JP7818526B2 - 表示装置の作製方法 - Google Patents

表示装置の作製方法

Info

Publication number
JP7818526B2
JP7818526B2 JP2022567713A JP2022567713A JP7818526B2 JP 7818526 B2 JP7818526 B2 JP 7818526B2 JP 2022567713 A JP2022567713 A JP 2022567713A JP 2022567713 A JP2022567713 A JP 2022567713A JP 7818526 B2 JP7818526 B2 JP 7818526B2
Authority
JP
Japan
Prior art keywords
layer
light
electrode
oxide
emitting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2022567713A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2022123383A5 (https=
JPWO2022123383A1 (https=
Inventor
舜平 山崎
晋吾 江口
健一 岡崎
紘慈 楠
健輔 吉住
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Publication of JPWO2022123383A1 publication Critical patent/JPWO2022123383A1/ja
Publication of JPWO2022123383A5 publication Critical patent/JPWO2022123383A5/ja
Application granted granted Critical
Publication of JP7818526B2 publication Critical patent/JP7818526B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8052—Cathodes
    • H10K59/80522—Cathodes combined with auxiliary electrodes
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/02—Details
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
    • H05B33/22—Light sources with substantially two-dimensional [2D] radiating surfaces characterised by the chemical or physical composition or the arrangement of auxiliary dielectric or reflective layers
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B33/00—Electroluminescent light sources
    • H05B33/12—Light sources with substantially two-dimensional [2D] radiating surfaces
    • H05B33/26—Light sources with substantially two-dimensional [2D] radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode
    • H05B33/28—Light sources with substantially two-dimensional [2D] radiating surfaces characterised by the composition or arrangement of the conductive material used as an electrode of translucent electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]
    • H10D30/67—Thin-film transistors [TFT]
    • H10D30/674—Thin-film transistors [TFT] characterised by the active materials
    • H10D30/6755—Oxide semiconductors, e.g. zinc oxide, copper aluminium oxide or cadmium stannate
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K50/00—Organic light-emitting devices
    • H10K50/10—OLEDs or polymer light-emitting diodes [PLED]
    • H10K50/19—Tandem OLEDs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/1201—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/121—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements
    • H10K59/1213—Active-matrix OLED [AMOLED] displays characterised by the geometry or disposition of pixel elements the pixel elements being TFTs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/10—OLED displays
    • H10K59/12—Active-matrix OLED [AMOLED] displays
    • H10K59/124—Insulating layers formed between TFT elements and OLED elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/80—Constructional details
    • H10K59/805—Electrodes
    • H10K59/8051—Anodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/20—Changing the shape of the active layer in the devices, e.g. patterning
    • H10K71/231—Changing the shape of the active layer in the devices, e.g. patterning by etching of existing layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/60—Forming conductive regions or layers, e.g. electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
    • H10K71/621—Providing a shape to conductive layers, e.g. patterning or selective deposition
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
    • H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
    • H10K59/30—Devices specially adapted for multicolour light emission
    • H10K59/38—Devices specially adapted for multicolour light emission comprising colour filters or colour changing media [CCM]

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Optics & Photonics (AREA)
  • Electroluminescent Light Sources (AREA)
  • Thin Film Transistor (AREA)
JP2022567713A 2020-12-07 2021-11-25 表示装置の作製方法 Active JP7818526B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2020202409 2020-12-07
JP2020202409 2020-12-07
PCT/IB2021/060953 WO2022123383A1 (ja) 2020-12-07 2021-11-25 表示装置の作製方法

Publications (3)

Publication Number Publication Date
JPWO2022123383A1 JPWO2022123383A1 (https=) 2022-06-16
JPWO2022123383A5 JPWO2022123383A5 (https=) 2024-11-26
JP7818526B2 true JP7818526B2 (ja) 2026-02-20

Family

ID=81974219

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022567713A Active JP7818526B2 (ja) 2020-12-07 2021-11-25 表示装置の作製方法

Country Status (5)

Country Link
US (1) US20240023371A1 (https=)
JP (1) JP7818526B2 (https=)
KR (1) KR20230116807A (https=)
CN (1) CN116530233A (https=)
WO (1) WO2022123383A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7585062B2 (ja) * 2021-01-28 2024-11-18 株式会社ジャパンディスプレイ 表示装置
WO2024052786A1 (ja) * 2022-09-09 2024-03-14 株式会社半導体エネルギー研究所 発光デバイスおよび表示装置
KR20250113405A (ko) * 2022-11-30 2025-07-25 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 디바이스
JPWO2024141880A1 (https=) * 2022-12-28 2024-07-04
KR20250170623A (ko) * 2023-03-31 2025-12-05 가부시키가이샤 한도오따이 에네루기 켄큐쇼 발광 디바이스, 표시 장치, 표시 모듈, 전자 기기

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003051599A (ja) 2001-05-24 2003-02-21 Semiconductor Energy Lab Co Ltd 半導体装置及び電子機器
JP2003347053A (ja) 2002-05-29 2003-12-05 Seiko Instruments Inc 有機ｅｌ素子およびその製造方法
US20180261792A1 (en) 2017-03-10 2018-09-13 Samsung Display Co., Ltd. Organic light-emitting display apparatus and method of manufacturing the same
CN109509765A (zh) 2017-09-14 2019-03-22 黑牛食品股份有限公司 一种有机发光显示屏及其制造方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10208883A (ja) * 1996-11-20 1998-08-07 Hokuriku Electric Ind Co Ltd 発光装置とその製造方法
JP3705237B2 (ja) 2001-09-05 2005-10-12 ソニー株式会社 有機電界発光素子を用いた表示装置の製造システムおよび製造方法
JP6124584B2 (ja) 2012-12-21 2017-05-10 株式会社半導体エネルギー研究所 発光装置及びその製造方法

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003051599A (ja) 2001-05-24 2003-02-21 Semiconductor Energy Lab Co Ltd 半導体装置及び電子機器
JP2003347053A (ja) 2002-05-29 2003-12-05 Seiko Instruments Inc 有機ｅｌ素子およびその製造方法
US20180261792A1 (en) 2017-03-10 2018-09-13 Samsung Display Co., Ltd. Organic light-emitting display apparatus and method of manufacturing the same
CN109509765A (zh) 2017-09-14 2019-03-22 黑牛食品股份有限公司 一种有机发光显示屏及其制造方法

Also Published As

Publication number Publication date
US20240023371A1 (en) 2024-01-18
CN116530233A (zh) 2023-08-01
WO2022123383A1 (ja) 2022-06-16
KR20230116807A (ko) 2023-08-04
JPWO2022123383A1 (https=) 2022-06-16

Similar Documents

Publication Publication Date Title
JP7818526B2 (ja) 表示装置の作製方法
US12575132B2 (en) Semiconductor device
KR102900745B1 (ko) 표시 장치, 표시 모듈, 및 전자 기기
US12219861B2 (en) Display apparatus and electronic device
JP2023093390A (ja) 表示装置、及び電子機器
US20250160123A1 (en) Semiconductor device
KR102907086B1 (ko) 표시 장치, 표시 모듈, 및 전자 기기
US20220223671A1 (en) Display panel, data processing device and method for manufacturing the display panel
US20250169175A1 (en) Semiconductor device
CN115362486A (zh) 显示装置、显示模块、电子设备及车辆
KR20230148185A (ko) 표시 장치
WO2022167893A1 (ja) 半導体装置
US20240224698A1 (en) Display apparatus
JP2025160250A (ja) 表示装置
WO2022248972A1 (ja) 半導体装置、表示装置、及び電子機器
CN117296089A (zh) 显示装置及显示装置的制造方法
JP7808054B2 (ja) 表示装置、表示装置の作製方法、及び電子機器
US12555529B2 (en) Display apparatus and electronic device
US20240413141A1 (en) Display apparatus and electronic device
CN116913926A (zh) 半导体装置
WO2022249001A1 (ja) 半導体装置、表示装置、及び電子機器
KR20240011740A (ko) 표시 장치
JP7813726B2 (ja) 発光素子、表示装置、および電子機器
KR20230156336A (ko) 표시 장치 및 표시 장치의 제작 방법
WO2022149040A1 (ja) 表示装置、表示装置の作製方法、及び電子機器

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20241118

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20241118

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20260113

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20260209

R150 Certificate of patent or registration of utility model

Ref document number: 7818526

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150