JP7588580B2 - 酸素センサ及びそれを具備する微小機械電気素子 - Google Patents

酸素センサ及びそれを具備する微小機械電気素子 Download PDF

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Publication number
JP7588580B2
JP7588580B2 JP2021508925A JP2021508925A JP7588580B2 JP 7588580 B2 JP7588580 B2 JP 7588580B2 JP 2021508925 A JP2021508925 A JP 2021508925A JP 2021508925 A JP2021508925 A JP 2021508925A JP 7588580 B2 JP7588580 B2 JP 7588580B2
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electrode
oxygen
solid electrolyte
electrolyte membrane
membrane
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Japanese (ja)
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JPWO2020195681A1 (https=
Inventor
広平 加藤
慎吾 井手
旬春 大山
康博 瀬戸
勇 八島
憲剛 島ノ江
賢 渡邉
昂一 末松
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Kyushu University NUC
Mitsui Kinzoku Co Ltd
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Kyushu University NUC
Mitsui Mining and Smelting Co Ltd
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/403—Cells and electrode assemblies
    • G01N27/406—Cells and probes with solid electrolytes
    • G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
    • G01N27/409—Oxygen concentration cells

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Molecular Biology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Measuring Oxygen Concentration In Cells (AREA)
JP2021508925A 2019-03-22 2020-03-05 酸素センサ及びそれを具備する微小機械電気素子 Active JP7588580B2 (ja)

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JP2024063710A JP7763291B2 (ja) 2019-03-22 2024-04-11 酸素センサ及びそれを具備する微小機械電気素子

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JP2019054098 2019-03-22
JP2019054098 2019-03-22
PCT/JP2020/009431 WO2020195681A1 (ja) 2019-03-22 2020-03-05 酸素センサ及びそれを具備する微小機械電気素子

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JPWO2020195681A1 JPWO2020195681A1 (https=) 2020-10-01
JP7588580B2 true JP7588580B2 (ja) 2024-11-22

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090007637A1 (en) 2007-07-06 2009-01-08 National Taiwan University Of Science & Technology Gas sensor
US20140318960A1 (en) 2013-04-25 2014-10-30 Wisenstech Inc. Micromachined oxygen sensor and method of making the same
WO2016111110A1 (ja) 2015-01-07 2016-07-14 三井金属鉱業株式会社 配向性アパタイト型酸化物イオン伝導体及びその製造方法
WO2017099963A1 (en) 2015-12-09 2017-06-15 Honeywell International Inc. Electrochemical sensor and electronics on a ceramic substrate

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56145342A (en) * 1980-04-14 1981-11-12 Toray Ind Inc Solid-electrolyte oximeter
JPS5797439A (en) * 1980-12-09 1982-06-17 Toray Ind Inc Oxygen sensor
JPS6024445A (ja) * 1983-07-20 1985-02-07 Toyota Motor Corp 空燃比検出器
JPS62129753A (ja) * 1985-11-29 1987-06-12 Yokogawa Electric Corp 固体電解質を用いた分析装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20090007637A1 (en) 2007-07-06 2009-01-08 National Taiwan University Of Science & Technology Gas sensor
US20140318960A1 (en) 2013-04-25 2014-10-30 Wisenstech Inc. Micromachined oxygen sensor and method of making the same
WO2016111110A1 (ja) 2015-01-07 2016-07-14 三井金属鉱業株式会社 配向性アパタイト型酸化物イオン伝導体及びその製造方法
WO2017099963A1 (en) 2015-12-09 2017-06-15 Honeywell International Inc. Electrochemical sensor and electronics on a ceramic substrate

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WO2020195681A1 (ja) 2020-10-01
JP2024074981A (ja) 2024-05-31
JP7763291B2 (ja) 2025-10-31
JPWO2020195681A1 (https=) 2020-10-01

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