JP7482746B2 - 基板処理装置、基板処理システム、及びメンテナンス方法 - Google Patents
基板処理装置、基板処理システム、及びメンテナンス方法 Download PDFInfo
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- 239000000758 substrate Substances 0.000 title claims description 198
- 238000012545 processing Methods 0.000 title claims description 164
- 238000000034 method Methods 0.000 title claims description 39
- 238000012423 maintenance Methods 0.000 title claims description 35
- 238000012546 transfer Methods 0.000 claims description 84
- 239000004020 conductor Substances 0.000 claims description 29
- 239000012528 membrane Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 21
- 230000032258 transport Effects 0.000 description 21
- 238000010586 diagram Methods 0.000 description 14
- 229910052782 aluminium Inorganic materials 0.000 description 6
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 6
- 238000009792 diffusion process Methods 0.000 description 5
- 238000005260 corrosion Methods 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 239000010453 quartz Substances 0.000 description 4
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 239000012212 insulator Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000002826 coolant Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 2
- SIWVEOZUMHYXCS-UHFFFAOYSA-N oxo(oxoyttriooxy)yttrium Chemical compound O=[Y]O[Y]=O SIWVEOZUMHYXCS-UHFFFAOYSA-N 0.000 description 2
- 238000007792 addition Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 239000013626 chemical specie Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000006837 decompression Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
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Description
Claims (16)
- 開口を提供する側壁を含む第1のチャンバであり、該第1のチャンバ内で上方及び下方に移動可能な可動部を更に含む、該第1のチャンバと、
前記第1のチャンバ内に配置される基板支持器と、
前記第1のチャンバ内に配置され、前記基板支持器上に載置される基板がその中で処理される処理空間を前記基板支持器と共に画成する第2のチャンバであり、前記第1のチャンバから取り外し可能であり、且つ、前記開口を介して前記第1のチャンバの内部空間と前記第1のチャンバの外部との間で搬送可能である、該第2のチャンバと、
前記第2のチャンバを該第2のチャンバの上で延在する前記可動部に解除可能に固定するクランプと、
前記クランプによる前記第2のチャンバの固定を解除するように構成された解除機構と、
前記可動部を上方及び下方に移動させるように構成されたリフト機構と、
を備える基板処理装置。 - 前記第2のチャンバは、前記処理空間の上方で延在する天部を含み、
前記クランプは、前記天部を前記可動部に解除可能に固定する、
請求項1に記載の基板処理装置。 - 前記クランプは、
前記天部がそこから吊り下げられるように構成された下端を有する支持部と、
前記支持部の前記下端を介して前記天部を前記可動部に付勢するバネと、
を含む、
請求項2に記載の基板処理装置。 - 前記解除機構は、前記クランプによる前記天部の固定を解除するために前記支持部の前記下端を前記第2のチャンバから引き離すエア圧を与えるエア供給器を含む、請求項3に記載の基板処理装置。
- 前記基板支持器の外周に沿って設けられており、グランドに接続された導体部と、
前記導体部に電気的に接続されたコンタクトと、
を更に備え、
前記第2のチャンバは、前記基板支持器と共に前記処理空間を画成している状態で、前記コンタクトに当接する、
請求項1~4の何れか一項に記載の基板処理装置。 - 前記コンタクトは、前記第2のチャンバと弾性的に接触するように構成されている、請求項5に記載の基板処理装置。
- 前記コンタクトは、バネを含む、請求項6に記載の基板処理装置。
- 前記コンタクトは、ピンであり、
前記第2のチャンバは、前記ピンが嵌め込まれる凹部を提供する、
請求項5に記載の基板処理装置。 - 前記ピンは、テーパー形状を有し、
前記第2のチャンバの前記凹部は、前記ピンの前記テーパー形状に対応するテーパー形状を有する、
請求項8に記載の基板処理装置。 - 前記コンタクトは、可撓性を有し、且つ、導電性材料から形成された膜を含み、
前記膜にエア圧を与えて該膜を前記第2のチャンバに押し当てるように構成された別のエア供給器を更に備える、
請求項6に記載の基板処理装置。 - 前記第2のチャンバは、前記処理空間の下方で延在する底部を含み、該底部が前記コンタクトに当接する、請求項5~10の何れか一項に記載の基板処理装置。
- 内縁部及び外縁部を有するカバーリングを更に備え、
前記基板支持器上には、エッジリングが配置され、
前記カバーリングの前記内縁部は、その上に配置される前記エッジリングの外縁部を支持し、
前記カバーリングの前記外縁部は、径方向に突き出した複数の凸部を含み、
前記第2のチャンバは、前記エッジリング及び前記カバーリングが通過可能な内孔を画成する内縁部を有する底部を含み、該底部の該内縁部の上に前記複数の凸部が配置されている状態で前記カバーリングを支持し、
前記内孔は、前記複数の凸部が通過可能であり前記内縁部によって提供された複数のノッチを含む、
請求項1~10の何れか一項に記載の基板処理装置。 - プラズマ処理装置である請求項1~12の何れか一項に記載の基板処理装置。
- 請求項1~13の何れか一項に記載の基板処理装置と、
開口を提供する側壁を含む別のチャンバと搬送装置を有する搬送モジュールであって、該搬送装置は、前記第1のチャンバの内部空間から該第1のチャンバの前記開口及び前記別のチャンバの前記開口を介して該別のチャンバの内部空間に前記第2のチャンバを搬送するように構成されている、該搬送モジュールと、
前記リフト機構、前記解除機構、及び前記搬送装置を制御するように構成された制御部と、
を備え、
前記制御部は、
前記可動部及び前記第2のチャンバを、前記基板支持器から上方に引き離すよう、前記リフト機構を制御し、
前記搬送装置に前記第2のチャンバを受け渡すために前記クランプによる前記第2のチャンバの固定を解除するよう、前記解除機構を制御し、
前記第1のチャンバの前記内部空間から該第1のチャンバの前記開口及び前記別のチャンバの前記開口を介して前記別のチャンバの前記内部空間に前記第2のチャンバを搬送するよう、前記搬送装置を制御する、
基板処理システム。 - 前記基板処理装置は、前記第1のチャンバの前記開口を開閉するように構成されたゲートバルブを更に備え、
前記搬送モジュールは、前記別のチャンバの前記開口を開閉するように構成されたゲートバルブを更に備え、移動可能に構成されており、
前記第1のチャンバの前記側壁、前記別のチャンバの前記側壁、前記基板処理装置の前記ゲートバルブ、及び前記搬送モジュールの前記ゲートバルブは、前記第1のチャンバに前記別のチャンバが接続されている状態で、それらの間に密閉された空間を画成し、
前記密閉された空間を減圧するように構成された排気装置を更に備える、
請求項14に記載の基板処理システム。 - (a)基板処理装置の第1のチャンバ内で第2のチャンバを基板支持器から上方に引き離す工程であり、該基板処理装置は、
開口を提供する側壁を含み、前記第2のチャンバの上で延在し前記第1のチャンバ内で上方及び下方に移動可能な可動部を更に含む前記第1のチャンバと、
前記第1のチャンバ内に配置される前記基板支持器と、
前記第1のチャンバ内に配置され、前記基板支持器上に載置される基板がその中で処理される処理空間を前記基板支持器と共に画成する前記第2のチャンバと、
を備える、該工程と、
(b)前記第1のチャンバの前記可動部に対する前記第2のチャンバの固定を解除する工程と、
(c)前記第1のチャンバの内部空間から前記開口を介して搬送モジュールのチャンバの内部空間に前記第2のチャンバを搬送する工程と、
を含むメンテナンス方法。
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