JPWO2022209704A5 - - Google Patents

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Publication number
JPWO2022209704A5
JPWO2022209704A5 JP2023510794A JP2023510794A JPWO2022209704A5 JP WO2022209704 A5 JPWO2022209704 A5 JP WO2022209704A5 JP 2023510794 A JP2023510794 A JP 2023510794A JP 2023510794 A JP2023510794 A JP 2023510794A JP WO2022209704 A5 JPWO2022209704 A5 JP WO2022209704A5
Authority
JP
Japan
Prior art keywords
control device
piezoelectric pump
fluid control
pipe
fluid
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2023510794A
Other languages
English (en)
Japanese (ja)
Other versions
JP7632597B2 (ja
JPWO2022209704A1 (https=
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/JP2022/010565 external-priority patent/WO2022209704A1/ja
Publication of JPWO2022209704A1 publication Critical patent/JPWO2022209704A1/ja
Publication of JPWO2022209704A5 publication Critical patent/JPWO2022209704A5/ja
Application granted granted Critical
Publication of JP7632597B2 publication Critical patent/JP7632597B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2023510794A 2021-04-02 2022-03-10 流体制御装置 Active JP7632597B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021063465 2021-04-02
JP2021063465 2021-04-02
PCT/JP2022/010565 WO2022209704A1 (ja) 2021-04-02 2022-03-10 流体制御装置

Publications (3)

Publication Number Publication Date
JPWO2022209704A1 JPWO2022209704A1 (https=) 2022-10-06
JPWO2022209704A5 true JPWO2022209704A5 (https=) 2023-11-17
JP7632597B2 JP7632597B2 (ja) 2025-02-19

Family

ID=83456047

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023510794A Active JP7632597B2 (ja) 2021-04-02 2022-03-10 流体制御装置

Country Status (2)

Country Link
JP (1) JP7632597B2 (https=)
WO (1) WO2022209704A1 (https=)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003075037A (ja) * 2001-08-31 2003-03-12 Hitachi Ltd ピエゾポンプを用いた電子機器の冷却システム
JP3569267B2 (ja) * 2002-03-27 2004-09-22 コニカミノルタホールディングス株式会社 流体輸送システム
EP2930363B1 (en) * 2014-04-10 2020-06-10 Stichting Nationaal Lucht- en Ruimtevaart Laboratorium Piezoelectric pump assembly and pressurised circuit provided therewith
GB2585497B (en) * 2018-04-10 2022-11-30 Murata Manufacturing Co Fluid control device
CN111727319B (zh) * 2018-04-19 2022-08-30 株式会社村田制作所 泵装置
JPWO2020217934A1 (https=) * 2019-04-25 2020-10-29

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