JP7452187B2 - 重金属イオンの拡散性の評価方法、及び、構造体の製造方法 - Google Patents
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- 229910001385 heavy metal Inorganic materials 0.000 title claims description 157
- 150000002500 ions Chemical class 0.000 title claims description 151
- 238000000034 method Methods 0.000 title claims description 39
- 238000004519 manufacturing process Methods 0.000 title claims description 11
- 229920005989 resin Polymers 0.000 claims description 166
- 239000011347 resin Substances 0.000 claims description 166
- 238000011156 evaluation Methods 0.000 claims description 64
- 239000004065 semiconductor Substances 0.000 claims description 49
- 229910052751 metal Inorganic materials 0.000 claims description 41
- 239000002184 metal Substances 0.000 claims description 41
- 230000009477 glass transition Effects 0.000 claims description 38
- 239000000463 material Substances 0.000 claims description 36
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 claims description 33
- 229910001431 copper ion Inorganic materials 0.000 claims description 33
- 239000007788 liquid Substances 0.000 description 34
- 210000004027 cell Anatomy 0.000 description 29
- 238000012856 packing Methods 0.000 description 16
- 238000009792 diffusion process Methods 0.000 description 13
- -1 iron ions Chemical class 0.000 description 12
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 10
- 239000000243 solution Substances 0.000 description 10
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 8
- JHIVVAPYMSGYDF-UHFFFAOYSA-N cyclohexanone Chemical compound O=C1CCCCC1 JHIVVAPYMSGYDF-UHFFFAOYSA-N 0.000 description 8
- 150000003839 salts Chemical class 0.000 description 8
- 239000002904 solvent Substances 0.000 description 7
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 7
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 6
- 238000005259 measurement Methods 0.000 description 6
- 230000035699 permeability Effects 0.000 description 6
- 229920000800 acrylic rubber Polymers 0.000 description 5
- 210000005056 cell body Anatomy 0.000 description 5
- 229910052802 copper Inorganic materials 0.000 description 5
- 239000010949 copper Substances 0.000 description 5
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 5
- 230000007423 decrease Effects 0.000 description 5
- 238000002474 experimental method Methods 0.000 description 5
- 239000000203 mixture Substances 0.000 description 5
- 229920000058 polyacrylate Polymers 0.000 description 5
- 239000003566 sealing material Substances 0.000 description 5
- PMZURENOXWZQFD-UHFFFAOYSA-L Sodium Sulfate Chemical compound [Na+].[Na+].[O-]S([O-])(=O)=O PMZURENOXWZQFD-UHFFFAOYSA-L 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 4
- 230000005540 biological transmission Effects 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 239000000047 product Substances 0.000 description 4
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 4
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 3
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 3
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 3
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 229910000365 copper sulfate Inorganic materials 0.000 description 3
- XTVVROIMIGLXTD-UHFFFAOYSA-N copper(II) nitrate Chemical compound [Cu+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XTVVROIMIGLXTD-UHFFFAOYSA-N 0.000 description 3
- 238000009826 distribution Methods 0.000 description 3
- 239000011521 glass Substances 0.000 description 3
- 239000003960 organic solvent Substances 0.000 description 3
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Substances [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 3
- BDERNNFJNOPAEC-UHFFFAOYSA-N propan-1-ol Chemical compound CCCO BDERNNFJNOPAEC-UHFFFAOYSA-N 0.000 description 3
- 238000007789 sealing Methods 0.000 description 3
- 229910052938 sodium sulfate Inorganic materials 0.000 description 3
- 235000011152 sodium sulphate Nutrition 0.000 description 3
- NLHHRLWOUZZQLW-UHFFFAOYSA-N Acrylonitrile Chemical compound C=CC#N NLHHRLWOUZZQLW-UHFFFAOYSA-N 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- KDLHZDBZIXYQEI-UHFFFAOYSA-N Palladium Chemical compound [Pd] KDLHZDBZIXYQEI-UHFFFAOYSA-N 0.000 description 2
- 239000004793 Polystyrene Substances 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-N acrylic acid group Chemical group C(C=C)(=O)O NIXOWILDQLNWCW-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 150000001768 cations Chemical class 0.000 description 2
- 239000011248 coating agent Substances 0.000 description 2
- 238000000576 coating method Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 2
- 229910000366 copper(II) sulfate Inorganic materials 0.000 description 2
- OPQARKPSCNTWTJ-UHFFFAOYSA-L copper(ii) acetate Chemical compound [Cu+2].CC([O-])=O.CC([O-])=O OPQARKPSCNTWTJ-UHFFFAOYSA-L 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 239000012153 distilled water Substances 0.000 description 2
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- 238000001336 glow discharge atomic emission spectroscopy Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 239000002798 polar solvent Substances 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 229920000139 polyethylene terephthalate Polymers 0.000 description 2
- 239000005020 polyethylene terephthalate Substances 0.000 description 2
- 229920001296 polysiloxane Polymers 0.000 description 2
- 229920002223 polystyrene Polymers 0.000 description 2
- 239000003586 protic polar solvent Substances 0.000 description 2
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- 239000000126 substance Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 229920005992 thermoplastic resin Polymers 0.000 description 2
- 229920001187 thermosetting polymer Polymers 0.000 description 2
- 235000012431 wafers Nutrition 0.000 description 2
- 239000004925 Acrylic resin Substances 0.000 description 1
- 229920000178 Acrylic resin Polymers 0.000 description 1
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 description 1
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
- 229910021595 Copper(I) iodide Inorganic materials 0.000 description 1
- 229910021592 Copper(II) chloride Inorganic materials 0.000 description 1
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 229920000877 Melamine resin Polymers 0.000 description 1
- 239000004640 Melamine resin Substances 0.000 description 1
- VEQPNABPJHWNSG-UHFFFAOYSA-N Nickel(2+) Chemical compound [Ni+2] VEQPNABPJHWNSG-UHFFFAOYSA-N 0.000 description 1
- 239000004677 Nylon Substances 0.000 description 1
- 239000004698 Polyethylene Substances 0.000 description 1
- 239000004743 Polypropylene Substances 0.000 description 1
- 229920001807 Urea-formaldehyde Polymers 0.000 description 1
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 1
- PTFCDOFLOPIGGS-UHFFFAOYSA-N Zinc dication Chemical compound [Zn+2] PTFCDOFLOPIGGS-UHFFFAOYSA-N 0.000 description 1
- 150000001242 acetic acid derivatives Chemical class 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000004458 analytical method Methods 0.000 description 1
- 239000003963 antioxidant agent Substances 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 229910001451 bismuth ion Inorganic materials 0.000 description 1
- 238000009529 body temperature measurement Methods 0.000 description 1
- WLZRMCYVCSSEQC-UHFFFAOYSA-N cadmium(2+) Chemical compound [Cd+2] WLZRMCYVCSSEQC-UHFFFAOYSA-N 0.000 description 1
- 238000011088 calibration curve Methods 0.000 description 1
- 239000003575 carbonaceous material Substances 0.000 description 1
- 125000003178 carboxy group Chemical group [H]OC(*)=O 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 150000003841 chloride salts Chemical class 0.000 description 1
- 229910001430 chromium ion Inorganic materials 0.000 description 1
- 229910001429 cobalt ion Inorganic materials 0.000 description 1
- XLJKHNWPARRRJB-UHFFFAOYSA-N cobalt(2+) Chemical compound [Co+2] XLJKHNWPARRRJB-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- RFKZUAOAYVHBOY-UHFFFAOYSA-M copper(1+);acetate Chemical compound [Cu+].CC([O-])=O RFKZUAOAYVHBOY-UHFFFAOYSA-M 0.000 description 1
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
- 229910000336 copper(I) sulfate Inorganic materials 0.000 description 1
- LSXDOTMGLUJQCM-UHFFFAOYSA-M copper(i) iodide Chemical compound I[Cu] LSXDOTMGLUJQCM-UHFFFAOYSA-M 0.000 description 1
- WIVXEZIMDUGYRW-UHFFFAOYSA-L copper(i) sulfate Chemical compound [Cu+].[Cu+].[O-]S([O-])(=O)=O WIVXEZIMDUGYRW-UHFFFAOYSA-L 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003480 eluent Substances 0.000 description 1
- 125000003700 epoxy group Chemical group 0.000 description 1
- 150000002391 heterocyclic compounds Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000004694 iodide salts Chemical class 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N iron Substances [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 229910001437 manganese ion Inorganic materials 0.000 description 1
- 229910052753 mercury Inorganic materials 0.000 description 1
- 125000005395 methacrylic acid group Chemical group 0.000 description 1
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910001453 nickel ion Inorganic materials 0.000 description 1
- 150000002823 nitrates Chemical class 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 125000004433 nitrogen atom Chemical group N* 0.000 description 1
- 229920001778 nylon Polymers 0.000 description 1
- 229910052763 palladium Inorganic materials 0.000 description 1
- 239000012466 permeate Substances 0.000 description 1
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- 229920000515 polycarbonate Polymers 0.000 description 1
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920000573 polyethylene Polymers 0.000 description 1
- 229920001155 polypropylene Polymers 0.000 description 1
- 229920002635 polyurethane Polymers 0.000 description 1
- 239000004814 polyurethane Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
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Images
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- Die Bonding (AREA)
Description
ポンプ:L-6000(株式会社日立製作所製)
カラム:ゲルパック(Gelpack)GL-R440(日立化成株式会社製)、ゲルパック(Gelpack)GL-R450(日立化成株式会社製)、及び、ゲルパックGL-R400M(日立化成株式会社製)(各10.7mm(直径)×300mm)をこの順に連結したカラム
溶離液:テトラヒドロフラン(THF)
サンプル:試料120mgをTHF5mLに溶解させた溶液
流速:1.75mL/分
下記アクリルゴム溶液を100メッシュのフィルターでろ過した後に真空脱泡した。離型処理を施した厚み38μmのポリエチレンテレフタレート(PET。基材フィルム)上に真空脱泡後のアクリルゴム溶液を塗布して塗膜を得た。塗膜を90℃で5分間、130℃で5分間の2段階で加熱乾燥することにより、評価対象の樹脂部材としてBステージ状態の評価フィルム(厚さ:20μm)をそれぞれ得た。
A:重量平均分子量:80万、ガラス転移温度:12℃、ナガセケムテックス株式会社製、商品名:HTR-860P-3CSP、溶剤:シクロヘキサノン
B:重量平均分子量:60万、ガラス転移温度:12℃、溶剤:シクロヘキサノン
C:重量平均分子量:30万、ガラス転移温度:12℃、溶剤:シクロヘキサノン
D:重量平均分子量:100万、ガラス転移温度:3℃、溶剤:シクロヘキサノン
無水硫酸銅(II)2.0gを蒸留水1020gに溶解し、完全に硫酸銅が溶解するまでよく撹拌することにより、銅イオン濃度がCu元素換算で濃度500mg/kgである硫酸銅水溶液(以下、「A液」という)を調製した。
(銅イオンの拡散)
上述の評価フィルムA及びDのそれぞれについて、上述の実験Aと同様の評価装置を用いて評価フィルム内に銅イオンを拡散させた。上述の実験Aと同様に印加電圧24.0Vにて電圧を印加した。600分が経過した後、評価フィルムを回収した。評価フィルム中の水を蒸発させるため25℃で評価フィルムを8時間乾燥し、グロー放電発光分析の評価フィルムとして得た。
グロー放電発光分析(GD-OES)に基づき、評価フィルムの厚み方向における銅イオンの存在量を測定した。測定装置として株式会社リガク製の商品名「GDA750」を用いて下記の測定条件で測定を行った。
・測定直径:4mm
・電圧:700V
・電流:15mA
・周波数:110Hz
・Duty:20%
・時間:20000秒
Claims (5)
- 樹脂部材を構成する樹脂材料のガラス転移温度に基づき前記樹脂部材における重金属イオンの拡散性を評価する評価方法であって、
前記重金属イオンの拡散性として、前記樹脂部材の一方側から他方側に向けて前記樹脂部材内において重金属イオンを拡散させた際に前記樹脂部材の前記一方側の半分の領域における重金属イオンの存在量が前記樹脂部材の前記他方側の半分の領域における重金属イオンの存在量よりも多い状態を与えるか否かを評価し、
前記ガラス転移温度が100℃以下である、重金属イオンの拡散性の評価方法。 - 前記重金属イオンが銅イオンである、請求項1に記載の重金属イオンの拡散性の評価方法。
- 前記樹脂部材がフィルム状である、請求項1又は2に記載の重金属イオンの拡散性の評価方法。
- 重金属イオンを含有する金属部材と、請求項1~3のいずれか一項に記載の重金属イオンの拡散性の評価方法の評価結果に基づき選定された樹脂部材と、を接触させる工程を備える、構造体の製造方法。
- 前記樹脂部材に対して前記金属部材とは反対側に半導体素子を配置する工程を更に備える、請求項4に記載の構造体の製造方法。
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Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005311069A (ja) | 2004-04-21 | 2005-11-04 | Jsr Corp | 半導体装置およびその製造方法 |
JP2006278992A (ja) | 2005-03-30 | 2006-10-12 | Sumitomo Bakelite Co Ltd | ポリベンゾオキサゾール樹脂膜の製造方法、絶縁膜および半導体装置 |
JP2008047817A (ja) | 2006-08-21 | 2008-02-28 | Fujitsu Ltd | 半導体装置 |
JP2008244363A (ja) | 2007-03-28 | 2008-10-09 | Seiko Epson Corp | 薄膜トランジスタ、電子回路、表示装置および電子機器 |
JP2012059767A (ja) | 2010-09-06 | 2012-03-22 | Nitto Denko Corp | 半導体装置用フィルム、及び、半導体装置 |
JP2013026566A (ja) | 2011-07-25 | 2013-02-04 | Nitto Denko Corp | 半導体装置製造用の接着シート、半導体装置製造用の接着シートを有する半導体装置、及び、半導体装置の製造方法 |
-
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- 2020-03-30 JP JP2020060877A patent/JP7452187B2/ja active Active
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005311069A (ja) | 2004-04-21 | 2005-11-04 | Jsr Corp | 半導体装置およびその製造方法 |
JP2006278992A (ja) | 2005-03-30 | 2006-10-12 | Sumitomo Bakelite Co Ltd | ポリベンゾオキサゾール樹脂膜の製造方法、絶縁膜および半導体装置 |
JP2008047817A (ja) | 2006-08-21 | 2008-02-28 | Fujitsu Ltd | 半導体装置 |
JP2008244363A (ja) | 2007-03-28 | 2008-10-09 | Seiko Epson Corp | 薄膜トランジスタ、電子回路、表示装置および電子機器 |
JP2012059767A (ja) | 2010-09-06 | 2012-03-22 | Nitto Denko Corp | 半導体装置用フィルム、及び、半導体装置 |
JP2013026566A (ja) | 2011-07-25 | 2013-02-04 | Nitto Denko Corp | 半導体装置製造用の接着シート、半導体装置製造用の接着シートを有する半導体装置、及び、半導体装置の製造方法 |
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