JP7706022B2 - 荷電粒子線装置 - Google Patents

荷電粒子線装置 Download PDF

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Publication number
JP7706022B2
JP7706022B2 JP2024534840A JP2024534840A JP7706022B2 JP 7706022 B2 JP7706022 B2 JP 7706022B2 JP 2024534840 A JP2024534840 A JP 2024534840A JP 2024534840 A JP2024534840 A JP 2024534840A JP 7706022 B2 JP7706022 B2 JP 7706022B2
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Prior art keywords
electrode
potential
acceleration
short
charged particle
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Japanese (ja)
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JPWO2024018568A1 (enrdf_load_stackoverflow
Inventor
貴 久保
稔 酒巻
裕 森田
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Hitachi High Tech Corp
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Hitachi High Tech Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/248—Components associated with high voltage supply

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2024534840A 2022-07-20 2022-07-20 荷電粒子線装置 Active JP7706022B2 (ja)

Applications Claiming Priority (1)

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PCT/JP2022/028259 WO2024018568A1 (ja) 2022-07-20 2022-07-20 荷電粒子線装置

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JPWO2024018568A1 JPWO2024018568A1 (enrdf_load_stackoverflow) 2024-01-25
JP7706022B2 true JP7706022B2 (ja) 2025-07-10

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JP2024534840A Active JP7706022B2 (ja) 2022-07-20 2022-07-20 荷電粒子線装置

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JP (1) JP7706022B2 (enrdf_load_stackoverflow)
WO (1) WO2024018568A1 (enrdf_load_stackoverflow)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017204375A (ja) 2016-05-11 2017-11-16 日本電子株式会社 電子顕微鏡および電子顕微鏡の制御方法
JP2019050199A (ja) 2017-09-07 2019-03-28 日本電子株式会社 電子銃および電子線装置
JP2019139964A (ja) 2018-02-09 2019-08-22 日本電子株式会社 電子顕微鏡および電子顕微鏡の制御方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6381743A (ja) * 1986-09-26 1988-04-12 Jeol Ltd 電界放射型電子銃
JPH0740478B2 (ja) * 1989-09-13 1995-05-01 日本電子株式会社 電極短絡機構
JPH1125900A (ja) * 1997-07-07 1999-01-29 Hitachi Ltd 多段加速形荷電粒子ビーム発生装置及びそれを用いた走査電子顕微鏡

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2017204375A (ja) 2016-05-11 2017-11-16 日本電子株式会社 電子顕微鏡および電子顕微鏡の制御方法
JP2019050199A (ja) 2017-09-07 2019-03-28 日本電子株式会社 電子銃および電子線装置
JP2019139964A (ja) 2018-02-09 2019-08-22 日本電子株式会社 電子顕微鏡および電子顕微鏡の制御方法

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WO2024018568A1 (ja) 2024-01-25
JPWO2024018568A1 (enrdf_load_stackoverflow) 2024-01-25

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