JPS63265647A - Manufacture of on-demand type ink jet printer head - Google Patents
Manufacture of on-demand type ink jet printer headInfo
- Publication number
- JPS63265647A JPS63265647A JP3882988A JP3882988A JPS63265647A JP S63265647 A JPS63265647 A JP S63265647A JP 3882988 A JP3882988 A JP 3882988A JP 3882988 A JP3882988 A JP 3882988A JP S63265647 A JPS63265647 A JP S63265647A
- Authority
- JP
- Japan
- Prior art keywords
- stainless steel
- steel plate
- parts
- printer head
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 15
- 229910001220 stainless steel Inorganic materials 0.000 claims abstract description 33
- 239000010935 stainless steel Substances 0.000 claims abstract description 33
- 239000002184 metal Substances 0.000 claims abstract description 23
- 229910052751 metal Inorganic materials 0.000 claims abstract description 23
- 230000006835 compression Effects 0.000 claims abstract description 20
- 238000007906 compression Methods 0.000 claims abstract description 20
- 238000009792 diffusion process Methods 0.000 claims abstract description 19
- 238000000034 method Methods 0.000 claims abstract description 9
- 229920002120 photoresistant polymer Polymers 0.000 claims abstract description 8
- 239000011261 inert gas Substances 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 239000000758 substrate Substances 0.000 abstract description 26
- 238000007639 printing Methods 0.000 abstract description 14
- 150000002739 metals Chemical class 0.000 abstract description 5
- 239000011248 coating agent Substances 0.000 abstract 1
- 238000000576 coating method Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 239000000853 adhesive Substances 0.000 description 6
- 230000001070 adhesive effect Effects 0.000 description 6
- 238000005260 corrosion Methods 0.000 description 3
- 230000007797 corrosion Effects 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000007641 inkjet printing Methods 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 238000007429 general method Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1623—Manufacturing processes bonding and adhesion
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
【発明の詳細な説明】
本発明は、記録紙に必要な所だけインク粒を噴きつけて
印刷するオンディマンド型インクジエ・ントプリンター
のヘッドの製造方法に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for manufacturing a head for an on-demand type inkjet printer that prints by spraying ink droplets onto recording paper only where necessary.
従来のオンディマンド型インクジェットプリンターのヘ
ッドの製造は第１図に示すように、ガラス又はセラミッ
クの平滑基板１０に、インク供給室１１、圧縮室１２、
インク噴射ノズル１３、インク流通経路１４を腐食など
の手段により凹型に形成し、平滑基板１０を下板として
、その上に上板（第２図図示）を接着し、圧縮室（圧縮
により圧力を発生する圧力発生室）１２の上部に圧電素
子（第２図図示）をとりつけていた。第２図は、第１図
のＡ−Ａ’断面図の一部分で、２１は上板、２２は圧電
素子である。インク噴射ノズル１３は、幅が５０〜１１
００ａ、、Ｔ１１１食深さ２０〜６０μｍ程度のもので
あり、下板１０と上板２１の接着にエポキシ樹脂系接着
剤などの接着剤を使用していた。As shown in FIG. 1, the manufacturing of a conventional on-demand inkjet printer head consists of a smooth substrate 10 made of glass or ceramic, an ink supply chamber 11, a compression chamber 12,
The ink jet nozzle 13 and the ink flow path 14 are formed into a concave shape by corrosion or other means, the smooth substrate 10 is used as a lower plate, an upper plate (shown in FIG. 2) is adhered thereon, and a compression chamber (pressure is A piezoelectric element (shown in FIG. 2) was attached to the upper part of the pressure generating chamber (12). FIG. 2 is a part of the sectional view taken along the line AA' in FIG. 1, where 21 is an upper plate and 22 is a piezoelectric element. The ink jet nozzle 13 has a width of 50 to 11
00a, , T111 has a depth of about 20 to 60 μm, and an adhesive such as an epoxy resin adhesive is used to bond the lower plate 10 and the upper plate 21.
しかし、このように接着剤で上板２１と下板１０を接合
するのが接合の一般方法であったが、圧縮室の部分の上
板２１と下板１０も接着剤で接合されていると、印字指
令に応じて圧電素子に駆動信号が印加された場合、接着
剤により振動が吸収されてしまい、圧電素子の搭載され
た基板の急峻な振動が得られない、従って、圧縮室内の
インクの圧力変化も緩慢となり、連続してインクを噴射
する場合、印刷指令の時間間隔を小さくできず、印刷速
度が大巾に低下してしまう、また、基板の振動も緩慢な
ため、インクの噴射速度も低下し、記録に必要なインク
の噴射速度を確保するためには圧電素子の駆動エネルギ
ーを大きくしなくてはならないがこのようにすると、さ
らに印字指令の時間間隔を大きくしなくてはならず、印
字速度はさらに低下する。However, although the general method of joining was to join the upper plate 21 and the lower plate 10 with adhesive in this way, it is said that the upper plate 21 and the lower plate 10 in the compression chamber part are also joined with adhesive. When a drive signal is applied to the piezoelectric element in response to a printing command, the vibration is absorbed by the adhesive, making it impossible to obtain steep vibrations of the substrate on which the piezoelectric element is mounted. Pressure changes are also slow, and when ink is ejected continuously, the time interval between print commands cannot be made small, resulting in a significant drop in printing speed.Furthermore, the vibration of the substrate is also slow, so the ink ejection speed In order to secure the ink ejection speed necessary for recording, the driving energy of the piezoelectric element must be increased, but in this case, the time interval between printing commands must also be increased. , the printing speed will further decrease.
本発明はかかる欠点を除去し、上板と下板との密着接合
を確保し上記欠点を除去したオンディマンド型のインク
ジェットプリンターヘッドの製造方法を提供することを
目的とする。SUMMARY OF THE INVENTION An object of the present invention is to provide a method for manufacturing an on-demand inkjet printer head that eliminates the above drawbacks and ensures close contact between the upper and lower plates.
まず、本発明の製造方法に係るオンディマンド型のイン
クジェットプリンターヘッドは、溝が形成されたステン
レス板、前記ステンレス板に接合された平滑ステンレス
板、前記溝部に形成された圧縮室、前記溝部に形成され
前記圧縮室に連通ずる噴射ノズル、前記圧縮室に対応す
る前記ステンレス板上に搭載された圧電素子により構成
されたオンディマンド型のインクジェットプリンターヘ
ッドにおいて、少なくとも前記圧縮室に対応した部分の
前記平滑ステンレス板と前記溝の形成されたステンレス
板の接合が、直接又はインサート金属を介した金属同士
の拡散接合により接合されているものである。First, an on-demand inkjet printer head according to the manufacturing method of the present invention includes a stainless steel plate in which a groove is formed, a smooth stainless steel plate joined to the stainless steel plate, a compression chamber formed in the groove, and a compression chamber formed in the groove. In an on-demand inkjet printer head comprising an injection nozzle communicating with the compression chamber and a piezoelectric element mounted on the stainless steel plate corresponding to the compression chamber, the smooth stainless steel plate at least in a portion corresponding to the compression chamber. and the grooved stainless steel plate are joined by direct or metal-to-metal diffusion bonding via an insert metal.
そして、本発明のオンディマンド型のインクジェットプ
リンターヘッドの製造方法は、溝を形成したステンレス
板と平滑ステンレス板とを接合し、前記溝部に圧縮室を
形成すると共に前記圧縮室に連通した噴射ノズルを形成
し、前記圧縮室に対応する前記ステンレス板上に圧電素
子を搭載したオンディマンド型のインクジェットプリン
ターヘッドの製造方法において、 ゛
ステンレス板の表面を鏡面状にしてフォトレジスト膜を
塗布し所望のパターンで露光した後、前記露光に対応し
て腐食をおこないインク噴射ノズル部となる凹部を形成
することにより前記溝を形成したステンレス板を構成し
、表面が鏡面状に平滑化された前記平滑ステンレス板と
重ね熱と圧力による金属同士の拡散接合をおこなうこと
により前記溝を形成したステンレス板と前記平滑板とが
接合される工程をとることを特徴とする。なお、前記拡
散接合はイナートガス中で行なうとよい。In the method for manufacturing an on-demand inkjet printer head of the present invention, a grooved stainless steel plate and a smooth stainless steel plate are joined, a compression chamber is formed in the groove, and an injection nozzle communicating with the compression chamber is formed. In the method for manufacturing an on-demand inkjet printer head in which a piezoelectric element is mounted on the stainless steel plate corresponding to the compression chamber, the surface of the stainless steel plate is made mirror-like, coated with a photoresist film, and exposed in a desired pattern. After that, corrosion is performed in response to the exposure to form a concave portion that will become an ink jet nozzle portion, thereby forming a stainless steel plate with the grooves formed thereon, and stacking it on the smooth stainless steel plate whose surface has been smoothed to a mirror finish. The present invention is characterized by a step in which the grooved stainless steel plate and the smooth plate are joined by performing metal-to-metal diffusion bonding using heat and pressure. Note that the diffusion bonding is preferably performed in an inert gas.
上記本発明のオンディマンド型のイ、ンクジェットプリ
ンターヘッドを製造する具体的方法を第３図を用いて説
明する。第３図は本発明のオンディマンド型のインクジ
ェットプリンターヘッドの製造工程図である。ａに示す
工程は、表面を鏡面状にした金属基板４０にフォトレジ
スト膜４１を塗布したもので、次のｂに示す工程はある
所望のパターンで露光し、必要な部分だけレジストを残
し、それ以外の部分のレジストを除去するものである。A specific method for manufacturing the on-demand type inkjet printer head of the present invention will be described with reference to FIG. FIG. 3 is a manufacturing process diagram of the on-demand type inkjet printer head of the present invention. In the process shown in a, a photoresist film 41 is applied to a metal substrate 40 with a mirror-like surface.The next process shown in b is to expose the photoresist film 41 in a certain desired pattern, leaving only the necessary parts of the resist, and then This removes the resist from other parts.
次のＣに示す工程では、レジストのない部分が腐食され
、その部分に四部（インク噴出ノズル部）４３を形成し
、次のｄに示す工程でレジストをすべて剥離してはじめ
て下基板ができる。ｅに示す工程で下基板４０と表面が
鏡面状に平滑化された金属上基板４２の接合面を合わせ
、ガス圧力下のもとて熱をかけ拡散接合する。これによ
り、下基板４０と上基板４２は接合面で熱と圧力により
金属同士が分子拡散をおこし金属が溶融することなく接
着するため、インク噴出ノズル部４３も損失せずに製造
できる。In the next step shown in C, the part without resist is corroded, and four parts (ink ejection nozzle part) 43 are formed in that part, and in the next step shown in d, the resist is completely peeled off to form the lower substrate. In the step shown in e, the bonding surfaces of the lower substrate 40 and the metal upper substrate 42 whose surfaces have been smoothed to a mirror finish are brought together and heat is applied under gas pressure to perform diffusion bonding. As a result, the lower substrate 40 and the upper substrate 42 are bonded to each other without melting due to molecular diffusion of the metals caused by heat and pressure at the bonding surfaces, so that the ink ejection nozzle portion 43 can also be manufactured without loss.
接合においては、金属が酸化されないようヘリウムなど
のイナートガス中で行なうのが好ましく、そのガス圧も
使用金属がステンレスの場合’ＩｋｇｌＣ本接合温度は
１０００°Ｃ前後、接合時間２時間が適当である。ステ
ンレスはインクに対し耐食性を有し、また剛性があるた
め振動性にすぐれオンディマンド型のインクジェットプ
リンターヘッドを構成する金属として適している。なお
拡散接合温度、圧力、時間、使用ガス、及び使用金属と
ヘッドを構成する金属板の仮数は限定するものではない
。また拡散接合の形態も限定するものではなく、上基板
と下基板が金属同士の拡散接合によって接合されていれ
ばよく、第４図のように、本発明のオンディマンド型の
インクジェットプリンターヘッドがインサート金属５Ｉ
を中間継手として下基板４０、上基板４２が拡散接合さ
れていてもよい。インサート金属としては上記したステ
ンレスの他、よく知られているニッケル、クロム箔等が
ある。The bonding is preferably carried out in an inert gas such as helium to prevent oxidation of the metal, and when the metal used is stainless steel, the bonding temperature is approximately 1000° C. and the bonding time is 2 hours. Stainless steel is corrosion resistant to ink and has excellent vibration resistance due to its rigidity, making it suitable as a metal for constructing on-demand type inkjet printer heads. Note that the diffusion bonding temperature, pressure, time, gas used, metal used, and the mantissa of the metal plate constituting the head are not limited. Further, the form of diffusion bonding is not limited as long as the upper substrate and the lower substrate are bonded by metal-to-metal diffusion bonding, and as shown in FIG. 5I
The lower substrate 40 and the upper substrate 42 may be diffusion bonded using the intermediate joint. Insert metals include the well-known nickel and chrome foils in addition to the above-mentioned stainless steel.
第５図は本発明のヘッドの他の実施例である。FIG. 5 shows another embodiment of the head of the present invention.
６１．６３はそれぞれインク噴射ノズル６５ｂ。61 and 63 are ink jet nozzles 65b, respectively.
６５ｄ、６５ａ、６５ｃを有する平滑金属基板で、６２
は薄い鏡面状に平滑化された金属板、６４ａ。A smooth metal substrate having 65d, 65a, 65c, 62
64a is a thin mirror-like smooth metal plate.
６４ｂ、６４ｃ、６４ｄは圧電素子である。薄板６２を
はさむように基板６１．６３の３枚を拡散接合し、それ
ぞれのノズルにつながる圧縮室に対応した基板６１．６
３上に圧電素子６４ａ〜６４ｄを搭載したオンディマン
ド型のインクジェットプリンターヘッドであり、これに
より印刷の高密度化が可能になる。64b, 64c, and 64d are piezoelectric elements. Three substrates 61.63 are diffusion bonded so as to sandwich the thin plate 62, and the substrates 61.6 correspond to the compression chambers connected to each nozzle.
This is an on-demand type inkjet printer head in which piezoelectric elements 64a to 64d are mounted on 3, which enables high-density printing.
このように製造された本発明のオンディマンド型のイン
クジェットプリンター用ヘッドは、溝が形成されたステ
ンレス板とステンレス板に接合される平滑ステンレス板
が少なくとも圧縮室に対応した部分の結合が金属同士の
拡散接合により接合されている。従ってステンレス板上
に搭載された圧電素子が振動する際、接着剤による接合
の場合と異なりその振動が吸収されることなく圧縮室内
のインクに直接伝達され、圧電素子の搭載された基板は
印字指令に応じて急峻に振巾を変化させる振動をおこな
う。従って圧縮室内のインクの圧力変化も急峻となり、
連続してインクを噴射する場合、振巾の小さな印字指令
パルスを、時間間隔を短（して連続的に印加すればよく
、オンディマンド型のインクジェットプリンターの印字
速度を大巾に速くすることができる。オンディマンド型
の場合、インクの噴射速度が一般に遅く、噴射速度が遅
くなることにより印字品質が低下したり、さらに遅い場
合には印刷不能となるが、本発明のヘッドは振動が吸収
されないためこのような不都合を生ぜず、小さいな駆動
エネルギーの印加により、インクジェット記録に必要上
、及び印字品質上充分な噴射速度を得ることができ、低
消費電力で印刷が可能なオンディマンド型のインクジェ
ットプリンターの利点を最大限活用できる。さらに記録
紙に対してヘッドを相対移動させインクジェット記録を
おこなうシリアル型のインクジェットプリンターの場合
であっても、本発明のヘッドによれば圧電素子に印字指
令を印加して実際にインクが噴射するまでの時間間隔を
小さくできるため、印字制御が容易であり、また印字ド
ツトのいずれも生じにくい。In the on-demand inkjet printer head of the present invention manufactured in this manner, the grooved stainless steel plate and the smooth stainless steel plate bonded to the stainless steel plate are joined at least in the portion corresponding to the compression chamber by metal-to-metal diffusion. Joined by bonding. Therefore, when the piezoelectric element mounted on the stainless steel plate vibrates, the vibration is not absorbed, but is directly transmitted to the ink in the compression chamber, unlike when bonding with adhesive, and the board on which the piezoelectric element is mounted receives the printing command. It vibrates with a sharp amplitude change depending on the amount of vibration. Therefore, the pressure change of the ink inside the compression chamber also becomes steep.
When ejecting ink continuously, printing command pulses with a small amplitude can be applied continuously at short time intervals, which can greatly increase the printing speed of on-demand inkjet printers. In the case of an on-demand type, the ink ejection speed is generally slow, and if the ejection speed is slow, the print quality will deteriorate, and if it is even slower, printing will not be possible.However, the head of the present invention does not absorb vibrations, so this problem can be avoided. Advantages of an on-demand inkjet printer that does not cause such inconveniences, can obtain a jetting speed sufficient for inkjet recording and print quality by applying small drive energy, and can print with low power consumption. Furthermore, even in the case of a serial type inkjet printer that performs inkjet recording by moving the head relative to the recording paper, the head of the present invention applies printing commands to the piezoelectric element and performs actual printing. Since the time interval until the ink is ejected can be shortened, printing control is easy and printing dots are less likely to occur.
そして、本発明の製造方法によると、表面が鏡面状のス
テンレス板同士を接合する際、一方のステンレス板の表
面にフォトエツチングで溝を形成するため鏡面状の平滑
性を損なうことなく圧力発生やインク噴射等に最適な微
細な溝形成が可能となり、熱、圧力による金属の拡散接
合を行なうため最適な状態で形成された溝や、接合面の
平滑性が損なわれることなく良好なインク噴射が可能な
インクジェットヘッドを製造できる。またイナートガス
中で熱、圧力による拡散接合をおこなうとさらに良好な
特性のヘッドを製造できる。According to the manufacturing method of the present invention, when joining stainless steel plates with mirror-like surfaces, grooves are formed on the surface of one stainless steel plate by photo-etching, so pressure can be generated without impairing the mirror-like smoothness. It is possible to form fine grooves that are ideal for ink jetting, etc., and the grooves are formed in the optimal condition for metal diffusion bonding using heat and pressure, and good ink jetting is possible without compromising the smoothness of the bonded surface. It is possible to manufacture possible inkjet heads. Further, by performing diffusion bonding using heat and pressure in an inert gas, a head with even better characteristics can be manufactured.
第１図は従来・の方法で製造されたオンディマンド型イ
ンクジェットプリンターのヘッドの基板を示す平面図、
第２図は、第１図のＡ−Ａ’断面の部分断面図である。
第３図は本発明になるヘッドの製造工程図、第４図、第
５図は本発明のヘッドの他の実施例である。
ｌＯ・・・・・・インクジェットプリンターヘッドの基
板、２１・・・・・・インクジェットプリンターヘッド
上板、３１・・・・・・クロム蒸着膜、３４・・・・・
・金蒸着膜、４１・・・・・・フォトレジスト膜、５１
・・・・・・インサート金属
以上
出願人 セイコーエプソン株式会社
第１図
第２図
（、Ｃ）
（ｄ）
（ｅ３
第３図
第４図
第５図FIG. 1 is a plan view showing the substrate of an on-demand inkjet printer head manufactured by a conventional method;
FIG. 2 is a partial sectional view taken along the line AA' in FIG. 1. FIG. 3 is a manufacturing process diagram of the head according to the present invention, and FIGS. 4 and 5 are other embodiments of the head according to the present invention. 1O... Inkjet printer head substrate, 21... Inkjet printer head upper plate, 31... Chrome vapor deposited film, 34...
・Gold vapor deposited film, 41...Photoresist film, 51
...Insert metal and above Applicant: Seiko Epson Corporation Figure 1 Figure 2 (, C) (d) (e3 Figure 3 Figure 4 Figure 5
Claims (2)
を接合し、前記溝部に圧縮室を形成すると共に前記圧縮
室に連通した噴射ノズルを形成し、前記圧縮室に対応す
る前記ステンレス板上に圧電素子を搭載したオンディマ
ンド型のインクジェットプリンターヘッドの製造方法に
おいて、 ステンレス板の表面を鏡面状にしてフォトレジスト膜を
塗布し所望のパターンで露光した後、前記露光に対応し
て腐食をおこないインク噴射ノズル部となる凹部を形成
することにより前記溝を形成したステンレス板を構成し
、表面が鏡面状に平滑化された前記平滑ステンレス板と
重ね熱と圧力による金属同士の拡散接合をおこなうこと
により前記溝を形成したステンレス板と前記平滑板とが
接合される工程をとることを特徴とするオンディマンド
型のインクジェットプリンターヘッドの製造方法。(1) A grooved stainless steel plate and a smooth stainless steel plate are joined together, a compression chamber is formed in the groove, and an injection nozzle communicating with the compression chamber is formed, and a jet nozzle is formed on the stainless steel plate corresponding to the compression chamber. In a method of manufacturing an on-demand inkjet printer head equipped with a piezoelectric element, the surface of a stainless steel plate is mirror-finished, coated with a photoresist film, exposed to light in a desired pattern, and then corroded in response to the exposure to eject ink. A stainless steel plate with the grooves formed thereon is formed by forming a concave portion to serve as a nozzle portion, and is stacked on the smooth stainless steel plate whose surface has been smoothed to a mirror finish to perform metal-to-metal diffusion bonding using heat and pressure. A method for manufacturing an on-demand inkjet printer head, comprising the step of joining a grooved stainless steel plate and the smooth plate.
熱と圧力による金属同士の拡散接合がイナートガス中で
行われることを特徴とする特許請求の範囲第１項記載の
オンディマンド型のインクジェットプリンターヘッドの
製造方法。(2) The on-demand type inkjet printer head according to claim 1, wherein the metal-to-metal diffusion bonding of the grooved stainless steel plate and the smooth stainless steel plate is performed in an inert gas using heat and pressure. Production method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3882988A JPS63265647A (en) | 1988-02-22 | 1988-02-22 | Manufacture of on-demand type ink jet printer head |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3882988A JPS63265647A (en) | 1988-02-22 | 1988-02-22 | Manufacture of on-demand type ink jet printer head |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13644378A Division JPS5563280A (en) | 1978-11-06 | 1978-11-06 | Ink jet printer head |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63265647A true JPS63265647A (en) | 1988-11-02 |
Family
ID=12536120
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3882988A Pending JPS63265647A (en) | 1988-02-22 | 1988-02-22 | Manufacture of on-demand type ink jet printer head |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63265647A (en) |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5396042A (en) * | 1991-12-25 | 1995-03-07 | Rohm Co Ltd | Anodic bonding process and method of producing an ink-jet print head using the same process |
| EP0999056A1 (en) * | 1998-11-04 | 2000-05-10 | Microjet Technology Co., Ltd | Method and device for manufacturing ink jet printhead |
| US6991324B2 (en) * | 2002-03-19 | 2006-01-31 | Sharp Kabushiki Kaisha | Solution injector head, functional layer forming apparatus and liquid crystal display |
| US7325310B2 (en) * | 2002-09-04 | 2008-02-05 | Samsung Electronics Co., Ltd. | Method for manufacturing a monolithic ink-jet printhead |
| US20090313826A1 (en) * | 2005-12-13 | 2009-12-24 | Tsuyoshi Mita | Method of manufacturing a piezoelectric actuator and liquid ejection head |
| US7695114B2 (en) | 2006-02-20 | 2010-04-13 | Ricoh Printing Systems, Ltd. | Inkjet head and method of producing the same |
-
1988
- 1988-02-22 JP JP3882988A patent/JPS63265647A/en active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5396042A (en) * | 1991-12-25 | 1995-03-07 | Rohm Co Ltd | Anodic bonding process and method of producing an ink-jet print head using the same process |
| US6086188A (en) * | 1991-12-25 | 2000-07-11 | Rohm Co., Ltd. | Ink-jet print head having parts anodically bonded |
| EP0999056A1 (en) * | 1998-11-04 | 2000-05-10 | Microjet Technology Co., Ltd | Method and device for manufacturing ink jet printhead |
| US6991324B2 (en) * | 2002-03-19 | 2006-01-31 | Sharp Kabushiki Kaisha | Solution injector head, functional layer forming apparatus and liquid crystal display |
| US7325310B2 (en) * | 2002-09-04 | 2008-02-05 | Samsung Electronics Co., Ltd. | Method for manufacturing a monolithic ink-jet printhead |
| US20090313826A1 (en) * | 2005-12-13 | 2009-12-24 | Tsuyoshi Mita | Method of manufacturing a piezoelectric actuator and liquid ejection head |
| US8230596B2 (en) * | 2005-12-13 | 2012-07-31 | Fujifilm Corporation | Method of manufacturing a liquid ejection head |
| US7695114B2 (en) | 2006-02-20 | 2010-04-13 | Ricoh Printing Systems, Ltd. | Inkjet head and method of producing the same |
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