JP2008230017A - Liquid jetting head and method for manufacturing it - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a liquid jetting head in which a waterproof member is filled in a gap between a piezoelectric vibrator and a flexible cable even when a driving terminal of an actuator member and a wiring terminal of the flexible cable are joined together with a conductive member. <P>SOLUTION: When the actuator member 4 and the flexible cable 18 are joined together, the driving terminal 39 and the wiring terminal are joined together by placing an anisotropic conductive film 48 between them, and a double-faced tape 47 is provided so as to surround the piezoelectric vibrator 30 between the actuator member 4 and the flexible cable 18, to form a space 49 enwrapping the piezoelectric vibrator 30. In the flexible cable 18 and double-faced tape 47, through-holes 60a and 60b communicating with the space 49 are provided, and fluorine gel 61 is filled in the space 49. <P>COPYRIGHT: (C)2009,JPO&INPIT

Description

  The present invention relates to a liquid jet head such as an ink jet recording head and a method for manufacturing the same.

  Bending and deforming a piezoelectric vibrator (a type of pressure generating element) formed on the surface of a diaphragm in a kind of liquid ejecting head that discharges liquid droplets from the nozzle opening by causing pressure fluctuations in the liquid in the pressure chamber In some cases, liquid droplets are ejected. The liquid ejecting head includes, for example, an actuator member including a pressure chamber and a piezoelectric vibrator, and a flow path unit including a nozzle opening and a common liquid chamber. In this liquid ejecting head, the pressure chamber volume is changed by supplying a driving signal to drive the piezoelectric vibrator, the pressure stored in the liquid stored in the pressure chamber is changed, and the nozzle is formed by using this pressure change. A droplet is discharged from the opening.

  Here, each of the piezoelectric vibrators has a drive terminal, and a wiring terminal formed at the tip of the wiring member is connected to the driving terminal, and the IC serving as a driving circuit is connected to the wiring member and the wiring terminal. A drive signal is supplied. As the wiring member in this case, a flexible cable as a film member is preferably used. This flexible cable is formed by forming a conductor pattern (lead pattern) with copper foil on the surface of an insulating film such as polyimide or polyester, and covering portions other than the wiring terminals (outer leads) with a resist. The wiring terminal portion of the wiring member is pre-soldered, and the wiring member is attached to the actuator member by soldering the wiring terminal to the drive terminal of the piezoelectric vibrator (for example, Patent Documents). 1).

  In the liquid jet head according to the related art including the above-described Patent Document 1, a pressure chamber that discharges an internal liquid through a nozzle opening, and a drive signal that is disposed corresponding to the pressure chamber and supplied through a drive terminal One set is formed of two rows formed by arranging actuator members having pressure generating elements that are deformed by the above and generate pressure fluctuations in the liquid in the pressure chamber in one direction. Between the two rows of pressure chambers or actuator members, the drive terminals are arranged in two rows corresponding to each actuator member. And when joining the wiring terminal of the said flexible cable to each drive terminal, the operation | work which makes a wiring terminal contact | abut to a drive terminal, and is pressed down and joined is performed for every row | line | column.

  On the other hand, through-holes are provided in a part of the flexible cable facing each row of drive terminals, and after the joining operation, fluorine gel, which is an example of a gel-like waterproof member, is injected from the through-holes. Is done. This fluorogel will flow between each row of drive terminals, but it will pass between adjacent drive terminals to reach the gap between the flexible cable and the piezoelectric vibrator and fill the gap. To do. In this way, the entire upper surface of the piezoelectric vibrator is covered with the fluorine gel to prevent deterioration of the piezoelectric vibrator due to water immersion.

JP 2003-291337 A

  On the other hand, the process of providing solder plating on each wiring terminal in advance and soldering and joining each wiring terminal and each driving terminal is complicated and increases the manufacturing cost, so that each wiring terminal and each driving terminal are made conductive. Manufacturing costs can be reduced by joining through the members.

  However, if a conductive member is provided on the drive terminal and a flexible cable is provided thereon, the through-hole is blocked by the conductive member, so that the fluorine gel cannot be injected.

  In view of the above problems, the present invention provides a waterproof member in the gap between the piezoelectric vibrator and the flexible cable even when the drive terminal of the actuator member and the wiring terminal of the flexible cable are joined by the conductive member. An object of the present invention is to provide a filled liquid jet head and a method of manufacturing the same.

  In order to achieve the above object, the present invention is modified by a pressure chamber that discharges an internal liquid through a nozzle opening due to pressure fluctuation, and a drive signal that is disposed corresponding to the pressure chamber and is supplied through a drive terminal. A liquid ejecting head in which one set is formed of two rows formed by arranging actuator members having pressure generating elements that cause a pressure fluctuation in the liquid in the pressure chamber in one direction, and the drive terminal has a pressure It is disposed in a region between two rows of generating elements, and is mounted with a drive circuit for actuator members in each row, and transmits a drive signal output from the drive circuit via a wiring terminal joined to each drive terminal. The actuator member has a film member disposed so as to straddle the actuator member, and the drive terminal and the wiring terminal are joined by interposing a conductive member therebetween, while the actuator is connected to the actuator member. The adhesive member is provided between the data member and the film member so as to surround the pressure generating element, so that a space containing the pressure generating element is formed, and the members corresponding to different surfaces in the space formed by each member are formed. Among them, each of the members corresponding to two different surfaces is provided with a through hole communicating with the space, and the space is filled with a waterproof member that does not hinder the deformation of the pressure generating element and has hydrophobicity. The gist.

  According to this, it is possible to improve the productivity of the recording head by bonding each drive terminal and each wiring terminal at once using a conductive member, and from the through hole communicating with the space containing the pressure generating element. It is possible to obtain a highly durable liquid jet head filled with a waterproof member.

  The through hole of the liquid jet head of the present invention may be provided in an actuator member and an adhesive member corresponding to different surfaces in the space.

  According to this, when the waterproof member is injected into the space from one of the through holes provided in the actuator member and the adhesive member, the air in the space is discharged from the other through hole. A liquid jet head filled in the space without bubbles can be obtained, and the pressure generating element can be waterproofed more reliably.

  The through hole of the liquid jet head according to the present invention may be provided in an adhesive member corresponding to a surface having a different space.

  According to this, when the waterproof member is injected into the space from any one of the through holes provided in the adhesive member, the air in the space is discharged from the other through hole. The liquid jet head filled in the inside can be obtained, and the pressure generating element can be waterproofed more reliably.

  Each of the through holes of the liquid jet head according to the present invention may be provided at the end of each member so as to be spaced apart from each other.

  According to this, since the through holes are provided apart from each other, when the waterproof member is injected into the space from one through hole, it becomes difficult to cover the other through hole with the waterproof member and traps the air in the space. The waterproof member can be efficiently filled without any trouble.

  The present invention relates to a pressure chamber that discharges an internal liquid through a nozzle opening due to pressure fluctuation, and a liquid in the pressure chamber that is deformed by a drive signal that is disposed corresponding to the pressure chamber and supplied through a drive terminal. A method of manufacturing a liquid ejecting head in which one set is formed of two rows formed by arranging actuator members having pressure generating elements that cause pressure fluctuations in one direction. A film member having each wiring terminal connected to the drive circuit of each row of actuator members, with each drive terminal being disposed in a region between them, and an adhesive member being disposed on the actuator member so as to surround the pressure generating element. Each wiring terminal and each driving terminal are joined to the actuator member via a conductive member and a space containing the pressure generating element is formed by bonding the film member and the adhesive member. The deformation of the pressure generating element is inhibited through a through hole communicating with the space provided in each of the members corresponding to two different surfaces among the members corresponding to different surfaces in the space formed by each member. The gist of the invention is to inject a waterproof member having no hydrophobicity into the space.

  According to this, it is possible to improve the productivity of the recording head by bonding each drive terminal and each wiring terminal at once using a conductive member, and from the through hole communicating with the space containing the pressure generating element. A highly durable liquid jet head that is filled with a waterproof member can be manufactured.

  In the liquid jet head manufacturing method of the present invention, when the waterproof member is injected into the space, the waterproof member is injected into the space so that the waterproof member is injected from one through hole and the air in the space is discharged from the other through hole. May be filled.

  According to this, since the air in the space is discharged from the other through hole when the waterproof member is injected into the space from one through hole, the liquid ejecting head in which the waterproof member is filled without bubbles in the space And the pressure generating element can be waterproofed more reliably.

  The method for manufacturing a liquid jet head according to the present invention is such that a waterproof member is injected from one through hole provided in the film member, and air in the space is discharged from the other through hole provided in the adhesive member. May be filled.

  According to this, when the waterproof member is injected from the through hole of the film member, the waterproof member can easily expand into the space due to its own weight, and the air in the space can be efficiently discharged from the other through hole provided in the adhesive member. Can do.

(First embodiment)
The best mode for carrying out the present invention will be described below with reference to the accompanying drawings. In the embodiments described below, various limitations are made as preferred specific examples of the present invention. However, the scope of the present invention is not limited to the following description unless otherwise specified. However, the present invention is not limited to these embodiments. In the following description, an ink jet recording head (hereinafter simply referred to as a recording head) mounted on an ink jet recording apparatus (a type of liquid ejecting apparatus; hereinafter simply referred to as a printer) is taken as an example of the liquid ejecting head of the present invention. To do.

  FIG. 1 is an exploded perspective view illustrating an example of the configuration of the recording head 1. The recording head 1 includes a supply needle unit 3 provided with a plurality of ink supply needles 2 for introducing ink stored in an ink cartridge (not shown) into the head, and a piezoelectric vibrator 30 (see FIG. 2 and the like). A head unit 6 including an actuator unit 4 and a flow path unit 5 is schematically provided with a head case 9. Further, in this recording head 1, a metal for protecting the head unit 6 and adjusting the nozzle plate 8 to the ground potential on the tip side of the head case 9 (on the side opposite to the joint surface of the supply needle unit 3). A cover 10 made of metal is attached.

  The supply needle unit 3 is a synthetic resin member in which the ink supply needles 2 are arranged side by side in the head main scanning direction (the nozzle row orthogonal direction). The tip of the ink supply needle 2 disposed in the supply needle unit 3 is pointed in a conical shape so that it can be easily inserted into the ink cartridge. In addition, a plurality of introduction holes communicating with the inside and outside of the ink supply needle 2 are formed at the tip portion, and ink in the ink cartridge is introduced into the head through these introduction holes. Since the recording head 1 of the present embodiment is capable of ejecting four types of ink, the supply needle unit 3 is provided with a total of four ink supply needles 2 with the tip protruding upward. .

  The head case 9 has a base portion 12 to which the supply needle unit 3 and the wiring substrate 11 are attached, and a hollow box-like shape that extends downward from the bottom portion of the base portion 12 and has the head unit 6 attached to the opening surface. It is a member constituted by the case portion 13. In the present embodiment, the head case 9 and the supply needle unit 3 are made of a synthetic resin such as a modified PPE (polyphenylene ether) resin. In the base portion 12 of the head case 9, an upper opening 14 of a converging channel (not shown) for supplying ink to the head unit 6 side is located at a position corresponding to each ink supply needle 2 of the supply needle unit 3. Each has been established. Further, the base portion 12 is partitioned with a substrate placement portion 15 for placing the wiring substrate 11.

  The wiring board 11 includes a connector 16 to which a wiring cable (not shown) such as an FFC (flexible flat cable) from the printer main body side is attached. In addition, a connection terminal 17 is formed on the wiring board 11, and a flexible cable 18 as a film member such as a TCP (tape carrier package) is electrically connected to the connection terminal 17. . The wiring board 11 receives a drive signal from the printer body through the FFC, and supplies the drive signal to the piezoelectric vibrator 30 of the actuator member 4 via the flexible cable 18.

  The nozzle plate 8 is one of the members constituting the flow path unit 5 and is produced, for example, by pressing a metal plate material such as stainless steel. In the nozzle plate 8, a plurality of nozzle openings 19 are formed in a row at a pitch corresponding to the dot formation density. In this embodiment, the row of nozzle openings 19 (nozzle row) is in the main scanning direction. Multiple lines (4 rows) are arranged side by side. The nozzle plate 8 is disposed on the side opposite to the joint surface side of the actuator member 4 in the flow path unit 5.

  2A is a plan view of the actuator member, FIG. 2B is a plan view of the flexible cable, and FIG. 3 is a cross-sectional view of a main part for explaining the configuration of the head unit. The flexible cable 18 shown in FIG. 3 is a cross section obtained by cutting the flexible cable 18 shown in FIG. A dotted rectangle indicated by reference numeral “30” in FIG. 2B indicates the position of the row of piezoelectric vibrators 30 when the flexible cable 18 is joined to the actuator member 4. Similarly, a dotted U-shaped region indicated by reference numeral “47” indicates a position of a double-sided tape 47 described later.

  As shown in FIGS. 2A and 3, the head unit 6 is configured by integrating the actuator member 4 and the flow path unit 5 in an overlapped state, and the inside of the head unit 6 through the nozzle opening 19 due to pressure fluctuation. A pressure chamber 28 that discharges the liquid and a piezoelectric member that is deformed by a drive signal that is disposed corresponding to the pressure chamber 28 and that is supplied via a drive terminal 39 to cause a pressure fluctuation in the liquid in the pressure chamber 28. The actuator member 4 having the transducer 30 is formed in one set with two rows formed in one direction (vertical direction in FIG. 2A), and two sets (see FIG. 1). They are formed side by side in another direction orthogonal to the one direction. A compliance substrate 70 is provided in a portion of the flow path unit 5 that protrudes in the horizontal direction from the actuator member 4. The compliance substrate 70 is an impact mitigating member for mitigating a sudden rise in pressure when ink flows into the reservoir 25.

  Here, the drive terminal 39 is disposed at the right end of one row and at the left end of the other row in each set, and the piezoelectric vibrator 2 is arranged in a region between the rows of the piezoelectric vibrators 30. The drive terminals 39 for the columns are formed. On the other hand, a double-sided tape 47 as an adhesive member is provided between the actuator member 4 and the flexible cable 18 so as to surround the piezoelectric vibrator 30. In the present embodiment, the double-sided tape 47 surrounds the piezoelectric vibrators 30 arranged in a line in a U-shape. Thus, each row of the piezoelectric vibrators 30 is surrounded by the drive terminals 39 and the double-sided tape 47. Note that the double-sided tape 47 is disposed closer to the piezoelectric vibrator 30 than the compliance substrate 70.

  As shown in FIGS. 2B and 3, the flexible cable 18 includes an IC 46 that is a drive circuit for selectively driving the actuator units 4 in each row, and a base film 43 made of an insulating film such as polyimide or polyester. It is equipped with. A conductor pattern (wiring pattern) is formed of a conductive material such as copper foil on the surface of the flexible cable 18, and a wiring electrically connected to the conductor pattern is provided in a region facing each drive terminal 39 on the surface. A terminal 44 is provided. The IC 46 is electrically connected to the conductive pattern so as to transmit the drive signal output from the IC 46 to the actuator unit 4. Further, a solder resist 45 is provided on the surface of the flexible cable 18 other than the wiring terminals 44.

  Further, the flexible cable 18 has a bifurcated end portion, and two rows and one set of wiring terminals 44 are formed at the central portion in the width direction of each branch portion. Ink supply paths 51 and 52 for supplying ink to the reservoir 25 (see FIG. 3) are positioned between the two branch portions, so that a space for the ink supply paths 51 and 52 is secured by cutting out this portion. Two branch portions are formed above, and wiring terminals 44 and the like are arranged.

  The flexible cable 18 is disposed above the actuator member 4 so as to straddle the flexible cable 18. More specifically, each wiring terminal 44 of the flexible cable 18 is joined to each driving terminal 39 of the actuator member 4 via an anisotropic conductive film 48 as a conductive member, while the flexible cable 18 is interposed via a double-sided tape 47. Are bonded to the upper surface of the actuator member 4. As a result, the flexible cable 18, the drive terminal 39 and the wiring terminal 44 joined via the anisotropic conductive film 48, and the double-sided tape 47 form a space 49 for each row of the piezoelectric vibrators 30. A piezoelectric vibrator 30 is included in 49.

  Since the anisotropic conductive film 48 is formed in a size that covers the entire two rows of drive terminals 39 of the actuator member 4, when the flexible cable 18 is joined to the actuator member 4, each drive terminal 39 and each wiring terminal are connected. 44 can be bonded together. In addition, as an electroconductive member, not only an anisotropic conductive film but anisotropic conductive paste may be sufficient.

  As shown in FIGS. 2B and 3, a space 49 is formed for each row of the piezoelectric vibrators 30 by each member. In this embodiment, a space 49 is formed for each row of piezoelectric vibrators 30 by the members of the flexible cable 18, the double-sided tape 47 formed in a U shape, the anisotropic conductive film 48, and the actuator member 4. . In other words, the space 49 obtains a space region by six surfaces of the first surface S1 to the sixth surface S6 that are in contact with the space 49 of each member.

  Further, among the members corresponding to the first surface S <b> 1 to the sixth surface S <b> 6 that form the space 49, a through hole 60 that communicates with the space 49 is provided in each of the members corresponding to two different surfaces. In the present embodiment, the through hole 60a is provided in the flexible cable 18 corresponding to the first surface S1, and the through hole 60b is provided in the double-sided tape 47 corresponding to the second surface S2. Also, the through hole 60a is at the end of the flexible cable 18 and the through hole 60b is at the end of the double-sided tape 47 (second surface) so that the through hole 60a and the through hole 60b are spaced apart from each other. (The end of S2). The space 49 is filled with fluorine gel 61 injected through one through hole 60a or through hole 60b. The fluorine gel 61 can improve the durability by preventing the piezoelectric vibrator 30 from being deteriorated due to water immersion without inhibiting the deformation of the piezoelectric vibrator 30.

  As described above, each drive terminal 39 and each wiring terminal 44 are joined at once using the anisotropic conductive film 48 to improve the productivity of the recording head 1 and to penetrate the flexible cable 18. By filling the space 49 containing the piezoelectric vibrator 30 through the hole 60 with the fluorine gel 61, the recording head 1 having high durability can be obtained.

  When the flexible cable 18 is joined to the actuator member 4, the double-sided tape 47 is disposed on the actuator member 4 so as to surround the piezoelectric vibrators 30 arranged in a row, while the two rows of drive terminals 39 are entirely disposed. The anisotropic conductive film 48 is placed on the drive terminal 39 so as to cover it. Then, the flexible cable 18 is placed on the actuator member 4 so that each wiring terminal 44 corresponds to each driving terminal 39 through the anisotropic conductive film 48. Next, the flexible cable 18 is pressed to the actuator member 4 side, and the anisotropic conductive film 48 is heated to electrically join each drive terminal 39 and each wiring terminal 44. Finally, the fluorine gel 61 is injected from the through hole 60a or the through hole 60b. In the present embodiment, of the two through holes 60, the fluorine gel 61 is injected from the through hole 60a using the through hole 60a provided in the flexible cable 18 as an injection port, and the through hole 60b provided in the double-sided tape 47 is formed into a space. 49 is a discharge port for discharging the air in 49. Thereby, the fluorine gel 61 can be filled in the space 49 without generating bubbles. The through hole 60b can be used as an inlet and the through hole 60a can be used as an exhaust port.

  The flow path unit 5 includes an ink supply port 22 that functions as an orifice and a supply port plate 24 in which a through hole that is a part of the nozzle communication port 23 is formed, and a reservoir 25 that is supplied with ink from the ink supply needle 2 side. (Common liquid chamber) and a reservoir plate 26 in which a through-hole serving as a part of the nozzle communication port 23 is formed, and the nozzle plate 8. The flow path unit 5 is configured such that the nozzle plate 8 is disposed on one surface of the reservoir plate 26 and the supply port plate 24 is disposed on the other surface, and these members are joined together by a heat welding film or the like. ing. The flow path unit 5 forms an ink flow path (liquid flow path) from the reservoir 25 to the nozzle opening 19.

  The actuator member 4 includes a pressure chamber plate 29 having a through hole serving as a pressure chamber 28, a plurality of piezoelectric vibrators 30 mounted side by side, a vibrator plate 31 that partitions a part of the pressure chamber 28, and a supply A communication port plate 34 in which a communication hole serving as the side communication port 32 and a communication hole serving as the nozzle communication port 23 are formed is provided in a stacked state. The pressure chamber plate 29, the vibrator plate 31, and the communication port plate 34 are made of ceramics such as alumina and zirconium oxide, and are integrated by firing.

  The pressure chamber 28 is a hollow space that is elongated in a direction orthogonal to the nozzle row, and a plurality of pressure chambers 28 are formed corresponding to the nozzle openings 19. One end side of each pressure chamber 28 communicates with the reservoir 25 through the supply side communication port 32 and the ink supply port 22. The other end of the pressure chamber 28 opposite to the supply side communication port 32 communicates with the nozzle opening 19 through the nozzle communication port 23. A part of the pressure chamber 28, that is, a surface opposite to the communication port plate 34 is partitioned by the vibrator plate 31.

  In the present embodiment, the piezoelectric vibrator 30 that functions as a kind of pressure generating element is a so-called flexural mode piezoelectric vibrator that performs flexural vibration in response to an applied electric field. The layer 38 is formed in a sandwiched state. The piezoelectric vibrator 30 is formed on the surface of the vibrator plate 31 opposite to the pressure chamber 28 so as to cover the pressure chamber 28. That is, each piezoelectric vibrator 30 is arranged in the nozzle row direction corresponding to each pressure chamber 28. Here, the one located at the end of the piezoelectric vibrator array is not involved in the ejection of ink droplets. That is, the dummy vibrator is not driven without being supplied with a drive signal.

  The piezoelectric vibrator may be of a so-called double-chip type in which two piezoelectric layers are sandwiched between a common electrode and two upper and lower drive electrodes.

  The drive terminal 39 is electrically connected to the drive electrode 36 of the piezoelectric vibrator 30. The common electrode 37 is electrically connected to the common ground terminal 41 (see FIG. 5) through a common trunk electrode (not shown).

  4 is a plan view for explaining the arrangement of drive terminals in the actuator member, FIG. 5 is an enlarged view of region A in FIG. 4, and FIG. 6 is an enlarged view of region B in FIG. 4 to 6 mainly show the drive terminal 39, and the piezoelectric vibrator 30 is not shown for convenience.

  As shown in these drawings, each drive terminal 39 is arranged in the nozzle row direction to form a drive terminal row 40, and this drive terminal row 40 is arranged in the width direction of the actuator member 4 (in the nozzle row direction). Two rows are formed near the center in the (perpendicular direction).

  As shown in FIGS. 5 and 6, common ground terminals 41 are provided on both sides in the drive terminal row direction. The common ground terminal 41 is a portion that is electrically connected to the common electrode 37 of the piezoelectric vibrator 30 through the common trunk electrode and is connected to the ground terminal (not shown) of the flexible cable 18. In the present embodiment, the first and second terminals from one end (area B) of each drive terminal row 40 and the first to third terminals from the other end (area A) are respectively connected to the common ground terminal 41. It has become. The drive terminal 39 and the common ground terminal 41 are made of a metal material such as silver, and are formed on the surface of the actuator member 4 by screen printing in the present embodiment.

  When a drive signal is supplied to the drive electrode 36 through the drive terminal 39, an electric field corresponding to the potential difference is generated between the drive electrode 36 and the common electrode 37. This electric field is applied to the piezoelectric layer 38, and the piezoelectric layer 38 bends and deforms according to the strength of the applied electric field. That is, as the potential of the drive signal supplied to the drive electrode 36 is increased, the piezoelectric layer 38 is displaced closer to the flow path unit 5 and the pressure chamber plate 29 is deformed so as to reduce the volume of the pressure chamber 28. Let On the other hand, the lower the potential of the drive signal supplied to the drive electrode 36, the more the piezoelectric layer 38 is displaced away from the flow path unit 5, and the pressure chamber plate 29 is increased so as to increase the volume of the pressure chamber 28. Deform. By driving the piezoelectric vibrator 30 as described above, the pressure chamber 28 contracts or expands, thereby causing a pressure fluctuation in the ink in the pressure chamber 28. By utilizing this pressure fluctuation, the ink in the pressure chamber 28 can be ejected from the nozzle opening 19 as ink droplets.

(Other embodiments)
FIG. 7 is a plan view of an actuator member and a flexible cable according to another embodiment. In the present embodiment, the double-sided tape 47 is provided with through holes 60a and 0b. The through hole 60 a is provided at a position corresponding to the fourth surface S 4 with respect to the space 49, and the through hole 60 b is provided at a position corresponding to the second surface S 2 with respect to the space 49 on different surfaces. In the present embodiment, the fluorine gel 61 is injected from the through hole 60 a using the through hole 60 a as an injection port, and the through hole 60 b is used as an exhaust port for discharging the air in the space 49. Even in this case, the fluorine gel 61 can be filled into the space 49 without generating bubbles. The through hole 60b can be used as an inlet and the through hole 60a can be used as an exhaust port.

  In the description of the above embodiment, the positions where the through holes 60a and 60b are provided are provided on the first surface S1 and the second surface S2 or the second surface S2 and the fourth surface S4, but the present invention is not limited to this. The first surface S1 to the sixth surface S6 can be appropriately combined and set.

  In the above description, the recording head 1 is described as an example of the liquid ejecting head, but the present invention can also be applied to other liquid ejecting heads. For example, a color material ejecting head used for manufacturing a color filter such as a liquid crystal display, an electrode material ejecting head used for forming an electrode such as an organic EL (Electro Luminescence) display, FED (field emission display), a biochip (biochemical element) The present invention can also be applied to bioorganic matter ejecting heads and the like used in the production of

FIG. 3 is an exploded perspective view illustrating a configuration of a recording head. The top view of the actuator member and flexible cable in 1st Embodiment. FIG. 3 is a cross-sectional view of a main part of the head unit in the first embodiment. The top view of an actuator member. The enlarged view of the area | region A in FIG. The enlarged view of the area | region B in FIG. The top view of the actuator member and flexible cable in other embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Recording head, 4 ... Actuator member, 5 ... Flow path unit, 6 ... Head unit, 18 ... Flexible cable as a film member, 30 ... Piezoelectric vibrator as a pressure generating element, 39 ... Drive terminal, 40 ... Drive terminal Rows 44, wiring terminals, 47, anisotropic conductive film as a conductive member, 49, space, 60, 60a, 60b, through holes, 61, fluorine gel as a waterproof member, S1 to S6, first surface -Sixth surface.

Claims (7)

A pressure chamber that discharges the internal liquid through the nozzle opening due to pressure fluctuations, and a pressure signal that is deformed by a drive signal that is disposed in correspondence with the pressure chambers and that is supplied via a drive terminal. A liquid ejecting head in which one set is formed of two rows formed by arranging actuator members each having a pressure generating element for generating
The drive terminal is disposed in a region between two rows of pressure generating elements;
A drive circuit for the actuator members in each row is mounted, and a drive signal output from the drive circuit is transmitted via a wiring terminal joined to each drive terminal so as to straddle the actuator members. The drive terminal and the wiring terminal are joined by interposing a conductive member therebetween, while the pressure generating element is interposed between the actuator member and the film member. By providing an adhesive member so as to surround, a space containing the pressure generating element is formed,
Each of the members corresponding to two different surfaces among the members corresponding to different surfaces in the space formed by the members is provided with a through hole communicating with the space.
The liquid ejecting head according to claim 1, wherein the space is filled with a waterproof member that does not hinder deformation of the pressure generating element and has hydrophobicity. The liquid ejecting head according to claim 1,
The liquid ejecting head, wherein the through hole is provided in the actuator member and the adhesive member corresponding to different surfaces of the space. The liquid ejecting head according to claim 1,
The liquid ejecting head according to claim 1, wherein the through hole is provided in the adhesive member corresponding to a different surface of the space. In the liquid jet head according to any one of claims 1 to 3,
The liquid ejecting head according to claim 1, wherein each of the through holes is provided at an end portion of each of the members so as to be spaced apart from each other. A pressure chamber that discharges the internal liquid through the nozzle opening due to pressure fluctuations, and a pressure signal that is deformed by a drive signal that is disposed in correspondence with the pressure chambers and that is supplied via a drive terminal. A method of manufacturing a liquid jet head in which one set is formed by two rows formed by arranging actuator members having pressure generating elements that are arranged in one direction,
The drive terminals are disposed in a region between two rows of the pressure generating elements, and an adhesive member is disposed on the actuator member so as to surround the pressure generating elements, thereby driving the actuator members of the respective rows. The film member having each wiring terminal connected to the circuit is bonded to the actuator member through the conductive member and the wiring terminal and the driving terminal, and the film member and the adhesive member are bonded to each other. Forming a space containing the pressure generating element,
Of the members corresponding to different surfaces in the space formed by the members, the pressure generating element via a through hole provided in each of the members corresponding to two different surfaces. A method of manufacturing a liquid ejecting head, wherein a waterproof member that does not hinder the deformation of the liquid and has hydrophobicity is injected into the space. The method of manufacturing a liquid jet head according to claim 5,
When the waterproof member is injected into the space, the waterproof member is injected from one through hole, and the space is filled with the waterproof member so that air in the space is discharged from the other through hole. A method of manufacturing a liquid ejecting head. In the manufacturing method of the liquid jet head according to claim 5 or 6,
Injecting the waterproof member from one of the through holes provided in the film member and filling the waterproof member so as to discharge air in the space from the other through hole provided in the adhesive member. A method of manufacturing a liquid ejecting head.

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