JP7461958B2 - 放射線ベースの厚さゲージ - Google Patents

放射線ベースの厚さゲージ Download PDF

Info

Publication number
JP7461958B2
JP7461958B2 JP2021544450A JP2021544450A JP7461958B2 JP 7461958 B2 JP7461958 B2 JP 7461958B2 JP 2021544450 A JP2021544450 A JP 2021544450A JP 2021544450 A JP2021544450 A JP 2021544450A JP 7461958 B2 JP7461958 B2 JP 7461958B2
Authority
JP
Japan
Prior art keywords
radiation
material layer
filter
layer
thickness
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021544450A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022519242A (ja
JP2022519242A5 (https=
Inventor
ヴァヘ ガジカニアン，
アハマッド アール． シシェガー，
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nordson Corp
Original Assignee
Nordson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nordson Corp filed Critical Nordson Corp
Publication of JP2022519242A publication Critical patent/JP2022519242A/ja
Publication of JP2022519242A5 publication Critical patent/JP2022519242A5/ja
Priority to JP2023199834A priority Critical patent/JP7660180B2/ja
Application granted granted Critical
Publication of JP7461958B2 publication Critical patent/JP7461958B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G01B15/025—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness by measuring absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G01N23/087—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays using polyenergetic X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20066—Measuring inelastic scatter of gamma rays, e.g. Compton effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1013—Different kinds of radiation or particles electromagnetic radiation gamma
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/313—Accessories, mechanical or electrical features filters, rotating filter disc
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/633—Specific applications or type of materials thickness, density, surface weight (unit area)

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Molecular Biology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
JP2021544450A 2019-01-30 2020-01-29 放射線ベースの厚さゲージ Active JP7461958B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2023199834A JP7660180B2 (ja) 2019-01-30 2023-11-27 放射線ベースの厚さゲージ

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962799001P 2019-01-30 2019-01-30
US62/799,001 2019-01-30
PCT/US2020/015615 WO2020160106A1 (en) 2019-01-30 2020-01-29 Radiation-based thickness gauge

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2023199834A Division JP7660180B2 (ja) 2019-01-30 2023-11-27 放射線ベースの厚さゲージ

Publications (3)

Publication Number Publication Date
JP2022519242A JP2022519242A (ja) 2022-03-22
JP2022519242A5 JP2022519242A5 (https=) 2023-02-03
JP7461958B2 true JP7461958B2 (ja) 2024-04-04

Family

ID=69740644

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021544450A Active JP7461958B2 (ja) 2019-01-30 2020-01-29 放射線ベースの厚さゲージ
JP2023199834A Active JP7660180B2 (ja) 2019-01-30 2023-11-27 放射線ベースの厚さゲージ

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2023199834A Active JP7660180B2 (ja) 2019-01-30 2023-11-27 放射線ベースの厚さゲージ

Country Status (6)

Country Link
US (1) US11079222B2 (https=)
EP (1) EP3918372A1 (https=)
JP (2) JP7461958B2 (https=)
KR (1) KR102609389B1 (https=)
CN (1) CN113728247B (https=)
WO (1) WO2020160106A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7461958B2 (ja) * 2019-01-30 2024-04-04 ノードソン コーポレーション 放射線ベースの厚さゲージ
EP4601028A4 (en) 2022-10-03 2026-04-01 Fujifilm Corp METHOD FOR MANUFACTURING AN ELECTRODE LAYER
JP2024077026A (ja) * 2022-11-28 2024-06-07 キヤノン株式会社 放射線撮像装置
WO2024119407A1 (zh) * 2022-12-07 2024-06-13 宁德时代新能源科技股份有限公司 面密度检测装置
EP4722644A1 (en) * 2024-10-02 2026-04-08 LG Energy Solution, Ltd. An apparatus for inspecting a coated electrode sheet for a secondary battery and a method using the same

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3417243A (en) * 1965-10-28 1968-12-17 Minnesota Mining & Mfg Method and apparatus for x-ray fluorescence gauging of a higher atomic number selected element in a coating on a base
JPS5922161B2 (ja) * 1974-05-13 1984-05-24 株式会社東芝 放射線厚み計
US4525854A (en) * 1983-03-22 1985-06-25 Troxler Electronic Laboratories, Inc. Radiation scatter apparatus and method
GB8515552D0 (en) * 1985-06-19 1985-07-24 Boyle Controls Ltd Coating weight & thickness gauges
US4860329A (en) * 1986-02-24 1989-08-22 Upa Technology, Inc. X-ray fluorescence thickness measuring device
JPH04331308A (ja) * 1991-03-05 1992-11-19 Permelec Electrode Ltd 箔厚み連続測定装置
GB9105639D0 (en) * 1991-03-18 1991-05-01 Data Measurement Corp Dynamic alloy correction gauge
GB9113990D0 (en) * 1991-06-28 1991-08-14 Data Measurement Corp Means of calibrating x-ray gauging systems
US6369381B1 (en) * 1999-01-29 2002-04-09 Troxler Electronic Laboratories, Inc. Apparatus and method for calibration of nuclear gauges
US6787773B1 (en) * 2000-06-07 2004-09-07 Kla-Tencor Corporation Film thickness measurement using electron-beam induced x-ray microanalysis
DE10345754A1 (de) * 2003-09-23 2005-04-21 Mesacon Messelektronik Gmbh Dr Vorrichtung und Verfahren zur Bestimmung der Dicke bewegter metallischer, bandförmiger Werkstoffe
CN1995993B (zh) * 2005-12-31 2010-07-14 清华大学 一种利用多种能量辐射扫描物质的方法及其装置
CN201177501Y (zh) 2007-12-27 2009-01-07 江苏天瑞信息技术有限公司 X荧光测厚光谱仪
ITUD20080072A1 (it) * 2008-04-04 2009-10-05 Danieli Automation Spa Misuratore di spessore per lamiere e relativo procedimento di misura
CN101893432B (zh) * 2009-05-21 2014-11-26 昆山善思光电科技有限公司 无损探伤测厚仪
EP2527055A1 (de) 2011-05-25 2012-11-28 Siemens Aktiengesellschaft Verfahren sowie Vorrichtung zur Bestimmung einer Dicke eines Walzguts
DE102011051365B4 (de) * 2011-06-27 2013-08-22 Rayonic Sensor Systems Gmbh Detektionseinrichtung und System zum Messen der Dicke einer Zinkschicht auf Stahl und zum Messen des Eisengehaltes einer Zinkschicht
CN102607476B (zh) 2012-01-05 2016-07-13 黑龙江省科学院技术物理研究所 可调节高精度x射线测厚仪及测试方法
WO2014082795A1 (de) * 2012-11-29 2014-06-05 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und vorrichtung zur durchführung einer röntgenfluoreszenzanalyse
AU2014268284A1 (en) * 2014-11-30 2016-06-16 Southern Innovation International Pty Ltd Method and apparatus for material identification
CN106197550B (zh) * 2016-08-17 2018-07-06 西安交通大学 集测厚仪、密度计和料位计于一体的测量装置及测量方法
JP7461958B2 (ja) * 2019-01-30 2024-04-04 ノードソン コーポレーション 放射線ベースの厚さゲージ

Also Published As

Publication number Publication date
CN113728247B (zh) 2023-08-22
JP2024009260A (ja) 2024-01-19
WO2020160106A1 (en) 2020-08-06
US20200240776A1 (en) 2020-07-30
KR20210142605A (ko) 2021-11-25
JP2022519242A (ja) 2022-03-22
US11079222B2 (en) 2021-08-03
KR102609389B1 (ko) 2023-12-01
JP7660180B2 (ja) 2025-04-10
CN113728247A (zh) 2021-11-30
EP3918372A1 (en) 2021-12-08

Similar Documents

Publication Publication Date Title
JP7660180B2 (ja) 放射線ベースの厚さゲージ
CN102081164B (zh) X射线测量设备
JP2962015B2 (ja) ｋ吸収端フィルタおよびＸ線装置
Jakubek et al. Pixel detectors for imaging with heavy charged particles
JP5419099B2 (ja) 直接変換型放射線検出器およびイオン化放射線を直接電流に変換する方法
JP5911585B2 (ja) 放射能分析装置
JP5779819B2 (ja) 放射線検出器
JP7027077B2 (ja) 信号処理回路、放射線検出装置及び信号処理方法
JP2020197540A (ja) シンチレータベースの放射線検出器のための性能安定化
Michel et al. Reconstruction of X-ray spectra with the energy sensitive photon counting detector Medipix2
JP2008256631A (ja) １ｃｍ線量当量計用シンチレーション検出器
HK40060588A (zh) 基於辐射的测厚仪
Zang et al. The Dosepix detector—an energy-resolving photon-counting pixel detector for spectrometric measurements
HK40060588B (zh) 基於辐射的测厚仪
CN110622040B (zh) 用于高能射线照相的检测器和关联的成像组件
Manninen et al. Gamma ray source line broadening and Compton line profile analysis
Zambra et al. Experimental results on hard x-ray energy emitted by a low-energy plasma focus device: a radiographic image analysis
Sabharwal et al. Multiple backscattering on monoelemental materials and albedo factors of 279, 320, 511 and 662 keV gamma photons
Bondar et al. Characterization of a 109Cd γ-Ray Source for the Two-Phase Argon Detector
Aspacher et al. Compton continuum suppression by analog pulse shape analysis
Prokeš et al. Determination of X-ray tubes radiation beam characteristics with semiconductor pixel detectors
Broeke et al. Oblique fluorescence in a MARS scanner with a CdTe-Medipix3RX
Hosur et al. Determination of rest mass energy of the electron—an undergraduate laboratory experiment
JP2007248319A (ja) シンチレーション検出器およびシンチレーション式低エネルギー光子１ｃｍ線量当量計
Barykov et al. A multielectrode X-ray detector

Legal Events

Date Code Title Description
A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230126

A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230126

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20230126

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230216

A711 Notification of change in applicant

Free format text: JAPANESE INTERMEDIATE CODE: A711

Effective date: 20230327

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A821

Effective date: 20230327

A02 Decision of refusal

Free format text: JAPANESE INTERMEDIATE CODE: A02

Effective date: 20230727

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231127

A911 Transfer to examiner for re-examination before appeal (zenchi)

Free format text: JAPANESE INTERMEDIATE CODE: A911

Effective date: 20231205

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20240227

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240325

R150 Certificate of patent or registration of utility model

Ref document number: 7461958

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150