JPH08309987A - Ink jet head, ink jet apparatus using the same and production of ink jet head - Google Patents

Abstract

PURPOSE: To obtain an ink jet head good in yield and capable of being made long in low cost and to provide an ink jet apparatus using the same. CONSTITUTION: A grooved plate 11 having a large number of ink emitting grooves constituting a large number of ink passages arranged to both surfaces thereof and a plurality of element substrates 14, 15 each having a plurality of energy generation elements for emitting ink provided thereto are provided and the element substrates 14, 15 are bonded to both surfaces of the grooved plate 11 so that the energy generation elements of the element substrates 14, 15 face to the ink emitting grooves of the grooved plate 11.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet head capable of high speed recording, high density recording or gradation recording, an ink jet apparatus using the same, and a method of manufacturing an ink jet head.

"Print" used in this specification
The term includes printing techniques such as textile printing and printing of articles other than paper.

[0003]

2. Description of the Related Art In recent years, as the amount of information has increased, there has been a demand for higher speed printers. For the purpose of increasing the speed of the printer, the relatively long inkjet head has various advantages over the relatively short inkjet head.

The conventional long ink jet head is manufactured by arranging short ink jet heads in the longitudinal direction by a required printing width and joining them. As shown in FIG. 11 showing the appearance of such a conventional long inkjet head, a grooved plate 2 having ink ejection grooves 1 arranged in parallel at a predetermined interval on the surface of a silicon wafer or the like.
And an element substrate 3 formed of a silicon wafer or the like, in which energy generating elements (not shown) facing each ink ejection groove 1 are arranged at a predetermined interval, are superposed, and these are integrally bonded to each other to form a single base plate 4. Are arranged in a line, and the adjacent grooved plates 2 and the element substrate 3 are bonded to each other, and these and the base plate 4 are integrally bonded.

Further, a structure in which the grooved plate 2 is composed of one long material and a plurality of element substrates 3 is used is also known from, for example, Japanese Patent Laid-Open No. 3-184860.

Further, in order to easily and accurately align the grooved plate 2 and the element substrate 3, as described in, for example, Japanese Patent Application Laid-Open No. 62-55155, a grooved plate is used. It has been proposed that a concave and convex portion for positioning which is mutually engaged with the element substrate is formed.

[0007]

In the conventional method for manufacturing a long ink jet head shown in FIG. 11, the base plate 4 is used.
On the other hand, it is not possible to completely eliminate the positional deviation of the unit including the pair of grooved plates 2 and the element substrate 3, so that the ink ejection direction may vary, and in particular, the ink may be discharged between adjacent units. There is a problem that the intervals of the ejection grooves 1 vary. Further, it is difficult to realize high density recording and gradation recording at low cost.

In the method disclosed in Japanese Patent Laid-Open No. 184860/1993, in which the grooved plate is composed of one long member, it is possible to avoid the above-mentioned decrease in yield. For higher head density,
Similar to the other conventional ones mentioned above, it is difficult to deal with.

On the other hand, in the case of the method of forming the concave-convex portion for positioning disclosed in Japanese Patent Laid-Open No. 62-55155 and the like on the grooved plate and the element substrate, the fitting may occur depending on the variation in the dimensions of the concave-convex portion. There is a possibility that something cannot happen. If it is attempted to forcefully fit in such a state, the grooved plate or the element substrate may be partially damaged and may enter the ink ejection groove. Further, if the grooved plate and the element substrate are fitted together, it becomes difficult to finely adjust the relative positions thereof, and the surface of the grooved plate on which the ink ejection grooves are formed and the energy generation of the element substrate are generated. Since it is necessary to form the uneven portion on the surface on which the element is provided, it is difficult to increase the density of the ink ejection groove.

[0010]

SUMMARY OF THE INVENTION An object of the present invention is to provide an ink jet head capable of high speed recording, high density recording or gradation recording, and having a high yield and a low cost, an ink jet head using the same, and an ink jet device. It is to provide a method of manufacturing a head.

[0011]

According to a first aspect of the present invention, a grooved plate in which a plurality of grooves forming a plurality of ink flow paths are arranged on both sides and an energy generating element for ejecting ink are respectively provided. A plurality of element substrates provided, and the element substrates are bonded to both sides of the grooved plate so that the energy generating elements of these element substrates respectively face the grooves of the grooved plate. It is a characteristic inkjet head.

According to the second aspect of the present invention, a grooved plate in which a plurality of grooves forming a plurality of ink flow paths are arranged on both sides, and a plurality of energy generating elements for ejecting ink are respectively provided. An inkjet head having a plurality of element substrates, wherein the element substrates are bonded to both sides of the grooved plate so that the energy generating elements of these element substrates respectively face the grooves of the grooved plate, and the inkjet head An inkjet device, comprising: a unit that faces a head and that conveys a print medium on which ink ejected from the inkjet head is printed.

In these two forms, the arrangement positions of the grooves are shifted from each other on both sides of the grooved plate, or the cross-sectional areas of a plurality of grooves arranged on one surface of the grooved plate and the other are arranged. The cross-sectional areas of the plurality of grooves arranged on the surface are different from each other, or the plurality of grooves are
It is effective to arrange them in parallel with each other at a predetermined interval. Also, a plurality of the element substrates may be bonded to one surface of the grooved plate, the grooved plate is a silicon single crystal plate, and the plurality of grooves arranged on both sides thereof are anisotropic. It is also preferable to form by etching.

On the other hand, according to a third aspect of the present invention, a grooved plate in which a plurality of grooves forming a plurality of ink flow paths are arranged on both sides, and a plurality of the grooves are superposed on both sides of the grooved plate, respectively. And a plurality of element substrates each provided with a plurality of energy generating elements for ejecting ink facing the groove. A step of manufacturing an ingot of crystalline silicon, a step of detecting a <100> direction of the ingot, and a step of cutting the ingot along a longitudinal direction so that a {100} plane appears based on the <100> direction. And a step of forming the grooves along the longitudinal direction of the two {100} planes of the silicon single crystal plate obtained thereby. In the manufacturing method of the ink jet head is characterized in that comprises.

Here, it is preferable to form the plurality of grooves by anisotropic etching.

[0016]

According to the present invention, by joining the element substrates to both sides of one grooved plate, the grooves on both sides of the grooved plate respectively function as ink passages. Then, by individually operating each energy generating element of the element substrate, the ink located in the groove facing these energy generating elements is ejected from the tip of the ink passage serving as the ink ejection port.

By displacing the arrangement positions of the grooves arranged on both sides of the grooved plate with respect to each other, the apparent distance between the ink ejection ports can be made equal to the arrangement distance between the grooves on one surface of the grooved plate or the grooves on the other surface. It will be half.

By changing the cross-sectional area of the groove on one surface of the grooved plate and the cross-sectional area of the other groove, the size of the ink droplets ejected from the groove side of the one surface and the other surface can be changed. The size of the ink droplet ejected from the groove side is different.

[0019]

EXAMPLES Examples of an ink jet head according to the present invention will be described in detail with reference to FIGS.

As shown in FIG. 1 showing the appearance of the present embodiment, FIG. 2 showing the appearance of the grooved plate portion thereof, and FIG. 3 showing the appearance of the element substrate portion, one grooved plate 11 is provided. ,
A pair of upper and lower joint surfaces 12 and 13 are formed, and a first element substrate 14 to be described later is attached to these joint surfaces 12 and 13.
And the second element substrate 15 are superposed on each other, and the grooved plate 11 and the element substrates 14 and 15 are bonded to each other.

On one joint surface 12 of the grooved plate 11, V-shaped first ink ejection grooves 16 are formed which are arranged in parallel with each other at a predetermined interval along the longitudinal direction of the grooved plate 11. ing. Similarly, on the other joint surface 13 of the grooved plate 11, V-shaped second ink ejection grooves 17 are formed which are arranged parallel to each other at a predetermined interval along the longitudinal direction of the grooved plate 11. ing. In the present embodiment, the first ink ejection groove 16 and the second ink ejection groove 17 have the same cross-sectional shape, cross-sectional area, and the like, and their intervals are also set equal. Further, the first ink ejection groove 16 and the second ink ejection groove 17 are opposite to each other in the direction perpendicular to the joint surfaces 12 and 13.

Further, on the plurality of first element substrates 14 stacked along the longitudinal direction of the grooved plate 11, a plurality of first energy generating elements 18 facing the first ink ejection grooves 16, for example, well-known elements. Piezoelectric elements, heating elements, etc. are formed at predetermined intervals, and the plurality of second element substrates 15 stacked along the longitudinal direction of the grooved plate 11 also have exactly the same structure. A plurality of second energy generating elements (not shown) facing the second ink ejection groove 17 are formed at predetermined intervals. These first element substrates 1
4 and the second element substrate 15 are superposed on the joint surfaces 12 and 13 of the grooved plate 11 so that these energy generating elements 18 face the ink ejection grooves 16 and 17, and the ink ejection grooves 16 and 17 are closed. The ink passages are formed in the front surface of the grooved plate 11, and the ink discharge ports 19 are
To open.

As shown in FIGS. 4 to 6 showing the manufacturing procedure of the grooved plate 11 in this embodiment, the thermal oxide film 22 having a thickness of about 5000 Å is formed on both sides of the single crystal silicon wafer 21 to be the grooved plate 11. Of the resist layer 23 having a pattern corresponding to the ink ejection grooves 16 and 17 on both surfaces of the resist layer 23.
Are formed by photoetching (see FIG. 4). next,
After the portion of the thermal oxide film 22 without the resist layer 23 is removed by dry etching, the resist layer 23 is peeled off, and the portion of the thermal oxide film 22 corresponding to the ink ejection grooves 16 and 17 is removed in a pattern. A crystalline silicon wafer 21 is obtained (see FIG. 5). Then, the single crystal silicon wafer 21 is anisotropically etched with an aqueous solution of potassium hydroxide to form the ink ejection grooves 16 and 17 on both surfaces of the single crystal silicon wafer 21 (see FIG. 6), and then the thermal oxide film 22 is formed. After removal, the grooved plate 11 as shown in FIG. 2 is completed.

As the single crystal silicon wafer 21 which becomes the above-mentioned grooved plate 11, it is preferable to use the one manufactured by the procedure shown in FIGS. 7 and 8. That is, <110
Using a single crystal silicon ingot by the CZ (Czochralski: pulling up) method with the pulling axis in the> direction, the single crystal silicon ingot is cut to a predetermined length in the direction perpendicular to the pulling axis and the outer peripheral surface is shaped. A columnar single crystal silicon ingot 31 is obtained (see FIG. 7). Next, by the X-ray diffraction method or the like, {10
0} plane is obtained, and this single crystal silicon ingot 31 is sliced as shown by the chain double-dashed line in FIG. 7 to obtain a single crystal silicon wafer 21 as shown in FIG. The single crystal silicon wafer 21 thus obtained has a rectangular plate shape having a {100} plane perpendicular to the <100> direction.

The longitudinal direction (vertical direction in the figure) of this rectangular single crystal silicon wafer 21 is <110> of the pulling axis.
Since it overlaps with the direction, the length of the single crystal silicon wafer 21 can be freely set according to the length of the prepared single crystal silicon ingot, which corresponds to the grooved plate 11 for a long inkjet head. A long single crystal silicon wafer 21 can be manufactured. Moreover, the ink ejection groove 1 by anisotropic etching using potassium hydroxide is used.
There is an advantage that the formation of 6 and 17 can be performed as usual. That is, since the surface of the single crystal silicon wafer 21 which becomes the pair of bonding surfaces 12 and 13 of the grooved plate 11 is the {100} surface perpendicular to the <100> direction, it is formed of potassium hydroxide. On the surfaces of the ink ejection grooves 16 and 17, a {111} plane having a V-shaped cross section appears.

A plurality of element substrates 1 for the grooved plate 11
When bonding 4 and 15, it is possible to align the element substrates 14 and 15 one by one with respect to the grooved plate 11 and then bond them. Alternatively, the grooved plates 11 may be superposed on each other and integrally bonded. In addition, since the distance from the energy generating element 18 to the ink ejection port 19 is an important factor in ink ejection performance, the distance from the energy generating element 18 to the ink ejection port 19 is set in advance more than the final dimension. It is preferable to set the size to be about 100 μm larger, and after joining the grooved plate 11 and the element substrates 14 and 15, the tip surface of the ink jet head facing the ink ejection port 19 is finished and cut to the final dimension. .

As described above, while the grooved plate 11 which is easier to manufacture a long material than the element substrates 14 and 15 is formed of a single long material, the energy generating element 18 is provided for the purpose of avoiding a decrease in yield. By using the plurality of element substrates 14 and 15 provided one by one, a long inkjet head can be manufactured with high yield and at low cost. Further, since the two rows of inkjet ejection ports 19 are formed side by side on one grooved plate 11, recording can be performed at a speed twice that of the conventional one.

Incidentally, in the conventional ink jet head as shown in FIG. 11, there is a possibility that "streaks" due to the poor positioning accuracy of the bonding may be observed at the boundary of the short ink jet head unit during recording. In the ink jet head of this embodiment, since the grooved plate 11 is formed as a single sheet, there is no possibility of such "streaking". In addition, in the above-described embodiment, the first ink ejection groove 19 and the second ink ejection groove 19 are made to face each other in the direction perpendicular to the joint surfaces 12 and 13 of the grooved plate 11. However, it is also possible to shift these facing states.

As shown in FIG. 9 showing the appearance of another embodiment of the ink jet head according to the present invention, a pair of upper and lower joint surfaces 42 and 43 are formed on one grooved plate 41. The first element substrate 44 and the second element substrate 45 are superposed on the joint surfaces 42 and 43, respectively, and the grooved plate 41 and the element substrates 44 and 45 are joined to each other.

On one joint surface 42 of the grooved plate 41, there are formed V-shaped first ink discharge grooves 46 arranged in parallel with each other at a predetermined interval along the longitudinal direction of the grooved plate 41. ing. Similarly, on the other joint surface 43 of the grooved plate 41, V-shaped second ink ejection grooves 47 arranged in parallel with each other at a predetermined interval along the longitudinal direction of the grooved plate 41 are formed. ing. In the present embodiment, the first ink ejection groove 46 and the second ink ejection groove 47 have the same cross-sectional shape, cross-sectional area, and the like, and their intervals are also equal. However, they are in a state of being displaced from each other in parallel with each other by half the distance along the arrangement direction.

In addition, a plurality of first energy generating elements (not shown) facing the first ink ejection groove 46 are predetermined on the plurality of first element substrates 44 stacked along the longitudinal direction of the grooved plate 11. A plurality of second element substrates 45, which are formed at intervals and are stacked in the longitudinal direction of the grooved plates 41, have the same structure and face the second ink ejection groove 47. A plurality of second energy generating elements that are not formed are formed at predetermined intervals.
These first element substrate 44 and second element substrate 45
These energy generating elements are the ink discharge grooves 46,
They are superposed on the joint surfaces 42 and 43 of the grooved plate 41 so as to face 47 and form ink passages, respectively.

In the present embodiment, since the first ink ejection groove 46 and the second ink ejection groove 47 are displaced by a half pitch along the arrangement direction of these, the ink at the tip of the ink passage is The interval between the ejection openings is twice as high as that of the conventional one, and a higher-definition image than that of the conventional one can be obtained.

In the above two embodiments, the cross-sectional area of the first ink ejection groove 19 and the second ink ejection groove 19 are used.
Although the cross-sectional areas of 1 and 2 are set equal to each other, these cross-sectional areas may be different from each other.

As shown in FIG. 10, which shows the appearance of another embodiment of the ink jet head according to the present invention,
The grooved plate 51 has a pair of upper and lower joint surfaces 52, 53.
Are formed, the first element substrate 54 and the second element substrate 55 are superposed on the joint surfaces 52, 53, respectively, and the grooved plate 51 and the element substrates 54, 55 are formed.
And are joined together.

On one joint surface 52 of the grooved plate 51, there are formed V-shaped first ink ejection grooves 56 arranged in parallel with each other at a predetermined interval along the longitudinal direction of the grooved plate 51. ing. Similarly, on the other joint surface 53 of the grooved plate 51, V-shaped second ink ejection grooves 57 are formed which are arranged in parallel with each other at a predetermined interval along the longitudinal direction of the grooved plate 51. ing. In the present embodiment, the first ink ejection groove 56 and the second ink ejection groove 57 are set to have the same interval. However, the sectional area of the second ink ejection groove 57 is 1 with respect to the sectional area of the first ink ejection groove 56.
It is set to a small value of about / 4, and is in a state of being displaced from each other in parallel with each other by half of the interval along the arrangement direction.

The other structure is almost the same as that of the embodiment shown in FIG. 9. By changing the sectional areas of the first ink ejection groove 56 and the second ink ejection groove 57 in this way,
As a result of being able to change the size of the ink droplets between them, it is possible to perform recording with gradation.

In the above-mentioned embodiment, the ink jet apparatus using the electrothermal conversion element for generating heat energy as the energy generating element has been described in order to achieve the high density and high definition of the print. It can also be applied to an inkjet device using an electromechanical conversion element.

Regarding the typical constitution and principle of an ink jet device using the electrothermal converting element, for example, US Pat. No. 4,723,129 and US Pat.
What is done using the basic principles disclosed in 0,796 is preferred. This method can be applied to both the so-called on-demand type and the continuous type, but in particular, in the case of the on-demand type, it is arranged corresponding to the sheet holding the ink or the ink passage. By applying at least one drive signal to the electrothermal converter, which corresponds to the recorded information and causes a rapid temperature rise exceeding nucleate boiling, thermal energy is generated in the electrothermal converter, and heat of the inkjet head is generated. This is effective because film boiling is caused on the working surface, and as a result, bubbles in the ink can be formed in a one-to-one correspondence with this drive signal. By the growth and contraction of the bubbles, the ink is ejected from the ejection port to form at least one ink droplet. It is more preferable to make this drive signal into a pulse shape, because the bubble growth and contraction are immediately and appropriately performed, so that it is possible to discharge the ink with excellent responsiveness. As the pulse-shaped driving signal, those described in US Pat. No. 4,463,359 and US Pat. No. 4,345,262 are suitable.

If the conditions described in US Pat. No. 4,313,124, which is an invention relating to the rate of temperature rise on the above-mentioned heat acting surface, are adopted, more excellent recording can be performed.

As the constitution of the ink jet head, in addition to the combination constitution of the discharge port and the ink passage and the electrothermal converter (the straight ink passage or the ink passage bent at a right angle) as disclosed in the above-mentioned respective specifications. U.S. Pat. No. 4,558,333 or 4,45,33, which discloses a configuration in which a heat acting portion is arranged in a bent portion of an ink passage.
The structure using the specification of No. 9,600 is also included in the present invention. In addition, Japanese Unexamined Patent Publication No. 59-123670 discloses a configuration in which a common slit is used as a discharge portion of the electrothermal converter for a plurality of electrothermal converters, and an opening for absorbing a pressure wave of thermal energy. The effect of the present invention is effective even if the configuration corresponding to Japanese Patent Laid-Open No. 59-138461, which discloses a configuration in which the above is associated with the discharge portion, is effective. That is, according to the present invention, recording can be surely and efficiently performed regardless of the form of the inkjet head.

Furthermore, in the above-described embodiments of the present invention, the ink is described as a liquid, but an ink that solidifies at room temperature or lower and that softens or liquefies at room temperature may be used. Or, in the ink jet system, it is common to control the temperature of the ink itself within a range of 30 ° C. or higher and 70 ° C. or lower to control the temperature of the ink so that the viscosity of the ink is within a stable ejection range. A liquid ink may be used. In addition, the temperature rise due to thermal energy is positively prevented by using it as the energy of the state change of the ink from the solid state to the liquid state, or in order to prevent the evaporation of the ink, it is solidified and heated in the standing state. You may use the ink liquefied by.

In any case, when heat energy is applied in accordance with the recording signal, the ink is liquefied and the liquid ink is ejected, or when it reaches the recording medium, it begins to solidify. The present invention can also be applied to the case of using an ink that has a property of liquefying only when energy is applied. The ink in such a case is disclosed in JP-A-54-
As described in JP-A-56847 or JP-A-60-71260, a mode in which it is held as a liquid or a solid in the concave portion or through hole of the porous sheet and faces the electrothermal converter. Also good. In the present invention, the most effective one for each of the above-mentioned inks is to execute the above-mentioned film boiling method.

[0043]

According to the present invention, the grooved plate is made of one long material, and the element substrates are bonded to both surfaces of the grooved plate, so that a long ink jet capable of high-speed recording. The head and the inkjet device using the same can be realized with high yield.

Further, the arrangement position of the first ink ejection groove,
By displacing the arrangement position of the second ink ejection groove from each other, the ink ejection grooves are arranged at an apparent double density as compared with the case of only the first ink ejection groove or the second ink ejection groove. Then, a high-definition image can be obtained.

Furthermore, the cross-sectional area of the first ink ejection groove,
The size of the ink droplet ejected from the first ink ejection groove and the size of the ink droplet ejected from the second ink ejection groove are changed by mutually changing the cross-sectional area of the second ink ejection groove. This makes it possible to perform recording with gradation.

[Brief description of drawings]

FIG. 1 is a perspective view showing an external appearance of an embodiment of an inkjet head according to the present invention in a broken state.

FIG. 2 is a perspective view showing an external appearance of a grooved plate in the embodiment shown in FIG. 1 in a fractured state.

FIG. 3 is a perspective view showing the outer appearance of one element substrate in the embodiment shown in FIG.

FIG. 4 is a work process diagram showing the manufacturing procedure of the grooved plate together with FIGS. 5 and 6.

FIG. 5 is a working process diagram showing the manufacturing procedure of the grooved plate together with FIGS. 4 and 6.

FIG. 6 is a work process diagram showing a procedure for manufacturing a grooved plate, together with FIGS. 4 and 5.

FIG. 7 is a principle diagram showing a manufacturing procedure of a silicon single crystal plate to be a grooved plate together with FIG.

FIG. 8 is a principle diagram showing a manufacturing procedure of a silicon single crystal plate to be a grooved plate together with FIG. 7.

FIG. 9 is a perspective view showing an appearance of another embodiment of the inkjet head according to the present invention in a broken state.

FIG. 10 is a perspective view showing an appearance of another embodiment of the inkjet head according to the present invention in a broken state.

FIG. 11 is a perspective view showing an external appearance of a conventional long inkjet head in a broken state.

[Explanation of Codes] 11 Grooved Plate 12, 13 Bonding Surface 14 First Element Substrate 15 Second Element Substrate 16 First Ink Ejection Groove 17 Second Ink Ejection Groove 18 Energy Generating Element 19 Ink Ejection Port 21 Single Crystal silicon wafer 22 Thermal oxide film 23 Resist layer 31 Single crystal silicon ingot 41 Grooved plate 42, 43 Bonding surface 44 First element substrate 45 Second element substrate 46 First ink ejection groove 47 Second ink ejection groove 47 51 grooved plates 52, 53 bonding surface 54 first element substrate 55 second element substrate 56 first ink ejection groove 57 second ink ejection groove

Claims (14)

[Claims] 1. A grooved plate in which a plurality of grooves forming a plurality of ink flow paths are arranged on both surfaces, and a plurality of element substrates each provided with a plurality of energy generating elements for ejecting ink. An ink jet head characterized in that the element substrates are bonded to both sides of the grooved plate so that the energy generating elements of these element substrates respectively face the grooves of the grooved plate. 2. The ink jet head according to claim 1, wherein the arrangement positions of the grooves are offset from each other on both sides of the grooved plate. 3. The cross-sectional areas of the plurality of grooves arranged on one surface of the grooved plate and the cross-sectional areas of the plurality of grooves arranged on the other surface of the grooved plate are different from each other. The inkjet head described in 1. 4. The inkjet head according to claim 1, wherein the plurality of grooves are arranged in parallel with each other at a predetermined interval. 5. The ink jet head according to claim 1, wherein a plurality of the element substrates are joined to one surface of the grooved plate. 6. The grooved plate is a silicon single crystal plate,
The plurality of grooves arranged on both surfaces thereof are formed by anisotropic etching, respectively.
The inkjet head described in any one of 5. 7. A grooved plate in which a plurality of grooves forming a plurality of ink flow paths are arranged on both surfaces, and a plurality of element substrates each provided with a plurality of energy generating elements for ejecting ink. An inkjet head in which the element substrates are joined to both sides of the grooved plate so that the energy generating elements of these element substrates respectively face the grooves of the grooved plate; An inkjet device, comprising: a unit that conveys a print medium on which the ejected ink is printed. 8. The inkjet device according to claim 7, wherein the arrangement positions of the grooves are shifted from each other on both sides of the grooved plate. 9. The cross-sectional area of the plurality of grooves arranged on one surface of the grooved plate and the cross-sectional area of the plurality of grooves arranged on the other surface of the grooved plate are different from each other. The inkjet device described in 1. 10. The plurality of grooves are arranged in parallel with each other at a predetermined interval.
The inkjet device described in any one of 1. 11. The ink jet apparatus according to claim 7, wherein a plurality of the element substrates are bonded to one surface of the grooved plate. 12. The grooved plate is a silicon single crystal plate, and the plurality of grooves arranged on both surfaces of the plate are formed by anisotropic etching, respectively. The inkjet device described in 1. 13. A grooved plate in which a plurality of grooves forming a plurality of ink flow paths are arranged on both sides, and a plurality of the grooves are overlapped on both sides of the grooved plate to cover the plurality of grooves and face the grooves. In an ink jet head having a plurality of element substrates each provided with a plurality of energy generating elements for ejecting ink, a step of manufacturing a single crystal silicon ingot such that the longitudinal direction is the <110> direction, The step of detecting the <100> direction of the ingot, the step of cutting the ingot along the longitudinal direction so that the {100} plane appears based on the <100> direction, and the silicon monolith obtained thereby. Two crystal plates {10
And a step of forming the grooves along the longitudinal direction of the 0} plane, respectively. 14. The method of manufacturing an ink jet head according to claim 13, wherein the plurality of grooves are formed by anisotropic etching.