JP7468704B2 - 搬送システム - Google Patents
搬送システム Download PDFInfo
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- JP7468704B2 JP7468704B2 JP2022569733A JP2022569733A JP7468704B2 JP 7468704 B2 JP7468704 B2 JP 7468704B2 JP 2022569733 A JP2022569733 A JP 2022569733A JP 2022569733 A JP2022569733 A JP 2022569733A JP 7468704 B2 JP7468704 B2 JP 7468704B2
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- 230000032258 transport Effects 0.000 description 200
- 239000004065 semiconductor Substances 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 101000931462 Homo sapiens Protein FosB Proteins 0.000 description 1
- 101000873785 Homo sapiens mRNA-decapping enzyme 1A Proteins 0.000 description 1
- 102100020847 Protein FosB Human genes 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 102100035856 mRNA-decapping enzyme 1A Human genes 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- 238000011144 upstream manufacturing Methods 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0457—Storage devices mechanical with suspended load carriers
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67733—Overhead conveying
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67727—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations using a general scheme of a conveying path within a factory
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/0485—Check-in, check-out devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G1/00—Storing articles, individually or in orderly arrangement, in warehouses or magazines
- B65G1/02—Storage devices
- B65G1/04—Storage devices mechanical
- B65G1/137—Storage devices mechanical with arrangements or automatic control means for selecting which articles are to be removed
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G47/00—Article or material-handling devices associated with conveyors; Methods employing such devices
- B65G47/52—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices
- B65G47/60—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type
- B65G47/61—Devices for transferring articles or materials between conveyors i.e. discharging or feeding devices to or from conveyors of the suspended, e.g. trolley, type for articles
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/6773—Conveying cassettes, containers or carriers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67736—Loading to or unloading from a conveyor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67769—Storage means
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
- B65G2201/02—Articles
- B65G2201/0297—Wafer cassette
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Warehouses Or Storage Devices (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Threshing Machine Elements (AREA)
Description
図1に示されるように、搬送システム1は、FOUP(被搬送物)300を搬送するためのシステムである。搬送システム1は、第1軌道10と、第2軌道20と、中継部30と、天井搬送車(第1天井搬送車)40A及び天井搬送車(第2天井搬送車)40B(図2参照)と、制御装置50(図3参照)と、を備える。
続いて、第2実施形態について説明する。図4及び図5に示されるように、搬送システム1Aは、第1軌道10Aと、第2軌道20Aと、中継部30と、天井搬送車40A及び天井搬送車40Bと、制御装置50(図3参照)と、を備える。
Claims (4)
- 第1棟に設けられた第1軌道と、
前記第1棟とは異なる第2棟に設けられた第2軌道と、
前記第1軌道を走行して被搬送物を搬送すると共に、前記被搬送物を移載する第1天井搬送車と、
前記第2軌道を走行して前記被搬送物を搬送すると共に、前記被搬送物を移載する第2天井搬送車と、
前記第1天井搬送車と前記第2天井搬送車との間で前記被搬送物を受け渡すための中継部と、を備え、
前記中継部は、
前記第1天井搬送車及び前記第2天井搬送車のそれぞれから移載される前記被搬送物を一時的に保管する複数の保管部と、
前記第1軌道から延長して設けられ、前記第1天井搬送車が前記被搬送物を前記保管部に載置すると共に前記保管部から前記被搬送物を取得する第1移載軌道と、
前記第2軌道から延長して設けられ、前記第2天井搬送車が前記被搬送物を前記保管部に載置すると共に前記保管部から前記被搬送物を取得する第2移載軌道と、を有し、
前記第1移載軌道は、直線状に延在している第1往路部分と、前記第1往路部分に続く第1折返し部分と、前記第1折返し部分に続き、直線状に延在している第1復路部分と、を有し、
前記第2移載軌道は、直線状に延在している第2往路部分と、前記第2往路部分に続く第2折返し部分と、前記第2折返し部分に続き、直線状に延在している第2復路部分と、を有し、
前記第1往路部分と前記第2復路部分とが鉛直方向から見て重なっていると共に、前記第1復路部分と前記第2往路部分とが前記鉛直方向から見て重なっており、
前記第1往路部分を走行する前記第1天井搬送車の走行方向と前記第2復路部分を走行する前記第2天井搬送車の走行方向とが一致すると共に、前記第1復路部分を走行する前記第1天井搬送車の走行方向と前記第2往路部分を走行する前記第2天井搬送車の走行方向とが一致し、
複数の前記保管部のそれぞれは、前記第1往路部分、前記第1復路部分、前記第2往路部分及び前記第2復路部分の下方に位置し、且つ前記鉛直方向から見て前記第1往路部分及び前記第2復路部分の両側方に設けられていると共に、前記第1復路部分及び前記第2往路部分の両側方に設けられており、
前記第1往路部分を走行する前記第1天井搬送車及び前記第2復路部分を走行する前記第2天井搬送車が同一の前記保管部に前記被搬送物を移載可能であると共に、前記第1復路部分を走行する前記第1天井搬送車及び前記第2往路部分を走行する前記第2天井搬送車が同一の前記保管部に前記被搬送物を移載可能であり、
前記第1軌道は、前記第1移載軌道の前記第1往路部分に続き前記第1折返し部分と分岐すると共に前記第1復路部分と合流する、前記第2棟に設けられた第1延長軌道を有し、
前記第2軌道は、前記第2移載軌道の前記第2往路部分に続き前記第2折返し部分と分岐すると共に前記第2復路部分と合流する、前記第1棟に設けられた第2延長軌道を有し、
前記第1天井搬送車は、前記第1棟及び前記第2棟において前記被搬送物の移載が可能であり、
前記第2天井搬送車は、前記第1棟及び前記第2棟において前記被搬送物の移載が可能である、搬送システム。 - 前記中継部は、前記第1棟、前記第2棟、又は、前記第1棟と前記第2棟との中間部のいずれかに配置されている、請求項1に記載の搬送システム。
- 前記第1天井搬送車は、
前記第1移載軌道において、前記第1往路部分、前記第1折返し部分及び前記第1復路部分の順に走行し、
前記第1往路部分において前記保管部に対して前記被搬送物を載置し、前記第1復路部分において前記被搬送物を前記保管部から取得し、
前記第2天井搬送車は、
前記第2移載軌道において、前記第2往路部分、前記第2折返し部分及び前記第2復路部分の順に走行し、
前記第2往路部分において前記保管部に対して前記被搬送物を載置し、前記第2復路部分において前記被搬送物を前記保管部から取得する、請求項1又は2に記載の搬送システム。 - 前記第1天井搬送車及び前記第2天井搬送車の動作を制御する制御装置を備え、
前記制御装置は、前記第1棟での前記第1天井搬送車の稼動状況及び前記第2棟での前記第2天井搬送車の稼動状況に応じて、前記第1移載軌道又は前記第2移載軌道での前記被搬送物の移載、又は、前記第1棟又は前記第2棟への前記被搬送物の搬送を制御する、請求項1~3のいずれか一項に記載の搬送システム。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020208274 | 2020-12-16 | ||
JP2020208274 | 2020-12-16 | ||
PCT/JP2021/037889 WO2022130758A1 (ja) | 2020-12-16 | 2021-10-13 | 搬送システム |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2022130758A1 JPWO2022130758A1 (ja) | 2022-06-23 |
JP7468704B2 true JP7468704B2 (ja) | 2024-04-16 |
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ID=82059426
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Application Number | Title | Priority Date | Filing Date |
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JP2022569733A Active JP7468704B2 (ja) | 2020-12-16 | 2021-10-13 | 搬送システム |
Country Status (8)
Country | Link |
---|---|
US (1) | US20240025637A1 (ja) |
EP (1) | EP4245695A1 (ja) |
JP (1) | JP7468704B2 (ja) |
KR (1) | KR20230107658A (ja) |
CN (1) | CN116583940A (ja) |
IL (1) | IL303394A (ja) |
TW (1) | TW202233497A (ja) |
WO (1) | WO2022130758A1 (ja) |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012066933A (ja) | 2010-09-27 | 2012-04-05 | Daifuku Co Ltd | 物品搬送設備 |
WO2017029871A1 (ja) | 2015-08-14 | 2017-02-23 | 村田機械株式会社 | 搬送システム |
US20170194181A1 (en) | 2016-01-04 | 2017-07-06 | Micron Technology, Inc. | Overhead traveling vehicle, transportation system with the same, and method of operating the same |
WO2019087571A1 (ja) | 2017-11-02 | 2019-05-09 | 村田機械株式会社 | 天井搬送車システム及び天井搬送車システムでの物品の一時保管方法 |
WO2019211933A1 (ja) | 2018-05-01 | 2019-11-07 | 村田機械株式会社 | 搬送システム |
-
2021
- 2021-10-13 EP EP21906122.3A patent/EP4245695A1/en active Pending
- 2021-10-13 KR KR1020237020167A patent/KR20230107658A/ko unknown
- 2021-10-13 WO PCT/JP2021/037889 patent/WO2022130758A1/ja active Application Filing
- 2021-10-13 US US18/265,456 patent/US20240025637A1/en active Pending
- 2021-10-13 IL IL303394A patent/IL303394A/en unknown
- 2021-10-13 JP JP2022569733A patent/JP7468704B2/ja active Active
- 2021-10-13 CN CN202180082107.3A patent/CN116583940A/zh active Pending
- 2021-12-10 TW TW110146333A patent/TW202233497A/zh unknown
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012066933A (ja) | 2010-09-27 | 2012-04-05 | Daifuku Co Ltd | 物品搬送設備 |
WO2017029871A1 (ja) | 2015-08-14 | 2017-02-23 | 村田機械株式会社 | 搬送システム |
US20170194181A1 (en) | 2016-01-04 | 2017-07-06 | Micron Technology, Inc. | Overhead traveling vehicle, transportation system with the same, and method of operating the same |
WO2019087571A1 (ja) | 2017-11-02 | 2019-05-09 | 村田機械株式会社 | 天井搬送車システム及び天井搬送車システムでの物品の一時保管方法 |
WO2019211933A1 (ja) | 2018-05-01 | 2019-11-07 | 村田機械株式会社 | 搬送システム |
Also Published As
Publication number | Publication date |
---|---|
IL303394A (en) | 2023-08-01 |
JPWO2022130758A1 (ja) | 2022-06-23 |
CN116583940A (zh) | 2023-08-11 |
TW202233497A (zh) | 2022-09-01 |
KR20230107658A (ko) | 2023-07-17 |
US20240025637A1 (en) | 2024-01-25 |
EP4245695A1 (en) | 2023-09-20 |
WO2022130758A1 (ja) | 2022-06-23 |
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