JP7648410B2 - ３次元情報の決定 - Google Patents

３次元情報の決定 Download PDF

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JP7648410B2
JP7648410B2 JP2021043156A JP2021043156A JP7648410B2 JP 7648410 B2 JP7648410 B2 JP 7648410B2 JP 2021043156 A JP2021043156 A JP 2021043156A JP 2021043156 A JP2021043156 A JP 2021043156A JP 7648410 B2 JP7648410 B2 JP 7648410B2
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レヴァント アンナ
ビストリッツァー ラファエル
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アプライド マテリアルズ イスラエル リミテッド
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    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0004—Industrial image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/97—Determining parameters from multiple pictures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/04—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring contours or curvatures
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F18/00—Pattern recognition
    • G06F18/20—Analysing
    • G06F18/24—Classification techniques
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T17/00—Three dimensional [3D] modelling, e.g. data description of 3D objects
    • G06T17/20—Finite element generation, e.g. wire-frame surface description, tesselation
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/0002—Inspection of images, e.g. flaw detection
    • G06T7/0012—Biomedical image inspection
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T7/00—Image analysis
    • G06T7/50—Depth or shape recovery
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V10/00—Arrangements for image or video recognition or understanding
    • G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
    • G06V10/77—Processing image or video features in feature spaces; using data integration or data reduction, e.g. principal component analysis [PCA] or independent component analysis [ICA] or self-organising maps [SOM]; Blind source separation
    • G06V10/774—Generating sets of training patterns; Bootstrap methods, e.g. bagging or boosting
    • G06V10/7747—Organisation of the process, e.g. bagging or boosting
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V20/00—Scenes; Scene-specific elements
    • G06V20/60—Type of objects
    • G06V20/64—Three-dimensional objects
    • G06V20/653—Three-dimensional objects by matching three-dimensional models, e.g. conformal mapping of Riemann surfaces
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/10—Image acquisition modality
    • G06T2207/10056—Microscopic image
    • G06T2207/10061—Microscopic image from scanning electron microscope
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20081—Training; Learning
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/20—Special algorithmic details
    • G06T2207/20084—Artificial neural networks [ANN]
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
    • G06T2207/00—Indexing scheme for image analysis or image enhancement
    • G06T2207/30—Subject of image; Context of image processing
    • G06T2207/30108—Industrial image inspection
    • G06T2207/30148—Semiconductor; IC; Wafer
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V2201/00—Indexing scheme relating to image or video recognition or understanding
    • G06V2201/06—Recognition of objects for industrial automation
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
    • G06V2201/00—Indexing scheme relating to image or video recognition or understanding
    • G06V2201/12—Acquisition of 3D measurements of objects

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  • Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Software Systems (AREA)
  • Data Mining & Analysis (AREA)
  • Evolutionary Computation (AREA)
  • Artificial Intelligence (AREA)
  • Multimedia (AREA)
  • Medical Informatics (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Quality & Reliability (AREA)
  • Evolutionary Biology (AREA)
  • General Engineering & Computer Science (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • Bioinformatics & Computational Biology (AREA)
  • Computing Systems (AREA)
  • Databases & Information Systems (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Radiology & Medical Imaging (AREA)
  • Computer Graphics (AREA)
  • Geometry (AREA)
  • Electromagnetism (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP2021043156A 2020-03-17 2021-03-17 ３次元情報の決定 Active JP7648410B2 (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/821,831 2020-03-17
US16/821,831 US11321835B2 (en) 2020-03-17 2020-03-17 Determining three dimensional information

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JP2021166284A JP2021166284A (ja) 2021-10-14
JP2021166284A5 JP2021166284A5 (enExample) 2024-03-27
JP7648410B2 true JP7648410B2 (ja) 2025-03-18

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US (1) US11321835B2 (enExample)
JP (1) JP7648410B2 (enExample)
KR (1) KR102765100B1 (enExample)
CN (1) CN113405493B (enExample)
TW (1) TWI859429B (enExample)

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US11288174B2 (en) 2020-02-19 2022-03-29 Applied Materials Israel Ltd. Testing a code using real time analysis
US11443420B2 (en) * 2020-12-28 2022-09-13 Applied Materials Israel Ltd. Generating a metrology recipe usable for examination of a semiconductor specimen
US12480898B2 (en) 2022-09-01 2025-11-25 Applied Materials Israel Ltd. Z-profiling of wafers based on X-ray measurements
JP7754058B2 (ja) * 2022-11-11 2025-10-15 トヨタ自動車株式会社 情報処理装置、情報処理方法、及び情報処理プログラム

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JP3961657B2 (ja) * 1998-03-03 2007-08-22 株式会社東芝 パターン寸法測定方法
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US7764824B2 (en) * 2003-07-18 2010-07-27 Applied Materials Israel, Ltd. Method for defect detection and process monitoring based on SEM images
KR101128558B1 (ko) * 2003-10-08 2012-03-26 어플라이드 머티리얼즈 이스라엘 리미티드 측정 시스템 및 방법
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JP2011027461A (ja) 2009-07-22 2011-02-10 Renesas Electronics Corp パターン形状計測方法、半導体装置の製造方法、およびプロセス制御システム
WO2019198143A1 (ja) 2018-04-10 2019-10-17 株式会社日立製作所 加工レシピ生成装置

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Publication number Publication date
TWI859429B (zh) 2024-10-21
KR20210117195A (ko) 2021-09-28
CN113405493B (zh) 2023-10-24
US11321835B2 (en) 2022-05-03
US20210295499A1 (en) 2021-09-23
KR102765100B1 (ko) 2025-02-11
JP2021166284A (ja) 2021-10-14
CN113405493A (zh) 2021-09-17
TW202207160A (zh) 2022-02-16

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