JP7463722B2 - 光導波路素子および光変調器 - Google Patents
光導波路素子および光変調器 Download PDFInfo
- Publication number
- JP7463722B2 JP7463722B2 JP2019236028A JP2019236028A JP7463722B2 JP 7463722 B2 JP7463722 B2 JP 7463722B2 JP 2019236028 A JP2019236028 A JP 2019236028A JP 2019236028 A JP2019236028 A JP 2019236028A JP 7463722 B2 JP7463722 B2 JP 7463722B2
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- optical waveguide
- resin
- waveguide element
- buffer layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 230000003287 optical effect Effects 0.000 title claims description 238
- 239000000758 substrate Substances 0.000 claims description 194
- 229920005989 resin Polymers 0.000 claims description 99
- 239000011347 resin Substances 0.000 claims description 99
- 230000000694 effects Effects 0.000 claims description 19
- 229920001187 thermosetting polymer Polymers 0.000 claims description 5
- 229920005992 thermoplastic resin Polymers 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 102
- 239000000463 material Substances 0.000 description 22
- 238000000034 method Methods 0.000 description 19
- 238000010586 diagram Methods 0.000 description 13
- 230000005684 electric field Effects 0.000 description 12
- 230000006866 deterioration Effects 0.000 description 10
- 230000008569 process Effects 0.000 description 8
- 239000013307 optical fiber Substances 0.000 description 7
- 230000001902 propagating effect Effects 0.000 description 7
- 230000003014 reinforcing effect Effects 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000015572 biosynthetic process Effects 0.000 description 6
- 239000012792 core layer Substances 0.000 description 6
- 238000003786 synthesis reaction Methods 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 5
- 239000012790 adhesive layer Substances 0.000 description 4
- 230000015556 catabolic process Effects 0.000 description 4
- 238000006731 degradation reaction Methods 0.000 description 4
- 238000000206 photolithography Methods 0.000 description 4
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 229910052681 coesite Inorganic materials 0.000 description 3
- 229910052906 cristobalite Inorganic materials 0.000 description 3
- 238000000151 deposition Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 229910052682 stishovite Inorganic materials 0.000 description 3
- 229910052905 tridymite Inorganic materials 0.000 description 3
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 description 2
- 238000005336 cracking Methods 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- ZKATWMILCYLAPD-UHFFFAOYSA-N niobium pentoxide Chemical compound O=[Nb](=O)O[Nb](=O)=O ZKATWMILCYLAPD-UHFFFAOYSA-N 0.000 description 2
- 230000005693 optoelectronics Effects 0.000 description 2
- 239000011368 organic material Substances 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000000678 plasma activation Methods 0.000 description 2
- 238000004528 spin coating Methods 0.000 description 2
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 1
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910017083 AlN Inorganic materials 0.000 description 1
- 229910004261 CaF 2 Inorganic materials 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- 108010053070 Glutathione Disulfide Proteins 0.000 description 1
- 206010021143 Hypoxia Diseases 0.000 description 1
- 229910021193 La 2 O 3 Inorganic materials 0.000 description 1
- 229910003327 LiNbO3 Inorganic materials 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- ISWSIDIOOBJBQZ-UHFFFAOYSA-N Phenol Chemical compound OC1=CC=CC=C1 ISWSIDIOOBJBQZ-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005253 cladding Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 229910052593 corundum Inorganic materials 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- YPZRWBKMTBYPTK-BJDJZHNGSA-N glutathione disulfide Chemical compound OC(=O)[C@@H](N)CCC(=O)N[C@H](C(=O)NCC(O)=O)CSSC[C@@H](C(=O)NCC(O)=O)NC(=O)CC[C@H](N)C(O)=O YPZRWBKMTBYPTK-BJDJZHNGSA-N 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 229910052746 lanthanum Inorganic materials 0.000 description 1
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical compound [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 1
- JDSHMPZPIAZGSV-UHFFFAOYSA-N melamine Chemical compound NC1=NC(N)=NC(N)=N1 JDSHMPZPIAZGSV-UHFFFAOYSA-N 0.000 description 1
- 230000010287 polarization Effects 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 125000002924 primary amino group Chemical group [H]N([H])* 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 1
- 238000001029 thermal curing Methods 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- 238000001771 vacuum deposition Methods 0.000 description 1
- 229910001845 yogo sapphire Inorganic materials 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
- G02B6/10—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type
- G02B6/12—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings of the optical waveguide type of the integrated circuit kind
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/03—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect
- G02F1/035—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on ceramics or electro-optical crystals, e.g. exhibiting Pockels effect or Kerr effect in an optical waveguide structure
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019236028A JP7463722B2 (ja) | 2019-12-26 | 2019-12-26 | 光導波路素子および光変調器 |
| PCT/JP2020/039346 WO2021131272A1 (fr) | 2019-12-26 | 2020-10-20 | Élément de guide d'ondes optiques et modulateur optique |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019236028A JP7463722B2 (ja) | 2019-12-26 | 2019-12-26 | 光導波路素子および光変調器 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2021105649A JP2021105649A (ja) | 2021-07-26 |
| JP7463722B2 true JP7463722B2 (ja) | 2024-04-09 |
Family
ID=76574151
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019236028A Active JP7463722B2 (ja) | 2019-12-26 | 2019-12-26 | 光導波路素子および光変調器 |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP7463722B2 (fr) |
| WO (1) | WO2021131272A1 (fr) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006035992A1 (fr) | 2004-09-29 | 2006-04-06 | Ngk Insulators, Ltd. | Dispositif à fonctionnement optique |
| JP2007122038A (ja) | 2005-09-29 | 2007-05-17 | Sumitomo Osaka Cement Co Ltd | 光制御デバイス |
| JP2008089936A (ja) | 2006-09-30 | 2008-04-17 | Sumitomo Osaka Cement Co Ltd | 光制御素子 |
| JP2017032968A (ja) | 2016-02-08 | 2017-02-09 | 住友大阪セメント株式会社 | 光変調器及びそれを用いた光送信装置 |
| JP2018173440A (ja) | 2017-03-31 | 2018-11-08 | 住友大阪セメント株式会社 | 電気光学素子 |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0667130A (ja) * | 1992-08-14 | 1994-03-11 | Nippon Telegr & Teleph Corp <Ntt> | 光制御素子 |
| JPH0756036A (ja) * | 1993-08-13 | 1995-03-03 | Fujitsu Ltd | 光導波路デバイス及びその製造方法 |
| US9664931B1 (en) * | 2012-11-16 | 2017-05-30 | Hrl Laboratories, Llc | Electro-optic modulation structures |
-
2019
- 2019-12-26 JP JP2019236028A patent/JP7463722B2/ja active Active
-
2020
- 2020-10-20 WO PCT/JP2020/039346 patent/WO2021131272A1/fr active Application Filing
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006035992A1 (fr) | 2004-09-29 | 2006-04-06 | Ngk Insulators, Ltd. | Dispositif à fonctionnement optique |
| JP2007122038A (ja) | 2005-09-29 | 2007-05-17 | Sumitomo Osaka Cement Co Ltd | 光制御デバイス |
| JP2008089936A (ja) | 2006-09-30 | 2008-04-17 | Sumitomo Osaka Cement Co Ltd | 光制御素子 |
| JP2017032968A (ja) | 2016-02-08 | 2017-02-09 | 住友大阪セメント株式会社 | 光変調器及びそれを用いた光送信装置 |
| JP2018173440A (ja) | 2017-03-31 | 2018-11-08 | 住友大阪セメント株式会社 | 電気光学素子 |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2021131272A1 (fr) | 2021-07-01 |
| JP2021105649A (ja) | 2021-07-26 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP7419806B2 (ja) | 光導波路素子および光変調器 | |
| WO2011111726A1 (fr) | Élément de guide d'onde optique | |
| JP2004157500A (ja) | 光変調器 | |
| WO2007122877A1 (fr) | ÉLÉMENT de modulation optique | |
| WO2007111085A1 (fr) | Dispositif à guide d'ondes optiques | |
| US5548668A (en) | Velocity-matched electrodes for electro-optic travelling-wave modulators and method for forming the same | |
| JP2001235714A (ja) | 進行波形光変調器およびその製造方法 | |
| JP2009109929A (ja) | 光変調器 | |
| JP7463722B2 (ja) | 光導波路素子および光変調器 | |
| JP2021105631A (ja) | 光導波路素子、光変調器、光変調モジュール、及び光送信装置 | |
| JP4875807B2 (ja) | 光変調器 | |
| US11442329B2 (en) | Optical waveguide element, optical modulator, optical modulation module, and optical transmission apparatus | |
| JP3695708B2 (ja) | 光変調器 | |
| US7409114B2 (en) | Optical modulator | |
| JP7428051B2 (ja) | 光導波路素子とそれを用いた光変調デバイス及び光送信装置 | |
| JP7347300B2 (ja) | 光変調器 | |
| JP7054068B2 (ja) | 光制御素子とそれを用いた光変調デバイス並びに光送信装置 | |
| JP2613942B2 (ja) | 導波路型光デバイス | |
| JP7207086B2 (ja) | 光変調器 | |
| WO2023188361A1 (fr) | Élément de guide d'ondes optique, et dispositif de modulation optique et appareil de transmission optique utilisant un élément de guide d'ondes optique | |
| WO2024069952A1 (fr) | Élément de guide d'ondes optique, dispositif de modulation optique l'utilisant, et dispositif de transmission optique | |
| WO2023053332A1 (fr) | Élément de guide d'ondes optique, et appareil de transmission optique et dispositif de modulation optique l'utilisant | |
| JP2005077987A (ja) | 光変調器 | |
| JP4671335B2 (ja) | 導波路型光デバイス | |
| JP3735685B2 (ja) | 集積型光導波路素子 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220916 |
|
| RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7422 Effective date: 20220929 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20221003 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20230822 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20231006 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20240109 |
|
| A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20240201 |
|
| TRDD | Decision of grant or rejection written | ||
| A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20240227 |
|
| A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20240311 |