JP7842907B2 - 搬送方法、搬送装置および解析システム - Google Patents

搬送方法、搬送装置および解析システム

Info

Publication number
JP7842907B2
JP7842907B2 JP2024574109A JP2024574109A JP7842907B2 JP 7842907 B2 JP7842907 B2 JP 7842907B2 JP 2024574109 A JP2024574109 A JP 2024574109A JP 2024574109 A JP2024574109 A JP 2024574109A JP 7842907 B2 JP7842907 B2 JP 7842907B2
Authority
JP
Japan
Prior art keywords
mesh
unit
conveying
transport
holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2024574109A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2024161507A1 (https=
JPWO2024161507A5 (https=
Inventor
佳▲徳▼ 東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi High Tech Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi High Tech Corp filed Critical Hitachi High Tech Corp
Publication of JPWO2024161507A1 publication Critical patent/JPWO2024161507A1/ja
Publication of JPWO2024161507A5 publication Critical patent/JPWO2024161507A5/ja
Application granted granted Critical
Publication of JP7842907B2 publication Critical patent/JP7842907B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2024574109A 2023-01-31 2023-01-31 搬送方法、搬送装置および解析システム Active JP7842907B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2023/003076 WO2024161507A1 (ja) 2023-01-31 2023-01-31 搬送方法、搬送装置および解析システム

Publications (3)

Publication Number Publication Date
JPWO2024161507A1 JPWO2024161507A1 (https=) 2024-08-08
JPWO2024161507A5 JPWO2024161507A5 (https=) 2025-10-06
JP7842907B2 true JP7842907B2 (ja) 2026-04-08

Family

ID=92146206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024574109A Active JP7842907B2 (ja) 2023-01-31 2023-01-31 搬送方法、搬送装置および解析システム

Country Status (2)

Country Link
JP (1) JP7842907B2 (https=)
WO (1) WO2024161507A1 (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016171107A (ja) 2015-03-11 2016-09-23 ファスフォードテクノロジ株式会社 ボンディング装置及びボンディング方法
WO2021210087A1 (ja) 2020-04-15 2021-10-21 株式会社日立ハイテク 搬送装置および解析システム

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016171107A (ja) 2015-03-11 2016-09-23 ファスフォードテクノロジ株式会社 ボンディング装置及びボンディング方法
WO2021210087A1 (ja) 2020-04-15 2021-10-21 株式会社日立ハイテク 搬送装置および解析システム

Also Published As

Publication number Publication date
WO2024161507A1 (ja) 2024-08-08
JPWO2024161507A1 (https=) 2024-08-08

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