JP7489770B2 - 半導体製造装置のパイプを通して流体の流れを測定するための装置 - Google Patents
半導体製造装置のパイプを通して流体の流れを測定するための装置 Download PDFInfo
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- 230000002411 adverse Effects 0.000 description 1
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Images
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/68—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using thermal effects
- G01F1/684—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow
- G01F1/6847—Structural arrangements; Mounting of elements, e.g. in relation to fluid flow where sensing or heating elements are not disturbing the fluid flow, e.g. elements mounted outside the flow duct
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/48—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by a capillary element
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/363—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction with electrical or electro-mechanical indication
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K31/00—Actuating devices; Operating means; Releasing devices
- F16K31/12—Actuating devices; Operating means; Releasing devices actuated by fluid
- F16K31/126—Actuating devices; Operating means; Releasing devices actuated by fluid the fluid acting on a diaphragm, bellows, or the like
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/40—Details of construction of the flow constriction devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/40—Details of construction of the flow constriction devices
- G01F1/42—Orifices or nozzles
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01F—MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUID LEVEL; METERING BY VOLUME
- G01F1/00—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow
- G01F1/05—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects
- G01F1/34—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure
- G01F1/36—Measuring the volume flow or mass flow of fluid or fluent solid material wherein the fluid passes through a meter in a continuous flow by using mechanical effects by measuring pressure or differential pressure the pressure or differential pressure being created by the use of flow constriction
- G01F1/40—Details of construction of the flow constriction devices
- G01F1/44—Venturi tubes
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05B—CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS
- G05B11/00—Automatic controllers
- G05B11/01—Automatic controllers electric
- G05B11/36—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential
- G05B11/42—Automatic controllers electric with provision for obtaining particular characteristics, e.g. proportional, integral, differential for obtaining a characteristic which is both proportional and time-dependent, e.g. P. I., P. I. D.
-
- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Fluid Mechanics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Mechanical Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Computer Hardware Design (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Measuring Volume Flow (AREA)
- Die Bonding (AREA)
Description
101 パイプ
103 シーリング構造
105 フロー構造
107 流体入口
109 流体出口
111 測定デバイス
113 第1の圧力ポート
115 第2の圧力ポート
119 第1のシール
121 第2のシール
123 第1のチャンバ
125 第2のチャンバ
127 開口部
129 開口部
201a~d チューブ
203a~d 流体入口
205a~d 流体出口
301 流体ライン
303 流体ライン
305 制御ユニット
309 流量調整器
311 圧力センサ要素
700 半導体製造装置
701 プロセスチャンバ
Claims (20)
- 半導体製造装置(700)のパイプ(101)を通る流体の流れを測定するための装置(100)であって、
前記パイプ(101)に配置されたシーリング構造(103)と、
前記シーリング構造(103)の上流に配置された流体入口(107)と、前記シーリング構造(103)の下流に配置された流体出口(109)とを有するフロー構造(105)と、
前記シーリング構造(103)の上流のパイプ(101)に配置された第1のチャンバ(123)、および前記シーリング構造(103)の下流のパイプ(101)に配置された第2のチャンバ(125)と、
測定デバイス(111)であって、前記測定デバイス(111)は、前記第1のチャンバ(123)内の第1の流体圧力および前記第2のチャンバ(125)内の第2の流体圧力を測定するように適合されている、測定デバイス(111)と、を備え、
前記第1のチャンバ(123)および前記第2のチャンバ(125)が前記シーリング構造(103)によって互いに分離されており、
前記測定デバイス(111)は、前記第1および第2の流体圧力に基づいて流体の流れを決定するように構成されている、装置(100)。 - 前記フロー構造(105)は、前記パイプ(101)内に延びている、請求項1に記載の装置(100)。
- 前記フロー構造(105)は、複数のチューブ(201a~d)を備えている、請求項1または2に記載の装置(100)。
- 前記チューブは、前記シーリング構造(103)の貫通孔によって形成されている、請求項3に記載の装置(100)。
- 前記シーリング構造(103)は、シールされた障壁である、請求項1ないし4のうちいずれか1項に記載の装置(100)。
- 前記第1のチャンバ(123)および/または前記第2のチャンバ(125)は、シーリング構造(103)に接続されている、請求項1ないし5のうちいずれか1項に記載の装置(100)。
- 前記第1のチャンバ(123)および前記第2のチャンバ(125)は、それぞれ開口部(127,129)を有し、流体が前記第1のチャンバ、前記第2のチャンバ(123,125)それぞれに流入することを可能にしている、請求項1ないし6のうちいずれか1項に記載の装置(100)。
- 前記第1のチャンバ(123)および/または前記第2のチャンバ(125)は、円錐形状である、請求項1ないし7のうちいずれか1項に記載の装置(100)。
- 前記第1のチャンバおよび/または前記第2のチャンバ(123,125)は、前記シーリング構造(103)と同軸に配置されている、請求項1ないし8のうちいずれか1項に記載の装置(100)。
- 前記測定デバイス(111)は、流体接続および/または圧力接続を介して前記第1のチャンバ(123)および前記第2のチャンバ(125)に接続され、前記第1および第2の流体圧力を測定する、請求項1ないし9のうちいずれか1項に記載の装置(100)。
- 前記測定デバイス(111)は、前記第1の流体圧力および前記第2の流体圧力を測定するための少なくとも1つの圧力センサ要素(311)を備えている、請求項1ないし10のうちいずれか1項に記載の装置(100)。
- 前記測定デバイス(111)は、前記第1および第2の流体圧力との圧力差に基づいて流体の流れを決定するように構成されている処理ユニットを備えている、請求項1ないし11のうちいずれか1項に記載の装置(100)。
- 前記装置(100)は、前記パイプ内に配置された流量調整器を備え、前記流量調整器は、流体の流れを制御するために調整することができる、請求項1ないし12のうちいずれか1項に記載の装置(100)。
- 前記測定デバイス(111)は、決定された流体の流れに基づいて前記流量調整器を制御するように構成されている、請求項13に記載の装置(100)。
- 請求項1ないし14のうちいずれか1項に記載のパイプ(101)を通る流体の流れを測定するためのパイプ(101)および装置(100)を備えている、半導体製造装置(700)。
- 前記パイプ(101)は、汚染流体のための排出ラインである、請求項15に記載の半導体製造装置(700)。
- 前記チューブ(201a~d)が整流チューブである、請求項3に記載の装置(100)。
- 前記シーリング構造(103)がプラグである、請求項5に記載の装置(100)。
- 前記流体接続が流体ラインであり、および/または前記圧力接続が圧力ポートまたは圧力ラインである、請求項10に記載の装置(100)。
- 半導体製造装置(700)がコータまたはボンダである、請求項15に記載の半導体製造装置(700)。
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL2022125A NL2022125B1 (en) | 2018-12-03 | 2018-12-03 | Apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing device |
NL2022125 | 2018-12-03 |
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JP2020091289A JP2020091289A (ja) | 2020-06-11 |
JP7489770B2 true JP7489770B2 (ja) | 2024-05-24 |
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US (1) | US11499855B2 (ja) |
JP (1) | JP7489770B2 (ja) |
KR (1) | KR20200067766A (ja) |
CN (1) | CN111256766B (ja) |
AT (1) | AT521898B1 (ja) |
DE (1) | DE102019132686A1 (ja) |
NL (1) | NL2022125B1 (ja) |
TW (1) | TWI831881B (ja) |
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US10768031B2 (en) * | 2018-01-17 | 2020-09-08 | Johnson Controls, Inc. | Air duct airflow sensor |
US11448420B2 (en) | 2018-01-17 | 2022-09-20 | Johnson Controls, Inc. | Air duct damper |
CN110082027A (zh) * | 2019-04-09 | 2019-08-02 | 苏州敏芯微电子技术股份有限公司 | 差压传感器封装结构及电子设备 |
NL1044073B1 (en) * | 2020-07-22 | 2022-07-04 | Van Putten Instr Bv | Differential pressure flow cone meter |
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- 2019-12-02 AT ATA51050/2019A patent/AT521898B1/de active
- 2019-12-03 JP JP2019218967A patent/JP7489770B2/ja active Active
- 2019-12-03 KR KR1020190159016A patent/KR20200067766A/ko unknown
- 2019-12-03 CN CN201911221046.5A patent/CN111256766B/zh active Active
- 2019-12-03 US US16/702,214 patent/US11499855B2/en active Active
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JP2020091289A (ja) | 2020-06-11 |
CN111256766A (zh) | 2020-06-09 |
KR20200067766A (ko) | 2020-06-12 |
US11499855B2 (en) | 2022-11-15 |
DE102019132686A1 (de) | 2020-06-04 |
AT521898A3 (de) | 2021-07-15 |
AT521898B1 (de) | 2021-10-15 |
US20200173825A1 (en) | 2020-06-04 |
CN111256766B (zh) | 2024-08-02 |
AT521898A2 (de) | 2020-06-15 |
TW202107525A (zh) | 2021-02-16 |
TWI831881B (zh) | 2024-02-11 |
NL2022125B1 (en) | 2020-06-30 |
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