JP7517972B2 - Sample holder - Google Patents

Description

This disclosure relates to a sample holder such as a wafer heating device. The wafer heating device can be used to produce a semiconductor thin film on a wafer such as a semiconductor wafer, a liquid crystal substrate, or a circuit substrate. The wafer heating device can also be used to form a resist film by drying and baking a resist liquid applied to the wafer.

For example, the heater unit described in Patent Document 1 is known as a sample holder. The heater unit described in Patent Document 1 includes a heating element, a heater substrate that has a heating surface on its upper surface and has the heating element installed therein, a metal container that reflects the heat of the heating element and is located away from the lower surface of the heater substrate, a heater substrate support that fixes the heater substrate and the container, and a container support that fixes the container to the device stand.

In such a heater unit, the heating element generates heat. This heat is transferred from the heating element to the surface of the heater substrate, heating the heating surface. However, some of the heat generated by the heating element is not transferred to the heating surface of the heater substrate, and is instead emitted to the outside as radiant heat from the heater substrate. The container can reflect some of this radiant heat. This allows the container to return some of the radiant heat that is emitted to the outside back to the heater substrate. As a result, the heater substrate can efficiently heat the heating surface of the heater substrate.

In addition, by providing a heater substrate support that fixes the heater substrate and the container, and a container support that fixes the container and the device stand, the path for heat dissipation from the heating element to the device stand can be made longer than when the heater substrate, container, and device stand are fixed by a single support. This reduces the risk of heat dissipation from the heating element to the device stand, and reduces the risk of heat from the heating element being released to the outside.

JP 2005-235672 A

In such heater units, the heat from the heating element can cause the container to thermally expand. When this happens, there is a risk that thermal stress will concentrate at the fixing portion between the container and the container support. This can lead to cracks occurring at the fixing portion between the container and the container support. As a result, it is difficult to improve the durability of the heater unit.

The sample holder of the present disclosure comprises a plate-shaped ceramic substrate, a heating resistor located inside or on the underside of the ceramic substrate, a metal plate located below the ceramic substrate facing the ceramic substrate, a first fixing member fixing the ceramic substrate and the metal plate, and a rod-shaped second fixing member fixed to the underside of the metal plate and extending downward from the metal plate, the second fixing member having a plurality of first portions and a second portion continuous with the plurality of first portions and thinner than the plurality of first portions, the second portion being located between the plurality of first portions, when viewed in a cross section perpendicular to the longitudinal direction of the second fixing member, the second portion has a longitudinal direction and a lateral direction, the second fixing member has a plurality of the second portions, and when viewed in a cross section perpendicular to the longitudinal direction of the second fixing member, the longitudinal orientations of at least two of the plurality of second portions are different from each other .

According to one embodiment of the sample holder of the present disclosure, the second fixing member has a plurality of first portions and a second portion that is continuous with the plurality of first portions and is thinner than the plurality of first portions. When the upper end of the second fixing member is pulled in the surface direction of the metal plate due to thermal expansion of the metal plate, stress is concentrated at the boundary between the first portion and the second portion, which have different shapes. At this time, the second portion, which is thinner than the first portion, has low strength against pulling in the surface direction of the metal plate due to thermal expansion of the metal plate, so the second portion can be bent. As a result, when the metal plate thermally expands, the upper end of the second fixing member can be moved in accordance with the thermal expansion of the metal plate. This can reduce thermal stress generated in the fixing portion between the metal plate and the upper end of the second fixing member. This can reduce the risk of cracks occurring in the fixing portion between the metal plate and the upper end of the second fixing member.

In addition, since the second fixing member has a first portion that is thicker than the second portion, the first portion has a higher strength against tension in the surface direction of the metal plate due to thermal expansion of the metal plate compared to the second portion, and this reduces the risk of the second fixing member bending significantly. This allows the second fixing member to support the metal plate.

If the entire second fixing member is made thin, the amount of displacement that occurs in the second fixing member when it is bent becomes too large, making it difficult to support the metal plate. Conversely, if the entire second fixing member is made thick, it becomes difficult to bend the second fixing member, making it difficult to reduce the thermal stress that occurs between the second fixing member and the metal plate. In the sample holder disclosed herein, since the second fixing member has a second portion between a plurality of first portions, it is possible to reduce the amount of displacement of the entire second fixing member while bending the second portion. This is because, when the second portion is bent, displacement is unlikely to occur in the first portion located below the second portion, while displacement is likely to occur in the second portion and the first portion located above the second portion.

As a result, the thermal stress between the metal plate and the upper end of the second fixing member can be reduced while the metal plate is well supported. As a result, the durability of the sample holder can be improved.

FIG. 2 is a cross-sectional view showing an example of a sample holder. FIG. 2 is a perspective view showing a second fixing member of the sample holder shown in FIG. 1 . 13 is a cross-sectional view showing another example of the second fixing member. FIG. 13 is a cross-sectional view showing another example of the second fixing member. FIG. 13 is a cross-sectional view showing another example of the second fixing member. FIG. 13 is a cross-sectional view showing another example of the second fixing member. FIG. 13 is a cross-sectional view showing another example of the second fixing member. FIG. 13 is a cross-sectional view showing another example of the second fixing member. FIG. FIG. 11 is a perspective view showing another example of the second fixing member. 10 is a cross-sectional view showing a second portion of the second fixing member shown in FIG. 9 . FIG. 11 is a perspective view showing another example of the second fixing member. 12 is a cross-sectional view showing a second portion of the second fixing member shown in FIG. 11 . FIG. 11 is a perspective view showing another example of the second fixing member. FIG. 14 is a cross-sectional view of the second fixing member shown in FIG. 13 . FIG. 11 is a perspective view showing another example of the second fixing member. 16 is a cross-sectional view of the second fixing member shown in FIG. 15 . FIG. 11 is a perspective view showing another example of the second fixing member. 18 is a cross-sectional view showing a second portion of the second fixing member shown in FIG. 17. 18 is a cross-sectional view showing a second portion of the second fixing member shown in FIG. 17. FIG. 11 is a perspective view showing another example of the second fixing member. FIG. 11 is a cross-sectional view showing another example of the sample holder. FIG. 22 is a perspective view showing a second fixing member of the sample holder shown in FIG. 21 . 23 is a cross-sectional view of the second fixing member shown in FIG. 22. FIG. 11 is a cross-sectional view showing another example of the sample holder.

The sample holder 10 is explained in detail below.

Figure 1 is a cross-sectional view showing an example of a sample holder 10. As shown in Figure 1, the sample holder 10 includes a ceramic substrate 1, a heating resistor 2 located inside or on the underside of the ceramic substrate 1, a metal plate 3 located below the ceramic substrate 1 and facing the ceramic substrate 1, a first fixing member 4 that fixes the ceramic substrate 1 and the metal plate 3, and a second fixing member 5 that extends downward from the metal plate 3.

The ceramic substrate 1 is a member for holding a sample. The shape of the ceramic substrate 1 is, for example, a disk shape with a circular main surface or a rectangular plate shape with a square main surface. One of the main surfaces of the ceramic substrate 1 is a sample holding surface 11. The ceramic substrate 1 is made of a ceramic material such as aluminum nitride, silicon carbide, or alumina.

The ceramic substrate 1 can be obtained, for example, by stacking and firing a number of green sheets. An electrostatic adsorption electrode may be provided inside the ceramic substrate 1, if necessary. The dimensions of the ceramic substrate 1, for example, when it is disc-shaped, can be a diameter of the main surface of about 100 to 450 mm, and a thickness of about 0.5 to 10 mm.

The heating resistor 2 is a member that generates heat when a current flows through it. The heating resistor 2 is provided to heat the sample held on the sample holding surface 11. The heating resistor 2 is provided inside or on the underside of the ceramic substrate 1. The heating resistor 2 has a linear pattern with multiple folded portions. This allows the heating resistor 2 to heat the sample holding surface 11 evenly.

The heating resistor 2 has, for example, a metal material. Examples of metal materials used as the heating resistor 2 include gold, silver, palladium, and platinum. The heating resistor 2 may contain a glass component, for example, an oxide such as silicon dioxide. The dimensions of the heating resistor 2 can be, for example, a width of 0.5 to 30 mm, a thickness of 0.01 to 3 mm, and a length of 100 to 5000 mm.

The metal plate 3 is a member for reflecting a portion of the heat that is released from the ceramic substrate 1 to the outside as radiant heat when the heating resistor 2 generates heat. The metal plate 3 is, for example, a disk-shaped or rectangular plate-shaped member. The metal plate 3 has an upper surface and a lower surface. The metal plate 3 faces the ceramic substrate 1 and is located below the ceramic substrate 1. The metal plate 3 is also located below the ceramic substrate 1 and away from the ceramic substrate 1. The metal plate 3 may also be provided so that its upper surface faces the lower surface of the ceramic substrate 1. The metal plate 3 may also be provided, for example, parallel to the ceramic substrate 1.

The metal plate 3 contains a metal material such as stainless steel, aluminum, or iron. When the metal plate 3 is disk-shaped, the dimensions of the metal plate 3 can be, for example, 100 to 450 mm in diameter and 0.5 to 10 mm in thickness. The distance between the lower surface of the metal plate 3 and the lower surface of the ceramic substrate 1 can be, for example, 5 to 150 mm. By including the metal plate 3 in the sample holder 10, the sample holder 10 can reflect a portion of the heat that would otherwise be released from the ceramic substrate 1 to the outside. This reduces the risk of heat escaping from the ceramic substrate 1 to the outside, and allows the sample support surface 11 to be heated efficiently.

The first fixing member 4 is a member for fixing the ceramic substrate 1 and the metal plate 3. The first fixing member 4 is, for example, a rod-shaped member. For example, a plurality of the first fixing members 4 are provided between the ceramic substrate 1 and the metal plate 3. For example, the first fixing members 4 are provided perpendicular to the upper surface of the metal plate 3. One end of the first fixing member 4 may be fixed to the ceramic substrate 1. Also, the other end of the first fixing member 4 may be fixed to the metal plate 3.

For example, a bonding material can be used to fix the first fixing member 4 to the ceramic substrate 1. Examples of materials used as the bonding material include silver solder or silver-copper solder. The first fixing member 4 may be fixed to the ceramic substrate 1 by a screw. Also, the first fixing member 4 may use a spring to move in response to the thermal expansion of the ceramic substrate 1. This can reduce thermal stress between the first fixing member 4 and the ceramic substrate 1. Also, for example, a screw can be used to fix the first fixing member 4 to the metal plate 3. Also, the first fixing member 4 may be fixed to the metal plate 3 by a bonding material. Examples of materials used as the bonding material include silver solder or silver-copper solder.

The first fixing member 4 has, for example, a metal material. Examples of metal materials used for the first fixing member 4 include stainless steel, aluminum, and iron. The dimensions of the first fixing member 4 can be, for example, a diameter of 2 to 20 mm and a length of 5 to 150 mm. By providing the first fixing member 4, the ceramic substrate 1 and the metal plate 3 can be fixed together.

The second fixing member 5 is a member for fixing the metal plate 3 to another member. Examples of other members include a metal base. The second fixing member 5 is a rod-shaped member that is fixed to the underside of the metal plate 3 and extends downward from the metal plate 3. For example, multiple second fixing members 5 may be provided between the metal plate 3 and the other member.

The second fixing member 5 may be shaped like a rod, such as a circular rod or a square rod, or may be shaped like a tube. Here, "rod" means that it is a long and thin member.

The second fixing member 5 has a first portion 51 and a second portion 52 that is thinner than the first portion 51. The term "thin" here means that the whole or part of the second portion 52 is located inside the outer periphery of the first portion 51, as shown in the perspective view of the second fixing member 5 in FIG. 2. The first portion 51 and the second portion 52 may be integrally formed, or may be formed separately and joined together. The second fixing member 5 may be formed by stacking a plurality of first portions 51 and a plurality of second portions 52 in the length direction of the second fixing member 5. By forming the first portion 51 and the second portion 52 from a single member, the risk of stress concentration at the boundary between the first portion 51 and the second portion 52 can be reduced compared to when they are formed separately. This allows the strength of the second fixing member 5 to be maintained.

Note that imaginary lines are shown in the drawings to make the boundary between the first part 51 and the second part 52 easier to understand, but this does not limit the form of the invention.

The second fixing member 5 and the metal plate 3 may be fixed, for example, by using a screw. A nut may also be used when fixing the second fixing member 5 and the metal plate 3 with a screw. Another fixing method may be to use a bonding material. Examples of materials that can be used as bonding materials include silver solder and silver-copper solder.

Metal materials used as the second fixing member 5 include, for example, stainless steel, aluminum, or iron. The dimensions of the second fixing member 5, for example, when the second fixing member 5 is in the shape of a round bar, can be a diameter of 3 to 20 mm and a length of 5 to 200 mm.

In the sample holder 10 of this embodiment, as shown in the perspective view of the second fixing member 5 in FIG. 2, the second fixing member 5 has a plurality of first portions 51 and a second portion 52 that is continuous with the plurality of first portions 51 and is thinner than the plurality of first portions 51. As a result, when the upper end of the second fixing member 5 is pulled in the surface direction of the metal plate 3 due to thermal expansion of the metal plate 3, stress is concentrated at the boundary between the first portion 51 and the second portion 52, which have different shapes. At this time, the second portion 52, which is thinner than the first portion 51, has low strength against pulling in the surface direction of the metal plate 3 due to the thermal expansion of the metal plate 3, so the second portion 52 can be bent. As a result, when the metal plate 3 thermally expands, the upper end of the second fixing member 5 can be moved in accordance with the thermal expansion of the metal plate 3. As a result, the thermal stress generated in the fixing portion between the metal plate 3 and the upper end of the second fixing member 5 can be reduced. As a result, the risk of cracks occurring in the fixing portion between the metal plate 3 and the upper end of the second fixing member 5 can be reduced.

In addition, since the second fixing member 5 has the first portion 51 that is thicker than the second portion 52, the first portion 51 has a higher strength against tension in the surface direction of the metal plate 3 due to thermal expansion of the metal plate 3 than the second portion 52, and therefore the risk of the second fixing member 5 bending significantly can be reduced. This allows the second fixing member 5 to support the metal plate 3.

If the entire second fixing member 5 is made thin, the amount of displacement that occurs in the second fixing member 5 when the second fixing member 5 is bent becomes too large, making it difficult to support the metal plate 3. Conversely, if the entire second fixing member 5 is made thick, it becomes difficult to bend the second fixing member 5, making it difficult to reduce the thermal stress that occurs between the second fixing member 5 and the metal plate 3. In the sample holder 10 disclosed herein, the second fixing member 5 has the second portion 52 between the multiple first portions 51, so that the amount of displacement of the entire second fixing member 5 can be reduced while bending the second portion 52. This is because, when the second portion 52 is bent, the first portion 51 located below the second portion 52 is less likely to be displaced, while the second portion 52 and the first portion 51 located above the second portion 52 are more likely to be displaced.

As a result, the thermal stress between the metal plate 3 and the upper end of the second fixing member 5 can be reduced while the metal plate 3 is well supported. As a result, the durability of the sample holder 10 can be improved.

Also, as shown in FIG. 3, the entire outer periphery of the second part 52 may be located inside the outer periphery of the first part 51. As a result, when the upper end of the second fixing member 5 is pulled in the surface direction of the metal plate 3 due to thermal expansion of the metal plate 3, stress is concentrated at the boundary between the first part 51 and the second part 52, which have different shapes. At this time, since the outer periphery of the second part 52 is located inside the outer periphery of the first part 51, the strength against the pulling in the surface direction of the metal plate 3 due to the thermal expansion of the metal plate 3 is low, so that the upper end of the second fixing member 5 can move in all directions by following the thermal expansion of the metal plate 3. This reduces the thermal stress generated in the fixing part between the metal plate 3 and the upper end of the second fixing member 5. This reduces the risk of cracks occurring in the fixing part between the metal plate 3 and the upper end of the second fixing member 5. As a result, the durability of the sample holder 10 can be increased.

Furthermore, as shown in FIG. 3 , when a cross section including the first portion 51 and the second portion 52 is viewed parallel to the longitudinal direction of the second fixing member 5, the side of the second portion 52 is parallel to the longitudinal direction of the second fixing member 5 and extends in a straight line when the cross section including the first portion 51 and the second portion 52 is viewed.

Figures 4 to 8 show enlarged cross-sectional views of other examples of the second fixing member 5.

Also, as shown in FIG. 4, when a cross section including the first portion 51 and the second portion 52 is viewed parallel to the longitudinal direction of the second fixing member 5, the side of the second portion 52 may be curved. In other words, the second portion 52 may be a member having a rounded side. FIG. 4 shows an embodiment in which the second portion 52 is outwardly convex.

Also, as shown in FIG. 5, when a cross section including the first portion 51 and the second portion 52 is viewed parallel to the longitudinal direction of the second fixing member 5, the side of the second portion 52 may have a curved surface that is convex inward. This makes it possible to disperse the thermal stress that occurs on the side of the second portion 52 when the second portion 52 is bent, compared to when the side of the second portion 52 is straight as shown in FIG. 3. This reduces the risk of cracks occurring in the second portion 52. As a result, the durability of the sample holder 10 can be increased.

As shown in FIG. 6, when a cross section including the first portion 51 and the second portion 52 is viewed in a direction parallel to the length of the second fixing member 5, the side of the first portion 51 and the side of the second portion 52 may be connected. Here, "connected" means that the diameter length at the boundary between the first portion 51 and the second portion 52 is the same. In FIG. 6, the second portion 52 of the second fixing member 5 shows an area surrounded by a chain line and an outer circumferential line. This makes it possible to disperse stress occurring at the boundary between the first portion 51 and the second portion 52, compared to the case in which the diameter length at the boundary between the first portion 51 and the second portion 52 changes as in FIG. 3. This makes it possible to reduce the risk of cracks occurring at the boundary between the first portion 51 and the second portion 52 when the second fixing member 5 is bent. As a result, the durability of the sample holder 10 can be further improved.

Also, as shown in Figure 7, when a cross section including the first portion 51 and the second portion 52 is viewed in a direction parallel to the length of the second fixing member 5, the side surface of the second portion 52 may be configured with a surface inclined with respect to the side surface of the first portion 51 and a surface extending parallel to the side surface of the first portion 51. Figure 7 shows an embodiment in which the angle between the surface of the side surface of the second portion 52 inclined with respect to the side surface of the first portion 51 and the surface extending parallel to the side surface of the first portion 51 is an obtuse angle.

In addition, when a cross section including the first portion 51 and the second portion 52 is viewed parallel to the longitudinal direction of the second fixing member 5, the side of the second portion 52 may be parallel to the longitudinal direction of the second fixing member 5. As a result, as shown in FIG. 4, the cross-sectional area of the second portion 52 is smaller than when the side of the second portion 52 has a curved surface that is convex outward, so that the strength against tension in the surface direction of the metal plate 3 can be further reduced. Therefore, the second portion 52 can be bent more. As a result, the upper end of the second fixing member 5 can be moved in accordance with the thermal expansion of the metal plate 3. As a result, the thermal stress generated in the fixing portion between the metal plate 3 and the upper end of the second fixing member 5 can be reduced. As a result, the risk of cracks occurring in the fixing portion between the metal plate 3 and the upper end of the second fixing member 5 can be reduced. As a result, the durability of the sample holder 10 can be improved.

8, when a cross section including the first portion 51 and the second portion 52 is viewed in a direction parallel to the length of the second fixing member 5, the second portion 52 may be inserted into the first portion 51. In other words, the upper surface of the second portion 52 shown by the dashed line may be located above the lower end of the first portion 51. The lower surface of the second portion 52 shown by the dashed line may be located below the upper end of the first portion 51. This reduces the risk that particles will enter between the first portion 51 and the second portion 52. Therefore, the risk that the bending of the second portion 52 will be suppressed by particles can be reduced. This reduces the thermal stress generated in the fixing portion between the metal plate 3 and the upper end of the second fixing member 5. This reduces the risk that cracks will be generated in the fixing portion between the metal plate 3 and the upper end of the second fixing member 5. As a result, the durability of the sample holder 10 can be improved.

In the example shown in Figures 4 to 8, the entire outer periphery of the second part 52 is located inside the outer periphery of the first part 51. However, even in an example in which a part of the outer periphery of the second part 52 is located inside the outer periphery of the first part 51, as in Figure 2, the relationship between the first part 51 and the second part 52 may be as shown in Figures 4 to 8.

Figure 9 is a perspective view showing another example of the second fixing member 5. Also, Figure 10 is an enlarged cross-sectional view showing the cross section of the second part 52 taken along line A-A' in Figure 9.

9, 10, 11 and 12, when viewed in a cross section perpendicular to the length direction of the second fixing member 5, the second portion 52 may have a shape having a longitudinal direction and a lateral direction. In this case, the tensile strength in the lateral direction can be reduced. Therefore, when the lateral direction and the direction of thermal expansion are the same, the second portion 52 can be made easier to bend. In addition, since the second portion 52 has a longitudinal direction, the strength of the second portion 52 can be maintained compared to, for example, a case in which the cross section of the second portion 52 is a circular shape having an equivalent area. As a result, the thermal stress generated in the fixing portion between the metal plate 3 and the upper end of the second fixing member 5 can be further reduced while supporting the metal plate 3. This reduces the risk of cracks occurring in the fixing portion between the metal plate 3 and the upper end of the second fixing member 5.

In the example shown in Figures 4 to 8, the entire outer periphery of the second part 52 is located inside the outer periphery of the first part 51, but even in an example in which the second part 52 has a shape having a longitudinal direction and a lateral direction when viewed in a cross section perpendicular to the length direction of the second fixing member 5, as in Figure 9, the relationship between the first part 51 and the second part 52 may be as shown in Figures 4 to 8.

Also, as shown in FIG. 10, when a cross section including the second portion 52 perpendicular to the length direction of the second fixing member 5 is viewed, the outer periphery of the second portion 52 may be composed of two straight lines and two arc-shaped curves. Also, when viewed in a plan view, the two arc-shaped portions may overlap with the outer periphery of the first portion 51. This reduces the number of places where stress concentrates at the boundary between the first portion 51 and the second portion 52 compared to when the outer periphery of the second portion 52 is rectangular. This reduces the risk of cracks occurring at the boundary between the first portion 51 and the second portion 52 when the second fixing member 5 is bent. As a result, the durability of the sample holder 10 can be increased.

FIG. 11 is a perspective view showing another example of the second fixing member 5. FIG. 12 is a cross-sectional view showing the cross section of the second portion 52 taken along line B-B' in FIG. 11. As shown in FIGS. 11 and 12, when a cross section including the second portion 52 is viewed perpendicular to the longitudinal direction of the second fixing member 5, the outer periphery of the second portion 52 may be rectangular.

As shown in Figs. 13 and 14, when viewed in a cross section parallel to the longitudinal direction of the second fixing member 5 and including the first portion 51 and the second portion 52, the second fixing member 5 may have a plurality of second portions 52. This allows the second fixing member 5 to bend at the plurality of second portions 52. This allows the stress generated in the second portions 52 when bending to be dispersed. This allows the durability of the second fixing member 5 to be increased.

15 and 16, when a cross section including the first portion 51 and the second portion 52 is viewed in a direction parallel to the longitudinal direction of the second fixing member 5, the intervals between the second portions 52 may vary. In the embodiment of FIG. 15 and FIG. 16, the second fixing member 5 is
It is shown that there are three second portions 52 spaced at different intervals.

Figure 17 is a perspective view showing another example of the second fixing member 5. Figures 18 and 19 are cross-sectional views showing the cross sections of the second parts 52 cut along lines C-C' and D-D' in Figure 17. As shown in Figures 17, 18, and 19, the longitudinal directions of the second parts 52 may be different. This increases the number of directions in which the second fixing member 5 can bend, compared to when the longitudinal directions of the second parts 52 are the same. This allows the second fixing member 5 to bend even if the short side direction of the second parts 52 is misaligned with the direction of thermal expansion. As a result, the durability of the sample holder 10 can be improved.

Also, as shown in FIG. 20, the longitudinal directions of the multiple second portions 52 may be perpendicular to each other.

Also, as shown in Figures 21, 22, and 23, the second portion 52 may be located closer to the lower end than to the upper end of the second fixing member 5. This allows the distance between the metal plate 3 and the second portion 52 to be longer than when the second portion 52 is located closer to the upper end of the second fixing member 5. This allows the second portion 52 to be displaced while suppressing the bending angle. This allows the stress generated in the second portion 52 to be reduced. This allows the durability of the second fixing member 5 to be increased.

Also, as shown in FIG. 24, the second portion 52 of the second fixing member 5 may be located only in the center of the second fixing member 5. The "center" here means the center when the second fixing member 5 is divided into three equal parts in the length direction, which are the upper end, the center, and the lower end. As a result, the upper end and the lower end of the second fixing member 5 become the first portion 51, and it is possible to form screw holes for fixing the metal plate 3 and other members to the second fixing member 5 with screws. This allows the metal plate 3 and the second fixing member 5 to be firmly fixed. As a result, it is possible to increase the durability of the sample holder 10.

Also, as shown in FIG. 24, the second portions 52 of the multiple second fixing members 5 may be provided at the same height. This reduces the risk of the metal plate 3 being distorted due to the change in the amount of displacement of each second fixing member 5 when the second fixing members 5 are bent. This reduces the risk of heat from the ceramic substrate 1 not being transferred to the metal plate 3 and being released to the outside. As a result, the thermal uniformity of the sample support surface 11 can be improved.

1: Ceramic substrate 2: Heating resistor 3: Metal plate 4: First fixing member 5: Second fixing member 51: First portion 52: Second portion 10: Sample holder 11: Sample holding surface

Claims (6)

The device comprises a plate-shaped ceramic substrate, a heating resistor located inside or on the bottom surface of the ceramic substrate, a metal plate located below the ceramic substrate and facing the ceramic substrate, a first fixing member that fixes the ceramic substrate and the metal plate, and a rod-shaped second fixing member that is fixed to the bottom surface of the metal plate and extends downward from the metal plate,
the second fixing member has a plurality of first portions and a second portion that is continuous with the plurality of first portions and is thinner than the plurality of first portions, the second portion being located between the plurality of first portions;
When viewed in a cross section perpendicular to a longitudinal direction of the second fixing member, the second portion has a longitudinal direction and a lateral direction,
The second fixing member has a plurality of the second portions,
A sample holder characterized in that, when the plurality of second parts are viewed in a cross section perpendicular to the longitudinal direction of the second fixing member, the longitudinal orientations of at least two of the plurality of second parts are different from each other. The sample holder according to claim 1, characterized in that, when the plurality of second parts are viewed in a cross section perpendicular to the longitudinal direction of the second fixing member , the longitudinal directions of at least two of the plurality of second parts are perpendicular to each other. When viewed in a cross section perpendicular to the longitudinal direction of the second fixing member and including the second portion,
3. The sample holder according to claim 1, wherein the outer periphery of the second portion is rectangular. The device comprises a plate-shaped ceramic substrate, a heating resistor located inside or on the bottom surface of the ceramic substrate, a metal plate located below the ceramic substrate and facing the ceramic substrate, a first fixing member that fixes the ceramic substrate and the metal plate, and a rod-shaped second fixing member that is fixed to the bottom surface of the metal plate and extends downward from the metal plate,
the second fixing member has a plurality of first portions and a second portion that is continuous with the plurality of first portions and is thinner than the plurality of first portions, the second portion being located between the plurality of first portions;
When viewed in a cross section perpendicular to the longitudinal direction of the second fixing member and including the second portion,
A sample holder characterized in that the outer periphery of the second portion is composed of two straight lines and two arcuate curves. The device comprises a plate-shaped ceramic substrate, a heating resistor located inside or on the underside of the ceramic substrate, a metal plate located below the ceramic substrate and facing the ceramic substrate, a first fixing member that fixes the ceramic substrate and the metal plate, and a rod-shaped second fixing member that is fixed to the underside of the metal plate and extends downward from the metal plate,
the second fixing member has a plurality of first portions and a second portion that is continuous with the plurality of first portions and is thinner than the plurality of first portions, the second portion being located between the plurality of first portions;
A sample holder characterized in that the second portion is located closer to a lower end than to an upper end of the second fixing member. A sample holder according to any one of claims 1 to 5, characterized in that the side of the second portion is parallel to the longitudinal direction of the second fixing member.

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