JPH0110472Y2 - - Google Patents
Info
- Publication number
- JPH0110472Y2 JPH0110472Y2 JP1984031133U JP3113384U JPH0110472Y2 JP H0110472 Y2 JPH0110472 Y2 JP H0110472Y2 JP 1984031133 U JP1984031133 U JP 1984031133U JP 3113384 U JP3113384 U JP 3113384U JP H0110472 Y2 JPH0110472 Y2 JP H0110472Y2
- Authority
- JP
- Japan
- Prior art keywords
- blade
- disk
- blades
- rotor
- stator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
- F04D19/042—Turbomolecular vacuum pumps
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D29/00—Details, component parts, or accessories
- F04D29/40—Casings; Connections of working fluid
- F04D29/52—Casings; Connections of working fluid for axial pumps
- F04D29/54—Fluid-guiding means, e.g. diffusers
- F04D29/541—Specially adapted for elastic fluid pumps
- F04D29/542—Bladed diffusers
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3113384U JPS60143192U (ja) | 1984-03-02 | 1984-03-02 | タ−ボ分子ポンプの翼形状 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP3113384U JPS60143192U (ja) | 1984-03-02 | 1984-03-02 | タ−ボ分子ポンプの翼形状 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60143192U JPS60143192U (ja) | 1985-09-21 |
| JPH0110472Y2 true JPH0110472Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1989-03-24 |
Family
ID=30531460
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP3113384U Granted JPS60143192U (ja) | 1984-03-02 | 1984-03-02 | タ−ボ分子ポンプの翼形状 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60143192U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5743384U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1980-08-26 | 1982-03-09 | ||
| JPS5898696A (ja) * | 1981-12-09 | 1983-06-11 | Hitachi Ltd | 分子ポンプのステ−タ |
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1984
- 1984-03-02 JP JP3113384U patent/JPS60143192U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60143192U (ja) | 1985-09-21 |