JP7632597B2 - 流体制御装置 - Google Patents

流体制御装置 Download PDF

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Publication number
JP7632597B2
JP7632597B2 JP2023510794A JP2023510794A JP7632597B2 JP 7632597 B2 JP7632597 B2 JP 7632597B2 JP 2023510794 A JP2023510794 A JP 2023510794A JP 2023510794 A JP2023510794 A JP 2023510794A JP 7632597 B2 JP7632597 B2 JP 7632597B2
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JP
Japan
Prior art keywords
piezoelectric pump
connecting pipe
inlet
tube
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023510794A
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English (en)
Japanese (ja)
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JPWO2022209704A5 (https=
JPWO2022209704A1 (https=
Inventor
洋次 篠原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Murata Manufacturing Co Ltd
Original Assignee
Murata Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co Ltd filed Critical Murata Manufacturing Co Ltd
Publication of JPWO2022209704A1 publication Critical patent/JPWO2022209704A1/ja
Publication of JPWO2022209704A5 publication Critical patent/JPWO2022209704A5/ja
Application granted granted Critical
Publication of JP7632597B2 publication Critical patent/JP7632597B2/ja
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/08—Cooling; Heating; Preventing freezing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
    • F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B9/00—Piston machines or pumps characterised by the driving or driven means to or from their working members

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
JP2023510794A 2021-04-02 2022-03-10 流体制御装置 Active JP7632597B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021063465 2021-04-02
JP2021063465 2021-04-02
PCT/JP2022/010565 WO2022209704A1 (ja) 2021-04-02 2022-03-10 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022209704A1 JPWO2022209704A1 (https=) 2022-10-06
JPWO2022209704A5 JPWO2022209704A5 (https=) 2023-11-17
JP7632597B2 true JP7632597B2 (ja) 2025-02-19

Family

ID=83456047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023510794A Active JP7632597B2 (ja) 2021-04-02 2022-03-10 流体制御装置

Country Status (2)

Country Link
JP (1) JP7632597B2 (https=)
WO (1) WO2022209704A1 (https=)

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003075037A (ja) 2001-08-31 2003-03-12 Hitachi Ltd ピエゾポンプを用いた電子機器の冷却システム
JP2003286940A (ja) 2002-03-27 2003-10-10 Minolta Co Ltd 流体輸送システム
US20150292497A1 (en) 2014-04-10 2015-10-15 Stichting Nationaal Lucht-En Ruimtevaart Laboratorium Piezo pump and pressurized circuit provided therewith
WO2019198305A1 (ja) 2018-04-10 2019-10-17 株式会社村田製作所 流体制御装置
WO2019202831A1 (ja) 2018-04-19 2019-10-24 株式会社村田製作所 ポンプ装置
WO2020217934A1 (ja) 2019-04-25 2020-10-29 株式会社村田製作所 ポンプ装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003075037A (ja) 2001-08-31 2003-03-12 Hitachi Ltd ピエゾポンプを用いた電子機器の冷却システム
JP2003286940A (ja) 2002-03-27 2003-10-10 Minolta Co Ltd 流体輸送システム
US20150292497A1 (en) 2014-04-10 2015-10-15 Stichting Nationaal Lucht-En Ruimtevaart Laboratorium Piezo pump and pressurized circuit provided therewith
WO2019198305A1 (ja) 2018-04-10 2019-10-17 株式会社村田製作所 流体制御装置
WO2019202831A1 (ja) 2018-04-19 2019-10-24 株式会社村田製作所 ポンプ装置
WO2020217934A1 (ja) 2019-04-25 2020-10-29 株式会社村田製作所 ポンプ装置

Also Published As

Publication number Publication date
WO2022209704A1 (ja) 2022-10-06
JPWO2022209704A1 (https=) 2022-10-06

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