portion 17a different from the support portion 17c, and is provided on the surface. The driving integrated circuit 30
The piezoelectric vibrator 300 is connected to an external device.

Such a flexible cable 17 is
In this embodiment, a heat-resistant insulating film 3 such as polyimide is used.
6, a solderable metal that becomes the wiring 35, for example,
It is formed by laminating a metal foil such as copper, and is formed in a size that can straddle between the terminal portions 16 of the actuator unit 1 at least in a region facing the piezoelectric vibrator 300.

The heat-resistant insulating film 36 and the wiring 3
The thickness of the metal foil to be 5 is not particularly limited. However, since the flexible cable 17 has the driving integrated circuit 30 mounted thereon, it needs to have a predetermined strength.
For example, in the present embodiment, the thickness of the heat-resistant insulating film 36 is 50 μm, and the thickness of the metal foil serving as the wiring 35 is 18 μm.
And These seem to be thin at first glance, but the steps 3
The apparent strength is sufficient due to the bending of No. 4.

As described above, by providing the support portion 17c on the flexible cable 17, a space of the height h can be ensured so that the piezoelectric vibrator 300 does not contact the bottom surface of the driving integrated circuit 30. Therefore, the driving integrated circuit 30 mounted on the flexible cable 17 comes into contact with the piezoelectric vibrator 300 and hinders the vibration of the piezoelectric vibrator 300, thereby adversely affecting the print quality and preventing the piezoelectric vibrator 300 from being damaged. can do. Furthermore, since the flexible cable 17 has corners at both ends of the stepped portion 34 bent at substantially right angles, when the fixing portion 33 is fixed to the terminal portion 16, both corners are deformed to fix the fixing portion 33. Can be slightly shifted. Therefore, the dimensional accuracy of the component can be reduced.

The ink jet recording head thus constructed takes in ink from an ink inlet 24 connected to external ink supply means (not shown),
After filling the inside with ink from the nozzle opening 28 to the nozzle opening 28, a voltage is applied between the lower electrode film 13 and the upper electrode film 15 according to a recording signal output from the driving integrated circuit 30 by a signal from an external device (not shown). The pressure is applied to the pressure generating chamber 11 by causing the elastic plate 12 and the piezoelectric film 14 to bend and deform.
The pressure inside increases, and ink droplets are ejected from the nozzle opening 28.

(Other Embodiments) In each of the above embodiments, a thick film type ink jet recording head formed by a method such as attaching a green sheet is used as an example. However, the present invention is of course limited to this. Instead, the present invention can be applied to inkjet recording heads having various structures, such as a thin-film inkjet recording head manufactured by applying a film forming and lithography process.

Here, an example of a thin film type ink jet recording head will be described. FIG. 3 is an exploded perspective view showing an example of a recording head, and FIG. 4 is a sectional view thereof.

In such an ink jet recording head, an elastic film 53 is formed on one surface of a flow path forming substrate 52 in which a pressure generating chamber 51 is formed, as shown in the figure. On the elastic film 53, the lower electrode film 54, the piezoelectric film 5
5 and the upper electrode film 56 are laminated and patterned, and the piezoelectric vibrator 300 is constituted for each pressure generating chamber 51. On the piezoelectric vibrator 300, an insulator layer 57 having electrical insulation is formed. Further, a portion of the insulator layer 57 corresponding to each piezoelectric vibrator 300 is connected to a lead electrode 58. A contact hole 57a exposing a part of the upper electrode film 56 is formed. This contact hole 5
A lead electrode 58 having one end connected to each upper electrode film 56 and the other end extending to the connection terminal portion is formed via 7a.

On the other hand, on the other surface side of the flow path forming substrate 52,
A nozzle forming substrate 61 provided with a nozzle 61a is provided, and a nozzle communication hole 62 for communicating the nozzle 61a with the pressure generating chamber 51 is formed with a sealing plate 63 and a common ink chamber forming substrate 6.
4 and the ink chamber plate 65.

A common ink chamber 66 is formed by the sealing plate 63, the common ink chamber forming substrate 64, and the ink chamber plate 65. This common ink chamber 66 and each pressure generating chamber 1
1 is communicated through an ink supply communication hole 67 formed in the sealing plate 63, and the sealing plate 63 has an ink introduction port 68 for receiving ink supply from the outside. A thin wall 69 is formed in the ink chamber plate 65 at a portion facing the common ink chamber 66 by forming a concave portion 65a. The thin wall 69 absorbs the pressure generated when the ink is ejected toward the side opposite to the nozzle 61a, and the unnecessary positive or negative pressure is applied to the other pressure generating chambers 51 via the common ink chamber 66. Prevents joining.

In this embodiment, similarly to the above-described embodiment, the flexible cable is provided with a supporting portion for supporting the mounting portion on which the driving integrated circuit is mounted, so that the driving cable mounted on the flexible cable is provided. When connecting an integrated circuit to a piezoelectric vibrator, the driving integrated circuit contacts the piezoelectric vibrator, hinders the vibration of the piezoelectric vibrator, adversely affects print quality, and damages the piezoelectric vibrator. Can be prevented.

In this embodiment, an example in which the upper electrode film of the piezoelectric vibrator and the flexible cable are connected via the lead electrode has been described. However, the present invention is not limited to this, and various bonding techniques such as wire bonding are used. Alternatively, the connection may be made by using.

Further, in the above-described embodiment, the description has been made of the piezoelectric vibration type ink jet recording head. However, the present invention is not limited to this. For example, a heating element for generating Joule heat is provided in the pressure generating chamber, and the driving signal is generated. It can be applied to ink-jet recording heads of various structures as long as it does not contradict its purpose, such as those that generate heat and cause the ink in the pressure generating chamber to vaporize and pressurize the ink in the pressure generating chamber, etc. it can.

The ink jet recording head of each of the embodiments constitutes a part of a recording head unit having an ink flow path communicating with an ink cartridge and the like, and is mounted on an ink jet recording apparatus. FIG.
FIG. 2 is a schematic diagram illustrating an example of the ink jet recording apparatus.

As shown in FIG. 5, recording head units 71A and 71B each having an ink jet recording head.
The cartridges 72A and 72B constituting the ink supply means are detachably provided. A carriage 73 on which the recording head units 71A and 71B are mounted is provided on a carriage shaft 75 attached to the apparatus main body 74 so as to be movable in the axial direction. Have been. This recording head unit 71A
And 71B discharge, for example, a black ink composition and a color ink composition, respectively.

The driving force of the driving motor 76 is transmitted to the carriage 73 via a plurality of gears and a timing belt 77 (not shown), so that the carriage 73 on which the recording head units 71A and 71B are mounted moves along the carriage shaft 75. Moved. On the other hand, a platen 78 is provided on the apparatus main body 74 along a carriage shaft 75, and a recording sheet S, which is a recording medium such as paper fed by a paper feed roller (not shown), is wound around the platen 78. It is designed to be transported.

[0061]

As described above, in the present invention,
Since the mounting portion of the flexible cable on which the driving integrated circuit for driving the piezoelectric vibrator is mounted is supported by the support portion, the movement of the piezoelectric vibrator is not hindered between the piezoelectric vibrator and the flexible cable. It is possible to secure a sufficient interval, and it is possible to prevent vibration failure of the diaphragm due to contact with the flexible cable, breakage of the piezoelectric vibrator, and the like.

Further, since both ends of the supporting portion are corners, the supporting portion can be slightly deformed at the time of assembling, so that the dimensional accuracy of the component can be reduced.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of an ink jet recording head according to a first embodiment of the present invention.

FIG. 2 is a cross-sectional view of the ink jet recording head according to the first embodiment of the present invention.

FIG. 3 is an exploded perspective view of an ink jet recording head according to another embodiment of the present invention.

FIG. 4 is a diagram showing a plane and a cross section of an ink jet recording head according to another embodiment of the present invention.

FIG. 5 is a schematic diagram of an ink jet recording apparatus according to an embodiment of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Actuator unit 2 Flow path unit 10 Spacer 11 Pressure generating chamber 12 Elastic film 13 Lower electrode film 14 Piezoelectric film 15 Upper electrode film 16 Terminal part 17 Flexible cable 17a Mounting part 17b Window 17c Support part 17d Wiring part 20 Pressure generating chamber bottom plate Reference Signs List 21 Ink supply port forming substrate 25 Reservoir forming substrate 29 Nozzle plate 30 Driving integrated circuit 33 Fixing portion 34 Step portion

Claims (10)

[Claims] 1. A flow path forming substrate defining pressure generating chambers communicating with nozzle openings, a pressure generating means for applying pressure for ink ejection to the pressure generating chambers, and driving the pressure generating means. An ink jet recording head comprising a driving integrated circuit and a flexible cable for connecting the pressure generating means, wherein the flexible cable has a mounting portion on which the driving integrated circuit is mounted in a region facing the pressure generating means. And a support portion for supporting both ends of the mounting portion are provided so as to straddle the pressure generating means, and the support portion is provided between the pressure generating means and the mounting portion. An ink jet recording head, wherein the mounting portion is supported by forming an interval that does not hinder movement. 2. The fixing device according to claim 1, wherein the supporting portion is fixed to a surface of the flow path forming substrate, and a step portion extending in a direction substantially perpendicular to the fixing portion and connected to the mounting portion. And an inkjet recording head. 3. The flexible cable according to claim 1, wherein the flexible cable includes a heat-resistant insulating film laminated with a solderable metal foil, and a window for fixing the driving integrated circuit to the mounting portion, An ink jet recording head connected to the driving integrated circuit by connection means formed in the window. 4. An ink jet recording head according to claim 1, wherein at least a periphery of said driving integrated circuit is molded on said flexible cable with a polymer material. 5. The wiring according to claim 2, wherein the flow path forming substrate corresponding to the fixing portion of the flexible cable is provided with a wiring having one end connected to the pressure generating means. An ink jet recording head, wherein a wiring for connecting the wiring and the mounting portion is provided on a surface of the portion corresponding to the flow path forming substrate. 6. The pressure generating means according to claim 1, wherein the pressure generating means is a piezoelectric vibrator disposed on a vibration plate provided on one surface of the pressure generating chamber. Ink jet recording head. 7. The ink jet recording head according to claim 6, wherein the flow path forming substrate is formed of ceramics, and each layer of the piezoelectric vibrator is formed by pasting or printing a green sheet. 8. The method according to claim 6, wherein the flow path forming substrate is made of a silicon single crystal substrate, the pressure generating chamber is formed by anisotropic etching, and each layer of the piezoelectric vibrator is formed by a thin film and a lithography method. An ink jet recording head characterized by the following. 9. An ink jet recording head according to claim 1, wherein said pressure generating means is a heating element provided in said pressure generating chamber. 10. An ink jet recording apparatus comprising the ink jet recording head according to claim 1.