KR102609389B1 - 복사선-기반의 두께 게이지 - Google Patents

복사선-기반의 두께 게이지 Download PDF

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Publication number
KR102609389B1
KR102609389B1 KR1020217027135A KR20217027135A KR102609389B1 KR 102609389 B1 KR102609389 B1 KR 102609389B1 KR 1020217027135 A KR1020217027135 A KR 1020217027135A KR 20217027135 A KR20217027135 A KR 20217027135A KR 102609389 B1 KR102609389 B1 KR 102609389B1
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South Korea
Prior art keywords
radiation
material layer
thickness
filter
measurement
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Korean (ko)
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KR20210142605A (ko
Inventor
바헤 가지카니안
아흐매드 알. 쉬쉐가
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노드슨 코포레이션
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B15/00—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons
    • G01B15/02—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness
    • G01B15/025—Measuring arrangements characterised by the use of electromagnetic waves or particle radiation, e.g. by the use of microwaves, X-rays, gamma rays or electrons for measuring thickness by measuring absorption
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/02—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material
    • G01N23/06—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption
    • G01N23/083—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays
    • G01N23/087—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by transmitting the radiation through the material and measuring the absorption the radiation being X-rays using polyenergetic X-rays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/20066—Measuring inelastic scatter of gamma rays, e.g. Compton effect
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/20—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by using diffraction of the radiation by the materials, e.g. for investigating crystal structure; by using scattering of the radiation by the materials, e.g. for investigating non-crystalline materials; by using reflection of the radiation by the materials
    • G01N23/203—Measuring back scattering
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
    • G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1013—Different kinds of radiation or particles electromagnetic radiation gamma
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/10—Different kinds of radiation or particles
    • G01N2223/101—Different kinds of radiation or particles electromagnetic radiation
    • G01N2223/1016—X-ray
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/30—Accessories, mechanical or electrical features
    • G01N2223/313—Accessories, mechanical or electrical features filters, rotating filter disc
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/60—Specific applications or type of materials
    • G01N2223/633—Specific applications or type of materials thickness, density, surface weight (unit area)

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Biochemistry (AREA)
  • Pathology (AREA)
  • Immunology (AREA)
  • General Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electromagnetism (AREA)
  • Toxicology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Molecular Biology (AREA)
  • High Energy & Nuclear Physics (AREA)
  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Measurement Of Radiation (AREA)
KR1020217027135A 2019-01-30 2020-01-29 복사선-기반의 두께 게이지 Active KR102609389B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US201962799001P 2019-01-30 2019-01-30
US62/799,001 2019-01-30
PCT/US2020/015615 WO2020160106A1 (en) 2019-01-30 2020-01-29 Radiation-based thickness gauge

Publications (2)

Publication Number Publication Date
KR20210142605A KR20210142605A (ko) 2021-11-25
KR102609389B1 true KR102609389B1 (ko) 2023-12-01

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Country Status (6)

Country Link
US (1) US11079222B2 (https=)
EP (1) EP3918372A1 (https=)
JP (2) JP7461958B2 (https=)
KR (1) KR102609389B1 (https=)
CN (1) CN113728247B (https=)
WO (1) WO2020160106A1 (https=)

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JP7461958B2 (ja) * 2019-01-30 2024-04-04 ノードソン コーポレーション 放射線ベースの厚さゲージ
EP4601028A4 (en) 2022-10-03 2026-04-01 Fujifilm Corp METHOD FOR MANUFACTURING AN ELECTRODE LAYER
JP2024077026A (ja) * 2022-11-28 2024-06-07 キヤノン株式会社 放射線撮像装置
WO2024119407A1 (zh) * 2022-12-07 2024-06-13 宁德时代新能源科技股份有限公司 面密度检测装置
EP4722644A1 (en) * 2024-10-02 2026-04-08 LG Energy Solution, Ltd. An apparatus for inspecting a coated electrode sheet for a secondary battery and a method using the same

Citations (1)

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Publication number Priority date Publication date Assignee Title
WO1992016819A1 (en) * 1991-03-18 1992-10-01 Data Measurement Corporation Dynamic alloy correction gauge

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US3417243A (en) * 1965-10-28 1968-12-17 Minnesota Mining & Mfg Method and apparatus for x-ray fluorescence gauging of a higher atomic number selected element in a coating on a base
JPS5922161B2 (ja) * 1974-05-13 1984-05-24 株式会社東芝 放射線厚み計
US4525854A (en) * 1983-03-22 1985-06-25 Troxler Electronic Laboratories, Inc. Radiation scatter apparatus and method
GB8515552D0 (en) * 1985-06-19 1985-07-24 Boyle Controls Ltd Coating weight & thickness gauges
US4860329A (en) * 1986-02-24 1989-08-22 Upa Technology, Inc. X-ray fluorescence thickness measuring device
JPH04331308A (ja) * 1991-03-05 1992-11-19 Permelec Electrode Ltd 箔厚み連続測定装置
GB9113990D0 (en) * 1991-06-28 1991-08-14 Data Measurement Corp Means of calibrating x-ray gauging systems
US6369381B1 (en) * 1999-01-29 2002-04-09 Troxler Electronic Laboratories, Inc. Apparatus and method for calibration of nuclear gauges
US6787773B1 (en) * 2000-06-07 2004-09-07 Kla-Tencor Corporation Film thickness measurement using electron-beam induced x-ray microanalysis
DE10345754A1 (de) * 2003-09-23 2005-04-21 Mesacon Messelektronik Gmbh Dr Vorrichtung und Verfahren zur Bestimmung der Dicke bewegter metallischer, bandförmiger Werkstoffe
CN1995993B (zh) * 2005-12-31 2010-07-14 清华大学 一种利用多种能量辐射扫描物质的方法及其装置
CN201177501Y (zh) 2007-12-27 2009-01-07 江苏天瑞信息技术有限公司 X荧光测厚光谱仪
ITUD20080072A1 (it) * 2008-04-04 2009-10-05 Danieli Automation Spa Misuratore di spessore per lamiere e relativo procedimento di misura
CN101893432B (zh) * 2009-05-21 2014-11-26 昆山善思光电科技有限公司 无损探伤测厚仪
EP2527055A1 (de) 2011-05-25 2012-11-28 Siemens Aktiengesellschaft Verfahren sowie Vorrichtung zur Bestimmung einer Dicke eines Walzguts
DE102011051365B4 (de) * 2011-06-27 2013-08-22 Rayonic Sensor Systems Gmbh Detektionseinrichtung und System zum Messen der Dicke einer Zinkschicht auf Stahl und zum Messen des Eisengehaltes einer Zinkschicht
CN102607476B (zh) 2012-01-05 2016-07-13 黑龙江省科学院技术物理研究所 可调节高精度x射线测厚仪及测试方法
WO2014082795A1 (de) * 2012-11-29 2014-06-05 Helmut Fischer GmbH Institut für Elektronik und Messtechnik Verfahren und vorrichtung zur durchführung einer röntgenfluoreszenzanalyse
AU2014268284A1 (en) * 2014-11-30 2016-06-16 Southern Innovation International Pty Ltd Method and apparatus for material identification
CN106197550B (zh) * 2016-08-17 2018-07-06 西安交通大学 集测厚仪、密度计和料位计于一体的测量装置及测量方法
JP7461958B2 (ja) * 2019-01-30 2024-04-04 ノードソン コーポレーション 放射線ベースの厚さゲージ

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WO1992016819A1 (en) * 1991-03-18 1992-10-01 Data Measurement Corporation Dynamic alloy correction gauge

Also Published As

Publication number Publication date
CN113728247B (zh) 2023-08-22
JP2024009260A (ja) 2024-01-19
WO2020160106A1 (en) 2020-08-06
US20200240776A1 (en) 2020-07-30
KR20210142605A (ko) 2021-11-25
JP2022519242A (ja) 2022-03-22
JP7461958B2 (ja) 2024-04-04
US11079222B2 (en) 2021-08-03
JP7660180B2 (ja) 2025-04-10
CN113728247A (zh) 2021-11-30
EP3918372A1 (en) 2021-12-08

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