JP7442294B2 - 真空用ゲートバルブ - Google Patents
真空用ゲートバルブ Download PDFInfo
- Publication number
- JP7442294B2 JP7442294B2 JP2019199734A JP2019199734A JP7442294B2 JP 7442294 B2 JP7442294 B2 JP 7442294B2 JP 2019199734 A JP2019199734 A JP 2019199734A JP 2019199734 A JP2019199734 A JP 2019199734A JP 7442294 B2 JP7442294 B2 JP 7442294B2
- Authority
- JP
- Japan
- Prior art keywords
- valve body
- stem
- valve
- holder
- fixing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000007789 sealing Methods 0.000 claims description 58
- 238000005452 bending Methods 0.000 claims description 23
- 239000003566 sealing material Substances 0.000 description 43
- 238000003825 pressing Methods 0.000 description 15
- 238000003780 insertion Methods 0.000 description 14
- 230000037431 insertion Effects 0.000 description 14
- 239000000463 material Substances 0.000 description 13
- 239000002245 particle Substances 0.000 description 12
- 230000009471 action Effects 0.000 description 9
- 238000006243 chemical reaction Methods 0.000 description 8
- 230000008878 coupling Effects 0.000 description 7
- 238000010168 coupling process Methods 0.000 description 7
- 238000005859 coupling reaction Methods 0.000 description 7
- 230000000694 effects Effects 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 6
- 230000002093 peripheral effect Effects 0.000 description 6
- 239000004065 semiconductor Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 230000003749 cleanliness Effects 0.000 description 4
- 230000005489 elastic deformation Effects 0.000 description 4
- 229910052751 metal Inorganic materials 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 230000008901 benefit Effects 0.000 description 3
- 230000000630 rising effect Effects 0.000 description 3
- 230000002411 adverse Effects 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 2
- 238000002788 crimping Methods 0.000 description 2
- 238000013461 design Methods 0.000 description 2
- 238000006073 displacement reaction Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 230000001771 impaired effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000004073 vulcanization Methods 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/02—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
- F16K3/16—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together
- F16K3/18—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor with special arrangements for separating the sealing faces or for pressing them together by movement of the closure members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K3/00—Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
- F16K3/30—Details
- F16K3/314—Forms or constructions of slides; Attachment of the slide to the spindle
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
- F16K51/00—Other details not peculiar to particular types of valves or cut-off apparatus
- F16K51/02—Other details not peculiar to particular types of valves or cut-off apparatus specially adapted for high-vacuum installations
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Sliding Valves (AREA)
- Details Of Valves (AREA)
Description
1a 対向面(一面)
2 弁体
2a 背面
3 弁体シール材
4 横リブ(リブ部)
5 縦リブ(リブ部)
6 ステム
10 先端部(固定位置)
11 結合部(固定位置)
13a 13b クサビ面(ステム固定面)
16 ステム撓み部
22 弁座シール面
23 横窪み部
24 縦窪み部
G1 隙間(非接触)
S 弁体の上下方向中央位置(弁体の短尺方向中心軸)
L1 横窪み部の長さ方向の長さ
L2 弁体の長さ方向の長さ
Claims (4)
- バルブのステムに弁体ホルダを取付け、弁体ホルダに弁体が取付けられた真空用ゲートバルブにおいて、前記弁体ホルダの一面に曲げ強度を増すための横リブと縦リブからなるリブ部と前記弁体の背面に横方向中央位置に形成された横窪み部とこの横窪み部の中央位置に上方に向けて形成された縦窪み部とが備えられ、前記リブ部は、前記横窪み部と縦窪み部に前記弁体と非接触状態で収納され、前記弁体ホルダの両端は、前記横窪み部より長さ方向外側位置の前記弁体の背面に固定すると共に、前記弁体ホルダと前記ステムの固定位置は、前記弁体の上下方向中央位置より上部側であり、弁閉時は、前記弁体の上下方向中央位置よりも上部側を押すことで、前記弁体の中央付近で前記ステムに対して前記ステム全体の撓みと逆方向の弾性曲げを生じさせて前記弁体を傾動させることにより、前記弁体と弁座シール面を略平行に締め切るようにしたことを特徴とする真空用ゲートバルブ。
- 前記弁体ホルダと前記ステムの固定位置には、前記ステムの上端側面に下方に向かって傾斜させたクサビ形状のステム固定面を形成した請求項1に記載の真空用ゲートバルブ。
- 前記ステム固定面の前記ステムの下側位置には、厚さを薄くして弾性撓みを生じさせることにより前記弁体を傾動させるステム撓み部を形成した請求項2に記載の真空用ゲートバルブ。
- 前記横窪み部の長さ方向の長さは、前記弁体の長さ方向の長さの1/2以上である請求項1乃至3の何れか1項に記載の真空用ゲートバルブ。
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019199734A JP7442294B2 (ja) | 2019-11-01 | 2019-11-01 | 真空用ゲートバルブ |
TW109133573A TWI858146B (zh) | 2019-11-01 | 2020-09-28 | 真空用閘閥 |
KR1020200136700A KR20210053203A (ko) | 2019-11-01 | 2020-10-21 | 진공용 게이트 밸브 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2019199734A JP7442294B2 (ja) | 2019-11-01 | 2019-11-01 | 真空用ゲートバルブ |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021071186A JP2021071186A (ja) | 2021-05-06 |
JP7442294B2 true JP7442294B2 (ja) | 2024-03-04 |
Family
ID=75712772
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2019199734A Active JP7442294B2 (ja) | 2019-11-01 | 2019-11-01 | 真空用ゲートバルブ |
Country Status (2)
Country | Link |
---|---|
JP (1) | JP7442294B2 (ja) |
KR (1) | KR20210053203A (ja) |
Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004076893A (ja) | 2002-08-21 | 2004-03-11 | Kitz Sct:Kk | ゲートバルブ |
JP2004197769A (ja) | 2002-12-16 | 2004-07-15 | Smc Corp | ゲートバルブ |
JP2011094795A (ja) | 2009-10-27 | 2011-05-12 | Vat Holding Ag | 閉塞ユニット、真空バルブおよびバルブプレート |
KR101092138B1 (ko) | 2011-03-30 | 2011-12-12 | 한익수 | 사각 게이트 밸브 |
JP2012511672A (ja) | 2008-12-11 | 2012-05-24 | バット ホールディング アーゲー | バルブロッドに対するバルブプレートの懸架装置 |
JP5890929B1 (ja) | 2015-07-01 | 2016-03-22 | 株式会社ブイテックス | ゲートバルブ |
EP3048351A1 (en) | 2015-01-20 | 2016-07-27 | King Lai Hygienic Materials Co., Ltd. | Gate valve with linkage structure |
JP2018071642A (ja) | 2016-10-28 | 2018-05-10 | 株式会社キッツエスシーティー | 真空用ゲートバルブ |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4718121U (ja) * | 1971-03-31 | 1972-10-31 | ||
JPS5655002Y2 (ja) | 1976-12-04 | 1981-12-22 | ||
JPS5597563A (en) * | 1979-01-13 | 1980-07-24 | Rikagaku Kenkyusho | Gate valve |
-
2019
- 2019-11-01 JP JP2019199734A patent/JP7442294B2/ja active Active
-
2020
- 2020-10-21 KR KR1020200136700A patent/KR20210053203A/ko unknown
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2004076893A (ja) | 2002-08-21 | 2004-03-11 | Kitz Sct:Kk | ゲートバルブ |
JP2004197769A (ja) | 2002-12-16 | 2004-07-15 | Smc Corp | ゲートバルブ |
JP2012511672A (ja) | 2008-12-11 | 2012-05-24 | バット ホールディング アーゲー | バルブロッドに対するバルブプレートの懸架装置 |
JP2011094795A (ja) | 2009-10-27 | 2011-05-12 | Vat Holding Ag | 閉塞ユニット、真空バルブおよびバルブプレート |
KR101092138B1 (ko) | 2011-03-30 | 2011-12-12 | 한익수 | 사각 게이트 밸브 |
EP3048351A1 (en) | 2015-01-20 | 2016-07-27 | King Lai Hygienic Materials Co., Ltd. | Gate valve with linkage structure |
JP5890929B1 (ja) | 2015-07-01 | 2016-03-22 | 株式会社ブイテックス | ゲートバルブ |
JP2018071642A (ja) | 2016-10-28 | 2018-05-10 | 株式会社キッツエスシーティー | 真空用ゲートバルブ |
Also Published As
Publication number | Publication date |
---|---|
KR20210053203A (ko) | 2021-05-11 |
TW202120841A (zh) | 2021-06-01 |
JP2021071186A (ja) | 2021-05-06 |
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