JP7721992B2 - 慣性センサー及び慣性計測装置 - Google Patents

慣性センサー及び慣性計測装置

Info

Publication number
JP7721992B2
JP7721992B2 JP2021114059A JP2021114059A JP7721992B2 JP 7721992 B2 JP7721992 B2 JP 7721992B2 JP 2021114059 A JP2021114059 A JP 2021114059A JP 2021114059 A JP2021114059 A JP 2021114059A JP 7721992 B2 JP7721992 B2 JP 7721992B2
Authority
JP
Japan
Prior art keywords
movable body
spring
fixed electrode
axis
movable
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021114059A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023010144A (ja
JP2023010144A5 (enrdf_load_stackoverflow
Inventor
敦紀 成瀬
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2021114059A priority Critical patent/JP7721992B2/ja
Publication of JP2023010144A publication Critical patent/JP2023010144A/ja
Publication of JP2023010144A5 publication Critical patent/JP2023010144A5/ja
Application granted granted Critical
Publication of JP7721992B2 publication Critical patent/JP7721992B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Landscapes

  • Pressure Sensors (AREA)
JP2021114059A 2021-07-09 2021-07-09 慣性センサー及び慣性計測装置 Active JP7721992B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2021114059A JP7721992B2 (ja) 2021-07-09 2021-07-09 慣性センサー及び慣性計測装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021114059A JP7721992B2 (ja) 2021-07-09 2021-07-09 慣性センサー及び慣性計測装置

Publications (3)

Publication Number Publication Date
JP2023010144A JP2023010144A (ja) 2023-01-20
JP2023010144A5 JP2023010144A5 (enrdf_load_stackoverflow) 2024-05-17
JP7721992B2 true JP7721992B2 (ja) 2025-08-13

Family

ID=85118197

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021114059A Active JP7721992B2 (ja) 2021-07-09 2021-07-09 慣性センサー及び慣性計測装置

Country Status (1)

Country Link
JP (1) JP7721992B2 (enrdf_load_stackoverflow)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011112620A (ja) 2009-11-30 2011-06-09 Mitsubishi Electric Corp 加速度センサ
JP2014153363A (ja) 2013-02-06 2014-08-25 Freescale Semiconductor Inc スティクション耐性ｍｅｍｓデバイスおよび動作方法
US20150002982A1 (en) 2013-06-28 2015-01-01 Maxim Integrated Products, Inc. Recovery system and methods for MEMS devices
JP2015152553A (ja) 2014-02-19 2015-08-24 セイコーエプソン株式会社 機能デバイス、電子機器および移動体
JP2015206709A (ja) 2014-04-22 2015-11-19 セイコーエプソン株式会社 機能素子、物理量センサー、電子機器及び移動体
JP2018163137A (ja) 2017-03-27 2018-10-18 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
US20190120872A1 (en) 2017-10-24 2019-04-25 Nxp Usa, Inc. Mems device with two-stage motion limit structure
JP2019132736A (ja) 2018-01-31 2019-08-08 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP2020183870A (ja) 2019-04-26 2020-11-12 セイコーエプソン株式会社 慣性センサー、電子機器および移動体

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2019060688A (ja) * 2017-09-26 2019-04-18 セイコーエプソン株式会社 物理量検出回路、物理量検出装置、慣性計測装置、移動体測位装置、携帯型電子機器、電子機器及び移動体
JP2019066301A (ja) * 2017-09-29 2019-04-25 株式会社東海理化電機製作所 通信端末
JP2020085744A (ja) * 2018-11-28 2020-06-04 セイコーエプソン株式会社 加速度センサー、電子機器および移動体

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2011112620A (ja) 2009-11-30 2011-06-09 Mitsubishi Electric Corp 加速度センサ
JP2014153363A (ja) 2013-02-06 2014-08-25 Freescale Semiconductor Inc スティクション耐性ｍｅｍｓデバイスおよび動作方法
US20150002982A1 (en) 2013-06-28 2015-01-01 Maxim Integrated Products, Inc. Recovery system and methods for MEMS devices
JP2015152553A (ja) 2014-02-19 2015-08-24 セイコーエプソン株式会社 機能デバイス、電子機器および移動体
JP2015206709A (ja) 2014-04-22 2015-11-19 セイコーエプソン株式会社 機能素子、物理量センサー、電子機器及び移動体
JP2018163137A (ja) 2017-03-27 2018-10-18 セイコーエプソン株式会社 物理量センサー、電子機器および移動体
US20190120872A1 (en) 2017-10-24 2019-04-25 Nxp Usa, Inc. Mems device with two-stage motion limit structure
JP2019132736A (ja) 2018-01-31 2019-08-08 セイコーエプソン株式会社 物理量センサー、物理量センサーデバイス、電子機器および移動体
JP2020183870A (ja) 2019-04-26 2020-11-12 セイコーエプソン株式会社 慣性センサー、電子機器および移動体

Also Published As

Publication number Publication date
JP2023010144A (ja) 2023-01-20

Similar Documents

Publication Publication Date Title
JP7694182B2 (ja) 慣性センサー及び慣性計測装置
JP7718550B2 (ja) 物理量センサーの製造方法
JP2023064878A (ja) 慣性計測装置
US20230194563A1 (en) Inertial measurement device
CN117928507A (zh) 物理量传感器、物理量传感器器件以及惯性测量装置
US20220155335A1 (en) Physical Quantity Sensor, Physical Quantity Sensor Device, and Inertial Measurement Unit
JP7721992B2 (ja) 慣性センサー及び慣性計測装置
US20230349945A1 (en) Inertial sensor and inertial measurement unit
JP2022026565A (ja) 慣性センサー及び慣性計測装置
JP2022044165A (ja) 慣性センサー及び慣性計測装置
CN116358510A (zh) 传感器模块
CN115342795B (zh) 惯性传感器以及惯性测量装置
JP7635547B2 (ja) 物理量センサー、慣性計測装置、及び物理量センサーの製造方法
US20240035823A1 (en) Inertial Measurement Device And Method For Manufacturing Inertial Measurement Device
JP2022081956A (ja) 物理量センサー、物理量センサーデバイス及び慣性計測装置
JP2022052997A (ja) 物理量センサー及び慣性計測装置
JP7521312B2 (ja) 慣性センサー、及び慣性センサーの製造方法
JP7609194B2 (ja) 電子デバイス、電子機器および移動体
JP2022187133A (ja) 慣性センサー及び慣性計測装置
JP2024003931A (ja) 慣性センサー、慣性センサーの製造方法、及び慣性計測装置
US11693023B2 (en) Inertial sensor and inertial measurement unit
JP2022022024A (ja) 慣性センサー、慣性計測装置、及び慣性センサーの製造方法
US20230221346A1 (en) Inertial sensor, method for manufacturing inertial sensor, and inertial measurement unit
JP2022079129A (ja) 慣性センサー、慣性計測装置、及び慣性センサーの製造方法
CN120348902A (zh) 惯性传感器和电子部件

Legal Events

Date Code Title Description
RD04 Notification of resignation of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7424

Effective date: 20210917

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20211104

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240509

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240509

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20250225

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20250311

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20250424

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20250701

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20250714

R150 Certificate of patent or registration of utility model

Ref document number: 7721992

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150