JP7659515B2 - センサ及びキャパシタ装置 - Google Patents

センサ及びキャパシタ装置 Download PDF

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Publication number
JP7659515B2
JP7659515B2 JP2022031671A JP2022031671A JP7659515B2 JP 7659515 B2 JP7659515 B2 JP 7659515B2 JP 2022031671 A JP2022031671 A JP 2022031671A JP 2022031671 A JP2022031671 A JP 2022031671A JP 7659515 B2 JP7659515 B2 JP 7659515B2
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Japan
Prior art keywords
deformation
base
sensor
movable
fixed
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JP2022031671A
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English (en)
Japanese (ja)
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JP2023127778A5 (https=
JP2023127778A (ja
Inventor
直樹 平松
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Toshiba Corp
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Toshiba Corp
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Priority to JP2022031671A priority Critical patent/JP7659515B2/ja
Priority to US17/863,366 priority patent/US11774393B2/en
Publication of JP2023127778A publication Critical patent/JP2023127778A/ja
Publication of JP2023127778A5 publication Critical patent/JP2023127778A5/ja
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/24—Investigating the presence of flaws
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/226—Construction of measuring vessels; Electrodes therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/02—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance
    • G01N27/22—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance
    • G01N27/221—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties
    • G01N2027/222—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating impedance by investigating capacitance by investigating the dielectric properties for analysing gases
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00—Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/0004—Gaseous mixtures, e.g. polluted air
    • G01N33/0009—General constructional details of gas analysers, e.g. portable test equipment
    • G01N33/0027—General constructional details of gas analysers, e.g. portable test equipment concerning the detector
    • G01N33/0036—General constructional details of gas analysers, e.g. portable test equipment concerning the detector specially adapted to detect a particular component
    • G01N33/005—H2

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  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
JP2022031671A 2022-03-02 2022-03-02 センサ及びキャパシタ装置 Active JP7659515B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2022031671A JP7659515B2 (ja) 2022-03-02 2022-03-02 センサ及びキャパシタ装置
US17/863,366 US11774393B2 (en) 2022-03-02 2022-07-12 Sensor and capacitor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022031671A JP7659515B2 (ja) 2022-03-02 2022-03-02 センサ及びキャパシタ装置

Publications (3)

Publication Number Publication Date
JP2023127778A JP2023127778A (ja) 2023-09-14
JP2023127778A5 JP2023127778A5 (https=) 2024-05-22
JP7659515B2 true JP7659515B2 (ja) 2025-04-09

Family

ID=87851392

Family Applications (1)

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JP2022031671A Active JP7659515B2 (ja) 2022-03-02 2022-03-02 センサ及びキャパシタ装置

Country Status (2)

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US (1) US11774393B2 (https=)
JP (1) JP7659515B2 (https=)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040257745A1 (en) 2001-10-25 2004-12-23 Philippe Robert Variable high-ratio and low-voltage actuation micro-capacitor
US20060158484A1 (en) 2005-01-14 2006-07-20 Greywall Dennis S Thermal actuator for a MEMS device
JP2008039658A (ja) 2006-08-09 2008-02-21 Canon Inc 可燃性ガス検出器、可燃性ガス検出器の製造方法、及び可燃性ガス検出器を搭載した燃料電池システム
JP2012176445A (ja) 2011-02-25 2012-09-13 Murata Mfg Co Ltd Ｍｅｍｓアクチュエータおよび可変容量素子
WO2012131911A1 (ja) 2011-03-29 2012-10-04 富士通株式会社 電子デバイスとその製造方法
US20140211366A1 (en) 2012-09-20 2014-07-31 Wispry, Inc. Micro-electro-mechanical system (mems) variable capacitor apparatuses and related methods
JP2019056607A (ja) 2017-09-20 2019-04-11 株式会社東芝 ガスセンサおよびその製造方法
JP2021060330A (ja) 2019-10-09 2021-04-15 株式会社東芝 センサ及びセンサの校正方法
JP2022019147A (ja) 2020-07-17 2022-01-27 株式会社東芝 センサ及びセンサモジュール

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2016205353A1 (en) * 2015-06-15 2016-12-22 Purdue Research Foundation Microelectromechanical gas sensor based on knudsen thermal force
JP6308605B1 (ja) * 2017-03-06 2018-04-11 株式会社トライフォース・マネジメント 力覚センサ
CN107589155A (zh) * 2017-09-12 2018-01-16 华南师范大学 一种电容式传感器及其制备方法
JP6926040B2 (ja) * 2018-09-10 2021-08-25 株式会社東芝 水素センサ、水素検出方法およびプログラム

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20040257745A1 (en) 2001-10-25 2004-12-23 Philippe Robert Variable high-ratio and low-voltage actuation micro-capacitor
US20060158484A1 (en) 2005-01-14 2006-07-20 Greywall Dennis S Thermal actuator for a MEMS device
JP2008039658A (ja) 2006-08-09 2008-02-21 Canon Inc 可燃性ガス検出器、可燃性ガス検出器の製造方法、及び可燃性ガス検出器を搭載した燃料電池システム
JP2012176445A (ja) 2011-02-25 2012-09-13 Murata Mfg Co Ltd Ｍｅｍｓアクチュエータおよび可変容量素子
WO2012131911A1 (ja) 2011-03-29 2012-10-04 富士通株式会社 電子デバイスとその製造方法
US20140211366A1 (en) 2012-09-20 2014-07-31 Wispry, Inc. Micro-electro-mechanical system (mems) variable capacitor apparatuses and related methods
JP2019056607A (ja) 2017-09-20 2019-04-11 株式会社東芝 ガスセンサおよびその製造方法
JP2021060330A (ja) 2019-10-09 2021-04-15 株式会社東芝 センサ及びセンサの校正方法
JP2022019147A (ja) 2020-07-17 2022-01-27 株式会社東芝 センサ及びセンサモジュール

Also Published As

Publication number Publication date
US20230280299A1 (en) 2023-09-07
JP2023127778A (ja) 2023-09-14
US11774393B2 (en) 2023-10-03

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