JP7582487B2 - 顕微ラマン分光装置 - Google Patents

顕微ラマン分光装置 Download PDF

Info

Publication number
JP7582487B2
JP7582487B2 JP2023539715A JP2023539715A JP7582487B2 JP 7582487 B2 JP7582487 B2 JP 7582487B2 JP 2023539715 A JP2023539715 A JP 2023539715A JP 2023539715 A JP2023539715 A JP 2023539715A JP 7582487 B2 JP7582487 B2 JP 7582487B2
Authority
JP
Japan
Prior art keywords
raman
light
excitation
wavelength
scattered light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2023539715A
Other languages
English (en)
Japanese (ja)
Other versions
JPWO2023013325A5 (https=
JPWO2023013325A1 (https=
Inventor
篠山智生
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Publication of JPWO2023013325A1 publication Critical patent/JPWO2023013325A1/ja
Publication of JPWO2023013325A5 publication Critical patent/JPWO2023013325A5/ja
Priority to JP2024190296A priority Critical patent/JP2025016619A/ja
Application granted granted Critical
Publication of JP7582487B2 publication Critical patent/JP7582487B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/63Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
    • G01N21/65Raman scattering
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0229Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using masks, aperture plates, spatial light modulators or spatial filters, e.g. reflective filters
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0294Multi-channel spectroscopy
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/06Scanning arrangements arrangements for order-selection
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/12Generating the spectrum; Monochromators
    • G01J3/18Generating the spectrum; Monochromators using diffraction elements, e.g. grating
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/2803Investigating the spectrum using photoelectric array detector
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28Investigating the spectrum
    • G01J3/44Raman spectrometry; Scattering spectrometry ; Fluorescence spectrometry
    • G01J3/4412Scattering spectrometry
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B21/00Microscopes
    • G02B21/16Microscopes adapted for ultraviolet illumination ; Fluorescence microscopes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/10Arrangements of light sources specially adapted for spectrometry or colorimetry
    • G01J2003/102Plural sources

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Optics & Photonics (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Microscoopes, Condenser (AREA)
  • Spectrometry And Color Measurement (AREA)
JP2023539715A 2021-08-04 2022-06-30 顕微ラマン分光装置 Active JP7582487B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024190296A JP2025016619A (ja) 2021-08-04 2024-10-30 顕微ラマン分光装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2021127928 2021-08-04
JP2021127928 2021-08-04
PCT/JP2022/026204 WO2023013325A1 (ja) 2021-08-04 2022-06-30 顕微ラマン分光装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024190296A Division JP2025016619A (ja) 2021-08-04 2024-10-30 顕微ラマン分光装置

Publications (3)

Publication Number Publication Date
JPWO2023013325A1 JPWO2023013325A1 (https=) 2023-02-09
JPWO2023013325A5 JPWO2023013325A5 (https=) 2024-03-18
JP7582487B2 true JP7582487B2 (ja) 2024-11-13

Family

ID=85155765

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2023539715A Active JP7582487B2 (ja) 2021-08-04 2022-06-30 顕微ラマン分光装置
JP2024190296A Pending JP2025016619A (ja) 2021-08-04 2024-10-30 顕微ラマン分光装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024190296A Pending JP2025016619A (ja) 2021-08-04 2024-10-30 顕微ラマン分光装置

Country Status (5)

Country Link
US (1) US12480880B2 (https=)
EP (1) EP4382892A4 (https=)
JP (2) JP7582487B2 (https=)
CN (1) CN117859048A (https=)
WO (1) WO2023013325A1 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116625960A (zh) * 2023-05-06 2023-08-22 深圳综合粒子设施研究院 一种基于双针孔的原位光谱测试装置
CN120314282B (zh) * 2025-05-09 2025-10-21 奥谱天成(厦门)光电股份有限公司 一种libs与拉曼光谱联用系统

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012003198A (ja) 2010-06-21 2012-01-05 Olympus Corp 顕微鏡
JP2021096359A (ja) 2019-12-17 2021-06-24 日本分光株式会社 蛍光観察機能を備えるラマン顕微装置
US20210215537A1 (en) 2018-05-16 2021-07-15 Universite de Bordeaux Composite multispectral raman spectroscopy method and device

Family Cites Families (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11142240A (ja) * 1997-11-11 1999-05-28 Jasco Corp 分光装置
JP4565119B2 (ja) 2004-10-18 2010-10-20 学校法人早稲田大学 ラマン分光装置
JP5255750B2 (ja) * 2005-12-13 2013-08-07 ライカ マイクロシステムス ツェーエムエス ゲーエムベーハー 検出器
WO2007081691A2 (en) * 2006-01-04 2007-07-19 Chemimage Corporation Method and apparatus for dense spectrum unmixing and image reconstruction of a sample
DE102006047913B4 (de) 2006-10-06 2013-08-08 Carl Zeiss Microscopy Gmbh Hochempfindliche spektralanalytische Einheit
JP2008268387A (ja) * 2007-04-18 2008-11-06 Nidec Tosok Corp 共焦点顕微鏡
JP5307629B2 (ja) * 2009-05-22 2013-10-02 オリンパス株式会社 走査型顕微鏡装置
JP2011141311A (ja) * 2010-01-05 2011-07-21 Nikon Corp 多光子顕微鏡
WO2014060118A1 (en) * 2012-10-16 2014-04-24 Avantes Holding B.V. Dual beam device for simultaneous measurement of spectrum and polarization of light
SE539001C2 (en) * 2015-07-24 2017-03-14 Totalförsvarets Forskningsinstitut Optical measuring system based on Raman scattering
JP6410902B2 (ja) 2017-09-04 2018-10-24 株式会社日立ハイテクマニファクチャ&サービス 顕微ラマン分光装置および顕微ラマン分光システム
US12352945B2 (en) * 2019-11-29 2025-07-08 Sony Group Corporation Microscope device, spectroscope, and microscope system
CN110926612A (zh) 2019-12-18 2020-03-27 复旦大学 一种多通道宽带高分辨光谱仪

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012003198A (ja) 2010-06-21 2012-01-05 Olympus Corp 顕微鏡
US20210215537A1 (en) 2018-05-16 2021-07-15 Universite de Bordeaux Composite multispectral raman spectroscopy method and device
JP2021096359A (ja) 2019-12-17 2021-06-24 日本分光株式会社 蛍光観察機能を備えるラマン顕微装置

Also Published As

Publication number Publication date
WO2023013325A1 (ja) 2023-02-09
EP4382892A1 (en) 2024-06-12
CN117859048A (zh) 2024-04-09
US12480880B2 (en) 2025-11-25
JP2025016619A (ja) 2025-02-04
US20240344990A1 (en) 2024-10-17
EP4382892A4 (en) 2025-08-13
JPWO2023013325A1 (https=) 2023-02-09

Similar Documents

Publication Publication Date Title
US8310669B2 (en) Spectroscopic imaging method and system for exploring the surface of a sample
US4195930A (en) Optical Raman microprobe with laser
JP5092104B2 (ja) 分光測定装置、及び分光測定方法
JP4887989B2 (ja) 光学顕微鏡及びスペクトル測定方法
JP2025016619A (ja) 顕微ラマン分光装置
US8130376B2 (en) Optical devices, spectroscopic systems and methods for detecting scattered light
US20170016769A1 (en) Measurement system of real-time spatially-resolved spectrum and time-resolved spectrum and measurement module thereof
JP2014526686A (ja) 放出及び透過光学分光計
CN101241069A (zh) 色散型多功能阿达玛变换显微成像光谱仪
JP2005121479A (ja) 共焦点顕微分光装置
KR20150116999A (ko) 다채널 여기 광원 스위칭용 마이크로 라만 및 형광 분광분석장치
KR20150146075A (ko) 공초점 분광 현미경
CN211504404U (zh) 应用于光谱仪的双波长激发采集系统
US7483135B2 (en) Confocal spectrometer with astigmatic aperturing
JPWO2023013325A5 (https=)
CN118483211A (zh) 基于级联光谱仪的拉曼光谱测试系统及其测试方法
JP4336847B2 (ja) 顕微分光測定装置
Kirchner et al. All-reflective UV-VIS-NIR transmission and fluorescence spectrometer for μm-sized samples
CN210571973U (zh) 一种带有光镊的显微拉曼系统
JP4136891B2 (ja) 蛍光画像/スペクトルを測定する蛍光測定装置
JPH03239928A (ja) マルチチャネル蛍光分光装置
CN111707657A (zh) 一种双波长激光共焦拉曼探头及拉曼光谱仪
US11860105B2 (en) Raman spectrometer
JP2006300808A (ja) ラマン分光測定装置
JPH10227694A (ja) 発光現象識別装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20231017

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240307

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240514

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240710

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20240723

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20240918

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20241001

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20241014

R150 Certificate of patent or registration of utility model

Ref document number: 7582487

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150