JP7457088B2 - A storage device for storing cassettes for substrates and a processing device equipped with the same - Google Patents

Description

CROSS-REFERENCE TO RELATED APPLICATIONS This disclosure is incorporated herein by reference in U.S. patent application no. No. 15/673, 110, and US Provisional Patent Application No. 6 entitled “STORAGE APPARATUS FOR STORING CASSETTES FOR SUBSTRATES AND PROCESSING APPARATUS EQUIPPED THEREWITH” filed on November 13, 2017 2/585,283, which are incorporated herein by reference. incorporated into the book.

FIELD OF THE INVENTION The present invention relates generally to storage devices for storing cassettes for substrates. The invention may also relate to a processing device for processing substrates, and to a processing device comprising such a storage device.

Storage devices may be employed in equipment used in the manufacture of individual and integrated semiconductor products on semiconductor material substrates. Cassettes, which may require storage devices, can be used to transport the substrates.

A storage device for storing cassettes for substrates is
a movable base plate constructed and arranged to hold a cassette;
an outer wall having an opening for receiving and removing the cassette from the base plate;
a movement device constructed and arranged to move the base plate relative to the opening; On the base plate, a plurality of cassettes for storing at least one semiconductor material substrate can be stored through the openings in the outer wall. A retaining member is disposed on and supported by the base plate to allow the cassette to be placed in the correct position on the base plate.

A sensor may be required to detect at least one of the presence and correct orientation of the substrate cassette on the base plate at the opening. Because a large number of cassettes can be stored in a storage device, a large number of sensors may be required to detect the presence and correct orientation of the substrate cassettes on the base plate. The sensor may require a power connection and communication with a fixed part of the storage device. Therefore, cable feedthroughs may be required to allow movement of the main plate. A disadvantage of designs with movable sensors and cable feedthroughs on the base plate is that the design can be very large.

It is therefore an object of the invention to provide a storage device with a simplified design of a sensor for detecting at least one of the presence and correct orientation of a substrate cassette on a base plate.

Therefore, a storage device for storing cassettes for base materials,
a movable base plate constructed and arranged to hold a cassette;
an outer wall having an opening for receiving and removing the cassette from the base plate;
a movement device constructed and arranged to move the base plate relative to the aperture; the storage apparatus is provided with a fixed sensor in the vicinity of the aperture to determine the presence and correctness of the cassette on the base plate of the aperture; A storage device is provided that detects at least one of the directions.

movable to detect the presence and correct position of the cassette by providing a fixed sensor near the opening to detect at least one of the presence and correct orientation of the substrate cassette on the base plate near the opening; There is no need to wire to the base plate. Thereby, the design of the storage device can be simplified.

Processing equipment for the production of semiconductor products may be provided with a storage device according to the invention. Such equipment may allow products to be manufactured in large quantities and may be easy to maintain and/or install.

In addition to the components necessary for processing semiconductor substrates, the apparatus may include means for placing the cassette in or removing the cassette from the storage device. A substrate handler can also be included in the apparatus for placing substrates into and removing substrates from the cassette.

These and other embodiments will be readily apparent to those skilled in the art from the following detailed description of specific embodiments, which refers to the accompanying drawings. The invention is not limited to the particular embodiments disclosed.

It will be appreciated that elements in the figures are illustrated for simplicity and clarity and are not necessarily drawn to scale. For example, the dimensions of some of the elements in the figures may be exaggerated relative to other elements to aid in improving understanding of the illustrated embodiments of the disclosure.

FIG. 1 shows a schematic horizontal cross-sectional view of a processing device. FIG. 2 is a partially cutaway schematic perspective view of another processing device. 3 is a partially cut away perspective view of a storage device for the device of FIG. 1 or 2; FIG. FIG. 4 is a front view of a cassette holder assembly according to one embodiment. FIG. 5 is a rear view of the cassette holder assembly of FIG. 1 with a cassette having a relatively small size substrate according to one embodiment. FIG. 6 is a rear view of the cassette holder assembly of FIG. 1 with a cassette having a relatively large size substrate according to one embodiment. FIG. 7 is a top perspective view on a base plate for accommodating a cassette and a bottom perspective view on a retaining member prior to mounting on the base plate according to one embodiment. FIG. 8 is a front view of the base plate for holding the substrate cassette. 9a, 9b and 9c are more detailed top, side and bottom cross-sectional views of the bar of FIG. 4 of the movable element according to one embodiment.

The figures are not drawn to scale, and in particular the thickness dimensions are exaggerated for clarity. Corresponding areas have as far as possible the same reference symbols.

FIG. 1 shows a processing apparatus 1 for processing semiconductor substrates, also referred to by the term wafer. These wafers are subjected to a number of processing steps to form a number of integrated circuits on the surface which are later cut from the wafer and further processed.

Typically, the substrates are transferred into a cassette 9 shown in the top view of FIG. 1 of the storage device 2. The storage device 2 is provided with a movable base plate by having a rotary table 4 on which 2 to 10, for example 6, cassettes can be arranged in each of three tiers, so that for example this table 4 can It can contain 18 cassettes.

The storage device 2 is provided with an outer wall 3 provided with an opening that serves as an entry/exit port for the receipt and removal of cassettes from a clean room in which a very low dust atmosphere is maintained. Via the input/output port 5, the cassette 9 can be placed on the movable base plate of the table 4.

As the figures clearly show, the cross section of the storage device 2 has an at least partially regular polygonal perimeter, ie the three walls on the right in FIG. 1 form part of a regular octagon in cross section. The processing stations 10, 11 and 12, which will be described further below, have a circumference that is at least partially regular polygonal in cross-section. Stations 2, 10, 11 and 12 are embodied as separate stations that connect onto the other stations in lateral positions.

In the apparatus 1 a central station with a substrate handler 8 is provided. This substrate handler 8 can remove substrates 13 from the cassette 9 and place them into wafer carriers in processing stations 10, 11, 12. After processing, the substrate handler again removes the processed substrates from the wafer carrier of the processing station and places them in the next processing station or in an empty cassette 9 which is rotated into position by the rotary main plate 4. . The cassette 9 with the treated substrate 13 may be removed from the storage device 2 via the input/output port 6, which can function similarly to the input/output port 5.

Each of the processing stations 10, 11, 12 shown in FIG. 1 can be provided with a rotating table 14 in which three compartments 15 are defined. A wafer carrier 16 is provided in each of these compartments. The rotary table 14 can move and stop at three rotational positions. In each of these positions, one of the wafer carriers is accessible to the robot of the transfer station 8. After loading the wafer carrier 16 into one of the three compartments 15, the rotary table 14 is moved 1/3 turn clockwise. The freshly filled wafer carrier is here placed above the lifting device 17 and below the oven. By means of a lifting device 17, the filled wafer carrier is raised into the oven where the wafers are processed. When processing is complete, the wafer carrier is again moved downwardly into the table 14, and the table 14 is rotated another third of a revolution. Meanwhile, the next wafer carrier 16 can be filled again and placed in the oven using the lifting device 17. The freshly processed wafer can be cooled down for a period of time. After the processing cycle has finished again, the rotary table is again rotated one-third of a turn and the wafer carrier 16 with the processed and cooled wafer returns to its starting position adjacent to the transfer station 8. The processed wafer is then removed from the wafer carrier and placed in a ready wafer carrier at processing station 11 or in a ready cassette 9. The operation of processing stations 11 and 12 is identical in this case.

The storage device 2 may be combined with two or only one of the processing stations 10, 11 or 12. Instead of processing stations 10, 11, 12, other processing stations can be used. As a result of the embodiment, the individual connectable units have a perimeter that is at least partially regular polygonal in cross-section, so that the unit connects to another unit at a lateral position around the regular polygonal perimeter, and the structure of the device A large degree of freedom is possible according to the desired processing.

As further shown in FIG. It has a partially regular octagonal perimeter with sides of length equal to length. Here the storage device 2 and the processing stations 10, 11 and 12 may be connected in combination with one substrate handler 8.

However, from the structure according to the invention, other assemblies are also possible. Figure 2 shows, for example, a device consisting of a storage device 21 corresponding to that shown in cross section in Figure 1 and two processing stations, each of which can correspond to processing stations 10, 11 and 12. Here, a substrate handler 22 is also arranged. This substrate handler comprises a robot 25, which, as mentioned above, is able to remove the wafers 13 from the cassette 9 and place them in the wafer carrier 27 of the processing station and vice versa. The robot 25 may be a robot known per se and is mounted on a lifting device so that its working arm itself can bridge the height difference between the bottom wafers of the lower cassette and the top wafers of the upper cassette 9. Otherwise, the movement of the wafers is usually performed continuously from the lowest position to the highest position, i.e. the wafers 13 are removed from the cassette 9 or wafer carrier 27, starting from the bottom and continuing to the top, while they are again placed in the wafer carrier or cassette, starting from the top and continuing to the bottom. This prevents dust particles from falling onto the wafers below.

As clearly shown in FIG. 2, in this embodiment each connectable station has a closed enclosure with a closable passage opening on at least one of the sides of the part having a regular polygonal perimeter. have a body In this embodiment, each of the processing stations 23, 32 has one passage opening 26. The storage device 21 is provided with three passage openings 24. The passage opening can be opened and closed using a hatch 29 housed in the guide 30, which can be moved up and down by a linear actuator, for example a pneumatic cylinder 31. An inflatable seal may be incorporated into the guide 30. In the closed hatch 29 situation, this seal expands and thus provides a tight sealing contact. If the hatch 29 needs to be moved, the inflatable seal is depressurized, thereby removing itself from the hatch 29. As a result, when the hatch 29 is opened, there is no or only a minimal sliding contact, so that the risk of the formation of opened dust particles, which is particularly undesirable in the environment of the device according to the invention, is very small. Also, as schematically designated in FIG. 2, there is a wafer carrier 27 housed within a rotary table 28.

FIG. 3 shows a storage device according to the invention. This device 35 is completely octagonal in cross section with equal sides. The storage device 35 can be provided with four passage openings 38 similar to the passage openings 24 of the unit 21 shown in FIG. The apparatus 35 can comprise a rotating table 36 on which eight cassettes 9 for wafers 13 can be placed in each of three stages. The table 36 is driven in rotation around a vertical axis and may be fixed in different rotational positions using a drive device 37 housed in the closed compartment of the device 35.

The apparatus 35 can be provided with its own gas circulation device. This comprises a central gas supply via the shaft 40 of the rotary table leading to the interior space of a centrally arranged cylindrical filter 39. The gas supplied via the shaft 40 flows in a horizontal radial direction through this filter 39 in laminar flow through the cassette 9. Near the outer periphery, the gas flows upwards and is discharged through an outlet 41 located at the top of the storage device 35. With the central supply of gas realized in this way, all sides of the device 35 are possibly available for connection with other units. Gas circulation may be required for purging to maintain very low dust particle levels within the equipment.

FIG. 4 is a front view of a cassette holder assembly for storage device 2, 35 (FIGS. 1 and 3) for storing cassettes 9 with substrates 13, according to one embodiment. The cassette holder assembly 61 comprises a movable base plate 63 that is fed to the rotary table 4, 36 of FIGS. 1 and 3.

The cassette holder 61 includes identical left and right holding members 65a and 65b supported by a movable base plate 63, which position the cassette on the right R and left L, respectively, as viewed from the front face F. The left and right holding members 65a and 65b are substantially identical to each other. Each of the holding members 65a and 65b is mirror symmetrical with respect to a line J from the front face F to the back face B, which passes through the center of the holding member.

Additional retaining members in the form of bars 66 can be provided on the base plate 63 to position the cassette. The bar 66 can be provided with holes 68 that are used by sensors to sense the presence and/or correct positioning of the cassette on the cassette holder 61.

Each of the retaining members 65a, 65b has an end face 67LB, 67LF, 67RB, 67RF for engaging the cassette, being substantially parallel to the base plate 63, and for limiting the position of the cassette in the direction from the front F to the back B. It's okay. Each holding member may have left end faces 67LB, 67LF and right end faces 67RB, 67RF. The right end surfaces 67RB, 67RF may be located on the right side of the holding members 65a, 65b when viewed from the front F, and the left end surfaces 67LB, 67LF may be located on the left side of the holding members. Left end surfaces 67LB, 67LF and right end surfaces 67RB, 76RF of holding members 65a, 65b may be substantially parallel.

Right end surfaces 67RB, 67RF of right holding member 65b and left end surfaces 67LB, 67LF of left holding member 65a can be arranged to engage with cassette 69 (see FIGS. 5 and 6). The right end surfaces 67RB, 67RF of the left holding member 65a and the left end surfaces 67LB, 67LF of the right holding member 65b may not be arranged to engage with the cassette 9. If there is wear of the holding members on the end faces, the positions of the holding members 65a, 65b may be exchanged and other end faces may be used.

Cassettes of various sizes are available, which can depend on the size of the substrate and the preferences of the fab owner using the cassette, and the retaining member can be constructed to accommodate various sizes. Each of the holding members 65a and 65b has small cassette end faces 67RF and 67LF (see FIG. 5) for a cassette 9 for a base material W with a diameter of 150 mm, and a large cassette end face for a cassette 9 for a base material W with a diameter of 200 mm. It can have at least two end faces defined as end faces 67RB and 67LB (see FIG. 6). The small cassette end faces 67RF, 67LF may be positioned toward the front F of the base plate 63 relative to the large cassette end faces 67RB, 67LB to engage relatively small sized cassettes.

The retaining members 65a, 65b engage the cassette 9 and limit the position of the cassette in a right R to left L direction that is substantially parallel to the base plate 63 and substantially perpendicular to the front F to back B direction. It may have side surfaces 71LF, 71LB, 71RF, and 71RB for. Two sides may be provided, defined as right side 71RF, 71RB and left side 71LF, 71LB. The right side surfaces 71RF and 71RB can be located on the right side of the holding member when viewed from the front, and the left side surfaces 71LF and 71LB can be located on the left side of the holding members 65a and 65b when viewed from the front F.

The right side surfaces 71RF, 71RB of the right holding member 65b and the left side surfaces 71LF, 71LB of the left holding member 65a may be positioned to engage with the cassette 9. The right side surfaces 71RF, 71RB of the left holding member 65a and the left side surfaces 71LF, 71FB of the right holding member 65b do not have to be positioned to engage with the cassette 9.

The retaining member comprises at least two sides defined as small cassette sides 71RF, 71LF and large cassette sides 71RB, 71LB. The small cassette sides 71RF, 71LF may be positioned toward the front F of the base plate 63 relative to the large cassette sides 71RB, 71LB in order to engage a relatively small sized cassette 9 (see FIG. 5). The large cassette sides 71RB, 71LB may be positioned toward the back surface B of the base plate 63 relative to the small cassette sides 71RF, 71LF in order to engage a relatively small sized cassette 9 (see FIG. 4).

Both retaining members 65a, 65b may have sides for engaging the cassette and limiting the position of the cassette in opposite directions from right R to left L. Thereby, the cassette can be positioned from left to right using the holding members 65a and 65b.

The retaining members 65a, 65b can be removably fixed to the base plate 63 by fasteners, for example threaded fittings, for example bolts 75 passing through slotted holes 77. The slot holes 77 can have a direction perpendicular to the line from the front F to the back B in order to adjust the position of the holding members 65a, 65b on the base plate 63.

FIG. 7 is a top perspective view of the movable base plate 3 for accommodating a cassette, and a bottom perspective view of the right holding member 65b for attachment to the base plate 63. FIG. 7 can show a slotted hole 77 having a direction perpendicular to the line J from the front face F to the back face B of the member 65b. The retaining member 65b can be provided with elongated bars 79, 81 that fit into guide slots 83 and/or positioning slots 85 provided in the base plate 63. The two elongated guide bars 79 can be smaller than the two guide slots 83 in the direction perpendicular to the line J from the front F to the back B, to which the retaining member 65b is adjustably fixed, and which are arranged on the base plate 63. will lead you in that direction.

One elongated locating bar 81 may be the same size as the locating slot 85 in a direction substantially perpendicular to and substantially parallel to the front F to back B line J. When the retaining member 65b is attached to the base plate 63, the elongated locating bar 81 and locating slot 85 can secure portions of the retaining member on the base plate 63 in a left-to-right and front-to-back direction.

For cassettes with sizes that may deviate slightly from standard size cassettes, it may be necessary to adjust the distance between the holding members 65a, 65b slightly. For small adjustments of the distance between the retaining members 65a, 65b in the left-to-right direction, the elongated positioning bar 81 may be (partially) removable. For example, the top of the bar 81 can be cut off so that the retaining member 65b can be fixed on the base plate 63 in an adjustable manner from left to right. The elongated guide bar 79, which may be smaller in the left-to-right direction than the guide slot 83, allows the retaining member 65b to be adjustably fixed in that direction. From front to back, the elongated guide bar 79 can further secure the retaining member 65b on the base plate 63. A fastener, such as bolt 75 (of FIG. 4), may engage a threaded hole 89 through slotted hole 77 to secure the retaining member.

As shown in FIG. 7, the holding member 65b can have mirror symmetry with respect to a line J from the front F to the back B passing through the center of the holding member. The symmetry in the design of the retaining members 65a, 65b ensures that the same retaining members 65a, 65b can be used on the left and right sides on the base plate 63.

The retaining member 65a may include at least two, for example four, substantially parallel end surfaces 67LB, 67LF, 67RB, 67RF (see FIG. 4). The two end surfaces may be right end surfaces 67RB and 67RF located on the right side of the holding member when viewed from the front F, and the other two end surfaces may be a left end surface 67LB and 67RF located on the left side of the holding member when viewed from the front. It may be 67LF. End surfaces 67LB, 67LF, 67RB, and 67RF may be substantially parallel to each other. Further, the retaining member 65a may comprise at least two, for example four, substantially parallel sides 71LF, 71LB, 71RF, 71RB. When viewed from the front, the two side surfaces may be right side surfaces 71RF and 71RB located on the right side of the holding member, and the other two side surfaces may be left side surfaces 71LF and 71LB located on the left side of the holding member. Good too. The sides may be substantially parallel to each other.

The side surface of the holding member 65a may be perpendicular to the end surface. The side surface may intersect with the end surface. The holding member 65a can have at least one guide surface 87 adjacent to a side surface and/or an end surface. The guide surface 87 can have an angle of 15 to 75 degrees on the end or side surfaces.

The retaining member 65a may be provided with a slotted hole 77 for a fastener, the slotted hole 77 having a direction perpendicular to the line from the front face F to the rear face B of the retaining member. The retaining member 65a may be provided with at least one elongated bar extending downwardly from the bottom surface of the member.

The retaining members 65a, 65b may be injection molded. The retaining member can include a polymer. For example, the retaining member can include an acrylonitrile butadiene styrene material for its strength and flexibility.

The holding member 65a can be easily manufactured due to the symmetry between the left side and the right side when viewed from the front F. It is also simpler to use, as only one fastener, such as bolt 75, needs to be used to attach retaining member 65a onto base surface 63.

The retaining member can be made from plastic or metal. The metal may be aluminum or steel. The plastic may be acrylonitrile butadiene styrene (ABS), polypropylene (PP), or polyethylene (PE). These materials may have a low coefficient of friction and other favorable properties, such as good processing ability. Furthermore, the material can be stable to cleaning agents so that it can be properly cleaned.

The dimensions of the cassette holder 61 can be adapted to the dimensions of the cassette 9, which is a box-shaped main body with an open front, and the dimensions depend on the number and diameter of the substrates W arranged therein, for example 200 mm. can be determined. The base plate 63 can have a thickness of 0.2 to 4 mm, preferably 0.3 to 3 mm, and is provided with holes for fixing the cassette holders 65a and 65b to the device of which the cassette holder 61 forms a part. can be manufactured from steel.

The height dimension of the cassette holder members 65a, 65b may be 5 to 25 mm. For the cassette holders 65a and 65b, polymers can be used, such as acrylonitrile butadiene styrene, polypropylene or polyethylene, which have a predominance during operation and which can be harmful to the manufacturing process of e.g. ICs. No dust particles are formed. Further materials that can be used for the cassette holders 65a and 65b may be aluminum or steel.

Cassette holders can be used in equipment that processes semiconductor substrates and can transport substrates between equipment. In such devices, such as high-temperature furnaces, reaction chambers can be used to form fine-scale structures, such as integrated circuits, on semiconductor substrates.

FIG. 8 shows a front view of a movable base plate 63 for holding cassettes for substrates in the storage device 2 (of FIG. 1). The cassette 9 shown is held by a cassette holder on a lower movable base plate (not shown). The storage device is provided with an outer wall provided with openings 5, 6 for receiving and removing the cassettes 9 from the movable base plate.

A movement device constructed and arranged to move the base plate and the cassette thereon may be provided, for example in the form of drive device 37 (eg, a rotary motor) in FIG. 3. The movement device can move the cassette on the base plate 63 towards or away from the opening.

The storage device 1 may include a fixed sensor 91 (see FIG. 8) near the opening to detect at least one of the presence and correct orientation of the substrate cassette on the movable base plate 63 at the opening. . The sensor 91 may be mounted inside the outer wall of the storage device or may be mounted on a fixed frame portion of the device. Sensor 91 may be an optical sensor for optically detecting at least one of the presence and correct orientation of the substrate cassette on base plate 63. The base plate 63 may have a movable element 93 arranged to be movable in contact with the aforementioned cassette when the aforementioned cassette is placed in the correct orientation on the aforementioned movable base plate 63.

Indicator 95 may be movable by movable element 93 to indicate that said cassette is present in said correct orientation. An indicator 95 can be constructed and placed within the viewing angle of the optical sensor 91 to indicate to the optical sensor the presence and correct orientation of the substrate cassette on the base plate. Indicator 95 may be a reflective device, for example a mirror that reflects the radiation beam from sensor 91 back to sensor 91 . The (optical) sensor 91 may have a radiation source for directing a radiation beam (for example a 640 nm laser beam) onto a mirror and a sensor for detecting the reflection of the radiation beam. The base plate 63 is movable and the movable element 93 and indicator 95 are connected to the base plate and can therefore be movable as well. The sensor is fixed and the storage device can be constructed and arranged such that the various indicators 95 can be moved in front of the sensor 91 by moving the base plate 63 near the entry/exit port. This may have the advantage that only one sensor 91 is needed to measure the presence and/or correct placement of cassettes on multiple baseplates. Furthermore, since all active parts are provided on fixed parts of the storage device, there may be no need to provide electrical cables to the moving parts of the storage device. The movable base plate is provided with only passive components, such as movable element 93 and indicator 95.

9a-9c disclose more detailed top, side sectional, and bottom views on bar 66 of FIG. 4 of movable element 93 according to one embodiment. The movable element 93 can have a pivotable arm 97 and the bar 66 can be provided with a pivot axis 99 for pivotably mounting the aforementioned pivotable arm 97 under the base plate 63 . An indicator 95 may be provided at one end of said arm, said indicator indicating that said arm is movable in pivoting and said cassette is in said correct orientation. The pivotable arm has a counterweight 98 and a stop at the other end of the arm, the stop limiting the movement of said movable element and the counterweight pressing the movable element against the cassette. The base plate 63 has a hole and the aforementioned movable element 93 may have a pin 100 that cooperates with the cassette and is configured to be movable within the aforementioned hole. A hole 68 may be provided in the bar 66 and the pin may be movable through the hole. The bar may be partially configured and located within an opening in base plate 63. In this configuration, the movable element 93 may be provided below the base plate 63.

The storage device may be provided with walls 70, 72 (see FIG. 4) extending upwardly from the base plate 63 to leave one side open at the front F for accessing the base plate 63 with cassettes. . The wall 72 opposite the open position may be provided with holes for purging the cassette to remove particles from the cassette. The base plate may have a horizontal surface for accommodating the cassette, and the apparatus may be constructed and arranged such that the base plate is horizontally rotatable about a vertical axis of rotation. The wall may extend upwardly from the base plate 63 and define an isosceles trapezoid shape on the base plate.

The walls 70, 72 and the base plate 63 may be constructed of metal plates with L-shaped slot holes or straight slot holes. Walls 70, 72 and base plate 63 may also be provided with L-shaped lips. The L-shaped lip can fit into an L-shaped slotted hole or a straight slotted hole. After bending the lip that passes through the L-shaped slot hole or the straight slot hole, a secure connection can be made between the walls 70, 72 and the base plate 63. By providing this secure connection multiple times between each of the walls 70, 72 and between one or each of the walls 70, 72 and the base plate 63, the rigid construction of the carousel is achieved simply by using sheet metal. is created.

To detect at least one of the presence and correct orientation of the substrate cassette on the movable base plate, the optical sensor 91 may be a camera constructed and positioned to have the cassette on the base plate 63 near the opening of the input/output port within the camera's viewing angle.

The storage device 2 (of FIG. 1) is operable in connection with the camera and may have a computer with a processor and a memory, including the presence and correct orientation of the substrate cassettes on the base plate. machine vision software for detecting at least one of the following:

The storage device 2 may be part of the processing device 1 for processing the substrate, and may include a processing device for processing the substrate. A substrate handler may be provided to move the substrate from the cassette to the processing device and to move the substrate from the processing device to the cassette after processing. The processing device may have a reactor with a reaction chamber for processing multiple substrates.

Several substrates, such as silicon wafers, can be placed in substrate racks or boats within the reactor. Alternatively, a single substrate may be placed on a substrate susceptor within the reactor. Both the substrate and the rack or boat may be heated to the desired temperature. A typical substrate treatment process involves passing a reactive gas over a heated substrate to deposit a thin layer of reactant material or gaseous reactant onto the substrate.

A series of such processing steps on a substrate is called a recipe. If the deposited layer has the same crystal structure as the underlying silicon substrate, it is called an epitaxial layer. It is also sometimes referred to as a single crystal layer, since it has only one crystal structure. Through subsequent deposition, doping, lithography, etching, and other processes, these layers become integrated circuits that can contain tens, thousands, or even millions of integrated elements, depending on the size of the substrate and the complexity of the circuit. Manufacture.

Various processing parameters are carefully controlled to ensure high quality of the resulting layer. One such important parameter is the substrate temperature during each recipe step. For example, during CVD, a deposition gas reacts and deposits onto a substrate within a certain temperature window. Different temperatures also result in different deposition rates.

The specific embodiments shown and described are exemplifications of the invention and its best mode and are not intended to otherwise limit the scope of aspects and embodiments in any way. Indeed, in the interest of brevity, conventional manufacturing, related, preparation, and other functional aspects of the system may not be described in detail. Moreover, the connecting lines shown in the various figures are intended to represent example functional relationships and/or physical connections between the various elements. Many alternative or additional functional relationships or physical connections may exist in an actual system and/or may not exist in some embodiments.

Although specific embodiments of the invention have been described above, it will be understood that the invention may be practiced otherwise than as described. For example, as described in the numbered items below:

1. A cassette holder assembly for holding a cassette for storing at least one semiconductor material substrate within an interior space accessible from a front end of the cassette, the assembly comprising:
a base plate for accommodating a cassette;
right and left retaining members supported on the base plate for positioning the cassette to the right and left, respectively, when viewed from the front, the right and left retaining members being substantially identical to each other; A cassette holder assembly comprising: a retaining member;

2. The cassette holder assembly of item 1, wherein each of the retaining members is mirror symmetrical with respect to a back to front line passing through the center of the retaining member.

3. A cassette holder assembly as described in item 1, in which each of the holding members has at least two end faces that engage with the cassette and limit the position of the cassette in a front-to-rear direction substantially parallel to the base plate, and the at least two end faces include at least one right face and at least one left face, such that, when viewed from the front, the right end face is located on the right side of the holding member and the left end face is located on the left side of the holding member.

4. 4. The cassette holder assembly of item 3, wherein the right end surface of the right holding member and the left end surface of the left holding member are arranged to engage the cassette.

5. A cassette holder assembly as described in item 4, in which the right end surface of the left retaining member and the left end surface of the right retaining member are not positioned to engage with the cassette.

6. Each of the retaining members has at least four end faces that engage the cassette and limit the position of the cassette in a front-to-back direction substantially parallel to the base plate, a small cassette end face and a large cassette end face on each of the right and left sides of the cassette. 4. The cassette holder assembly of item 3, wherein the end face of the smaller cassette is positioned toward the front of the base plate relative to the end face of the larger cassette for engaging a relatively smaller sized cassette.

7. Each of the retaining members has a side surface that engages the cassette and limits the position of the cassette in a right-to-left direction substantially parallel to the base plate and substantially perpendicular in a front-to-back direction. cassette holder assembly.

8. According to item 7, each of the retaining members comprises at least two sides comprising a right side and a left side, the right side being located on the right side of the retaining member and the left side being located on the left side of the retaining member when viewed from the front. Cassette holder assembly as described.

9. 9. The cassette holder assembly of item 8, wherein the right side of the right retention member and the left side of the left retention member are arranged to engage the cassette.

10. 10. The cassette holder assembly of item 9, wherein the right side of the left retention member and the left side of the right retention member are not arranged to engage the cassette.

11. Each of the retaining members includes at least two sides comprising a small cassette side and a large cassette side, such that the small cassette side faces the large cassette side for engaging a relatively small sized cassette. 8. The cassette holder assembly of item 7, wherein the cassette holder assembly is positioned toward the front of the base plate.

12. The cassette holder assembly of item 1, wherein both of the retaining members have sides for engaging the cassette and limiting the position of the cassette in opposite right-to-left directions.

13. The cassette holder assembly of item 1, wherein at least one of the retention members is removably secured to the base plate by a fastener passing through a slotted hole, the slot having a direction perpendicular to the front to back line.

14. The cassette holder assembly described in item 1, wherein the holding member is provided with at least one elongated bar extending from a bottom surface of the holding member and is constructed to fit into a slot provided in the base plate.

15. 15. A cassette holder assembly according to item 14, wherein the at least one elongate bar is shorter than the slot in a direction perpendicular to the front to back line and is capable of adjustably securing the retaining member in that direction.

16. the at least one elongated bar is of the same size as the slot in a direction substantially perpendicular to the front to back line and is at least partially removable to allow adjustable fixation of the retaining member in that direction; The cassette holder assembly according to item 14.

17. A retaining member for positioning a cassette for storing at least one semiconductor material substrate on a base plate of a cassette holder assembly, the retaining member having a front face and a back face, the retaining member having a front face passing through a center of the retaining member. A retaining member having substantially mirror symmetry with respect to a line to the back surface.

18. The retaining member has at least two substantially parallel end faces, one end face being a right end face located on the right side of the retaining member and the other end face being a left end face located on the left side of the retaining member when viewed from the front. An end surface that is a surface;
at least two substantially parallel sides, viewed from the front, one side is a right side located on the right side of the retaining member and the other side is a left side located on the left side of the retaining member; The holding member according to item 17, comprising: a side surface;

19. 19. The retaining member according to item 18, wherein the side surfaces are perpendicular to the end surfaces, and at least one of the side surfaces intersects at least one of the end surfaces.

20. The retaining member according to item 17, wherein the retaining member is provided with slotted holes for fasteners, the slots having a direction perpendicular to a line from the front to the back of the retaining member.

21. 18. A retaining member according to item 17, wherein the retaining member is provided with at least one elongated bar extending from the bottom surface of the retaining member.

22. 18. A retaining member according to item 17, wherein the retaining member comprises an injection molded polymeric material.

It should be understood that the configurations and/or methods described herein are exemplary in nature, and that these specific embodiments or examples are not to be considered in a limiting sense, as numerous variations are possible. The specific routines or methods described herein may represent one or more of any number of processing strategies. Thus, the various illustrated operations may be performed in the illustrated sequence, in other sequences, or may be omitted in some cases.

The subject matter of the present disclosure is all novel and nonobvious combinations and subcombinations of the various processes, systems, and configurations, and other features, functions, operations, and/or characteristics disclosed herein, and the like. including any and all equivalents.

1 Processing device 2 Storage device 4 Rotary table 5, 6 Input/output port 8 Substrate handler 9 Cassette 10, 11, 12 Processing station 13 Substrate 14 Rotary table 15 Section 16 Wafer carrier 17 Lifting device 21 Storage device 22 Substrate handler 23 Processing Stations 24, 26 Passage opening 27 Wafer carrier 28 Rotary table 29 Hatch 30 Guide 31 Pneumatic cylinder 32 Processing station 35 Storage device 36 Rotary table 37 Drive device 38 Passage opening 39 Cylindrical filter 40 Shaft 41 Outlet 61 Cassette holder assembly 63 Movable Base plate 65a, 65b Holding member 66 Bar 67LB, 67LF, 67RB, 67RF End surface 68 Hole 69 Cassette 70, 72 Wall 71LF, 71LB, 71RF, 71RB Side surface 75 Bolt 77 Slot hole 79, 81 Bar 83 Guide slot 85 Positioning slot 87 Guide surface 91 fixed sensor 93 movable element 95 indicator 97 pivotable arm 98 counterweight

Claims (20)

A storage device for storing cassettes for base materials, the storage device comprising:
a movable base plate constructed and arranged to hold a cassette;
a bar provided on the movable base plate for positioning the cassette;
a movable element coupled to the bar and arranged to be movable in contact with the cassette when the cassette is in the correct orientation on the movable base plate;
an indicator movable by the movable element to indicate that the cassette is in the correct orientation;
an outer wall comprising an opening for receiving and removing a cassette from the base plate;
a movement device constructed and arranged to move the base plate relative to the opening; the storage device being provided with a fixed sensor proximate the opening; detecting at least one of the presence and correct orientation of said cassette. 2. The storage device of claim 1, wherein the sensor is an optical sensor that optically detects the presence and correct orientation of the cassette on the base plate. The storage device of claim 2, wherein the indicator is within a viewing angle of the optical sensor and indicates to the optical sensor the presence and correct orientation of the cassette on the base plate. Storage device according to claim 1, wherein the movable element comprises a pivotable arm and the bar is provided with a pivot for pivotably attaching the pivotable arm to the base plate. 5. The storage device of claim 4, wherein the pivotable arm includes the indicator, the indicator being movable when pivoting and indicating that the cassette is in the correct orientation. 6. A storage device according to claim 5, wherein the pivotable arm comprises a counterweight that presses the movable element against the cassette. 4. A storage device according to claim 3, wherein the base plate comprises a hole in the base plate, and the movable element comprises a pin cooperating with the cassette and configured to be movable within the hole. 4. The storage device of claim 3, wherein the movable element comprises a stop, the stop limiting movement of the movable element. 4. A storage device according to claim 3, wherein the movable element is provided on the underside of the base plate. 4. The storage device of claim 3, wherein the indicator comprises a reflector and the optical sensor comprises a radiation source that directs a beam of radiation toward the reflector and a sensor that detects reflection of the radiation beam. 8. The storage device of claim 7, wherein the bar includes a hole and the pin is movable through the hole. 2. The storage device of claim 1, wherein the base plate is provided with a wall extending upwardly from the base plate, leaving one side open for accessing the base plate. 13. The storage device according to claim 12, wherein a wall opposite the open side is provided with a hole for purging the cassette. 13. The storage device of claim 12, wherein the wall defines an isosceles trapezoid on the base plate. 2. The storage device of claim 1, wherein the base plate comprises multiple areas for holding the cassettes. 2. The storage device of claim 1, wherein the base plate has a horizontal surface for accommodating the cassette, and the device is constructed and arranged such that the base plate is movable in a horizontal direction. The optical sensor is configured to have the cassette on the base plate near the opening within a viewing angle of a camera to detect at least one of the presence of the cassette on the base plate and the correct orientation. 3. A storage device according to claim 2 , wherein the camera is constructed and arranged in a. The apparatus includes a computer operable in communication with the camera and having a processor and a memory, the memory detecting at least one of the presence of the cassette on the base plate and the correct orientation. 18. The storage device of claim 17, comprising machine vision software for. A processing device for processing a base material, the processing device comprising:
A storage device for storing the cassette according to claim 1;
a processing device for processing a substrate;
a substrate handler constructed and arranged to move substrates from the cassette to the processing device, and to move the substrates from the processing device to the cassette after processing. A processing apparatus for processing a substrate according to claim 19, comprising a reactor having a reaction chamber for processing a plurality of substrates.