JP7451202B2 - 搬送システム - Google Patents

搬送システム Download PDF

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Publication number
JP7451202B2
JP7451202B2 JP2020018350A JP2020018350A JP7451202B2 JP 7451202 B2 JP7451202 B2 JP 7451202B2 JP 2020018350 A JP2020018350 A JP 2020018350A JP 2020018350 A JP2020018350 A JP 2020018350A JP 7451202 B2 JP7451202 B2 JP 7451202B2
Authority
JP
Japan
Prior art keywords
conveyance
carrier
magnet
core
conveyance member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2020018350A
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English (en)
Japanese (ja)
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JP2021125979A (ja
JP2021125979A5 (https=
Inventor
仁 鈴木
武 山本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2020018350A priority Critical patent/JP7451202B2/ja
Priority to KR1020210011128A priority patent/KR102844098B1/ko
Priority to US17/161,981 priority patent/US20210242765A1/en
Priority to CN202110154604.1A priority patent/CN113224928A/zh
Priority to CN202510130900.6A priority patent/CN119995299A/zh
Publication of JP2021125979A publication Critical patent/JP2021125979A/ja
Publication of JP2021125979A5 publication Critical patent/JP2021125979A5/ja
Application granted granted Critical
Publication of JP7451202B2 publication Critical patent/JP7451202B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • H02K41/03—Synchronous motors; Motors moving step by step; Reluctance motors
    • H02K41/031—Synchronous motors; Motors moving step by step; Reluctance motors of the permanent magnet type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G54/00—Non-mechanical conveyors not otherwise provided for
    • B65G54/02—Non-mechanical conveyors not otherwise provided for electrostatic, electric, or magnetic
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K11/00—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection
    • H02K11/20—Structural association of dynamo-electric machines with electric components or with devices for shielding, monitoring or protection for measuring, monitoring, testing, protecting or switching
    • H02K11/21—Devices for sensing speed or position, or actuated thereby
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G43/00—Control devices, e.g. for safety, warning or fault-correcting
    • B65G43/08—Control devices operated by article or material being fed, conveyed or discharged
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02P—CONTROL OR REGULATION OF ELECTRIC MOTORS, ELECTRIC GENERATORS OR DYNAMO-ELECTRIC CONVERTERS; CONTROLLING TRANSFORMERS, REACTORS OR CHOKE COILS
    • H02P25/00—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details
    • H02P25/02—Arrangements or methods for the control of AC motors characterised by the kind of AC motor or by structural details characterised by the kind of motor
    • H02P25/06—Linear motors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/30—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations
    • H10P72/32—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations
    • H10P72/3204—Handling or holding of wafers, substrates or devices during manufacture or treatment thereof for conveying, e.g. between different workstations between different workstations using magnetic elements
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G2201/00—Indexing codes relating to handling devices, e.g. conveyors, characterised by the type of product or load being conveyed or handled
    • B65G2201/02—Articles

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Power Engineering (AREA)
  • Electromagnetism (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Metallurgy (AREA)
  • Mechanical Engineering (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • General Chemical & Material Sciences (AREA)
  • Linear Motors (AREA)
  • Non-Mechanical Conveyors (AREA)
  • Automatic Assembly (AREA)
JP2020018350A 2020-02-05 2020-02-05 搬送システム Active JP7451202B2 (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020018350A JP7451202B2 (ja) 2020-02-05 2020-02-05 搬送システム
KR1020210011128A KR102844098B1 (ko) 2020-02-05 2021-01-27 반송 시스템, 가공 시스템 및 물품의 제조방법
US17/161,981 US20210242765A1 (en) 2020-02-05 2021-01-29 Transport system, processing system, and article manufacturing method
CN202110154604.1A CN113224928A (zh) 2020-02-05 2021-02-04 运送系统、处理系统以及物品制造方法
CN202510130900.6A CN119995299A (zh) 2020-02-05 2021-02-04 运送系统、处理系统以及物品制造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020018350A JP7451202B2 (ja) 2020-02-05 2020-02-05 搬送システム

Publications (3)

Publication Number Publication Date
JP2021125979A JP2021125979A (ja) 2021-08-30
JP2021125979A5 JP2021125979A5 (https=) 2023-02-09
JP7451202B2 true JP7451202B2 (ja) 2024-03-18

Family

ID=77062401

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2020018350A Active JP7451202B2 (ja) 2020-02-05 2020-02-05 搬送システム

Country Status (4)

Country Link
US (1) US20210242765A1 (https=)
JP (1) JP7451202B2 (https=)
KR (1) KR102844098B1 (https=)
CN (2) CN119995299A (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7534923B2 (ja) 2020-10-30 2024-08-15 キヤノン株式会社 搬送システム及び搬送システムの制御方法
JP7771621B2 (ja) * 2021-10-19 2025-11-18 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法
CN115009857B (zh) * 2022-04-22 2023-07-25 江苏匠准数控机床有限公司 一种工件运载输送方法及装置
JP2023174388A (ja) * 2022-05-27 2023-12-07 キヤノン株式会社 搬送システム、成膜装置、搬送システムの制御方法及び物品の製造方法
CN116177230A (zh) * 2022-12-30 2023-05-30 安图实验仪器(郑州)有限公司 一种磁悬浮式样本传输装置
WO2025057539A1 (ja) 2023-09-12 2025-03-20 株式会社日立ハイテク 検体搬送装置
CN119706282B (zh) * 2024-12-31 2025-09-12 浙江华翊铁芯制造有限公司 一种铁芯检测换向装置及方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003219628A (ja) 2002-01-22 2003-07-31 Bunka Shutter Co Ltd リニアモータ式開閉装置
JP2010154683A (ja) 2008-12-25 2010-07-08 Thk Co Ltd リニアモータ

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2717174B2 (ja) * 1987-08-10 1998-02-18 俊郎 樋口 非接触型リニアアクチュエータ
JP3462819B2 (ja) * 1999-12-07 2003-11-05 株式会社日立ハイテクインスツルメンツ 電子部品供給装置及び電子部品供給方法
KR102192244B1 (ko) * 2013-12-30 2020-12-17 삼성디스플레이 주식회사 기판 이송장치
JP7066333B2 (ja) * 2017-05-17 2022-05-13 キヤノン株式会社 搬送システム、加工システム、物品の製造方法、搬送システムの制御方法及び可動機構
CN108336885B (zh) * 2017-07-06 2020-04-17 上海果栗自动化科技有限公司 线性马达及其动子运动定位控制装置
US11336165B2 (en) * 2018-03-28 2022-05-17 Rockwell Automation Technologies, Inc. Curvilinear motor
KR102733538B1 (ko) * 2018-12-21 2024-11-21 어플라이드 머티어리얼스, 인코포레이티드 자기 부상 시스템, 자기 부상 시스템을 위한 캐리어, 진공 시스템, 및 캐리어를 이송하는 방법

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003219628A (ja) 2002-01-22 2003-07-31 Bunka Shutter Co Ltd リニアモータ式開閉装置
JP2010154683A (ja) 2008-12-25 2010-07-08 Thk Co Ltd リニアモータ

Also Published As

Publication number Publication date
CN119995299A (zh) 2025-05-13
KR20210100013A (ko) 2021-08-13
JP2021125979A (ja) 2021-08-30
KR102844098B1 (ko) 2025-08-08
US20210242765A1 (en) 2021-08-05
CN113224928A (zh) 2021-08-06

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