JP7460461B2 - processing equipment - Google Patents

Description

The present invention relates to a processing device.

In a grinding device that uses a grinding wheel to grind rectangular plate-shaped workpieces, for example, multiple plate-shaped workpieces are held by the holding surface of a chuck table, and these multiple plate-shaped workpieces are ground simultaneously to the same thickness.

Multiple plate-shaped workpieces are stored in a cassette (magazine rack). Each plate-shaped workpiece is removed from the cassette, transported to the holding surface, and held there.

The cassette can store, for example, 20 plate-shaped works. The chuck table has a holding surface that can hold, for example, six plate-shaped workpieces. Therefore, six plate-shaped workpieces are transported to the holding surface for one-time grinding.

In the above example, the cassette contains 20 plate-shaped workpieces, so when the grinding process of the plate-shaped workpieces held on the holding surface is completed by the third transfer, the grinding process of 18 plate-shaped workpieces is completed. As a result, two plate-shaped workpieces remain in the cassette. Therefore, during the next fourth transfer, after these two plate-shaped workpieces are transferred to the holding surface, the empty cassette is replaced with another cassette containing 20 plate-shaped workpieces, and then four plate-shaped workpieces are transferred from this cassette to the holding surface.

In this way, the cassette may be replaced while a predetermined number of plate-shaped workpieces are being conveyed to the holding surface of the chuck table. Therefore, a stock area is prepared in which cassettes are prepared. Furthermore, in the technique disclosed in Patent Document 1, a cassette transport mechanism is used to transport the cassette between the stock area and the cassette stage.

Japanese Patent Application Publication No. 2008-130634

However, rectangular plate-like workpieces come in a variety of different sizes. Therefore, the size of the cassette varies depending on the size of the plate-shaped work. Therefore, if the cassettes have different sizes, it may be difficult for the transport mechanism that transports the cassettes to transport the cassettes.

Therefore, the object of the present invention is to easily transport cassettes of various sizes according to the size of the plate-shaped workpiece.

The processing device of the present invention (the present processing device) is a processing device that includes a holding means having a holding surface for holding a rectangular plate-shaped workpiece, a processing means for processing the plate-shaped workpiece, a cassette stage on which a cassette having multiple stages capable of accommodating multiple plate-shaped workpieces is placed, a work transport mechanism for transporting the plate-shaped workpiece contained in the cassette placed on the cassette stage to the holding surface, a stocker on which multiple cassettes can be placed, and a cassette transport mechanism for transporting the cassette placed on the stocker to the cassette stage, the stocker including a table, an adapter plate interposed between the table and the cassette, and a block disposed on the adapter plate for positioning the cassette, and the adapter plate has a mounting portion formed on the underside that allows the adapter plate to be positioned relative to the table, and a recess formed on the underside that is supported by the cassette transport mechanism, and the cassette transport mechanism has a support mechanism that supports the underside of the adapter plate on which the cassette is placed, and a movement mechanism that moves the support mechanism between the stocker and the cassette stage, and the support mechanism has a top plate connected to the movement mechanism, four pillars that hang down from the top plate, support parts that extend horizontally from the bottom ends of the pillars and support the recesses of the adapter plate, and a pillar rotation mechanism that can rotate the pillars to position the support parts in either a position that supports the recesses or a position outside the outer periphery of the adapter plate.

In addition, in this processing device, the column rotation mechanism includes a rotation plate arranged at the upper end of each of the four columns and extending in the horizontal direction, and a rotation plate arranged horizontally shifted from the axis of the column. a revolution axis that revolves around the axis of the pillar, a link plate that has an opening that can enter the four revolution axes, and connects the four revolution axes so that they can revolve; It may also include a horizontal drive unit that moves in the horizontal direction.

Further, in this processing apparatus, the cassette transport mechanism includes a weight detection section that detects the weight applied to the support mechanism when the support mechanism supports the adapter plate by the four support sections; The cassette may further include a determination unit that determines whether or not plate-shaped works are accommodated in all the stages of the cassette based on the detection results of the detection unit.

In this processing device, the cassette is placed on an adapter plate in the cassette stage and the stocker. When the cassette is moved, the support mechanism of the cassette transport mechanism supports the adapter plate on which the cassette is placed. This support mechanism is then moved between the stocker and the cassette stage by the moving mechanism of the cassette transport mechanism. Therefore, unlike a configuration in which the cassette is directly supported and moved, there is no need to adjust the cassette transport mechanism even if the size of the cassette changes. Therefore, in this processing device, the cassette transport mechanism can easily transport cassettes of various sizes according to the size of the plate-shaped workpiece.

FIG. 2 is a perspective view showing a configuration of a processing device. FIG. 2(a) is a perspective view showing the configuration of the adapter plate from the top side, and FIG. 2(b) is a perspective view showing the configuration of the adapter plate from the bottom side. FIG. 4 is a perspective view showing a configuration of a cassette transport mechanism. FIG. 6 is a perspective view showing a cassette transport operation using the support mechanism of the cassette transport mechanism. FIG. 6 is a perspective view showing a cassette transport operation using the support mechanism of the cassette transport mechanism. 13 is a perspective view showing a cassette transport operation using a support mechanism of the cassette transport mechanism; FIG. FIG. 11 is a perspective view showing a support mechanism having another configuration. 8 is an enlarged perspective view of a portion of the support mechanism shown in FIG. 7. FIG. 8 is a top view of the support mechanism shown in FIG. 7; 8 is a perspective view showing a supporting operation of the adapter plate using the support mechanism shown in FIG. 7. FIG. 8 is a perspective view showing the support operation of the adapter plate using the support mechanism shown in FIG. 7; 8 is a perspective view showing a supporting operation of the adapter plate using the support mechanism shown in FIG. 7. FIG. 13 is a perspective view showing a support mechanism having still another configuration.

As shown in FIG. 1, the processing apparatus 1 according to the present embodiment grinds a rectangular plate-shaped work 2 using a rough grinding section 10 and a finish grinding section 30.

The processing device 1 includes a first device base 3 and a second device base 5 disposed behind the first device base 3 (on the +Y direction side). On the first device base 3, the plate-shaped workpiece 2 is carried in and out. On the second device base 5, the plate-shaped workpiece 2 is processed by the rough grinding section 10 or the finish grinding section 30.

A cassette stage 40 and a stocker 50 are provided on the front side (-Y direction side) of the first device base 3. A cassette 41 containing a plate-shaped workpiece 2 before processing is placed on the cassette stage 40. A plurality of similar cassettes 41 containing plate-shaped workpieces 2 before processing can be placed on the stocker 50.

The cassette 41 has multiple levels (shelves) that can accommodate multiple plate-shaped workpieces, and each level accommodates one plate-shaped workpiece 2.

The cassette 41 has an opening facing in the +Y direction. A robot 155 is arranged on the +Y direction side of this opening. The robot 155 carries (stores) the processed plate-shaped work 2 into a cassette (not shown) for storing processed works.

Further, the robot 155 takes out the unprocessed plate-like work 2 from the cassette 41 and places it on the temporary placement table 154 of the temporary placement means 152.

The temporary placement table 154 is used to temporarily place the plate-shaped workpiece 2 taken out from the cassette 41. The temporary table 154 is configured so that two plate-like works 2 can be placed thereon. The temporary storage means 152 further includes a moving means 153 for moving the temporary storage table 154 in the X-axis direction.

When the robot 155 places the plate-shaped workpiece 2 on the temporary placement table 154 of the temporary placement means 152, the temporary placement means 152 uses the moving means 153 to position the temporary placement table 154 at the rough grinding position on the +X direction side (the position of the temporary placement table 154 shown in Figure 1).

The rough grinding unit 10 and the finish grinding unit 30 are arranged on the second device base 5 on the +Y direction side of the temporary placement means 152.

The rough grinding unit 10 includes a first chuck table 13 for holding the plate-shaped workpiece 2. The first chuck table 13 is an example of a holding means for holding the plate-shaped workpiece 2, and includes a first holding surface 12 for suction-holding the plate-shaped workpiece 2. The first holding surface 12 is connected to a suction source (not shown) and is capable of suction-holding two plate-shaped workpieces 2 simultaneously.
The first chuck table 13 is capable of rotating about a central axis that passes through the center of the first holding surface 12 and extends in the Z-axis direction while the plate-shaped workpiece 2 is suction-held by the first holding surface 12 .

A first column 14 is erected on the rear (+Y direction side) of the second device base 5. The rough grinding unit 10 is provided with a rough grinding means 15 for rough grinding the plate-shaped workpiece 2, and a rough grinding feed means 11 for feeding the rough grinding means 15 for grinding, on the front side of the first column 14.

The rough grinding means 15 is an example of a processing means for processing the plate-shaped workpiece 2, and includes a rough grinding wheel 17 having a rough grinding wheel 18. The rough grinding whetstone 18 is an example of a processing tool, and is a whetstone containing relatively large abrasive grains.

Further, the rough grinding section 10 includes a first height gauge 19 for measuring the thickness of the plate-like workpiece 2 held on the first holding surface 12 of the first chuck table 13.

In the rough grinding section 10, the plate-shaped workpiece 2 held on the first holding surface 12 of the first chuck table 13 is roughly ground by the rough grinding wheel 18 which is rotated by the rotation of the spindle 16 of the rough grinding means 15.

The finishing grinding section 30 includes a second chuck table 33 for holding the plate-shaped work 2. The second chuck table 33 is an example of a holding means for holding the plate-shaped workpiece 2, and includes a second holding surface 32 that holds the plate-shaped workpiece 2 by suction. The second holding surface 32 is communicated with a suction source (not shown), and is capable of suction-holding the two plate-like works 2 at the same time.
The second chuck table 33 is rotatable about a central axis extending in the Z-axis direction passing through the center of the second holding surface 32 while holding the plate-like workpiece 2 under suction by the second holding surface 32. .

A second column 34 is erected adjacent to the first column 14 at the rear of the second device base 5. The finish grinding section 30 is provided with a finish grinding means 35 for finish grinding the plate-shaped workpiece 2, and a finish grinding feed means 31 for feeding the finish grinding means 35 for grinding, on the front surface of the second column 34.

The finish grinding means 35 is an example of a processing means for processing the plate-shaped workpiece 2, and includes a finish grinding wheel 37 having a finish grinding wheel 38. The finishing grinding wheel 38 is an example of a processing tool, and is a grinding wheel containing relatively small abrasive grains.

Further, the finish grinding section 30 includes a second height gauge 39 for measuring the thickness of the plate-like workpiece 2 held on the second holding surface 32 of the second chuck table 33.

In the finishing grinding section 30 , the plate-like workpiece 2 held on the second holding surface 32 of the second chuck table 33 is subjected to finishing grinding by the finishing grinding wheel 38 rotated by the rotation of the spindle 36 of the finishing grinding means 35 .

In addition, in the conveyance space 170 shown by a broken line in FIG. 1 between the rough grinding section 10 and the finish grinding section 30 on the second device base 5, two A table conveying means 171 is provided.
In the present embodiment, the transport means 171 and the robot 155 constitute a work transport mechanism that transports the plate-shaped work 2 accommodated in the cassette 41 placed on the cassette stage 40 to the first holding surface 12 and the second holding surface 32. constitutes an example.

Figure 1 shows the transport means 171 for the rough grinding unit 10. The transport means 171 for the rough grinding unit 10 is provided with a transport pad 175 for holding the plate-shaped workpiece 2 on the +X side surface of a housing plate 173 extending in the Y-axis direction, a Z-axis movement mechanism 177 for moving the transport pad 175 in the Z-axis direction, and a Y-axis movement mechanism 179 for moving the transport pad 175 and the Z-axis movement mechanism 177 in the Y-axis direction. The transport pad 175 is capable of holding two plate-shaped workpieces 2 simultaneously.

The transport means 171 for the rough grinding unit 10 simultaneously holds two plate-shaped workpieces 2 temporarily placed on the temporary placement table 154 at the rough grinding position on the +X direction side using the transport pad 175, transports them to the first chuck table 13 of the rough grinding unit 10, and places them on the first holding surface 12.

In addition, after rough grinding, the transport means 171 for the rough grinding unit 10 simultaneously holds the two plate-shaped workpieces 2 on the first holding surface 12 of the first chuck table 13 using the transport pad 175 and places them on the temporary placement table 154 of the temporary placement means 152.

Note that after the plate-like workpiece 2 after rough grinding is placed on the temporary holding table 154 of the temporary holding means 152, the temporary holding means 152 moves the temporary holding means 152 to the rough grinding position on the +X direction side using the moving means 153. position to the finish grinding position on the -X direction side.

In addition, in the transport space 170, a transport means 171 for the finish grinding unit 30 is also arranged on the -X side of the transport means 171 for the rough grinding unit 10. The transport means 171 for the finish grinding unit 30 is configured to have a transport pad 175, a Z-axis movement mechanism 177, and a Y-axis movement mechanism 179 on the -X side surface of the housing plate 173 in the configuration of the transport means 171 for the rough grinding unit 10 shown in Figure 1.

The conveyance means 171 for the finish grinding section 30 simultaneously holds two plate-shaped workpieces 2 temporarily placed on the temporary table 154 at the finish grinding position on the -X direction side by means of a conveyance pad 175, and transfers them to the finish grinding section. 30, and placed on the second holding surface 32 thereof.

Further, the conveyance means 171 for the finish grinding section 30 simultaneously holds the two plate-shaped workpieces 2 on the second holding surface 32 of the second chuck table 33 after finish grinding with the conveyance pad 175, and the cleaning means 156 It is transported to the spinner table 157.

The cleaning means 156 is a spinner cleaning unit that cleans the plate-shaped work 2. The cleaning means 156 includes a spinner table 157 that holds the plate-shaped work 2 and a nozzle 158 that sprays cleaning water and dry air toward the spinner table 157. The spinner table 157 is configured to be able to hold two plate-shaped works 2 at the same time.

In the cleaning means 156, a spinner table 157 holding the plate-shaped work 2 rotates, and cleaning water is jetted toward the plate-shaped work 2 to spinner-clean the plate-shaped work 2. After that, drying air is blown onto the plate-shaped workpiece 2 to dry the plate-shaped workpiece 2.

The plate-shaped workpiece 2 cleaned by the cleaning means 156 is carried by the robot 155 into a cassette for storing processed workpieces.

As shown in FIG. 1, the stocker 50 includes a rectangular parallelepiped table 51 and an adapter plate 52 that is interposed between the table 51 and the cassette 41. As shown in FIG. 2(a), the stocker 50 includes a block 53 having an elongated rectangular parallelepiped shape that is placed on the adapter plate 52 and serves to position the cassette 41.

That is, the upper surface 521 of the adapter plate 52 shown in FIG. 2(a) is the surface on which the cassette 41 is placed. Four grooves 54 are formed in this upper surface 521. A block 53 is fitted into each of the grooves 54 so that the block 53 can move along the groove 54. For example, an operator can adjust the position of the block 53 to match the size of the bottom surface of the cassette 41, and the cassette 41 can be positioned by the four blocks 53.

In addition, two notches 55 are formed on each of the two side surfaces extending along the longitudinal direction (Y-axis direction) of the adapter plate 52.

Further, as shown in FIG. 2(b), the lower surface 522 of the adapter plate 52 is formed with three mounting portions 56 as conical recesses that allow positioning of the adapter plate 52 with respect to the table 51.

In this regard, as shown in FIG. 1, three plate supports 511 as conical convex portions are provided on the table 51, corresponding to each adapter plate 52. The three mounting parts 56 of the adapter plate 52 are arranged on the lower surface 522 of the adapter plate 52 so as to be able to fit into these three plate support parts 511.
By fitting the mounting portion 56 of the adapter plate 52 into the plate support portion 511 of the table 51, the adapter plate 52 can be properly positioned with respect to the table 51.
Note that a plate support section 411 similar to the plate support section 511 is also provided on the cassette stage 40 (see FIG. 6).

In this embodiment, the mounting portion 56 of the adapter plate 52 is fitted into the plate support portion 511 of the table 51, so that the adapter plate 52 is placed on the table 51 such that a gap is formed between the adapter plate 52 and the table 51.

Furthermore, as shown in FIG. 2(b), the lower surface 522 of the adapter plate 52 has elongated groove-shaped recesses 57 formed at positions corresponding to the four cutouts 55. Each recess 57 extends perpendicularly from the cutout 55 to the side surface of the adapter plate 52. The recesses 57 are the portions of the adapter plate 52 that are supported by the cassette transport mechanism 60 (see FIG. 3).

Further, as shown in FIG. 1, the processing apparatus 1 is provided with a cassette transport space 180 shown by a broken line above the robot 155. This cassette transport space 180 is equipped with a cassette transport mechanism 60 shown in FIG. 3 for transporting the cassette 41 placed on the stocker 50 to the cassette stage 40.

The cassette transport mechanism 60 includes a support mechanism 70 that supports the lower surface 522 of the adapter plate 52 on which the cassette 41 is placed, and a movement mechanism 100 that moves the support mechanism 70 between the stocker 50 and the cassette stage 40.

The moving mechanism 100 is provided on the front surface (−Y side surface) of a housing plate 61 that extends in the X-axis direction of the cassette transport mechanism 60 .
The moving mechanism 100 includes an X-axis moving mechanism 120 that moves the support mechanism 70 in the X-axis direction, and a Z-axis moving mechanism 130 that moves the support mechanism 70 in the Z-axis direction.

The X-axis movement mechanism 120 includes a pair of guide rails 123 extending in the X-axis direction, an X-axis table 124 placed on the guide rails 123, a ball screw 125 extending parallel to the guide rails 123, and a drive motor 126 that rotates the ball screw 25.

A pair of guide rails 123 are arranged on the front surface of the housing plate 61 in parallel to the X-axis direction. The X-axis table 124 is installed on a pair of guide rails 123 so as to be slidable along these guide rails 123. A Z-axis moving mechanism 130 and a support mechanism 70 are mounted on the X-axis table 124.

The ball screw 125 is screwed into a nut portion (not shown) provided on the X-axis table 124. The drive motor 126 is connected to one end of the ball screw 125 and drives the ball screw 125 to rotate. By rotationally driving the ball screw 125, the X-axis table 124, the Z-axis moving mechanism 130, and the support mechanism 70 move in the X-axis direction along the guide rail 123.

The Z-axis moving mechanism 130 includes a pair of guide rails 131 extending in the Z-axis direction, a Z-axis table 132 placed on the guide rails 131, a ball screw 133 extending parallel to the guide rails 131, and a drive motor 135 that rotates the ball screw 133. , an encoder 136 for detecting the rotational speed and position of the drive motor 135, and an arm 137 for supporting the support mechanism 70.

A pair of guide rails 131 are arranged on the sides of the X-axis table 124, parallel to the Z-axis direction. The Z-axis table 132 is installed on the pair of guide rails 131 so as to be able to slide along these guide rails 131. An arm 137 is attached to the Z-axis table 132.

The ball screw 133 is screwed into a nut portion (not shown) provided on the back side of the Z-axis table 132. The drive motor 135 is connected to one end of the ball screw 133 and drives the ball screw 133 to rotate. By rotationally driving the ball screw 133, the Z-axis table 132, the arm 137, and the support mechanism 70 supported by the arm 137 move in the Z-axis direction along the guide rail 131. Also, at this time, the encoder 136 measures the moving distance of the support mechanism 70 in the Z-axis direction.

The arm 137 includes a first arm portion 138 that is attached to the Z-axis table 132 and extends along the Y-axis direction, and a second arm portion 139 that extends downward from the tip of the first arm portion 138. The support mechanism 70 is held at the tip (lower end) of the second arm portion 139.

As shown in FIG. 3, the support mechanism 70 includes a top plate 71 connected to the second arm portion 139 of the arm 137 in the moving mechanism 100, and four wires penetrating the top plate 71 and hanging down from the top plate 71. A pillar 72 is provided. The four pillars 72 are arranged at positions where they can be fitted simultaneously into the four notches 55 of the adapter plate 52 shown in FIG. 2(a) and the like.

Further, the support mechanism 70 includes a support portion 73 extending horizontally from the lower end of the column 72. The support portion 73 is configured to be able to support (that is, fit into the recess 57) the recess 57 (see FIG. 2(b)) provided on the lower surface 522 of the adapter plate 52. .

The support mechanism 70 also includes rotary cylinders 75, an example of a column rotation mechanism, on the top surface of the top plate 71 in correspondence with each column 72. The rotary cylinders 75 are attached to the upper ends of the columns 72 that protrude upward through the top plate 71, and rotate the columns 72. By rotating the columns 72, the rotary cylinders 75 can position the support parts 73 provided at the tips of the columns 72 either in a position that supports the recesses 57 of the adapter plate 52, or in a position that is outside the outer periphery of the adapter plate 52.

As shown in FIG. 3, the cassette transport mechanism 60 also includes a weight detection unit 62 that detects the weight applied to the support mechanism 70, and a control unit 63 that controls the operation of the cassette transport mechanism 60.

Here, the transport operation of the cassette 41 by the cassette transport mechanism 60 will be explained. Below, the operation of placing the cassette 41 placed on the table 51 of the stocker 50 on the cassette stage 40 will be described.

First, the control unit 63 controls the moving mechanism 100 shown in FIG. 3 to move the support mechanism 70 directly above the cassette 41 placed on the adapter plate 52 on the table 51, as shown in FIG. Deploy. At this time, the control section 63 controls the rotary cylinder 75 to rotate the column 72 so that the extending direction of the support section 73 is parallel to the longitudinal side surface of the adapter plate 52 where the notch section 55 is provided. shall be. Thereby, the support part 73 is arranged at a position outside the outer periphery of the adapter plate 52. In this state, the control unit 63 controls the moving mechanism 100 to lower the support mechanism 70 as indicated by an arrow 301 in FIG.

Thereby, as shown in FIG. 5, the pillar 72 of the support mechanism 70 is fitted into the notch 55 of the adapter plate 52 on which the cassette 41 is placed. Further, the support portion 73 at the tip of the column 72 is arranged below the lower surface 522 of the adapter plate 52 (see FIG. 2(b)), which is placed on the table 51 with a gap therebetween.

In this state, the control unit 63 controls the rotary cylinder 75 to rotate the column 72 approximately 90 degrees as shown by the arrow 302, as shown in FIG. As a result, the support portion 73 provided at the tip of the pillar 72 is placed directly below the recess 57 of the adapter plate 52, that is, at a position that supports the recess 57 of the adapter plate 52.

Thereafter, the control unit 63 controls the moving mechanism 100 to raise the support mechanism 70 as indicated by an arrow 303 in FIG. As a result, the support portion 73 is fitted into the recess 57 of the adapter plate 52 and supports the recess 57 . In this way, the support mechanism 70 supports the cassette 41 along with the adapter plate 52 by the four support parts 73.

Further, when the support mechanism 70 supports the adapter plate 52 by the four support parts 73, the weight detection part 62 detects the weight applied to the support mechanism 70, that is, the total weight of the adapter plate 52 and the cassette 41. Detect. Then, the determination unit 64 of the control unit 63 determines whether the plate-like workpieces 2 are accommodated in all stages of the cassette 41 based on the detection result of the weight detection unit 62.
The weight detection unit 62 has a piezoelectric element (not shown) interposed between the first arm part 138 and the second arm part 139 of the arm 137, and detects the weight by the pressure applied to the piezoelectric element. Good too.
Further, the weight detection unit 62 may detect the weight based on the load current value applied to the drive motor 135 when the support mechanism 70 is raised.

If the judgment unit 64 judges that the plate-shaped workpieces 2 are not accommodated in all the levels of the cassette 41, the control unit 63 notifies the operator of this fact using a display unit such as a touch panel (not shown) provided on the processing device 1. Furthermore, the judgment unit 64 returns the adapter plate 52 onto the table 51, and ends the process.

On the other hand, if the judgment unit 64 judges that the plate-shaped workpieces 2 are stored in all stages of the cassette 41, the control unit 63 controls the movement mechanism 100 to move the support mechanism 70 as shown by arrows 304 and 305, and places the support mechanism 70 supporting the cassette 41 and the adapter plate 52 on the cassette stage 40. At this time, the placement portion 56 of the adapter plate 52 is engaged with the plate support portion 411 of the cassette stage 40.

The control unit 63 then controls the rotary cylinder 75 to rotate the pillar 72 by approximately 90 degrees, so that the extension direction of the support portion 73 is parallel to the side of the adapter plate 52 on which the notch portion 55 is provided. This positions the support portion 73 at a position outside the outer periphery of the adapter plate 52, and releases the support of the adapter plate 52 by the support mechanism 70. The control unit 63 then controls the movement mechanism 100 to move the support mechanism 70 away from the cassette stage 40 and position it at a predetermined position.

As described above, in the processing device 1 according to the present embodiment, the cassette 41 is placed on the adapter plate 52 in the cassette stage 40 and the stocker 50. When the cassette 41 is moved, the support mechanism 70 of the cassette transport mechanism 60 supports the adapter plate 52 on which the cassette 41 is placed. The support mechanism 70 is moved between the stocker 50 and the cassette stage 40 by the moving mechanism 100 of the cassette transport mechanism 60. Therefore, unlike a configuration in which the cassette 41 is directly supported and moved, there is no need to adjust the cassette transport mechanism 60 even if the size of the cassette 41 changes. Therefore, in this embodiment, the cassette transport mechanism 60 can easily transport cassettes 41 of various sizes according to the size of the plate-shaped workpiece 2.

In this embodiment, the judgment unit 64 judges whether or not the plate-shaped workpieces 2 are accommodated in all stages of the cassette 41 supported by the support mechanism 70 based on the detection result of the weight detection unit 62 of the cassette transport mechanism 60. If it is judged that the plate-shaped workpieces 2 are not accommodated in all stages, the cassette 41 is returned to the table 51 of the stocker 50. This makes it possible to prevent trouble such as transporting an empty cassette 41 to the cassette stage 40.
The determination unit 64 may be configured to determine the number of plate-shaped workpieces 2 in the cassette 41 based on the detection result of the weight detection unit 62. In this case, when a predetermined number or more of plate-shaped workpieces 2 are accommodated in the cassette 41, the control unit 63 may continue the process of placing the cassette 41 and the adapter plate 52 on the cassette stage 40.

In addition, in this embodiment, as shown in FIG. 3, the support mechanism 70 includes a rotary rotary shaft mounted on the top surface of the top plate 71 to rotate the columns 72 attached to the bottom surface of the top plate 71 so as to correspond to each column 72. A cylinder 75 is provided.

The cassette transport mechanism 60 may be provided with a support mechanism 77 as shown in FIG. 7 instead of the support mechanism 70. This support mechanism 77 has a configuration including a link mechanism 80 as a column rotation mechanism in place of the rotary cylinder 75 in the configuration of the support mechanism 70 described above. This link mechanism 80 rotates the four columns 72 simultaneously using one drive source.

As shown in FIG. 7, the link mechanism 80 includes a generally disk-shaped swivel plate 81 that corresponds to each pillar 72. The swivel plate 81 is disposed at the upper ends of the four pillars 72 that protrude upward through the top plate 71, and extends horizontally.

Further, the link mechanism 80 includes a revolution shaft 82 arranged on a rotation plate 81. The revolution axis 82 is horizontally shifted from the axis of the column 72 and is arranged on the rotating plate 81 . The revolution axis 82 can revolve around the axis of the pillar 72 as the rotation plate 81 and the pillar 72 rotate.

The link mechanism 80 further includes a link plate 83. The link plate 83 has openings through which the four revolution shafts 82 can enter, and connects the four revolution shafts 82 so that they can revolve.

That is, the link plate 83 has a pair of first link members 84 and a second link member 85 connected to the first link members 84.

The first link member 84 extends along the longitudinal direction (Y-axis direction) of the top plate 71, and is provided with openings 841 at both ends through which the revolution axis 82 can enter, as shown in the enlarged view of FIG. ing. That is, in the present embodiment, the openings 841 at both ends of each first link member 84 align with the revolution axis 82 of the rotating plate 81 provided in a pair of columns 72 arranged along the longitudinal direction (Y-axis direction) of the top plate 71. is engaged with.
The second link member 85 extends along the lateral direction (X-axis direction) of the top plate 71 and is fixed to the pair of first link members 84 .

The link mechanism 80 also includes a linear cylinder 90 as a horizontal drive unit that moves the link plate 83 in the horizontal direction.

As shown in FIG. 9, the direct-acting cylinder 90 is attached to the top plate 71 via a first pivot shaft 92 so as to be able to pivot on the XY plane and substantially along the Y-axis direction. The linear cylinder 90 also includes a rod 91 that extends and contracts approximately along the Y-axis direction. The tip of the rod 91 is engaged with a second pivot shaft 851 provided at the tip of the second link member 85 so as to be pivotable about the second pivot shaft 851 .

In this configuration, the control unit 63 controls the moving mechanism 100 shown in Figure 3 to position the support mechanism 77 directly above the cassette 41 placed on the adapter plate 52 on the table 51 (see Figure 4).

At this time, as shown in FIG. 10, the control unit 63 controls the linear cylinder 90 to retract the rod 91. As a result, the extension direction of the support part 73 provided at the tip of the pillar 72 becomes parallel to the longitudinal side of the top plate 71, i.e., parallel to the longitudinal side of the adapter plate 52. As a result, the support part 73 is positioned outside the outer periphery of the adapter plate 52.

In this state, the control unit 63 controls the moving mechanism 100 to lower the support mechanism 77. As a result, the pillars 72 of the support mechanism 77 are fitted into the cutouts 55 (see FIG. 2A) of the adapter plate 52. In addition, the support portions 73 at the tips of the pillars 72 are positioned below the lower surface 522 (see FIG. 2B) of the adapter plate 52, which is placed on the table 51 with a gap therebetween.
In addition, in Figures 10 to 12, in order to avoid complicating the drawings, for convenience, the cassette 41 placed on the adapter plate 52 and the cutout portion 55 formed on the side of the adapter plate 52 are omitted.

Thereafter, as shown in FIG. 11, the control unit 63 controls the linear cylinder 90 to extend the rod 91 approximately in the +Y direction as shown by an arrow 400. As a result, the second link member 85 of the link plate 83 connected to the rod 91 via the second pivot shaft 851 and the pair of first link members 84 connected to the second link member 85 are approximately Receives a force along the +Y direction.

This causes the link plate 83 to move horizontally in approximately the +Y direction. That is, a pair of first link members 84 move horizontally in approximately the +Y direction while revolving the revolution shaft 82 of the swivel plate 81 connected to both ends about the axis of the pillar 72. By revolving the revolution shaft 82, the swivel plate 81, the pillar 72, and the support part 73 provided at the tip of the pillar 72 are rotated counterclockwise as shown in FIG. 11.

The control unit 63 then controls the direct-acting cylinder 90 to further extend the rod 91 approximately in the +Y direction as shown by an arrow 400. Thereby, the revolution axis 82 is further revolved, and the turning plate 81, the pillar 72, and the support part 73 are further rotated in the counterclockwise direction. As a result, as shown in FIG. 12, the pillar 72 is rotated approximately 90 degrees, and the support portion 73 is placed directly below the recess 57 of the adapter plate 52, that is, in a position that supports the recess 57 of the adapter plate 52. .

Thereafter, the control unit 63 controls the moving mechanism 100 (see FIG. 3) to raise the support mechanism 77. As a result, the support portion 73 is fitted into the recess 57 of the adapter plate 52 and supports the recess 57 . In this way, the support mechanism 77 supports the cassette 41 along with the adapter plate 52 by the four support parts 73.

Then, the control unit 63 controls the moving mechanism 100 to move the support mechanism 77 and place the adapter plate 52 on the cassette stage 40, and then controls the linear cylinder 90 to retract the rod 91. This causes the revolution axis 82 to revolve in the reverse direction, and the support portion 73 of the pillar 72 becomes parallel to the longitudinal side surface of the adapter plate 52. This positions the support portion 73 at a position outside the outer periphery of the adapter plate 52, and the support of the adapter plate 52 by the support mechanism 77 is released.

In this way, even when the cassette transport mechanism 60 is equipped with a support mechanism 77, the support mechanism 77 supports the adapter plate 52 on which the cassette 41 is placed, and this support mechanism 77 can be moved between the stocker 50 and the cassette stage 40 by the moving mechanism 100 of the cassette transport mechanism 60. Therefore, even if the size of the cassette 41 changes, it is possible to easily transport the cassette 41 without adjusting the cassette transport mechanism 60.

Even when the support mechanism 77 is used, the control unit 63 may determine whether or not to continue the process of placing the cassette 41 and adapter plate 52 on the cassette stage 40, depending on the determination by the determination unit 64 based on the detection result of the weight detection unit 62.

Further, in the support mechanism 77, by moving the pair of first link members 84 using the linear motion cylinder 90, each revolution axis 82 is revolved, and the direction of the support portion 73 is changed. In this regard, the link mechanism 80 of the support mechanism 77 may include a rotary cylinder 95 provided at the upper end of one column 72 instead of the linear cylinder 90, as shown in FIG.

In this configuration, by rotating the rotary cylinder 95, the swivel plate 81 at the upper end of the column 72 on which the rotary cylinder 95 is mounted rotates, for example, in a counterclockwise direction. As a result, one of the first link members 84, one end of which is connected to the revolution shaft 82 of the swivel plate 81, the second link member 85 connected to the first link member 84, and the other first link member 84 receive a force substantially along the +Y direction, as shown by the arrow 405.

As a result, similar to the structure shown in FIGS. 7 to 12, the revolution axis 82 of the rotating plate 81 connected to the other end of one first link member 84 and both ends of the other first link member 84 is rotated. , the entire link plate 83 moves approximately in the +Y direction while being revolved around the axis of the column 72. As the revolution axis 82 revolves, the rotation plate 81, the pillar 72, and the support part 73 provided at the tip of the pillar 72 are rotated counterclockwise, as shown in FIG.

Therefore, even in this configuration, by fitting the support portion 73 into the recess 57 of the adapter plate 52, the support mechanism 77 can support the cassette 41 together with the adapter plate 52.

1: processing device, 2: plate-shaped workpiece, 3: first device base, 5: second device base,
10: Roughly ground part,
12: first holding surface, 13: first chuck table, 11: rough grinding feed means,
15: rough grinding means, 17: rough grinding wheel, 18: rough grinding stone,
30: finish grinding section,
32: second holding surface, 33: second chuck table, 31: finish grinding feed means,
35: finish grinding means, 37: finish grinding wheel, 38: finish grinding stone,
40: cassette stage, 41: cassette,
50: Storage, 51: Table,
52: adapter plate, 521: upper surface, 522: lower surface,
53: block, 54: groove, 55: notch, 56: mounting portion, 57: recess,
Cassette transport space 180, 60: cassette transport mechanism,
61: housing plate, 62: detection unit, 63: control unit, 64: determination unit,
70: Support mechanism, 71: Top plate, 72: Pillar, 73: Support portion, 75: Rotary cylinder,
77: Support mechanism, 80: Link mechanism, 81: Swivel plate, 82: Revolution axis,
83: link plate, 84: first link member, 841: opening,
85: second link member, 851: second pivot shaft,
90: linear cylinder, 91: rod, 92: first pivot shaft,
95: rotary cylinder,
100: movement mechanism, 120: X-axis movement mechanism, 130: Z-axis movement mechanism,
170: transport space, 171: transport means, 173: housing plate, 175: transport pad,
177: Z-axis movement mechanism, 179: Y-axis movement mechanism

Claims (3)

A holding means having a holding surface for holding a rectangular plate-shaped work, a processing means for processing the plate-shaped work, and a cassette stage on which a cassette having a plurality of stages capable of accommodating a plurality of plate-shaped works is placed; a workpiece transport mechanism that transports a plate-shaped workpiece accommodated in the cassette placed on the cassette stage to the holding surface;
a stocker on which a plurality of the cassettes can be placed; a cassette transport mechanism that transports the cassettes placed on the stocker to the cassette stage;
A processing device comprising:
The stocker includes a table, an adapter plate interposed between the table and the cassette, and a block disposed on the adapter plate to position the cassette,
The adapter plate is
a mounting part formed on the lower surface and capable of positioning the adapter plate with respect to the table;
a recess formed on the lower surface and supported by the cassette transport mechanism;
The cassette transport mechanism is
a support mechanism that supports the lower surface of the adapter plate on which the cassette is mounted;
a moving mechanism that moves the support mechanism between the stocker and the cassette stage;
The support mechanism is
a top plate connected to the moving mechanism;
Four pillars hanging from the top plate,
a support part extending horizontally from the lower end of the column and supporting the recess of the adapter plate;
comprising a column rotation mechanism capable of positioning the support part in either a position supporting the recessed part or a position outside the outer periphery of the adapter plate by rotating the column;
Processing equipment. The column rotation mechanism includes:
a horizontally extending pivot plate disposed at the upper end of each of the four columns;
a revolution shaft that is disposed on the swivel plate and horizontally shifted from the axis of the column and that revolves around the axis of the column;
a link plate having an opening through which the four revolution shafts can enter and connecting the four revolution shafts so as to be capable of revolving;
and a horizontal drive unit that moves the link plate in a horizontal direction.
The processing device according to claim 1. The cassette transport mechanism includes:
a weight detection unit that detects a weight applied to the support mechanism when the support mechanism supports the adapter plate by the four support parts;
and a determination unit that determines whether or not plate-shaped workpieces are accommodated in all the stages of the cassette based on the detection result of the weight detection unit.
The processing device according to claim 1.

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