JP7583954B2 - 気密端子 - Google Patents

気密端子 Download PDF

Info

Publication number
JP7583954B2
JP7583954B2 JP2023551627A JP2023551627A JP7583954B2 JP 7583954 B2 JP7583954 B2 JP 7583954B2 JP 2023551627 A JP2023551627 A JP 2023551627A JP 2023551627 A JP2023551627 A JP 2023551627A JP 7583954 B2 JP7583954 B2 JP 7583954B2
Authority
JP
Japan
Prior art keywords
annular member
hole
ceramic substrate
terminal according
conductive member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023551627A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023054512A5 (https=
JPWO2023054512A1 (https=
Inventor
遥 大村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Publication of JPWO2023054512A1 publication Critical patent/JPWO2023054512A1/ja
Publication of JPWO2023054512A5 publication Critical patent/JPWO2023054512A5/ja
Application granted granted Critical
Publication of JP7583954B2 publication Critical patent/JP7583954B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01R—ELECTRICALLY-CONDUCTIVE CONNECTIONS; STRUCTURAL ASSOCIATIONS OF A PLURALITY OF MUTUALLY-INSULATED ELECTRICAL CONNECTING ELEMENTS; COUPLING DEVICES; CURRENT COLLECTORS
    • H01R9/00—Structural associations of a plurality of mutually-insulated electrical connecting elements, e.g. terminal strips or terminal blocks; Terminals or binding posts mounted upon a base or in a case; Bases therefor
    • H01R9/16—Fastening of connecting parts to base or case; Insulating connecting parts from base or case
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B17/00—Insulators or insulating bodies characterised by their form
    • H01B17/26—Lead-in insulators; Lead-through insulators
    • H01B17/30—Sealing
    • H01B17/303—Sealing of leads to lead-through insulators
    • H01B17/305—Sealing of leads to lead-through insulators by embedding in glass or ceramic material
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F04D25/0693—Details or arrangements of the wiring

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Ceramic Engineering (AREA)
  • Ceramic Products (AREA)
  • Connections Arranged To Contact A Plurality Of Conductors (AREA)
JP2023551627A 2021-09-29 2022-09-28 気密端子 Active JP7583954B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021159883 2021-09-29
JP2021159883 2021-09-29
PCT/JP2022/036263 WO2023054512A1 (ja) 2021-09-29 2022-09-28 気密端子

Publications (3)

Publication Number Publication Date
JPWO2023054512A1 JPWO2023054512A1 (https=) 2023-04-06
JPWO2023054512A5 JPWO2023054512A5 (https=) 2024-06-19
JP7583954B2 true JP7583954B2 (ja) 2024-11-14

Family

ID=85780754

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023551627A Active JP7583954B2 (ja) 2021-09-29 2022-09-28 気密端子

Country Status (5)

Country Link
US (1) US20240395442A1 (https=)
EP (1) EP4411993A4 (https=)
JP (1) JP7583954B2 (https=)
CN (1) CN118044071A (https=)
WO (1) WO2023054512A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2025070217A1 (ja) * 2023-09-25 2025-04-03 京セラ株式会社 接合体、給電端子および気密端子

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002110265A (ja) 2000-09-29 2002-04-12 Kyocera Corp 真空気密端子および電気ポット
JP2019149304A (ja) 2018-02-27 2019-09-05 京セラ株式会社 密封端子

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5626305Y2 (https=) * 1976-10-12 1981-06-22
JPH1116620A (ja) * 1997-06-23 1999-01-22 Kyocera Corp 気密端子
JP4099025B2 (ja) * 2002-04-12 2008-06-11 京セラ株式会社 セラミック端子
JP7311447B2 (ja) * 2020-03-11 2023-07-19 京セラ株式会社 気密端子

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002110265A (ja) 2000-09-29 2002-04-12 Kyocera Corp 真空気密端子および電気ポット
JP2019149304A (ja) 2018-02-27 2019-09-05 京セラ株式会社 密封端子

Also Published As

Publication number Publication date
US20240395442A1 (en) 2024-11-28
EP4411993A4 (en) 2025-09-03
EP4411993A1 (en) 2024-08-07
WO2023054512A1 (ja) 2023-04-06
CN118044071A (zh) 2024-05-14
JPWO2023054512A1 (https=) 2023-04-06

Similar Documents

Publication Publication Date Title
CN110277342B (zh) 静电吸盘
TWI751444B (zh) 靜電吸盤
US6106960A (en) Joined articles, corrosion-resistant joining materials and process for producing joined articles
US5298745A (en) Multilayer multipole
CN113658774B (zh) 层叠型电感器部件以及层叠型电感器部件的制造方法
TW201939664A (zh) 靜電吸盤
JP7583954B2 (ja) 気密端子
CN108118290B (zh) 掩模及其制造方法
JP2020025101A (ja) 静電チャック
JP7408958B2 (ja) 静電チャック
JP7680556B2 (ja) 気密端子
CN110277343B (zh) 静电吸盘
CN111128837A (zh) 静电吸盘
EP2365742A1 (en) Electrode portion structure
JP6922874B2 (ja) 静電チャック
US20250183083A1 (en) Electrostatic chuck member and electrostatic chuck device
JP3842695B2 (ja) 半導体処理装置
US20250158543A1 (en) Electrostatic chuck member, electrostatic chuck device, and method for manufacturing electrostatic chuck member
US11410867B2 (en) Electrostatic chuck
JP7362030B2 (ja) 静電チャック
JPWO2023054512A5 (https=)
WO2024004778A1 (ja) 半導体製造装置用部材及び静電チャック装置
US20260011501A1 (en) Multilayer ceramic capacitor
JP2022150445A (ja) 絶縁継手、真空容器および粒子加速器
US20250157877A1 (en) Semiconductor substrate

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240328

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20240328

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240730

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240917

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20241008

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20241101

R150 Certificate of patent or registration of utility model

Ref document number: 7583954

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150