JP7501644B2 - 搬送車システム、及び搬送車制御方法 - Google Patents
搬送車システム、及び搬送車制御方法 Download PDFInfo
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
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- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
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- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2203/00—Indexing code relating to control or detection of the articles or the load carriers during conveying
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- Automobile Manufacture Line, Endless Track Vehicle, Trailer (AREA)
Description
図1は、第1実施形態に係る搬送車システムの配設の例を示す図である。図2は、第1実施形態に係る搬送車システムの構成例を示す図である。搬送車システム1は、コントローラ3と、複数の搬送車5と、コントローラ10とを有する。例えば、搬送車システム1は、半導体デバイスの製造工場に配設されるシステムであり、半導体デバイスの製造に用いられる半導体ウエハを収容したFOUP(Front‐Opening Unified Pod)、又はレチクル等の加工用部材を収容したレチクルポッド等の容器(物品)を搬送する。
第2実施形態では、上述した実施形態と同様の構成については同一の符号を付し、詳細な説明を省略又は簡略化する場合がある。第2実施形態において、搬送車システム1の構成等は、上述した実施形態と同様である。図11は、第2実施形態に係るコントローラ(エリアコントローラ)の構成例を示すブロック図である。図11に示すように、コントローラ10aは、通信部101と、記憶部110と、制御部120aとを有する。
3 コントローラ(上位)
5 搬送車
7 軌道
9 エリア
10 コントローラ(エリア)
101 通信部
110 記憶部
111 搬送車情報テーブル
112 搬送指令情報テーブル
120 制御部
121 データ処理部
122 搬送車情報出力部
123 台数算出部
124 割付部
125 経路探索部
126 搬送車決定部
Claims (8)
- 複数の搬送車と、前記複数の搬送車に搬送指令を割り付けるコントローラと、を備える搬送車システムであって、
前記コントローラは、
空き搬送車の台数が第1の台数である状況で、第1優先度の第1搬送指令が発生した場合に前記第1搬送指令を空き搬送車に割り付け、
空き搬送車の台数が前記第1の台数である状況で、前記第1優先度の前記第1搬送指令が発生せず、前記第1優先度よりも低い第2優先度の第2搬送指令が発生した場合に前記第2搬送指令を空き搬送車に割り付けず、
いずれの搬送車にも割り付けられていない搬送指令の優先度を、搬送指令の発生時からの時間経過に応じて引き上げ、
搬送指令の優先度の引き上げにあたり、搬送指令の発生時の優先度が高いほどより大きく設定される上限まで優先度の引き上げを許容する、搬送車システム。 - 前記コントローラは、空き搬送車の台数が前記第1の台数よりも少ない状況で、前記第1優先度の前記第1搬送指令が発生した場合に前記第1搬送指令を空き搬送車に割り付けない、請求項1に記載の搬送車システム。
- 前記コントローラは、空き搬送車の台数が前記第1の台数よりも多い第2の台数である状況で、前記第2優先度の前記第2搬送指令が発生した場合に前記第2搬送指令を空き搬送車に割り付ける、請求項1又は請求項2に記載の搬送車システム。
- 前記第2優先度は、順に低くなる優先度の指標として複数に分けられ、
前記第1の台数は、順に多くなる空き搬送車の台数の指標として複数に分けられ、
前記コントローラは、空き搬送車の台数が多いほど、より低い優先度の搬送指令を空き搬送車に割り付けることを許容する、請求項1から請求項3のいずれか一項に記載の搬送車システム。 - 前記コントローラは、前記第1優先度よりも高い特定優先度の最優先搬送指令が発生した場合に、空き搬送車の台数にかかわらず前記最優先搬送指令を空き搬送車に割り付けることを許容する、請求項1から請求項4のいずれか一項に記載の搬送車システム。
- 前記コントローラは、複数のエリアコントローラを備え、
前記複数のエリアコントローラのそれぞれは、
管轄エリア内の搬送車に搬送指令を割り付け、
管轄エリア内の空き搬送車の台数と、管轄エリア外の空き搬送車の台数との合計の台数が前記第1の台数である状況で、前記第1搬送指令が発生した場合に前記第1搬送指令を空き搬送車に割り付け、
管轄エリア内の空き搬送車の台数と、管轄エリア外の空き搬送車の台数との合計の台数が前記第1の台数である状況で、前記第2搬送指令が発生した場合に前記第2搬送指令を空き搬送車に割り付けない、請求項1から請求項5のいずれか一項に記載の搬送車システム。 - 前記コントローラは、前記時間経過に応じて優先度を段階的に引き上げる、請求項1から請求項6のいずれか一項に記載の搬送車システム。
- 複数の搬送車に搬送指令を割り付ける搬送車制御方法であって、
空き搬送車の台数が第1の台数である状況で、第1優先度の第1搬送指令が発生した場合に前記第1搬送指令を空き搬送車に割り付けることと、
空き搬送車の台数が前記第1の台数である状況で、前記第1優先度の前記第1搬送指令が発生せず、前記第1優先度よりも低い第2優先度の第2搬送指令が発生した場合に前記第2搬送指令を空き搬送車に割り付けないことと、
いずれの搬送車にも割り付けられていない搬送指令の優先度を、搬送指令の発生時からの時間経過に応じて引き上げることと、を含み、
搬送指令の優先度の引き上げにあたり、搬送指令の発生時の優先度が高いほどより大きく設定される上限まで優先度の引き上げを許容する、搬送車制御方法。
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JP2020147385 | 2020-09-02 | ||
JP2020147385 | 2020-09-02 | ||
PCT/JP2021/027760 WO2022049929A1 (ja) | 2020-09-02 | 2021-07-27 | 搬送車システム、及び搬送車制御方法 |
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JPWO2022049929A1 JPWO2022049929A1 (ja) | 2022-03-10 |
JPWO2022049929A5 JPWO2022049929A5 (ja) | 2023-05-17 |
JP7501644B2 true JP7501644B2 (ja) | 2024-06-18 |
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US (1) | US20230322486A1 (ja) |
EP (1) | EP4209852A1 (ja) |
JP (1) | JP7501644B2 (ja) |
KR (1) | KR20230043982A (ja) |
CN (1) | CN116075792A (ja) |
IL (1) | IL301064A (ja) |
TW (1) | TW202218023A (ja) |
WO (1) | WO2022049929A1 (ja) |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000148242A (ja) | 1998-11-17 | 2000-05-26 | Murata Mach Ltd | 搬送台車システム |
JP2002175116A (ja) | 2000-12-05 | 2002-06-21 | Murata Mach Ltd | 無人搬送車システム |
JP2010102590A (ja) | 2008-10-24 | 2010-05-06 | Murata Machinery Ltd | 搬送車システム |
WO2019197854A1 (ja) | 2018-04-13 | 2019-10-17 | 日産自動車株式会社 | 配車管理装置及び配車管理方法 |
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JPH10275017A (ja) * | 1997-03-31 | 1998-10-13 | Hitachi Ltd | 搬送制御方法および搬送装置 |
JP2002087539A (ja) * | 2000-09-18 | 2002-03-27 | Murata Mach Ltd | 搬送システム |
JP4705753B2 (ja) | 2003-12-05 | 2011-06-22 | 村田機械株式会社 | 搬送システム |
JP6848999B2 (ja) | 2019-03-11 | 2021-03-24 | フジテック株式会社 | 乗客コンベア |
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2021
- 2021-07-27 CN CN202180053896.8A patent/CN116075792A/zh active Pending
- 2021-07-27 US US18/023,842 patent/US20230322486A1/en active Pending
- 2021-07-27 IL IL301064A patent/IL301064A/en unknown
- 2021-07-27 EP EP21863987.0A patent/EP4209852A1/en active Pending
- 2021-07-27 WO PCT/JP2021/027760 patent/WO2022049929A1/ja unknown
- 2021-07-27 JP JP2022546157A patent/JP7501644B2/ja active Active
- 2021-07-27 KR KR1020237007032A patent/KR20230043982A/ko unknown
- 2021-09-01 TW TW110132453A patent/TW202218023A/zh unknown
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2000148242A (ja) | 1998-11-17 | 2000-05-26 | Murata Mach Ltd | 搬送台車システム |
JP2002175116A (ja) | 2000-12-05 | 2002-06-21 | Murata Mach Ltd | 無人搬送車システム |
JP2010102590A (ja) | 2008-10-24 | 2010-05-06 | Murata Machinery Ltd | 搬送車システム |
WO2019197854A1 (ja) | 2018-04-13 | 2019-10-17 | 日産自動車株式会社 | 配車管理装置及び配車管理方法 |
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WO2022049929A1 (ja) | 2022-03-10 |
IL301064A (en) | 2023-05-01 |
TW202218023A (zh) | 2022-05-01 |
EP4209852A1 (en) | 2023-07-12 |
JPWO2022049929A1 (ja) | 2022-03-10 |
CN116075792A (zh) | 2023-05-05 |
US20230322486A1 (en) | 2023-10-12 |
KR20230043982A (ko) | 2023-03-31 |
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