JP7691035B1 - 圧電振動素子 - Google Patents

圧電振動素子 Download PDF

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Publication number
JP7691035B1
JP7691035B1 JP2024562375A JP2024562375A JP7691035B1 JP 7691035 B1 JP7691035 B1 JP 7691035B1 JP 2024562375 A JP2024562375 A JP 2024562375A JP 2024562375 A JP2024562375 A JP 2024562375A JP 7691035 B1 JP7691035 B1 JP 7691035B1
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Japan
Prior art keywords
excitation electrode
main surface
electrode
excitation
thickness
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JP2024562375A
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English (en)
Japanese (ja)
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JPWO2025027927A1 (https=
JPWO2025027927A5 (https=
Inventor
俊雄 西村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
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Murata Manufacturing Co Ltd
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Publication date
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Publication of JPWO2025027927A5 publication Critical patent/JPWO2025027927A5/ja
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Classifications

    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/19—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator consisting of quartz
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/02007—Details of bulk acoustic wave devices
    • H03H9/02157—Dimensional parameters, e.g. ratio between two dimension parameters, length, width or thickness
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1014—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device
    • H03H9/1021—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by a frame built on a substrate and a cap, the frame having no mechanical contact with the BAW device the BAW device being of the cantilever type
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/05—Holders or supports
    • H03H9/10—Mounting in enclosures
    • H03H9/1007—Mounting in enclosures for bulk acoustic wave [BAW] devices
    • H03H9/1035—Mounting in enclosures for bulk acoustic wave [BAW] devices the enclosure being defined by two sealing substrates sandwiching the piezoelectric layer of the BAW device
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/131—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials consisting of a multilayered structure
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/02—Details
    • H03H9/125—Driving means, e.g. electrodes, coils
    • H03H9/13—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials
    • H03H9/132—Driving means, e.g. electrodes, coils for networks consisting of piezoelectric or electrostrictive materials characterized by a particular shape
    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
    • H03H9/00—Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
    • H03H9/15—Constructional features of resonators consisting of piezoelectric or electrostrictive material
    • H03H9/17—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator
    • H03H9/177—Constructional features of resonators consisting of piezoelectric or electrostrictive material having a single resonator of the energy-trap type

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  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
JP2024562375A 2023-07-31 2024-03-18 圧電振動素子 Active JP7691035B1 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023124943 2023-07-31
JP2023124943 2023-07-31
PCT/JP2024/010616 WO2025027927A1 (ja) 2023-07-31 2024-03-18 圧電振動素子

Publications (3)

Publication Number Publication Date
JPWO2025027927A1 JPWO2025027927A1 (https=) 2025-02-06
JP7691035B1 true JP7691035B1 (ja) 2025-06-11
JPWO2025027927A5 JPWO2025027927A5 (https=) 2025-07-08

Family

ID=94394983

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2024562375A Active JP7691035B1 (ja) 2023-07-31 2024-03-18 圧電振動素子

Country Status (4)

Country Link
US (1) US20250183872A1 (https=)
JP (1) JP7691035B1 (https=)
CN (1) CN119769028A (https=)
WO (1) WO2025027927A1 (https=)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013207338A (ja) * 2012-03-27 2013-10-07 Seiko Epson Corp 振動素子、振動子、電子デバイス、及び電子機器
JP2015065554A (ja) * 2013-09-25 2015-04-09 日本電波工業株式会社 水晶振動片及び水晶デバイス
WO2019054349A1 (ja) * 2017-09-13 2019-03-21 株式会社村田製作所 水晶振動素子およびその製造方法
WO2021045094A1 (ja) * 2019-09-04 2021-03-11 株式会社村田製作所 圧電振動子及びその製造方法
JP2022153702A (ja) * 2021-03-30 2022-10-13 株式会社大真空 圧電フィルタ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013207338A (ja) * 2012-03-27 2013-10-07 Seiko Epson Corp 振動素子、振動子、電子デバイス、及び電子機器
JP2015065554A (ja) * 2013-09-25 2015-04-09 日本電波工業株式会社 水晶振動片及び水晶デバイス
WO2019054349A1 (ja) * 2017-09-13 2019-03-21 株式会社村田製作所 水晶振動素子およびその製造方法
WO2021045094A1 (ja) * 2019-09-04 2021-03-11 株式会社村田製作所 圧電振動子及びその製造方法
JP2022153702A (ja) * 2021-03-30 2022-10-13 株式会社大真空 圧電フィルタ

Also Published As

Publication number Publication date
JPWO2025027927A1 (https=) 2025-02-06
WO2025027927A1 (ja) 2025-02-06
US20250183872A1 (en) 2025-06-05
CN119769028A (zh) 2025-04-04

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