JP7511748B2 - パルス電源装置 - Google Patents

パルス電源装置 Download PDF

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Publication number
JP7511748B2
JP7511748B2 JP2023516001A JP2023516001A JP7511748B2 JP 7511748 B2 JP7511748 B2 JP 7511748B2 JP 2023516001 A JP2023516001 A JP 2023516001A JP 2023516001 A JP2023516001 A JP 2023516001A JP 7511748 B2 JP7511748 B2 JP 7511748B2
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Japan
Prior art keywords
electrode
short
midpoint
gap switch
circuit line
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JP2023516001A
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Japanese (ja)
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JPWO2022224439A1 (https=
JPWO2022224439A5 (https=
Inventor
貴裕 井上
太一郎 民田
康隆 稲永
政郎 弓削
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Publication of JPWO2022224439A5 publication Critical patent/JPWO2022224439A5/ja
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    • H—ELECTRICITY
    • H03—ELECTRONIC CIRCUITRY
    • H03K—PULSE TECHNIQUE
    • H03K3/00—Circuits for generating electric pulses; Monostable, bistable or multistable circuits
    • H03K3/02—Generators characterised by the type of circuit or by the means used for producing pulses
    • H03K3/53—Generators characterised by the type of circuit or by the means used for producing pulses by the use of an energy-accumulating element discharged through the load by a switching device controlled by an external signal and not incorporating positive feedback

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  • Generation Of Surge Voltage And Current (AREA)
JP2023516001A 2021-04-23 2021-04-23 パルス電源装置 Active JP7511748B2 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2021/016447 WO2022224439A1 (ja) 2021-04-23 2021-04-23 パルス電源装置

Publications (3)

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JPWO2022224439A1 JPWO2022224439A1 (https=) 2022-10-27
JPWO2022224439A5 JPWO2022224439A5 (https=) 2023-07-28
JP7511748B2 true JP7511748B2 (ja) 2024-07-05

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ID=83723467

Family Applications (1)

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JP2023516001A Active JP7511748B2 (ja) 2021-04-23 2021-04-23 パルス電源装置

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JP (1) JP7511748B2 (https=)
WO (1) WO2022224439A1 (https=)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002263471A (ja) 2001-03-06 2002-09-17 Nippon Paint Co Ltd マルクス回路を用いたプラズマ処理方法及びプラズマ処理装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56148183A (en) * 1980-04-16 1981-11-17 Nissin Electric Co Ltd Impulse voltage generating device
JPH0435690U (https=) * 1990-07-23 1992-03-25

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002263471A (ja) 2001-03-06 2002-09-17 Nippon Paint Co Ltd マルクス回路を用いたプラズマ処理方法及びプラズマ処理装置

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Publication number Publication date
JPWO2022224439A1 (https=) 2022-10-27
WO2022224439A1 (ja) 2022-10-27

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