JPWO2024161507A1 - - Google Patents
Info
- Publication number
- JPWO2024161507A1 JPWO2024161507A1 JP2024574109A JP2024574109A JPWO2024161507A1 JP WO2024161507 A1 JPWO2024161507 A1 JP WO2024161507A1 JP 2024574109 A JP2024574109 A JP 2024574109A JP 2024574109 A JP2024574109 A JP 2024574109A JP WO2024161507 A1 JPWO2024161507 A1 JP WO2024161507A1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
- H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
- H01J37/317—Electron-beam or ion-beam tubes for localised treatment of objects for changing properties of the objects or for applying thin layers thereon, e.g. for ion implantation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/JP2023/003076 WO2024161507A1 (ja) | 2023-01-31 | 2023-01-31 | 搬送方法、搬送装置および解析システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JPWO2024161507A1 true JPWO2024161507A1 (https=) | 2024-08-08 |
| JPWO2024161507A5 JPWO2024161507A5 (https=) | 2025-10-06 |
| JP7842907B2 JP7842907B2 (ja) | 2026-04-08 |
Family
ID=92146206
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2024574109A Active JP7842907B2 (ja) | 2023-01-31 | 2023-01-31 | 搬送方法、搬送装置および解析システム |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7842907B2 (https=) |
| WO (1) | WO2024161507A1 (https=) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016171107A (ja) * | 2015-03-11 | 2016-09-23 | ファスフォードテクノロジ株式会社 | ボンディング装置及びボンディング方法 |
| WO2021210087A1 (ja) * | 2020-04-15 | 2021-10-21 | 株式会社日立ハイテク | 搬送装置および解析システム |
-
2023
- 2023-01-31 JP JP2024574109A patent/JP7842907B2/ja active Active
- 2023-01-31 WO PCT/JP2023/003076 patent/WO2024161507A1/ja not_active Ceased
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2016171107A (ja) * | 2015-03-11 | 2016-09-23 | ファスフォードテクノロジ株式会社 | ボンディング装置及びボンディング方法 |
| WO2021210087A1 (ja) * | 2020-04-15 | 2021-10-21 | 株式会社日立ハイテク | 搬送装置および解析システム |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2024161507A1 (ja) | 2024-08-08 |
| JP7842907B2 (ja) | 2026-04-08 |
Similar Documents
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