JP7825393B2 - 成膜装置 - Google Patents

成膜装置

Info

Publication number
JP7825393B2
JP7825393B2 JP2021141362A JP2021141362A JP7825393B2 JP 7825393 B2 JP7825393 B2 JP 7825393B2 JP 2021141362 A JP2021141362 A JP 2021141362A JP 2021141362 A JP2021141362 A JP 2021141362A JP 7825393 B2 JP7825393 B2 JP 7825393B2
Authority
JP
Japan
Prior art keywords
target
chamber
workpiece
opening
spare
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021141362A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022058195A5 (https=
JP2022058195A (ja
Inventor
寿 西垣
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Mechatronics Corp
Original Assignee
Shibaura Mechatronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shibaura Mechatronics Corp filed Critical Shibaura Mechatronics Corp
Priority to KR1020210127091A priority Critical patent/KR102731481B1/ko
Priority to CN202111155074.9A priority patent/CN114318284B/zh
Priority to TW110136127A priority patent/TWI791295B/zh
Publication of JP2022058195A publication Critical patent/JP2022058195A/ja
Publication of JP2022058195A5 publication Critical patent/JP2022058195A5/ja
Priority to KR1020240160922A priority patent/KR20240167741A/ko
Application granted granted Critical
Publication of JP7825393B2 publication Critical patent/JP7825393B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2021141362A 2020-09-30 2021-08-31 成膜装置 Active JP7825393B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
KR1020210127091A KR102731481B1 (ko) 2020-09-30 2021-09-27 성막 장치
CN202111155074.9A CN114318284B (zh) 2020-09-30 2021-09-29 成膜装置
TW110136127A TWI791295B (zh) 2020-09-30 2021-09-29 成膜裝置
KR1020240160922A KR20240167741A (ko) 2020-09-30 2024-11-13 성막 장치

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020164575 2020-09-30
JP2020164575 2020-09-30

Publications (3)

Publication Number Publication Date
JP2022058195A JP2022058195A (ja) 2022-04-11
JP2022058195A5 JP2022058195A5 (https=) 2024-09-05
JP7825393B2 true JP7825393B2 (ja) 2026-03-06

Family

ID=81110815

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021141362A Active JP7825393B2 (ja) 2020-09-30 2021-08-31 成膜装置

Country Status (1)

Country Link
JP (1) JP7825393B2 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN118086853B (zh) * 2024-04-29 2024-07-16 江苏透波光电科技有限公司 一种陶瓷基板大功率真空溅射设备

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3044735B2 (ja) * 1990-03-30 2000-05-22 ソニー株式会社 スパッタリング装置
JP3281005B2 (ja) * 1991-09-27 2002-05-13 沖電気工業株式会社 スパッタリング装置及びそれを用いた半導体装置の製造方法
JP4036928B2 (ja) * 1996-09-18 2008-01-23 松下電器産業株式会社 成膜装置とそのターゲット交換方法

Also Published As

Publication number Publication date
JP2022058195A (ja) 2022-04-11

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