JP4678224B2 - Liquid ejecting head and manufacturing method thereof - Google Patents

Description

  The present invention relates to a liquid jet head such as an ink jet recording head and a method for manufacturing the same.

  Bending and deforming a piezoelectric vibrator (a type of pressure generating element) formed on the surface of a diaphragm in a kind of liquid ejecting head that discharges liquid droplets from the nozzle opening by causing pressure fluctuations in the liquid in the pressure chamber In some cases, liquid droplets are ejected. For example, the liquid ejecting head includes an actuator unit including a pressure chamber and a piezoelectric vibrator, and a flow path unit including a nozzle opening and a common liquid chamber. In this liquid ejecting head, the pressure chamber volume is changed by supplying a driving signal to drive the piezoelectric vibrator, the pressure stored in the liquid stored in the pressure chamber is changed, and the nozzle is formed by using this pressure change. A droplet is discharged from the opening.

  Here, each of the piezoelectric vibrators has a drive terminal, and a wiring terminal formed at the tip of the wiring member is connected to the driving terminal, and the IC serving as a driving circuit is connected to the wiring member and the wiring terminal. A drive signal is supplied. In this case, a film-like flexible cable is preferably used as the wiring member. This flexible cable is formed by forming a conductor pattern (lead pattern) with copper foil on the surface of an insulating film such as polyimide or polyester, and covering portions other than the wiring terminals (outer leads) with a resist. The wiring terminal portion of the wiring member is pre-soldered, and the wiring member is attached to the actuator unit by soldering the wiring terminal to the drive terminal of the piezoelectric vibrator (for example, Patent Literature 1).

  In the liquid jet head according to the related art including the above-described Patent Document 1, a pressure chamber that discharges an internal liquid through a nozzle opening, and a drive signal that is disposed corresponding to the pressure chamber and supplied through a drive terminal When there are, for example, two rows formed by arranging a plurality of pairs of actuator units each having a pressure generating element that deforms due to the pressure in the liquid in the pressure chamber in one direction, the drive terminal is It is arranged outside the pressure chamber or actuator unit. And when joining the wiring terminal of the said flexible cable to each drive terminal, the operation | work which makes a wiring terminal contact | abut to a drive terminal, and is pressed down and joined is performed for every row | line | column.

  On the other hand, such a joining operation is performed by arranging the drive terminals at the right end of one row and adjacent to the left end of the other row in each set, so that joining operations for two rows can be performed once. Can be done by work.

  However, when such a configuration is adopted, since only the central portion of the flexible cable is supported by each drive terminal, the flexible cable resist layer is positioned so as to cover the actuator unit. In some cases, the surface of the actuator unit may come into contact with deformation of the flexible cable due to heat during the joining operation. When contact is made in this way, the predetermined vibration of the actuator unit is suppressed, and as a result, the amount of liquid droplets discharged from the nozzle openings is partially reduced, causing the problem of uneven printing.

JP 2003-291337 A

  In view of the above problems, the present invention provides a flexible cable positioned so as to cover the top of the actuator unit even when it is joined to the drive terminal of the actuator unit via the wiring terminal at the center of the flexible cable. An object of the present invention is to provide a liquid ejecting head having a structure that does not come into contact with the liquid and a manufacturing method thereof.

The first aspect of the present invention for achieving the above object is as follows:
A pressure chamber that discharges the internal liquid through the nozzle opening due to pressure fluctuations, and a pressure signal that is deformed by a drive signal that is disposed corresponding to the pressure chambers and that is supplied via a drive terminal. An actuator unit having a pressure generating element that generates the same is formed in two rows of rows formed in one direction, and at least two sets are arranged in another direction orthogonal to the one direction. In the formed liquid jet head,
The drive pin, while disposed in the region between the two rows of pressure generating elements in each set,
The drive circuit of the actuator unit in each row is mounted, and the drive signal output from the drive circuit is transmitted above the actuator unit via each wiring member and a wiring terminal joined to each driving terminal. Having a film-like flexible cable arranged so as to straddle,
Furthermore, a leg portion is formed at the inner end portion of the flexible cable, and the flexible cable is brought into contact with the surface of the actuator unit via the leg portion, and the outer end portion of the flexible cable is flipped upward. The lower surface of the actuator and the upper surface of the actuator unit are not in contact with each other.

  According to this aspect, since the inner side is lifted by the leg portion and the outer side is lifted by the flip-up, the flexible cable can reliably cover the actuator unit via the gap above the actuator unit. As a result, the flexible cable does not hinder the vibration of the actuator unit, and good printing can be ensured. At the same time, the operation of joining the wiring terminals to the drive terminals can be performed for two rows at the same time, so that the efficiency of the joining operation can be improved accordingly.

The second aspect of the present invention is:
In the first aspect, a leg portion is formed at an inner end portion of the flexible cable, and a similar leg portion is also formed at an outer end portion, and the surface of the actuator unit is interposed through each leg portion. It is configured such that the lower surface of the flexible cable and the upper surface of the actuator unit do not come into contact with each other by contact.

  According to this aspect, since both the inside and the outside of the joint are lifted by the legs, the flexible cable can reliably cover the actuator unit via the gap above the actuator unit. As a result, the flexible cable does not hinder the vibration of the actuator unit, and good printing can be ensured. At the same time, the operation of joining the wiring terminals to the drive terminals can be performed for two rows at the same time, so that the efficiency of the joining operation can be improved accordingly.

The third aspect of the present invention is:
A pressure chamber that discharges the internal liquid through the nozzle opening due to pressure fluctuations, and a pressure signal that is deformed by a drive signal that is disposed corresponding to the pressure chambers and that is supplied via a drive terminal. An actuator unit having a pressure generating element that generates the same is formed in two rows of rows formed in one direction, and at least two sets are arranged in another direction orthogonal to the one direction. In the manufacturing method of the liquid jet head to be formed,
While disposing the respective driving terminals in the area between the two rows of pressure generating elements in said each set,
The drive circuit of the actuator unit in each row is mounted, and the wiring terminals of the flexible cable having the wiring members connected to the ends of the wiring members and the wiring members are pressed in a state of being placed on the driving terminals. At the same time, the front end of the leg portion extending toward the actuator unit formed on the inner end portion of the flexible cable is brought into contact with the surface of the actuator unit, and the outer end portion of the flexible cable is flipped upward. The lower surface of the flexible cable and the upper surface of the actuator unit are prevented from contacting each other.

  According to this aspect, since the inner side is lifted by the leg portion and the outer side is lifted by the flip-up, the flexible cable can reliably cover the actuator unit via the gap above the actuator unit. As a result, the flexible cable does not hinder the vibration of the actuator unit, and good printing can be ensured. At the same time, the operation of joining the wiring terminals to the drive terminals can be performed for two rows at the same time, so that the efficiency of the joining operation can be improved accordingly.

The fourth aspect of the present invention is:
A pressure chamber that discharges the internal liquid through the nozzle opening due to pressure fluctuations, and a pressure signal that is deformed by a drive signal that is disposed corresponding to the pressure chambers and that is supplied via a drive terminal. An actuator unit having a pressure generating element that generates the same is formed in two rows of rows formed in one direction, and at least two sets are arranged in another direction orthogonal to the one direction. In the manufacturing method of the liquid jet head to be formed,
While disposing the respective driving terminals in the area between the two rows of pressure generating elements in said each set,
The drive circuit of the actuator unit in each row is mounted, and the wiring terminals of the flexible cable having the wiring members connected to the ends of the wiring members and the wiring members are pressed in a state of being placed on the driving terminals. At the same time, the lower end of the flexible cable and the upper surface of the actuator unit are brought into contact with the surface of the actuator unit by simultaneously contacting the tips of both legs formed on the inner end and the outer end of the flexible cable and extending toward the actuator unit. It is characterized by not touching.

  According to this aspect, since both the inside and the outside of the joint are lifted by the legs, the flexible cable can reliably cover the actuator unit via the gap above the actuator unit. As a result, the flexible cable does not hinder the vibration of the actuator unit, and good printing can be ensured. At the same time, the operation of joining the wiring terminals to the drive terminals can be performed for two rows at the same time, so that the efficiency of the joining operation can be improved accordingly.

According to a fifth aspect of the present invention,
Said 3rd or 4th aspect WHEREIN: The said leg part was formed at the time of stamping shaping | molding of a flexible cable, It is characterized by the above-mentioned.

  According to this aspect, the leg portion can be formed at the same time as the punching of the flexible cable, and the process can be rationalized accordingly.

The sixth aspect of the present invention is:
In the third aspect, the outer end of the flexible cable is flipped up by lifting the end in a direction opposite to the press-contact direction when the wiring terminal is pressed to the drive terminal.

  According to this aspect, the flip-up part can be performed simultaneously with the operation of joining the wiring terminals, and the process can be rationalized accordingly.

  The best mode for carrying out the present invention will be described below with reference to the accompanying drawings. In the embodiments described below, various limitations are made as preferred specific examples of the present invention. However, the scope of the present invention is not limited to the following description unless otherwise specified. However, the present invention is not limited to these embodiments. In the following description, an ink jet recording head (hereinafter simply referred to as a recording head) mounted on an ink jet recording apparatus (a type of liquid ejecting apparatus; hereinafter simply referred to as a printer) is taken as an example of the liquid ejecting head of the present invention. To do.

  FIG. 1 is an exploded perspective view illustrating an example of the configuration of the recording head 1. The recording head 1 includes a supply needle unit 3 provided with a plurality of ink supply needles 2 for introducing ink stored in an ink cartridge (not shown) into the head, and a piezoelectric vibrator 30 (see FIG. 2 and the like). A head unit 6 including an actuator unit 4 and a flow path unit 5 is schematically provided with a head case 9. Further, in this recording head 1, a metal for protecting the head unit 6 and adjusting the nozzle plate 8 to the ground potential on the tip side of the head case 9 (on the side opposite to the joint surface of the supply needle unit 3). A cover 10 made of metal is attached.

  The supply needle unit 3 is a synthetic resin member in which the ink supply needles 2 are arranged side by side in the head main scanning direction (the nozzle row orthogonal direction). The tip of the ink supply needle 2 disposed in the supply needle unit 3 is pointed in a conical shape so that it can be easily inserted into the ink cartridge. In addition, a plurality of introduction holes communicating with the inside and outside of the ink supply needle 2 are formed at the tip portion, and ink in the ink cartridge is introduced into the head through these introduction holes. Since the recording head 1 of the present embodiment is capable of ejecting four types of ink, the supply needle unit 3 is provided with a total of four ink supply needles 2 with the tip protruding upward. .

  The head case 9 has a base portion 12 to which the supply needle unit 3 and the wiring substrate 11 are attached, and a hollow box-like shape that extends downward from the bottom portion of the base portion 12 and has the head unit 6 attached to the opening surface. It is a member constituted by the case portion 13. In the present embodiment, the head case 9 and the supply needle unit 3 are made of a synthetic resin such as a modified PPE (polyphenylene ether) resin. In the base portion 12 of the head case 9, an upper opening 14 of a converging channel (not shown) for supplying ink to the head unit 6 side is located at a position corresponding to each ink supply needle 2 of the supply needle unit 3. Each has been established. Further, the base portion 12 is partitioned with a substrate placement portion 15 for placing the wiring substrate 11.

  The wiring board 11 includes a connector 16, and a wiring cable (not shown) such as an FFC (flexible flat cable) from the printer main body side is attached to the connector 16. In addition, a connection terminal 17 is formed on the wiring substrate 11, and a film-like flexible cable 18 such as a TCP (tape carrier package) is electrically connected to the connection terminal 17. The wiring board 11 receives a drive signal from the printer main body side through the FFC and supplies the drive signal to the piezoelectric vibrator 30 of the actuator unit 4 via the flexible cable 18.

  The nozzle plate 8 is one of the members constituting the flow path unit 5 and is produced, for example, by pressing a metal plate material such as stainless steel. In the nozzle plate 8, a plurality of nozzle openings 19 are formed in a row at a pitch corresponding to the dot formation density. In this embodiment, the row of nozzle openings 19 (nozzle row) is in the main scanning direction. Multiple lines (4 rows) are arranged side by side. The nozzle plate 8 is disposed in the flow path unit 5 on the side opposite to the joint surface side of the actuator unit 4.

  FIG. 2 is a cross-sectional view of an essential part for explaining the configuration of the head unit 6. The head unit 6 shown in the figure is configured by integrating the actuator unit 4 and the flow path unit 5 so as to overlap each other, and includes a pressure chamber 28 for discharging the internal liquid through the nozzle opening 19 due to pressure fluctuation. An actuator unit 4 having a piezoelectric vibrator 30 which is arranged in correspondence with the pressure chamber 28 and is deformed by a drive signal supplied via a drive terminal 39 to cause a pressure fluctuation in the liquid in the pressure chamber 28; Are formed by arranging two sets (see FIG. 1) in the other direction orthogonal to the one direction.

  Here, the drive terminal 39 is disposed so as to be adjacent to the right end of one row and the left end of the other row in each set, and in a region between the rows of the piezoelectric vibrators 30. Thus, drive terminals 39 for two rows of the piezoelectric vibrators are formed.

  The flexible cable 18 is mounted with an IC 46 (see FIG. 3), which is a drive circuit for selectively driving the actuator units 4 in each row, and copper on the surface of a base film 43 made of an insulating film such as polyimide or polyester. A conductor pattern (wiring pattern) is formed of a conductive material such as foil. Further, a portion other than the wiring terminal 44 is formed so as to be covered with the solder resist 45, and a drive signal output from the IC 46 (see FIG. 3) is transmitted to the actuator unit 4 via the wiring terminal 44 joined to the drive terminal 39. Therefore, the actuator unit 4 is disposed above the actuator unit 4. Here, the portion of the wiring terminal 44 is pre-soldered, and the flexible cable 18 and the actuator unit 4 can be joined by soldering the wiring terminal 44 to the drive terminal 39. That is, this joining operation is performed by pressing the flexible cable 18 downward while heating the wiring terminals 44 on the drive terminals 39.

  Here, a leg portion 18a is formed at the inner end of the flexible cable 18, and abuts against the surface of the actuator unit 4 via the leg portion 18a. Further, the outer end 18b of the flexible cable 18 is flipped upward. As a result, the lower surface of the solder resist 45 of the flexible cable 18 is not in contact with the upper surface of the actuator unit 4. Two rows of piezoelectric vibrators are made into one set, and each drive terminal 39 of the set is formed at both ends instead of between a pair of piezoelectric vibrators, and protrusions such as legs are formed between the rows. Even if the flexible cable 18 and the actuator unit 4 are to be joined, since the joining is performed in a state where there is almost no gap through which heat is released at both ends, high-temperature heat is confined between the actuator unit 4 and the flexible cable 18. Therefore, the flexible cable 18 may be excessively bent and eventually the flexible cable 18 may touch the actuator unit 4. A drive terminal 39 is formed and connected to the flexible cable 18, and the flip-up structure as shown by the legs 18a and 18b is adopted at both ends.With such a configuration, heat at the time of connection between the actuator unit 4 and the flexible cable 18 does not stagnate between the actuator unit 4 and the flexible cable 18.

  FIG. 3 is a plan view for explaining the configuration of the flexible cable 18 and shows a tip end portion connected to the piezoelectric vibrator 30. The flexible cable 18 shown in FIG. 2 is a cross section obtained by cutting the flexible cable 18 shown in FIG. 3 along the line II. As shown in FIG. 3, the flexible cable 18 is bifurcated at the tip, and two rows and one set of wiring terminals 44 are formed at the center in the width direction of each branch. Ink supply paths 51 and 52 for supplying ink to the reservoir 25 (see FIG. 2) are positioned between the two branch portions, so that a space for the ink supply paths 51 and 52 is secured by cutting out this portion. Two branch portions are formed above, and wiring terminals 44 and the like are arranged.

  In addition, a leg 18a is formed at the inner end (center side) of the flexible cable 18, and the outer end 18b of the flexible cable 18 is flipped upward.

  As described above, according to the present embodiment, the flexible cable 18 is lifted by the legs 18a and the outer end 18b is lifted by jumping up. The actuator unit 4 can be covered with a gap. As a result, the flexible cable 18 does not hinder the vibration of the actuator unit 4, and good printing can be ensured. At the same time, the joining operation of the wiring terminals 44 to the drive terminals 39 can be performed for two rows at the same time, so that the efficiency of the joining operation can be improved accordingly. The legs 18a may be formed continuously in the direction in which the piezoelectric vibrators 30 are arranged. However, if a gap is formed between the legs 18a and 18a, the actuator unit 4 can be formed from the gap. The heat at the time of joining with the flexible cable 18 can be released to the outside.

  Incidentally, when the leg portion 18a is not formed and the end portion 18b is not flipped up, as shown in FIG. 4, the two rows of drive terminals 39 and wiring terminals 44 that are concentrated in the central portion of the flexible cable 18 are used. The flexible cable 18 is supported, and the solder resist 45 comes into contact with the surface of the actuator unit 4 in combination with the deformation of the flexible cable 18 due to heat at the time of joining the wiring terminal 44 to the drive terminal 39. When contact is made in this way, the predetermined vibration of the actuator unit 4 is suppressed. As a result, the amount of liquid droplets discharged from the nozzle openings 19 is partially reduced, resulting in uneven printing.

  On the other hand, as in the present embodiment, the contact between the solder resist 45 and the surface of the actuator unit 4 is performed by forming leg portions 18a at the outer ends of the flexible cable 18 as shown in FIG. Even if it is configured to support the ends of the two by the two leg portions 18a, it can be prevented.

  The leg portions 18a of the flexible cable 18 are most easily and rationally formed by using a punch in the punching process of the flexible cable 18. Specifically, as shown in FIG. 6, the shape of the leg 18a is managed by its height and the amount of punch engagement (X position), and the height of the leg 18a is 0.063 mm or more. The amount (X position) was set to 0.195 ± 0.065 mm.

  Further, the flip-up portion is preferably formed by hooking and lifting the claw portion on the outer end portion of the flexible cable 18 when the wiring terminal 44 (see FIG. 2) is joined to the drive terminal 39 (see FIG. 2). Can do.

  FIG. 7 is a plan view showing the flexible cable 68 in the case of having two rows and three groups of actuator units 4. As shown in the figure, in this case, both ends of the central branch portion need to be leg portions 68a and 68a. This is because it is difficult to jump up either end. In FIG. 7, the same parts as those in FIG.

  Returning to FIG. 2, the flow path unit 5 includes an ink supply port 22 that functions as an orifice and a supply port plate 24 in which a through hole that is a part of the nozzle communication port 23 is formed, and ink from the ink supply needle 2 side. The reservoir 25 (common liquid chamber) to be supplied and the reservoir plate 26 in which a through hole that becomes a part of the nozzle communication port 23 is formed, and the nozzle plate 8 are configured. The flow path unit 5 is configured such that the nozzle plate 8 is disposed on one surface of the reservoir plate 26 and the supply port plate 24 is disposed on the other surface, and these members are joined together by a heat welding film or the like. ing. The flow path unit 5 forms an ink flow path (liquid flow path) from the reservoir 25 to the nozzle opening 19.

  The actuator unit 4 includes a pressure chamber plate 29 having a through hole serving as a pressure chamber 28, a plurality of piezoelectric vibrators 30 mounted side by side, a vibrator plate 31 that partitions a part of the pressure chamber 28, and a supply A communication port plate 34 in which a communication hole serving as the side communication port 32 and a communication hole serving as the nozzle communication port 23 are formed is provided in a stacked state. The pressure chamber plate 29, the vibrator plate 31, and the communication port plate 34 are made of ceramics such as alumina and zirconium oxide, and are integrated by firing.

  The pressure chamber 28 is a hollow space that is elongated in a direction orthogonal to the nozzle row, and a plurality of pressure chambers 28 are formed corresponding to the nozzle openings 19. One end side of each pressure chamber 28 communicates with the reservoir 25 through the supply side communication port 32 and the ink supply port 22. The other end of the pressure chamber 28 opposite to the supply side communication port 32 communicates with the nozzle opening 19 through the nozzle communication port 23. A part of the pressure chamber 28, that is, a surface opposite to the communication port plate 34 is partitioned by the vibrator plate 31.

  In the present embodiment, the piezoelectric vibrator 30 that functions as a kind of pressure generating element is a so-called flexural mode piezoelectric vibrator that performs flexural vibration in response to an applied electric field. The layer 38 is formed in a sandwiched state. The piezoelectric vibrator 30 is formed on the surface of the vibrator plate 31 opposite to the pressure chamber 28 so as to cover the pressure chamber 28. That is, each piezoelectric vibrator 30 is arranged in the nozzle row direction corresponding to each pressure chamber 28. Here, the one located at the end of the piezoelectric vibrator array is not involved in the ejection of ink droplets. That is, the dummy vibrator is not driven without being supplied with a drive signal.

  The piezoelectric vibrator may be of a so-called double-chip type in which two piezoelectric layers are sandwiched between a common electrode and two upper and lower drive electrodes.

  The drive terminal 39 is electrically connected to the drive electrode 36 of the piezoelectric vibrator 30. The common electrode 37 is electrically connected to a common ground terminal 41 (see FIGS. 9 and 10) via a common trunk electrode (not shown).

  8 is a plan view for explaining the arrangement state of the drive terminals 39 in the actuator unit 4, FIG. 9 is an enlarged view of a region A in FIG. 8, and FIG. 10 is an enlarged view of a region B in FIG. 8 to 10 mainly show the drive terminals 39, and the piezoelectric vibrator 30 is not shown for convenience.

  As shown in these drawings, each drive terminal 39 is arranged in the nozzle row direction to form a drive terminal row 40. This drive terminal row 40 is arranged in the width direction of the actuator unit 4 (in the nozzle row direction). Two rows are formed near the center in the (perpendicular direction).

  As shown in FIGS. 9 and 10, common ground terminals 41 are provided on both sides in the drive terminal row direction. The common ground terminal 41 is a portion that is electrically connected to the common electrode 37 of the piezoelectric vibrator 30 through the common trunk electrode and is connected to the ground terminal (not shown) of the flexible cable 18. In the present embodiment, the first and second terminals from one end (area B) of each drive terminal row 40 and the first to third terminals from the other end (area A) are respectively connected to the common ground terminal 41. It has become. The drive terminal 39 and the common ground terminal 41 are made of a metal material such as silver, and are formed on the surface of the actuator unit 4 by screen printing in the present embodiment.

  When a drive signal is supplied to the drive electrode 36 through the drive terminal 39, an electric field corresponding to the potential difference is generated between the drive electrode 36 and the common electrode 37. This electric field is applied to the piezoelectric layer 38, and the piezoelectric layer 38 bends and deforms according to the strength of the applied electric field. That is, as the potential of the drive signal supplied to the drive electrode 36 is increased, the piezoelectric layer 38 is displaced closer to the flow path unit 5 and the pressure chamber plate 29 is deformed so as to reduce the volume of the pressure chamber 28. Let On the other hand, the lower the potential of the drive signal supplied to the drive electrode 36, the more the piezoelectric layer 38 is displaced away from the flow path unit 5, and the pressure chamber plate 29 is increased so as to increase the volume of the pressure chamber 28. Deform. By driving the piezoelectric vibrator 30 as described above, the pressure chamber 28 contracts or expands, thereby causing a pressure fluctuation in the ink in the pressure chamber 28. By utilizing this pressure fluctuation, the ink in the pressure chamber 28 can be ejected from the nozzle opening 19 as ink droplets.

  In the above description, the recording head 1 is described as an example of the liquid ejecting head, but the present invention can also be applied to other liquid ejecting heads. For example, a color material ejecting head used for manufacturing a color filter such as a liquid crystal display, an electrode material ejecting head used for forming an electrode such as an organic EL (Electro Luminescence) display, FED (surface emitting display), a biochip (biochemical element) The present invention can also be applied to bioorganic matter ejecting heads and the like used in the production of

FIG. 2 is an exploded perspective view illustrating a configuration of a recording head. It is principal part sectional drawing explaining the structure of a head unit. It is a top view explaining the structure of a flexible cable. It is principal part sectional drawing explaining the structure of a head unit. It is principal part sectional drawing explaining the structure of a head unit. It is explanatory drawing which shows the formation aspect of the leg part of a flexible cable. It is a top view explaining the other structure of a flexible cable. It is a top view explaining the structure of an actuator unit. It is an enlarged view of the area | region A in FIG. It is an enlarged view of the area | region B in FIG.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Recording head, 2 Ink supply needle, 3 Supply needle unit, 4 Actuator unit, 5 Flow path unit, 6 Head unit, 8 Nozzle plate, 9 Head case, 10 Cover, 11 Wiring board, 12 Base part, 13 Case part, 14 upper opening, 15 substrate mounting portion, 16 connector, 17 connection terminal, 18 flexible cable, 18a leg, 18b end, 19 nozzle opening, 22 ink supply port, 23 nozzle communication port, 24 supply port plate, 25 Reservoir, 26 Reservoir plate, 28 Pressure chamber, 29 Pressure chamber plate, 30 Piezoelectric vibrator, 31 Vibrator plate, 32 Supply side communication port, 34 Communication port plate, 36 Drive electrode, 37 Common electrode, 38 Piezoelectric layer, 39 Drive terminal, 40 Drive terminal row, 41 Common contact terminal, 43 Base film, 44 Wiring end , 45 a solder resist, 46 IC, 51 ink supply port, 52 an ink supply port, 68 a flexible cable, 68a leg

Claims (6)

A pressure chamber that discharges the internal liquid through the nozzle opening due to pressure fluctuations, and a pressure signal that is deformed by a drive signal that is disposed in correspondence with the pressure chambers and that is supplied via a drive terminal. An actuator unit having a pressure generating element that generates the same is formed in two rows of rows formed in one direction, and at least two sets are arranged in another direction orthogonal to the one direction. In the formed liquid jet head,
The drive terminals are arranged in a region between two rows of pressure generating elements in each set,
The drive circuit of the actuator unit in each row is mounted, and the drive signal output from the drive circuit is transmitted via the wiring terminal joined to each wiring member and each driving terminal above the actuator unit. Having a film-like flexible cable arranged to straddle,
Further, the one end of the flexible cable to form at least two legs, as well as contact with the surface of the actuator unit via the leg portion, the other end of the flexible cable by flipping up upward The lower surface of the flexible cable is configured not to contact the upper surface of the actuator unit,
A liquid ejecting head, wherein a gap is formed between the leg portion formed on the flexible cable and the other leg portion. In claim 1,
A leg is formed at one end of the flexible cable, and a similar leg is formed at the other end, and the flexible cable is brought into contact with the surface of the actuator unit via each leg. A liquid ejecting head configured so that the lower surface of the actuator and the upper surface of the actuator unit do not contact each other. A pressure chamber that discharges the internal liquid through the nozzle opening due to pressure fluctuations, and a pressure signal that is deformed by a drive signal that is disposed in correspondence with the pressure chambers and that is supplied via a drive terminal. An actuator unit having a pressure generating element that generates the same is formed in two rows of rows formed in one direction, and at least two sets are arranged in another direction orthogonal to the one direction. In the manufacturing method of the liquid jet head to be formed,
While each drive terminal is disposed in a region between two rows of pressure generating elements in each set,
The drive circuit of the actuator unit in each row is mounted, and the wiring terminals of the flexible cable having the wiring members connected to the ends of the wiring members and the wiring members are pressed in a state of being placed on the driving terminals. joined, is brought into contact with at least two legs of the distal end at the same time extending to one actuator unit side formed at an end portion of the flexible cable on the surface of the actuator unit further bounce the other end of the flexible cable upwards The lower surface of the flexible cable and the upper surface of the actuator unit are prevented from contacting by raising
A method of manufacturing a liquid ejecting head, wherein a gap is formed between the leg portion formed on the flexible cable and the other leg portion. A pressure chamber that discharges the internal liquid through the nozzle opening due to pressure fluctuations, and a pressure signal that is deformed by a drive signal that is disposed corresponding to the pressure chambers and that is supplied via a drive terminal. An actuator unit having a pressure generating element that generates the same is formed in two rows of rows formed in one direction, and at least two sets are arranged in another direction orthogonal to the one direction. In the manufacturing method of the liquid jet head to be formed,
While each drive terminal is disposed in a region between two rows of pressure generating elements in each set,
The drive circuit of the actuator unit in each row is mounted, and the wiring terminals of the flexible cable having the wiring members connected to the ends of the wiring members and the wiring members are pressed in a state of being placed on the driving terminals. joined, the upper surface of the lower surface and the actuator unit of the flexible cable by abutting the tip of the legs on the surface of the actuator unit at the same time extending to one end and the actuator unit side formed at the other end of the flexible cable To avoid contact with
Each of the legs has at least two legs, and a gap is formed between the legs and the other legs of each of the legs. . In claim 3 or 4,
The leg is formed at the time of punching and forming a flexible cable. In claim 3,
The method of manufacturing a liquid ejecting head, wherein the other end portion of the flexible cable is flipped up by lifting the end portion in a direction opposite to the press-contact direction at the time of press-connecting the wiring terminal to the drive terminal.

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