JP2022002272A - Processing device - Google Patents

Abstract

To easily transport cassettes in various size in accordance with size of a plate-like workpiece.SOLUTION: In a processing device 1, a cassette 41 is mounted on an adapter plate 52 in a cassette stage 40 and a stocker 50. When moving the cassette 41, the adapter plate 52 mounting the cassette 41 is supported by a support mechanism 70 of a cassette transfer mechanism. The support mechanism 70 is moved between a stocker 50 and the cassette stage 40. Thus, unlike a configuration to directly support and move the cassette 41, it is not necessary to adjust the support mechanism 70 even when the size of the cassette 41 changes. Therefore, in the embodiment, it is possible to easily transport a cassette 41 in various size in accordance with the size of a plate-like workpiece 2 by using the support mechanism 70.SELECTED DRAWING: Figure 5

Description

The present invention relates to a processing apparatus.

In a grinding device that grinds a rectangular plate-shaped workpiece with a grinding wheel, for example, a plurality of plate-shaped workpieces are held by a holding surface of a chuck table, and these plurality of plate-shaped workpieces are simultaneously ground to have the same thickness. ing.

A plurality of plate-shaped workpieces are housed in a cassette (magazine rack). Each plate-shaped work is taken out from the cassette, transported to the holding surface, and held.

The cassette can store, for example, 20 plate-shaped workpieces. The chuck table has, for example, a holding surface capable of holding six plate-shaped workpieces. Therefore, six plate-shaped workpieces are transferred to the holding surface for one-time grinding.

In the above example, since the cassette contains 20 plate-shaped workpieces, for example, when the grinding process of the plate-shaped workpieces held on the holding surface by the third transfer is completed, 18 plate-shaped workpieces are stored. Grinding of the work is completed. As a result, two plate-shaped workpieces are left in the cassette. Therefore, in the next fourth transport, the cassette that has been emptied after transporting the two plate-shaped workpieces to the holding surface is replaced with another cassette containing the 20 plate-shaped workpieces. After replacement, four plate-shaped workpieces are transferred from this cassette to the holding surface.

In this way, the cassette may be replaced while a predetermined number of plate-shaped workpieces are being conveyed to the holding surface of the chuck table. Therefore, a stock area for preparing cassettes is prepared. Further, in the technique disclosed in Patent Document 1, a cassette transfer mechanism is used to transfer a cassette between the stock area and the cassette stage.

Japanese Unexamined Patent Publication No. 2008-130634

However, rectangular plate-shaped workpieces come in a variety of different sizes. Therefore, the size of the cassette is different according to the size of the plate-shaped work. Therefore, it may be difficult for the transport mechanism for transporting the cassette to transport the cassette if the size of the cassette is different.

Therefore, an object of the present invention is to easily transport cassettes of various sizes according to the size of the plate-shaped work.

The processing apparatus (the present processing apparatus) of the present invention includes a holding means having a holding surface for holding a square plate-shaped work, a processing means for processing the plate-shaped work, and a plurality of stages capable of accommodating a plurality of plate-shaped works. A cassette stage on which a cassette having the above-mentioned is mounted, a work transfer mechanism for transporting a plate-shaped work housed in the cassette mounted on the cassette stage to the holding surface, and a plurality of the cassettes can be mounted. A processing device including a stocker and a cassette transport mechanism for transporting the cassette mounted on the stocker to the cassette stage, wherein the stocker is interposed between a table and the table and the cassette. The adapter plate comprises a block that is placed on the adapter plate and positions the cassette, the adapter plate is formed on the lower surface, and a mounting portion capable of positioning the adapter plate with respect to the table and the mounting portion thereof. The cassette transfer mechanism includes a recess formed on the lower surface and supported by the cassette transfer mechanism, and the cassette transfer mechanism includes a support mechanism for supporting the lower surface of the adapter plate on which the cassette is placed, and the support mechanism is the stocker and the cassette. A moving mechanism for moving between the stage and the support mechanism includes a top plate connected to the moving mechanism, four pillars hanging from the top plate, and a horizontal direction from the lower end of the pillars. A support portion that extends and supports the recess of the adapter plate, and a position that supports the recess by rotating the column and a position that is outside the outer periphery of the adapter plate. It is equipped with a column rotation mechanism that can be positioned in either position.

Further, in the present processing apparatus, the column rotation mechanism is arranged on the swivel plate arranged at the upper end of each of the four columns and extending in the horizontal direction, and laterally deviated from the axis of the column in the swivel plate. A revolving shaft that revolves around the axis of the pillar, a link plate that has an opening that allows entry into the four revolving shafts, and that revolveably connects the four revolving shafts, and the link plate. A horizontal drive unit that moves in the horizontal direction may be provided.

Further, in the present processing apparatus, the cassette transfer mechanism includes a weight detection unit that detects the weight applied to the support mechanism when the support mechanism supports the adapter plate by the four support portions, and the weight. A determination unit for determining whether or not the plate-shaped work is housed in all the stages of the cassette based on the detection result of the detection unit may be further provided.

In this processing apparatus, the cassette is placed on the adapter plate in the cassette stage and the stocker. Then, when the cassette is moved, the adapter plate on which the cassette is placed is supported by the support mechanism of the cassette transfer mechanism. Then, this support mechanism is moved between the stocker and the cassette stage by the moving mechanism of the cassette transport mechanism. Therefore, unlike the configuration in which the cassette is directly supported and moved, it is not necessary to adjust the cassette transfer mechanism even if the size of the cassette changes. Therefore, in this processing apparatus, it is possible to easily transport cassettes of various sizes according to the size of the plate-shaped workpiece by the cassette transport mechanism.

It is a perspective view which shows the structure of a processing apparatus. FIG. 2A is a perspective view showing the configuration of the adapter plate from the upper surface side, and FIG. 2B is a perspective view showing the configuration of the adapter plate from the lower surface side. It is a perspective view which shows the structure of a cassette transfer mechanism. It is a perspective view which shows the transport operation of a cassette using the support mechanism of a cassette transport mechanism. It is a perspective view which shows the transport operation of a cassette using the support mechanism of a cassette transport mechanism. It is a perspective view which shows the transport operation of a cassette using the support mechanism of a cassette transport mechanism. It is a perspective view which shows the support mechanism of another structure. FIG. 3 is an enlarged perspective view showing a part of the support mechanism shown in FIG. 7. It is a top view of the support mechanism shown in FIG. 7. It is a perspective view which shows the support operation of the adapter plate using the support mechanism shown in FIG. 7. It is a perspective view which shows the support operation of the adapter plate using the support mechanism shown in FIG. 7. It is a perspective view which shows the support operation of the adapter plate using the support mechanism shown in FIG. 7. It is a perspective view which shows the support mechanism of the other structure.

As shown in FIG. 1, the processing apparatus 1 according to the present embodiment grinds a quadrangular plate-shaped work 2 by a rough grinding unit 10 and a finish grinding unit 30.

The processing apparatus 1 has a first apparatus base 3 and a second apparatus base 5 arranged behind the first apparatus base 3 (on the + Y direction side). On the first device base 3, the plate-shaped work 2 is carried in and out. On the second device base 5, the plate-shaped work 2 is processed by the rough grinding section 10 or the finish grinding section 30.

A cassette stage 40 and a stocker 50 are provided on the front side (-Y direction side) of the first device base 3. On the cassette stage 40, a cassette 41 in which the plate-shaped work 2 before processing is housed is placed. A plurality of similar cassettes 41 containing the plate-shaped work 2 before processing can be placed on the stocker 50.

The cassette 41 is provided with a plurality of stages (shelves) capable of accommodating a plurality of plate-shaped works, and one plate-shaped work 2 is accommodated in each stage.

The cassette 41 has an opening facing the + Y direction side. A robot 155 is arranged on the + Y direction side of this opening. The robot 155 carries (stores) the processed plate-shaped work 2 into a cassette for accommodating the processed work (not shown).

Further, the robot 155 takes out the plate-shaped work 2 before processing from the cassette 41 and places it on the temporary placing table 154 of the temporary placing means 152.

The temporary placement table 154 is used for temporarily placing the plate-shaped work 2 taken out from the cassette 41. The temporary placement table 154 is configured so that two plate-shaped workpieces 2 can be placed on it. The temporary placing means 152 further has a moving means 153 for moving the temporary placing table 154 in the X-axis direction.

When the plate-shaped work 2 is placed on the temporary placement table 154 of the temporary placement means 152 by the robot 155, the temporary placement means 152 uses the moving means 153 to place the temporary placement table 154 on the rough grinding position on the + X direction side. Place it at (the position of the temporary table 154 shown in FIG. 1).

A rough grinding section 10 and a finish grinding section 30 are arranged on the second device base 5 on the + Y direction side of the temporary placing means 152.

The rough grinding section 10 includes a first chuck table 13 for holding the plate-shaped work 2. The first chuck table 13 is an example of a holding means for holding the plate-shaped work 2, and includes a first holding surface 12 for sucking and holding the plate-shaped work 2. The first holding surface 12 is communicated with a suction source (not shown) so that the two plate-shaped works 2 can be sucked and held at the same time.
The first chuck table 13 is rotatable about a central axis extending in the Z-axis direction through the center of the first holding surface 12 in a state where the plate-shaped work 2 is sucked and held by the first holding surface 12. ..

Further, a first column 14 is erected behind the second device base 5 (on the + Y direction side). The rough grinding unit 10 is provided with a rough grinding means 15 for rough grinding the plate-shaped work 2 and a rough grinding feeding means 11 for grinding and feeding the rough grinding means 15 on the front surface of the first column 14.

The rough grinding means 15 is an example of a processing means for processing a plate-shaped work 2, and includes a rough grinding wheel 17 having a rough grinding wheel 18. The rough grinding wheel 18 is an example of a processing tool, and is a grindstone containing relatively large abrasive grains.

Further, the rough grinding unit 10 includes a first height gauge 19 for measuring the thickness of the plate-shaped work 2 held on the first holding surface 12 of the first chuck table 13.

In the rough grinding section 10, the plate-shaped work 2 held on the first holding surface 12 of the first chuck table 13 is roughly ground by the rough grinding wheel 18 rotated by the rotation of the spindle 16 of the rough grinding means 15.

The finish grinding unit 30 includes a second chuck table 33 for holding the plate-shaped work 2. The second chuck table 33 is an example of a holding means for holding the plate-shaped work 2, and includes a second holding surface 32 for sucking and holding the plate-shaped work 2. The second holding surface 32 is communicated with a suction source (not shown) so that the two plate-shaped workpieces 2 can be sucked and held at the same time.
The second chuck table 33 is rotatable about a central axis extending in the Z-axis direction through the center of the second holding surface 32 in a state where the plate-shaped work 2 is sucked and held by the second holding surface 32. ..

Further, behind the second device base 5, a second column 34 is erected so as to be adjacent to the first column 14. The finish grinding unit 30 is provided with a finish grinding means 35 for finish grinding the plate-shaped work 2 and a finish grinding feed means 31 for grinding and feeding the finish grinding means 35 on the front surface of the second column 34.

The finish grinding means 35 is an example of a processing means for processing the plate-shaped work 2, and includes a finish grinding wheel 37 having a finish grinding wheel 38. The finish grinding wheel 38 is an example of a processing tool, and is a grindstone containing relatively small abrasive grains.

Further, the finish grinding unit 30 is provided with a second height gauge 39 for measuring the thickness of the plate-shaped work 2 held on the second holding surface 32 of the second chuck table 33.

In the finish grinding unit 30, the plate-shaped work 2 held on the second holding surface 32 of the second chuck table 33 is finished and ground by the finish grinding wheel 38 rotated by the rotation of the spindle 36 of the finish grinding means 35.

Further, in the transport space 170 shown by the broken line in FIG. 1 between the rough grinding section 10 and the finish grinding section 30 on the second device base 5, 2 for the rough grinding section 10 and the finish grinding section 30 are provided. The table transport means 171 is provided.
In the present embodiment, the transporting means 171 and the robot 155 transport the plate-shaped work 2 housed in the cassette 41 mounted on the cassette stage 40 to the first holding surface 12 and the second holding surface 32. It constitutes an example.

FIG. 1 shows a transport means 171 for the rough grinding unit 10. The transport means 171 for the coarse grinding unit 10 moves the transport pad 175 and the transport pad 175 for holding the plate-shaped work 2 in the Z-axis direction on the + X-side surface of the housing plate 173 extending in the Y-axis direction. A Z-axis moving mechanism 177 for moving the transfer pad 175 and the Z-axis moving mechanism 177 in the Y-axis direction is provided. The transport pad 175 can hold two plate-shaped workpieces 2 at the same time.

The transport means 171 for the rough grinding unit 10 simultaneously holds two plate-shaped workpieces 2 temporarily placed on the temporary placement table 154 at the rough grinding position on the + X direction side by the transport pad 175, and the rough grinding unit 10 Is carried into the first chuck table 13 and placed on the first holding surface 12.

Further, the transport means 171 for the rough grinding unit 10 simultaneously holds the two plate-shaped workpieces 2 on the first holding surface 12 of the first chuck table 13 by the transport pad 175 after the rough grinding, and temporarily places the means. It is placed on the temporary storage table 154 of 152.

After the plate-shaped work 2 after rough grinding is placed on the temporary placement table 154 of the temporary placement means 152, the temporary placement means 152 uses the moving means 153 to roughly grind the temporary placement means 152 on the + X direction side. Move from the position to the finish grinding position on the -X direction side.

Further, in the transport space 170, the transport means 171 for the finish grinding section 30 is also arranged on the −X side of the transport means 171 for the rough grinding section 10. In the configuration of the transport means 171 for the rough grinding section 10 shown in FIG. 1, the transport means 171 for the finish grinding section 30 has a transport pad 175 and a Z-axis moving mechanism 177 on the −X side surface of the housing plate 173. And is configured to have a Y-axis direction moving mechanism 179.

The transport means 171 for the finish grinding unit 30 simultaneously holds the two plate-shaped workpieces 2 temporarily placed on the temporary placement table 154 at the finish grinding position on the −X direction side by the transport pad 175, and the finish grinding unit 171. It is carried into the second chuck table 33 of 30 and placed on the second holding surface 32 thereof.

Further, the transport means 171 for the finish grinding unit 30 simultaneously holds the two plate-shaped workpieces 2 on the second holding surface 32 of the second chuck table 33 by the transport pad 175 after the finish grinding, and the cleaning means 156. Is transported to the spinner table 157.

The cleaning means 156 is a spinner cleaning unit that cleans the plate-shaped work 2. The cleaning means 156 includes a spinner table 157 that holds the plate-shaped work 2, and a nozzle 158 that injects cleaning water and dry air toward the spinner table 157. The spinner table 157 is configured to hold two plate-shaped workpieces 2 at the same time.

In the cleaning means 156, the spinner table 157 holding the plate-shaped work 2 is rotated, and cleaning water is sprayed toward the plate-shaped work 2 to clean the plate-shaped work 2. After that, the plate-shaped work 2 is blown with dry air to dry the plate-shaped work 2.

The plate-shaped work 2 cleaned by the cleaning means 156 is carried into a cassette for accommodating the processed work by the robot 155.

Further, as shown in FIG. 1, the stocker 50 includes a rectangular parallelepiped table 51, and an adapter plate 52 interposed between the table 51 and the cassette 41. Further, as shown in FIG. 2A, the stocker 50 includes a block 53 having an elongated rectangular parallelepiped shape arranged on the adapter plate 52 for positioning the cassette 41.

That is, the upper surface 521 of the adapter plate 52 shown in FIG. 2A is the surface on which the cassette 41 is placed. Four grooves 54 are formed on the upper surface 521. Then, a block 53 is fitted in each of the grooves 54 so as to be movable along the groove 54. For example, the operator can position the cassette 41 by the four blocks 53 by adjusting the position of the block 53 according to the size of the bottom surface of the cassette 41.

Further, two notches 55 are formed on each of the two side surfaces extending along the longitudinal direction (Y-axis direction) of the adapter plate 52.

Further, as shown in FIG. 2B, the lower surface 522 of the adapter plate 52 is formed with three mounting portions 56 as conical recesses capable of positioning the adapter plate 52 with respect to the table 51.

In this regard, as shown in FIG. 1, on the table 51, three plate support portions 511 as conical convex portions corresponding to the adapter plates 52 are provided. The three mounting portions 56 of the adapter plate 52 are arranged on the lower surface 522 of the adapter plate 52 so that they can be fitted to the three plate supporting portions 511.
By fitting the mounting portion 56 of the adapter plate 52 to the plate support portion 511 of the table 51, the adapter plate 52 can be satisfactorily positioned with respect to the table 51.
A plate support portion 411 similar to the plate support portion 511 is also provided on the cassette stage 40 (see FIG. 6).

In the present embodiment, the mounting portion 56 of the adapter plate 52 is fitted to the plate supporting portion 511 of the table 51, so that a gap is formed between the adapter plate 52 and the table 51 in the adapter plate 52. As such, it is placed on the table 51.

Further, as shown in FIG. 2B, the lower surface 522 of the adapter plate 52 is formed with elongated groove-shaped recesses 57 at positions corresponding to the four notches 55. Each recess 57 extends vertically from the notch 55 to the side surface of the adapter plate 52. The recess 57 is a portion supported by the cassette transfer mechanism 60 (see FIG. 3) in the adapter plate 52.

Further, as shown in FIG. 1, the processing apparatus 1 is provided with a cassette transfer space 180 indicated by a broken line on the upper part of the robot 155. The cassette transfer space 180 is provided with a cassette transfer mechanism 60 shown in FIG. 3 for transporting the cassette 41 mounted on the stocker 50 to the cassette stage 40.

The cassette transfer mechanism 60 includes a support mechanism 70 that supports the lower surface 522 of the adapter plate 52 on which the cassette 41 is mounted, and a moving mechanism 100 that moves the support mechanism 70 between the stocker 50 and the cassette stage 40. ..

The moving mechanism 100 is provided on the front surface (the surface on the −Y side) of the housing plate 61 extending in the X-axis direction of the cassette transport mechanism 60.
The moving mechanism 100 includes an X-axis moving mechanism 120 that moves the support mechanism 70 in the X-axis direction, and a Z-axis moving mechanism 130 that moves the support mechanism 70 in the Z-axis direction.

The X-axis movement mechanism 120 includes a pair of guide rails 123 extending in the X-axis direction, an X-axis table 124 mounted on the guide rail 123, a ball screw 125 extending in parallel with the guide rail 123, and a drive motor for rotating the ball screw 25. Contains 126.

The pair of guide rails 123 are arranged on the front surface of the housing plate 61 in parallel with the X-axis direction. The X-axis table 124 is slidably installed on a pair of guide rails 123 along these guide rails 123. A Z-axis moving mechanism 130 and a support mechanism 70 are mounted on the X-axis table 124.

The ball screw 125 is screwed into a nut portion (not shown) provided on the X-axis table 124. The drive motor 126 is connected to one end of the ball screw 125 and rotationally drives the ball screw 125. When the ball screw 125 is rotationally driven, the X-axis table 124, the Z-axis moving mechanism 130, and the support mechanism 70 move in the X-axis direction along the guide rail 123.

The Z-axis movement mechanism 130 includes a pair of guide rails 131 extending in the Z-axis direction, a Z-axis table 132 mounted on the guide rail 131, a ball screw 133 extending in parallel with the guide rail 131, and a drive motor 135 for rotating the ball screw 133. , An encoder 136 for detecting the rotational speed and position of the drive motor 135, and an arm 137 for supporting the support mechanism 70.

The pair of guide rails 131 are arranged on the side surface of the X-axis table 124 in parallel with the Z-axis direction. The Z-axis table 132 is slidably installed on a pair of guide rails 131 along these guide rails 131. An arm 137 is mounted on the Z-axis table 132.

The ball screw 133 is screwed into a nut portion (not shown) provided on the back surface side of the Z-axis table 132. The drive motor 135 is connected to one end of the ball screw 133 and rotationally drives the ball screw 133. When the ball screw 133 is rotationally driven, the Z-axis table 132, the arm 137, and the support mechanism 70 supported by the arm 137 move in the Z-axis direction along the guide rail 131. At this time, the encoder 136 measures the moving distance in the Z-axis direction of the support mechanism 70.

The arm 137 includes a first arm portion 138 attached to the Z-axis table 132 and extending along the Y-axis direction, and a second arm portion 139 extending downward from the tip of the first arm portion 138. The support mechanism 70 is held at the tip (lower end) of the second arm portion 139.

As shown in FIG. 3, the support mechanism 70 includes a top plate 71 connected to the second arm portion 139 of the arm 137 in the moving mechanism 100, and four pieces that penetrate the top plate 71 and hang down from the top plate 71. It has a pillar 72. The four pillars 72 are arranged at positions where they can be simultaneously fitted to the four notched portions 55 of the adapter plate 52 shown in FIG. 2A and the like.

Further, the support mechanism 70 includes a support portion 73 extending in the horizontal direction from the lower end of the pillar 72. The support portion 73 is configured to be able to support (that is, be fitted to the recess 57) the recess 57 (see FIG. 2B) provided in the lower surface 522 of the adapter plate 52. ..

Further, the support mechanism 70 is provided with a rotary cylinder 75 as an example of the pillar rotation mechanism on the upper surface of the top plate 71 so as to correspond to each pillar 72. The rotary cylinder 75 is attached to the upper end of a pillar 72 that penetrates the top plate 71 and protrudes upward, and rotates the pillar 72. The rotary cylinder 75 rotates the pillar 72 so that the support portion 73 provided at the tip of the pillar 72 supports the recess 57 of the adapter plate 52 and the position outside the outer periphery of the adapter plate 52. It is possible to position it in any of the above.

Further, as shown in FIG. 3, the cassette transfer mechanism 60 includes a weight detection unit 62 that detects the weight applied to the support mechanism 70, and a control unit 63 for controlling the operation of the cassette transfer mechanism 60. There is.

Here, the transport operation of the cassette 41 by the cassette transport mechanism 60 will be described. Hereinafter, the operation of placing the cassette 41 arranged on the table 51 of the stocker 50 on the cassette stage 40 will be described.

First, the control unit 63 controls the moving mechanism 100 shown in FIG. 3, and as shown in FIG. 4, the support mechanism 70 is placed directly above the cassette 41 mounted on the adapter plate 52 on the table 51. Deploy. At this time, the control unit 63 controls the rotary cylinder 75 to rotate the pillar 72, so that the extending direction of the support portion 73 is parallel to the side surface in the longitudinal direction in which the notch portion 55 of the adapter plate 52 is provided. And. As a result, the support portion 73 is arranged at a position outside the outer circumference of the adapter plate 52. In this state, the control unit 63 controls the movement mechanism 100 to lower the support mechanism 70 as shown by the arrow 301 in FIG.

As a result, as shown in FIG. 5, the pillar 72 of the support mechanism 70 is fitted into the cutout portion 55 of the adapter plate 52 on which the cassette 41 is placed. Further, the support portion 73 at the tip of the pillar 72 is arranged below the lower surface 522 (see FIG. 2B) of the adapter plate 52 placed on the table 51 with a gap.

In this state, the control unit 63 controls the rotary cylinder 75 as shown in FIG. 5 to rotate the pillar 72 by approximately 90 degrees as indicated by the arrow 302. As a result, the support portion 73 provided at the tip of the pillar 72 is arranged directly below the recess 57 of the adapter plate 52, that is, at a position that supports the recess 57 of the adapter plate 52.

After that, the control unit 63 controls the movement mechanism 100 to raise the support mechanism 70 as shown by the arrow 303 in FIG. As a result, the support portion 73 is fitted into the recess 57 of the adapter plate 52 to support the recess 57. In this way, the support mechanism 70 supports the cassette 41 together with the adapter plate 52 by the four support portions 73.

Further, when the support mechanism 70 supports the adapter plate 52 by the four support portions 73, the weight detection unit 62 determines the weight applied to the support mechanism 70, that is, the total weight of the adapter plate 52 and the cassette 41. Detect. Then, the determination unit 64 of the control unit 63 determines whether or not the plate-shaped work 2 is accommodated in all the stages of the cassette 41 based on the detection result of the weight detection unit 62.
The weight detecting unit 62 has a piezoelectric element (not shown) interposed between the first arm portion 138 and the second arm portion 139 of the arm 137, and detects the weight by the pressure applied to the piezoelectric element. May be good.
Further, the weight detecting unit 62 may detect the weight by the load current value applied to the motor when the support mechanism 70 is raised by the drive motor 135.

When the determination unit 64 determines that the plate-shaped work 2 is not accommodated in all the stages of the cassette 41, the control unit 63 uses a display unit such as a touch panel (not shown) provided in the processing device 1. Notify the worker to that effect. Further, the determination unit 64 returns the adapter plate 52 to the table 51 and ends the process.

On the other hand, when the determination unit 64 determines that the plate-shaped work 2 is housed in all the stages of the cassette 41, the control unit 63 controls the moving mechanism 100 and supports it as indicated by arrows 304 and 305. The mechanism 70 is moved, and the support mechanism 70 in a state where the cassette 41 and the adapter plate 52 are supported is placed on the cassette stage 40. At this time, the mounting portion 56 of the adapter plate 52 is fitted to the plate supporting portion 411 of the cassette stage 40.

Next, the control unit 63 controls the rotary cylinder 75 to rotate the pillar 72 by approximately 90 degrees so that the extending direction of the support unit 73 is directed to the side surface of the adapter plate 52 where the notch portion 55 is provided. Make it parallel. As a result, the support portion 73 is arranged at a position outside the outer circumference of the adapter plate 52, and the support of the adapter plate 52 by the support mechanism 70 is released. After that, the control unit 63 controls the moving mechanism 100, separates the support mechanism 70 from the cassette stage 40, and arranges the support mechanism 70 at a predetermined position.

As described above, in the processing apparatus 1 according to the embodiment of the present embodiment, the cassette 41 is placed on the adapter plate 52 in the cassette stage 40 and the stocker 50. Then, when the cassette 41 is moved, the support mechanism 70 of the cassette transfer mechanism 60 supports the adapter plate 52 on which the cassette 41 is placed. Then, the support mechanism 70 is moved between the stocker 50 and the cassette stage 40 by the moving mechanism 100 of the cassette transport mechanism 60. Therefore, unlike the configuration in which the cassette 41 is directly supported and moved, it is not necessary to adjust the cassette transfer mechanism 60 even if the size of the cassette 41 changes. Therefore, in the present embodiment, the cassette transport mechanism 60 can easily transport cassettes 41 of various sizes according to the size of the plate-shaped work 2.

Further, in the present embodiment, the determination unit 64 accommodates the plate-shaped work 2 in all stages of the cassette 41 supported by the support mechanism 70 based on the detection result of the weight detection unit 62 of the cassette transfer mechanism 60. It is judged whether or not it has been done. Then, when it is determined that the plate-shaped work 2 is not accommodated in all the stages, the cassette 41 is returned to the table 51 of the stocker 50. This makes it possible to suppress troubles such as transporting an empty cassette 41 to the cassette stage 40.
The determination unit 64 may be configured to determine the number of plate-shaped works 2 in the cassette 41 based on the detection result of the weight detection unit 62. In this case, when a predetermined number or more of the plate-shaped works 2 are housed in the cassette 41, the control unit 63 may continue the process of placing the cassette 41 and the adapter plate 52 on the cassette stage 40. ..

In this embodiment, as shown in FIG. 3, the support mechanism 70 rotates a pillar 72 attached to the lower surface of the top plate 71 so as to correspond to each pillar 72 on the upper surface of the top plate 71. It is equipped with a cylinder 75.

The cassette transfer mechanism 60 may include a support mechanism 77 as shown in FIG. 7 in place of the support mechanism 70. In the configuration of the support mechanism 70 described above, the support mechanism 77 has a configuration in which a link mechanism 80 is provided as a column rotation mechanism instead of the rotary cylinder 75. The link mechanism 80 uses one drive source to rotate four pillars 72 at the same time.

As shown in FIG. 7, the link mechanism 80 includes a substantially disk-shaped swivel plate 81 corresponding to each pillar 72. The swivel plate 81 is arranged at the upper ends of the four pillars 72 protruding upward through the top plate 71, and extends in the horizontal direction.

Further, the link mechanism 80 includes a revolution shaft 82 arranged on the swivel plate 81. The revolution shaft 82 is arranged on the swivel plate 81 so as to be laterally displaced from the axis of the pillar 72 in the horizontal direction. The revolving shaft 82 can revolve around the axis of the pillar 72 with the rotation of the swivel plate 81 and the pillar 72.

Further, the link mechanism 80 includes a link plate 83. The link plate 83 has an opening that allows entry into the four revolution shafts 82, and connects the four revolution shafts 82 so as to be revolveable.

That is, the link plate 83 includes a pair of first link members 84 and a second link member 85 connected to the first link members 84.

The first link member 84 extends along the longitudinal direction (Y-axis direction) of the top plate 71, and is provided at both ends thereof with openings 841 that can enter the revolution shaft 82 as shown in the enlarged view of FIG. ing. That is, in the present embodiment, the revolution shaft 82 of the swivel plate 81 provided in the pair of pillars 72 in which the openings 841 at both ends of each first link member 84 are arranged along the longitudinal direction (Y-axis direction) of the top plate 71. Is engaged in.
The second link member 85 extends along the lateral direction (X-axis direction) of the top plate 71 and is fixed to the pair of first link members 84.

Further, the link mechanism 80 includes a linear motion cylinder 90 as a horizontal drive unit for moving the link plate 83 in the horizontal direction.

As shown in FIG. 9, the linear motion cylinder 90 is attached to the top plate 71 so as to be substantially along the Y-axis direction in a swivel state on the XY plane via the first swivel shaft 92. Further, the linear motion cylinder 90 includes a rod 91 that expands and contracts along a substantially Y-axis direction. The tip of the rod 91 is rotatably engaged with the second swivel shaft 851 provided at the tip of the second link member 85 with respect to the second swivel shaft 851.

In this configuration, the control unit 63 controls the moving mechanism 100 shown in FIG. 3 and arranges the support mechanism 77 directly above the cassette 41 mounted on the adapter plate 52 on the table 51 (FIG. 4). reference).

At this time, as shown in FIG. 10, the control unit 63 controls the linear motion cylinder 90 to bring the rod 91 into a contracted state. As a result, the extending direction of the support portion 73 provided at the tip of the pillar 72 is parallel to the longitudinal side surface of the top plate 71, that is, parallel to the longitudinal side surface of the adapter plate 52. As a result, the support portion 73 is arranged at a position outside the outer circumference of the adapter plate 52.

In this state, the control unit 63 controls the moving mechanism 100 to lower the support mechanism 77. As a result, the pillar 72 of the support mechanism 77 is fitted into the notch 55 (see FIG. 2A) of the adapter plate 52. Further, the support portion 73 at the tip of the pillar 72 is arranged below the lower surface 522 (see FIG. 2B) of the adapter plate 52 placed on the table 51 with a gap.
In FIGS. 10 to 12, in order to avoid complication of the drawings, the cassette 41 mounted on the adapter plate 52 and the notch 55 formed on the side surface of the adapter plate 52 are provided for convenience. Drawing is omitted.

After that, as shown in FIG. 11, the control unit 63 controls the linear motion cylinder 90 and extends the rod 91 in the substantially + Y direction as shown by the arrow 400. As a result, the second link member 85 of the link plate 83 connected to the rod 91 via the second swivel shaft 851 and the pair of first link members 84 connected to the second link member 85 are substantially eliminated. Receives a force along the + Y direction.

As a result, the link plate 83 moves horizontally along the substantially + Y direction. That is, the pair of first link members 84 horizontally move in the substantially + Y direction while revolving the revolution axis 82 of the swivel plate 81 connected to both ends thereof around the axis of the pillar 72. When the revolution shaft 82 is revolved, as shown in FIG. 11, the swivel plate 81, the pillar 72, and the support portion 73 provided at the tip of the pillar 72 are rotated in the counterclockwise direction.

Then, the control unit 63 controls the linear motion cylinder 90 to further extend the rod 91 in the substantially + Y direction as shown by the arrow 400. As a result, the revolution shaft 82 is further revolved, and the swivel plate 81, the pillar 72, and the support portion 73 are further rotated in the counterclockwise direction. As a result, as shown in FIG. 12, the pillar 72 is rotated by approximately 90 degrees, and the support portion 73 is arranged directly below the recess 57 of the adapter plate 52, that is, at a position supporting the recess 57 of the adapter plate 52. ..

After that, the control unit 63 controls the movement mechanism 100 (see FIG. 3) to raise the support mechanism 77. As a result, the support portion 73 is fitted into the recess 57 of the adapter plate 52 to support the recess 57. In this way, the support mechanism 77 supports the cassette 41 together with the adapter plate 52 by the four support portions 73.

After that, the control unit 63 controls the moving mechanism 100 to move the support mechanism 77, mounts the adapter plate 52 on the cassette stage 40, and then controls the linear motion cylinder 90 to contract the rod 91. As a result, the revolution shaft 82 is revolved in the opposite direction, and the support portion 73 of the pillar 72 becomes parallel to the side surface in the longitudinal direction of the adapter plate 52. As a result, the support portion 73 is arranged at a position outside the outer circumference of the adapter plate 52, and the support of the adapter plate 52 by the support mechanism 77 is released.

In this way, even when the cassette transfer mechanism 60 includes the support mechanism 77, the support mechanism 77 supports the adapter plate 52 on which the cassette 41 is mounted, and the support mechanism 77 is used as the moving mechanism of the cassette transfer mechanism 60. By 100, it is possible to move between the stocker 50 and the cassette stage 40. Therefore, even if the size of the cassette 41 changes, the cassette 41 can be easily transported without adjusting the cassette transport mechanism 60.

Even when the support mechanism 77 is used, the control unit 63 mounts the cassette 41 and the adapter plate 52 on the cassette stage 40 according to the judgment of the determination unit 64 based on the detection result of the weight detection unit 62. You may decide whether to continue the process.

Further, in the support mechanism 77, the linear motion cylinder 90 is used to move the pair of first link members 84 to revolve each revolution shaft 82 and change the direction of the support portion 73. In this regard, the link mechanism 80 of the support mechanism 77 may include a rotary cylinder 95 provided at the upper end of one pillar 72 instead of the linear motion cylinder 90, as shown in FIG.

In this configuration, by rotating the rotary cylinder 95, the swivel plate 81 at the upper end of the pillar 72 provided with the rotary cylinder 95 rotates, for example, in a counterclockwise direction. As a result, one first link member 84 whose one end is connected to the revolution shaft 82 of the swivel plate 81, the second link member 85 connected to the first link member 84, and the other first link member 84. However, as shown by the arrow 405, receives a force along the substantially + Y direction.

As a result, the revolution shaft 82 of the swivel plate 81 connected to the other end of one first link member 84 and both ends of the other first link member 84 has the same structure as shown with reference to FIGS. 7 to 12. The entire link plate 83 moves in the substantially + Y direction while revolving around the axis of the pillar 72. When the revolution shaft 82 is revolved, as shown in FIG. 13, the swivel plate 81, the pillar 72, and the support portion 73 provided at the tip of the pillar 72 are rotated in the counterclockwise direction.

Therefore, even in this configuration, the support mechanism 77 can support the cassette 41 together with the adapter plate 52 by fitting the support portion 73 into the recess 57 of the adapter plate 52.

1: Machining device 2: Plate-shaped work 3: First device base, 5: Second device base,
10: Rough grinding part,
12: 1st holding surface, 13: 1st chuck table, 11: rough grinding feed means,
15: Rough grinding means, 17: Rough grinding wheel, 18: Rough grinding wheel,
30: Finish grinding part,
32: 2nd holding surface, 33: 2nd chuck table, 31: finish grinding feed means,
35: Finish grinding means, 37: Finish grinding wheel, 38: Finish grinding wheel,
40: Cassette stage, 41: Cassette,
50: Stocker, 51: Table,
52: Adapter plate, 521: Top surface, 522: Bottom surface,
53: Block, 54: Groove, 55: Notch, 56: Placement, 57: Recess,
Cassette transfer space 180, 60: Cassette transfer mechanism,
61: Housing plate, 62: Detection unit, 63: Control unit, 64: Judgment unit,
70: Support mechanism, 71: Top plate, 72: Pillar, 73: Support part, 75: Rotary cylinder,
77: Support mechanism, 80: Link mechanism, 81: Swing plate, 82: Revolution shaft,
83: Link plate, 84: First link member, 841: Opening,
85: 2nd link member, 851: 2nd swivel shaft,
90: Linear cylinder, 91: Rod, 92: First swivel shaft,
95: Rotary cylinder,
100: Movement mechanism, 120: X-axis movement mechanism, 130: Z-axis movement mechanism,
170: Conveying space, 171: Conveying means, 173: Housing plate, 175: Conveying pad,
177: Z-axis movement mechanism, 179: Y-axis direction movement mechanism

Claims (3)

A holding means having a holding surface for holding a quadrangular plate-shaped work, a processing means for processing the plate-shaped work, a cassette stage on which a cassette having a plurality of stages capable of accommodating a plurality of plate-shaped works is placed, and a cassette stage. A work transfer mechanism for transporting a plate-shaped work housed in the cassette placed on the cassette stage to the holding surface, and a work transfer mechanism.
A stocker capable of mounting a plurality of the cassettes, a cassette transport mechanism for transporting the cassettes mounted on the stockers to the cassette stage, and a cassette transport mechanism.
It is a processing device equipped with
The stocker comprises a table, an adapter plate interposed between the table and the cassette, and a block disposed on the adapter plate to position the cassette.
The adapter plate is
A mounting portion formed on the lower surface and capable of positioning the adapter plate with respect to the table,
A recess formed on the lower surface and supported by the cassette transfer mechanism.
The cassette transfer mechanism is
A support mechanism that supports the lower surface of the adapter plate on which the cassette is placed, and
A moving mechanism for moving the support mechanism between the stocker and the cassette stage is provided.
The support mechanism is
The top plate connected to the moving mechanism and
Four pillars hanging from the top plate and
A support portion extending horizontally from the lower end of the column and supporting the recess of the adapter plate, and a support portion.
A column rotation mechanism capable of positioning the support portion at either a position for supporting the recess or a position outside the outer circumference of the adapter plate by rotating the column is provided.
Processing equipment. The pillar rotation mechanism is
A swivel plate located at the top of each of the four pillars and extending horizontally,
A revolution axis that is placed on the swivel plate horizontally offset from the axis of the column and revolves around the axis of the column.
A link plate having an opening that allows entry into the four revolution axes and connecting the four revolution axes in a revolving manner.
A horizontal drive unit for moving the link plate in the horizontal direction is provided.
The processing apparatus according to claim 1. The cassette transfer mechanism is
When the support mechanism supports the adapter plate by the four support parts, a weight detection unit that detects the weight applied to the support mechanism, and a weight detection unit.
A determination unit for determining whether or not a plate-shaped work is housed in all the stages of the cassette based on the detection result of the weight detection unit is further provided.
The processing apparatus according to claim 1.

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