JP7845687B2 - 検出器台座及びｘ線回折装置 - Google Patents

検出器台座及びｘ線回折装置

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Publication number
JP7845687B2
JP7845687B2 JP2023012826A JP2023012826A JP7845687B2 JP 7845687 B2 JP7845687 B2 JP 7845687B2 JP 2023012826 A JP2023012826 A JP 2023012826A JP 2023012826 A JP2023012826 A JP 2023012826A JP 7845687 B2 JP7845687 B2 JP 7845687B2
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Japan
Prior art keywords
ray detector
detector
arrangement
adjustment
section
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2023012826A
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English (en)
Japanese (ja)
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JP2024108448A (ja
JP2024108448A5 (https=
Inventor
勇士 白又
惇史 久慈
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Rigaku Corp
Original Assignee
Rigaku Corp
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Publication date
Application filed by Rigaku Corp filed Critical Rigaku Corp
Priority to JP2023012826A priority Critical patent/JP7845687B2/ja
Priority to US18/407,503 priority patent/US12487195B2/en
Publication of JP2024108448A publication Critical patent/JP2024108448A/ja
Publication of JP2024108448A5 publication Critical patent/JP2024108448A5/ja
Application granted granted Critical
Publication of JP7845687B2 publication Critical patent/JP7845687B2/ja
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20008—Constructional details of analysers, e.g. characterised by X-ray source, detector or optical system; Accessories therefor; Preparing specimens therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/207—Diffractometry using detectors, e.g. using a probe in a central position and one or more displaceable detectors in circumferential positions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/05—Investigating materials by wave or particle radiation by diffraction, scatter or reflection
    • G01N2223/056—Investigating materials by wave or particle radiation by diffraction, scatter or reflection diffraction
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/321—Accessories, mechanical or electrical features manipulator for positioning a part
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/50—Detectors
    • G01N2223/501—Detectors array

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP2023012826A 2023-01-31 2023-01-31 検出器台座及びｘ線回折装置 Active JP7845687B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2023012826A JP7845687B2 (ja) 2023-01-31 2023-01-31 検出器台座及びｘ線回折装置
US18/407,503 US12487195B2 (en) 2023-01-31 2024-01-09 Detector stand and X-ray diffraction apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023012826A JP7845687B2 (ja) 2023-01-31 2023-01-31 検出器台座及びｘ線回折装置

Publications (3)

Publication Number Publication Date
JP2024108448A JP2024108448A (ja) 2024-08-13
JP2024108448A5 JP2024108448A5 (https=) 2025-03-31
JP7845687B2 true JP7845687B2 (ja) 2026-04-15

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023012826A Active JP7845687B2 (ja) 2023-01-31 2023-01-31 検出器台座及びｘ線回折装置

Country Status (2)

Country Link
US (1) US12487195B2 (https=)
JP (1) JP7845687B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7845687B2 (ja) * 2023-01-31 2026-04-15 株式会社リガク 検出器台座及びｘ線回折装置

Citations (3)

* Cited by examiner, † Cited by third party
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US20060083350A1 (en) 2004-10-16 2006-04-20 Bruker Axs Gmbh Analysis device with variably illuminated strip detector
JP2007256542A (ja) 2006-03-22 2007-10-04 Expert Of Japan:Kk 固定アタッチメント
JP2015533415A (ja) 2012-10-18 2015-11-24 カール・ツァイス・エックス−レイ・マイクロスコピー・インコーポレイテッドＣａｒｌ Ｚｅｉｓｓ Ｘ−Ｒａｙ Ｍｉｃｒｏｓｃｏｐｙ， Ｉｎｃ． 結晶学的結晶粒方位マッピング機能を有する実験室ｘ線マイクロトモグラフィシステム

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Publication number Priority date Publication date Assignee Title
JPH01187441A (ja) * 1988-01-22 1989-07-26 Rigaku Denki Kk Ｘ線回折装置の三軸回転ゴニオメータ
JP2984232B2 (ja) * 1996-10-25 1999-11-29 株式会社テクノス研究所 Ｘ線分析装置およびｘ線照射角設定方法
US6744850B2 (en) * 2001-01-11 2004-06-01 Therma-Wave, Inc. X-ray reflectance measurement system with adjustable resolution
US6895075B2 (en) * 2003-02-12 2005-05-17 Jordan Valley Applied Radiation Ltd. X-ray reflectometry with small-angle scattering measurement
JP2005055241A (ja) * 2003-08-01 2005-03-03 Rigaku Corp 結晶試料ホルダと結晶評価システム
DE10340072A1 (de) * 2003-08-30 2005-03-31 Bruker Axs Gmbh Virtueller 2-dimensionaler Detektor
US7120228B2 (en) * 2004-09-21 2006-10-10 Jordan Valley Applied Radiation Ltd. Combined X-ray reflectometer and diffractometer
US7190762B2 (en) * 2004-10-29 2007-03-13 Broker Axs, Inc Scanning line detector for two-dimensional x-ray diffractometer
DE102006011004B4 (de) * 2006-03-09 2008-12-04 Siemens Ag Röntgensystem mit Röntgen-Flachdetektoren
US7920676B2 (en) * 2007-05-04 2011-04-05 Xradia, Inc. CD-GISAXS system and method
RU2419088C1 (ru) * 2010-02-01 2011-05-20 Учреждение Российской академии наук Физический институт им. П.Н. Лебедева РАН (ФИАН) Рентгеновский спектрометр
JP2014089143A (ja) * 2012-10-31 2014-05-15 Rigaku Corp Ｘ線検出器およびｘ線回折装置
US9557282B1 (en) * 2013-06-17 2017-01-31 U.S. Department Of Energy High precision detector robot arm system
KR102348995B1 (ko) * 2016-07-15 2022-01-10 가부시키가이샤 리가쿠 X선 검사 장치, x선 박막 검사 방법 및 로킹 커브 측정 방법
US10794844B2 (en) * 2016-08-10 2020-10-06 Proto Manufacturing, Ltd. Mounting system and sample holder for X-ray diffraction apparatus
JP6467600B2 (ja) * 2016-09-30 2019-02-13 株式会社リガク 波長分散型蛍光ｘ線分析装置
US10295484B2 (en) * 2017-04-05 2019-05-21 Bruker Axs, Inc. Method and apparatus for extending angular coverage for a scanning two-dimensional X-ray detector
JP2018205247A (ja) * 2017-06-08 2018-12-27 富士通株式会社 Ｘ線回折分析方法及びｘ線回折分析装置
US11867595B2 (en) * 2019-10-14 2024-01-09 Industrial Technology Research Institute X-ray reflectometry apparatus and method thereof for measuring three dimensional nanostructures on flat substrate
EP3961199A1 (en) * 2020-08-24 2022-03-02 Malvern Panalytical B.V. X-ray detector for x-ray diffraction analysis apparatus
US12336851B2 (en) * 2022-04-20 2025-06-24 Arion Diagnostics, Inc. Diffractive analyzer of patient tissue
JP7845687B2 (ja) * 2023-01-31 2026-04-15 株式会社リガク 検出器台座及びｘ線回折装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20060083350A1 (en) 2004-10-16 2006-04-20 Bruker Axs Gmbh Analysis device with variably illuminated strip detector
JP2007256542A (ja) 2006-03-22 2007-10-04 Expert Of Japan:Kk 固定アタッチメント
JP2015533415A (ja) 2012-10-18 2015-11-24 カール・ツァイス・エックス−レイ・マイクロスコピー・インコーポレイテッドＣａｒｌ Ｚｅｉｓｓ Ｘ−Ｒａｙ Ｍｉｃｒｏｓｃｏｐｙ， Ｉｎｃ． 結晶学的結晶粒方位マッピング機能を有する実験室ｘ線マイクロトモグラフィシステム

Also Published As

Publication number Publication date
US20240255446A1 (en) 2024-08-01
JP2024108448A (ja) 2024-08-13
US12487195B2 (en) 2025-12-02

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