JP7604343B2 - 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法 - Google Patents

液体吐出装置、液体吐出方法、成形装置及び物品の製造方法 Download PDF

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Publication number
JP7604343B2
JP7604343B2 JP2021151161A JP2021151161A JP7604343B2 JP 7604343 B2 JP7604343 B2 JP 7604343B2 JP 2021151161 A JP2021151161 A JP 2021151161A JP 2021151161 A JP2021151161 A JP 2021151161A JP 7604343 B2 JP7604343 B2 JP 7604343B2
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Japan
Prior art keywords
droplets
substrate
droplet
control unit
liquid
Prior art date
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Active
Application number
JP2021151161A
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English (en)
Japanese (ja)
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JP2023043494A (ja
JP2023043494A5 (https=
Inventor
健太郎 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2021151161A priority Critical patent/JP7604343B2/ja
Priority to TW111128523A priority patent/TW202313311A/zh
Priority to KR1020220112574A priority patent/KR20230040894A/ko
Priority to US17/932,202 priority patent/US12157307B2/en
Publication of JP2023043494A publication Critical patent/JP2023043494A/ja
Publication of JP2023043494A5 publication Critical patent/JP2023043494A5/ja
Application granted granted Critical
Publication of JP7604343B2 publication Critical patent/JP7604343B2/ja
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04535—Control methods or devices therefor, e.g. driver circuits, control circuits involving calculation of drop size, weight or volume
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/015—Ink jet characterised by the jet generation process
    • B41J2/04—Ink jet characterised by the jet generation process generating single droplets or particles on demand
    • B41J2/045—Ink jet characterised by the jet generation process generating single droplets or particles on demand by pressure, e.g. electromechanical transducers
    • B41J2/04501—Control methods or devices therefor, e.g. driver circuits, control circuits
    • B41J2/04581—Control methods or devices therefor, e.g. driver circuits, control circuits controlling heads based on piezoelectric elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/21—Ink jet for multi-colour printing
    • B41J2/2132—Print quality control characterised by dot disposition, e.g. for reducing white stripes or banding
    • B41J2/2135—Alignment of dots

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  • Engineering & Computer Science (AREA)
  • Quality & Reliability (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Coating Apparatus (AREA)
  • Application Of Or Painting With Fluid Materials (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
JP2021151161A 2021-09-16 2021-09-16 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法 Active JP7604343B2 (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2021151161A JP7604343B2 (ja) 2021-09-16 2021-09-16 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法
TW111128523A TW202313311A (zh) 2021-09-16 2022-07-29 液體排放裝置、液體排放方法、膜形成裝置和物品製造方法
KR1020220112574A KR20230040894A (ko) 2021-09-16 2022-09-06 액체 토출 장치, 액체 토출 방법, 막 형성 장치, 및 물품 제조 방법
US17/932,202 US12157307B2 (en) 2021-09-16 2022-09-14 Liquid discharge apparatus, liquid discharge method, film forming apparatus, and article manufacturing method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021151161A JP7604343B2 (ja) 2021-09-16 2021-09-16 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法

Publications (3)

Publication Number Publication Date
JP2023043494A JP2023043494A (ja) 2023-03-29
JP2023043494A5 JP2023043494A5 (https=) 2024-03-25
JP7604343B2 true JP7604343B2 (ja) 2024-12-23

Family

ID=85480213

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021151161A Active JP7604343B2 (ja) 2021-09-16 2021-09-16 液体吐出装置、液体吐出方法、成形装置及び物品の製造方法

Country Status (4)

Country Link
US (1) US12157307B2 (https=)
JP (1) JP7604343B2 (https=)
KR (1) KR20230040894A (https=)
TW (1) TW202313311A (https=)

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006205718A (ja) 2004-12-28 2006-08-10 Seiko Epson Corp 印刷装置、印刷装置制御プログラム及び印刷装置制御方法、並びに印刷用データ生成装置、印刷用データ生成プログラム及び印刷用データ生成方法
JP2010100069A (ja) 2010-02-10 2010-05-06 Seiko Epson Corp 印刷装置
JP2011222705A (ja) 2010-04-08 2011-11-04 Canon Inc インプリント装置およびインプリント基板の製造方法
JP2012045503A (ja) 2010-08-27 2012-03-08 Ricoh Co Ltd 液滴吐出装置、電気・機械変換素子
JP2014103189A (ja) 2012-11-19 2014-06-05 Dainippon Printing Co Ltd インプリント樹脂滴下位置決定方法、インプリント方法及び半導体装置製造方法
JP2017512120A (ja) 2013-12-30 2017-05-18 ノードソン コーポレーションＮｏｒｄｓｏｎ Ｃｏｒｐｏｒａｔｉｏｎ 粘性のある流体のディスペンシングシステムのための較正方法
JP2019075421A (ja) 2017-10-12 2019-05-16 キヤノン株式会社 インプリント装置、インプリント方法、情報処理装置、生成方法、プログラム及び物品の製造方法
JP2019177690A (ja) 2018-03-30 2019-10-17 株式会社リコー 液滴吐出装置およびドット位置調整方法
US20210069976A1 (en) 2019-09-11 2021-03-11 Canon Kabushiki Kaisha Imprint apparatus and method of controlling imprint apparatus

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7648220B2 (en) * 2007-04-23 2010-01-19 Hewlett-Packard Development Company, L.P. Sensing of fluid ejected by drop-on-demand nozzles
JP4811483B2 (ja) * 2009-03-23 2011-11-09 セイコーエプソン株式会社 流体噴射装置

Patent Citations (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006205718A (ja) 2004-12-28 2006-08-10 Seiko Epson Corp 印刷装置、印刷装置制御プログラム及び印刷装置制御方法、並びに印刷用データ生成装置、印刷用データ生成プログラム及び印刷用データ生成方法
JP2010100069A (ja) 2010-02-10 2010-05-06 Seiko Epson Corp 印刷装置
JP2011222705A (ja) 2010-04-08 2011-11-04 Canon Inc インプリント装置およびインプリント基板の製造方法
JP2012045503A (ja) 2010-08-27 2012-03-08 Ricoh Co Ltd 液滴吐出装置、電気・機械変換素子
JP2014103189A (ja) 2012-11-19 2014-06-05 Dainippon Printing Co Ltd インプリント樹脂滴下位置決定方法、インプリント方法及び半導体装置製造方法
JP2017512120A (ja) 2013-12-30 2017-05-18 ノードソン コーポレーションＮｏｒｄｓｏｎ Ｃｏｒｐｏｒａｔｉｏｎ 粘性のある流体のディスペンシングシステムのための較正方法
JP2019075421A (ja) 2017-10-12 2019-05-16 キヤノン株式会社 インプリント装置、インプリント方法、情報処理装置、生成方法、プログラム及び物品の製造方法
JP2019177690A (ja) 2018-03-30 2019-10-17 株式会社リコー 液滴吐出装置およびドット位置調整方法
US20210069976A1 (en) 2019-09-11 2021-03-11 Canon Kabushiki Kaisha Imprint apparatus and method of controlling imprint apparatus
JP2021044407A (ja) 2019-09-11 2021-03-18 キヤノン株式会社 インプリント装置およびインプリント装置の制御方法

Also Published As

Publication number Publication date
KR20230040894A (ko) 2023-03-23
JP2023043494A (ja) 2023-03-29
US20230079890A1 (en) 2023-03-16
TW202313311A (zh) 2023-04-01
US12157307B2 (en) 2024-12-03

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