JP7458353B2 - 保持装置 - Google Patents

保持装置 Download PDF

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Publication number
JP7458353B2
JP7458353B2 JP2021150177A JP2021150177A JP7458353B2 JP 7458353 B2 JP7458353 B2 JP 7458353B2 JP 2021150177 A JP2021150177 A JP 2021150177A JP 2021150177 A JP2021150177 A JP 2021150177A JP 7458353 B2 JP7458353 B2 JP 7458353B2
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JP
Japan
Prior art keywords
joint
aluminum nitride
nitride particles
holding device
sample
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021150177A
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English (en)
Japanese (ja)
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JP2023042824A (ja
Inventor
智史 森
敦 鈴木
絵里 早川
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Niterra Co Ltd
Original Assignee
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Spark Plug Co Ltd filed Critical NGK Spark Plug Co Ltd
Priority to JP2021150177A priority Critical patent/JP7458353B2/ja
Publication of JP2023042824A publication Critical patent/JP2023042824A/ja
Priority to JP2024022512A priority patent/JP2024046683A/ja
Application granted granted Critical
Publication of JP7458353B2 publication Critical patent/JP7458353B2/ja
Active legal-status Critical Current
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)
  • Drying Of Semiconductors (AREA)
JP2021150177A 2021-09-15 2021-09-15 保持装置 Active JP7458353B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021150177A JP7458353B2 (ja) 2021-09-15 2021-09-15 保持装置
JP2024022512A JP2024046683A (ja) 2021-09-15 2024-02-19 保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021150177A JP7458353B2 (ja) 2021-09-15 2021-09-15 保持装置

Related Child Applications (1)

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JP2024022512A Division JP2024046683A (ja) 2021-09-15 2024-02-19 保持装置

Publications (2)

Publication Number Publication Date
JP2023042824A JP2023042824A (ja) 2023-03-28
JP7458353B2 true JP7458353B2 (ja) 2024-03-29

Family

ID=85724112

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2021150177A Active JP7458353B2 (ja) 2021-09-15 2021-09-15 保持装置
JP2024022512A Pending JP2024046683A (ja) 2021-09-15 2024-02-19 保持装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2024022512A Pending JP2024046683A (ja) 2021-09-15 2024-02-19 保持装置

Country Status (1)

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JP (2) JP7458353B2 (https=)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20250135271A (ko) * 2023-04-18 2025-09-12 니혼도꾸슈도교 가부시키가이샤 유지 장치
JP2025011772A (ja) * 2023-07-11 2025-01-24 住友大阪セメント株式会社 静電チャック装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007194320A (ja) 2006-01-18 2007-08-02 Sumitomo Osaka Cement Co Ltd 静電チャック装置
JP2017178719A (ja) 2016-03-31 2017-10-05 三菱ケミカル株式会社 窒化アルミニウム−窒化ホウ素複合凝集粒子およびその製造方法
JP2020125228A (ja) 2019-02-06 2020-08-20 株式会社トクヤマ シリコーン樹脂用窒化アルミニウムフィラー

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002217508A (ja) * 2001-01-19 2002-08-02 Fuji Electric Co Ltd 金属ベース基板およびその製造方法
JP5567494B2 (ja) * 2007-12-19 2014-08-06 ラム リサーチ コーポレーション 半導体真空処理装置用のコンポーネント・アセンブリ、アセンブリを結合する方法、及び、半導体基板を処理する方法
US9520314B2 (en) * 2008-12-19 2016-12-13 Applied Materials, Inc. High temperature electrostatic chuck bonding adhesive
JP5267603B2 (ja) * 2010-03-24 2013-08-21 Ｔｏｔｏ株式会社 静電チャック
JP6892811B2 (ja) * 2017-10-02 2021-06-23 富士フイルム株式会社 組成物、熱伝導材料、熱伝導層付きデバイス
JP6886439B2 (ja) * 2018-08-07 2021-06-16 日本特殊陶業株式会社 複合部材および接着剤組成物
JP6899362B2 (ja) * 2018-09-19 2021-07-07 日本特殊陶業株式会社 保持装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007194320A (ja) 2006-01-18 2007-08-02 Sumitomo Osaka Cement Co Ltd 静電チャック装置
JP2017178719A (ja) 2016-03-31 2017-10-05 三菱ケミカル株式会社 窒化アルミニウム−窒化ホウ素複合凝集粒子およびその製造方法
JP2020125228A (ja) 2019-02-06 2020-08-20 株式会社トクヤマ シリコーン樹脂用窒化アルミニウムフィラー

Also Published As

Publication number Publication date
JP2023042824A (ja) 2023-03-28
JP2024046683A (ja) 2024-04-03

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