JP7664427B2 - 荷電粒子線装置及びそれを用いた検査方法 - Google Patents

荷電粒子線装置及びそれを用いた検査方法 Download PDF

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Publication number
JP7664427B2
JP7664427B2 JP2023574924A JP2023574924A JP7664427B2 JP 7664427 B2 JP7664427 B2 JP 7664427B2 JP 2023574924 A JP2023574924 A JP 2023574924A JP 2023574924 A JP2023574924 A JP 2023574924A JP 7664427 B2 JP7664427 B2 JP 7664427B2
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sample
electron
charged particle
signal
amount
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JPWO2023139668A1 (https=
Inventor
奈浦 寺尾
俊之 横須賀
智仁 中野
源 川野
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Hitachi High Tech Corp
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Hitachi High Tech Corp
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/22—Optical, image processing or photographic arrangements associated with the tube
    • H01J37/222—Image processing arrangements associated with the tube
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/244—Detectors; Associated components or circuits therefor
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/26—Electron or ion microscopes
    • H01J2237/28—Scanning microscopes
    • H01J2237/2813—Scanning microscopes characterised by the application
    • H01J2237/2817—Pattern inspection

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2023574924A 2022-01-19 2022-01-19 荷電粒子線装置及びそれを用いた検査方法 Active JP7664427B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2022/001684 WO2023139668A1 (ja) 2022-01-19 2022-01-19 荷電粒子線装置及びそれを用いた検査方法

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JPWO2023139668A1 JPWO2023139668A1 (https=) 2023-07-27
JP7664427B2 true JP7664427B2 (ja) 2025-04-17

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JP2023574924A Active JP7664427B2 (ja) 2022-01-19 2022-01-19 荷電粒子線装置及びそれを用いた検査方法

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JP (1) JP7664427B2 (https=)
DE (1) DE112022004986T5 (https=)
TW (1) TWI843354B (https=)
WO (1) WO2023139668A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240062986A1 (en) * 2021-03-01 2024-02-22 Hitachi High-Tech Corporation Charged Particle Beam Device

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006162609A (ja) 2005-11-18 2006-06-22 Hitachi Ltd 電子線を用いたパターン検査方法及びその装置
JP2010062106A (ja) 2008-09-08 2010-03-18 Hitachi High-Technologies Corp 走査型荷電粒子顕微鏡装置及び走査型荷電粒子顕微鏡装置で取得した画像の処理方法
JP2011192498A (ja) 2010-03-15 2011-09-29 Hitachi High-Technologies Corp 検査装置および検査方法
US20190037682A1 (en) 2017-07-28 2019-01-31 Wuhan China Star Optoelectronics Technology Co., Ltd. Cof flexible circuit board and touch display panel
WO2021053824A1 (ja) 2019-09-20 2021-03-25 株式会社日立ハイテク 荷電粒子線装置

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0163063U (https=) * 1987-10-16 1989-04-24
JP3688160B2 (ja) * 1999-09-17 2005-08-24 株式会社日立製作所 走査電子顕微鏡
DE10236738B9 (de) * 2002-08-09 2010-07-15 Carl Zeiss Nts Gmbh Elektronenmikroskopiesystem und Elektronenmikroskopieverfahren
JP4969231B2 (ja) 2006-12-19 2012-07-04 株式会社日立ハイテクノロジーズ 試料電位情報検出方法及び荷電粒子線装置
JP6121651B2 (ja) 2012-04-04 2017-04-26 株式会社日立ハイテクノロジーズ 電子顕微鏡、電子顕微鏡の観察条件の設定方法、および電子顕微鏡による観察方法
JP7201523B2 (ja) * 2018-06-07 2023-01-10 株式会社ニューフレアテクノロジー マルチ電子ビーム偏向器及びマルチビーム画像取得装置
US11791130B2 (en) * 2019-01-23 2023-10-17 Hitachi High-Tech Corporation Electron beam observation device, electron beam observation system, and image correcting method and method for calculating correction factor for image correction in electron beam observation device
JP7148467B2 (ja) 2019-08-30 2022-10-05 株式会社日立ハイテク 荷電粒子線装置

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006162609A (ja) 2005-11-18 2006-06-22 Hitachi Ltd 電子線を用いたパターン検査方法及びその装置
JP2010062106A (ja) 2008-09-08 2010-03-18 Hitachi High-Technologies Corp 走査型荷電粒子顕微鏡装置及び走査型荷電粒子顕微鏡装置で取得した画像の処理方法
JP2011192498A (ja) 2010-03-15 2011-09-29 Hitachi High-Technologies Corp 検査装置および検査方法
US20190037682A1 (en) 2017-07-28 2019-01-31 Wuhan China Star Optoelectronics Technology Co., Ltd. Cof flexible circuit board and touch display panel
WO2021053824A1 (ja) 2019-09-20 2021-03-25 株式会社日立ハイテク 荷電粒子線装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20240062986A1 (en) * 2021-03-01 2024-02-22 Hitachi High-Tech Corporation Charged Particle Beam Device

Also Published As

Publication number Publication date
TW202331243A (zh) 2023-08-01
JPWO2023139668A1 (https=) 2023-07-27
TWI843354B (zh) 2024-05-21
DE112022004986T5 (de) 2024-08-01
WO2023139668A1 (ja) 2023-07-27

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