JP7426958B2 - 磁気センサ及び検査装置 - Google Patents

磁気センサ及び検査装置 Download PDF

Info

Publication number
JP7426958B2
JP7426958B2 JP2021010239A JP2021010239A JP7426958B2 JP 7426958 B2 JP7426958 B2 JP 7426958B2 JP 2021010239 A JP2021010239 A JP 2021010239A JP 2021010239 A JP2021010239 A JP 2021010239A JP 7426958 B2 JP7426958 B2 JP 7426958B2
Authority
JP
Japan
Prior art keywords
magnetic
opposing
magnetic layer
layer
current
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2021010239A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022114102A (ja
JP2022114102A5 (enExample
Inventor
仁志 岩崎
聡志 白鳥
哲 喜々津
祥弘 東
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP2021010239A priority Critical patent/JP7426958B2/ja
Priority to US17/444,987 priority patent/US11759118B2/en
Publication of JP2022114102A publication Critical patent/JP2022114102A/ja
Publication of JP2022114102A5 publication Critical patent/JP2022114102A5/ja
Application granted granted Critical
Publication of JP7426958B2 publication Critical patent/JP7426958B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Classifications

    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/242—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/72—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating magnetic variables
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0011—Arrangements or instruments for measuring magnetic variables comprising means, e.g. flux concentrators, flux guides, for guiding or concentrating the magnetic flux, e.g. to the magnetic sensor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0023—Electronic aspects, e.g. circuits for stimulation, evaluation, control; Treating the measured signals; calibration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/0094—Sensor arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/093—Magnetoresistive devices using multilayer structures, e.g. giant magnetoresistance sensors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R33/00—Arrangements or instruments for measuring magnetic variables
    • G01R33/02—Measuring direction or magnitude of magnetic fields or magnetic flux
    • G01R33/06—Measuring direction or magnitude of magnetic fields or magnetic flux using galvano-magnetic devices
    • G01R33/09—Magnetoresistive devices
    • G01R33/098—Magnetoresistive devices comprising tunnel junctions, e.g. tunnel magnetoresistance sensors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02—Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0223—Magnetic field sensors
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00—Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/04—Arrangements of multiple sensors of the same type
    • A61B2562/046—Arrangements of multiple sensors of the same type in a matrix array
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/0033—Features or image-related aspects of imaging apparatus, e.g. for MRI, optical tomography or impedance tomography apparatus; Arrangements of imaging apparatus in a room
    • A61B5/0035—Features or image-related aspects of imaging apparatus, e.g. for MRI, optical tomography or impedance tomography apparatus; Arrangements of imaging apparatus in a room adapted for acquisition of images from more than one imaging mode, e.g. combining MRI and optical tomography
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/05—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves
    • A61B5/055—Detecting, measuring or recording for diagnosis by means of electric currents or magnetic fields; Measuring using microwaves or radio waves involving electronic [EMR] or nuclear [NMR] magnetic resonance, e.g. magnetic resonance imaging
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/242—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents
    • A61B5/243—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents specially adapted for magnetocardiographic [MCG] signals
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/242—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents
    • A61B5/245—Detecting biomagnetic fields, e.g. magnetic fields produced by bioelectric currents specially adapted for magnetoencephalographic [MEG] signals
    • A—HUMAN NECESSITIES
    • A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00—Measuring for diagnostic purposes; Identification of persons
    • A61B5/24—Detecting, measuring or recording bioelectric or biomagnetic signals of the body or parts thereof
    • A61B5/316—Modalities, i.e. specific diagnostic methods
    • A61B5/369—Electroencephalography [EEG]

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Health & Medical Sciences (AREA)
  • Pathology (AREA)
  • Veterinary Medicine (AREA)
  • Biophysics (AREA)
  • Molecular Biology (AREA)
  • Surgery (AREA)
  • Animal Behavior & Ethology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Public Health (AREA)
  • Biomedical Technology (AREA)
  • Medical Informatics (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Radiology & Medical Imaging (AREA)
  • Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Measuring Magnetic Variables (AREA)
  • Investigating Or Analyzing Materials By The Use Of Magnetic Means (AREA)
  • Hall/Mr Elements (AREA)
JP2021010239A 2021-01-26 2021-01-26 磁気センサ及び検査装置 Active JP7426958B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2021010239A JP7426958B2 (ja) 2021-01-26 2021-01-26 磁気センサ及び検査装置
US17/444,987 US11759118B2 (en) 2021-01-26 2021-08-12 Magnetic sensor and inspection device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2021010239A JP7426958B2 (ja) 2021-01-26 2021-01-26 磁気センサ及び検査装置

Publications (3)

Publication Number Publication Date
JP2022114102A JP2022114102A (ja) 2022-08-05
JP2022114102A5 JP2022114102A5 (enExample) 2023-05-01
JP7426958B2 true JP7426958B2 (ja) 2024-02-02

Family

ID=82495184

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021010239A Active JP7426958B2 (ja) 2021-01-26 2021-01-26 磁気センサ及び検査装置

Country Status (2)

Country Link
US (1) US11759118B2 (enExample)
JP (1) JP7426958B2 (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7746238B2 (ja) * 2022-08-25 2025-09-30 株式会社東芝 磁気センサ及び検査装置

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001345495A (ja) 2000-05-30 2001-12-14 Alps Electric Co Ltd スピンバルブ型薄膜磁気素子およびこのスピンバルブ型薄膜磁気素子を備えた薄膜磁気ヘッド
JP2003318460A (ja) 2002-04-24 2003-11-07 Alps Electric Co Ltd 磁気検出素子及びその製造方法
JP2018155719A (ja) 2017-03-21 2018-10-04 株式会社東芝 磁気センサ、生体細胞検出装置及び診断装置
JP2019132719A (ja) 2018-01-31 2019-08-08 旭化成エレクトロニクス株式会社 磁気検出装置
JP2019207167A (ja) 2018-05-29 2019-12-05 株式会社東芝 磁気センサ及び診断装置
JP2020170838A (ja) 2019-04-02 2020-10-15 株式会社東芝 磁気センサ、センサモジュール及び診断装置
JP7284739B2 (ja) 2020-09-14 2023-05-31 株式会社東芝 磁気センサ及び検査装置
JP7316719B2 (ja) 2020-08-25 2023-07-28 株式会社東芝 磁気センサ及び検査装置
JP7319683B2 (ja) 2020-09-01 2023-08-02 株式会社東芝 磁気センサ及び診断装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2018048832A (ja) * 2016-09-20 2018-03-29 株式会社東芝 磁気センサ、磁気センサ装置、診断装置
JP2018146314A (ja) * 2017-03-03 2018-09-20 株式会社東芝 磁気センサ、磁気センサ装置
JP6538943B2 (ja) * 2017-08-31 2019-07-03 旭化成エレクトロニクス株式会社 測定装置および測定方法
JP7421462B2 (ja) * 2020-10-16 2024-01-24 株式会社東芝 磁気センサ及び検査装置

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2001345495A (ja) 2000-05-30 2001-12-14 Alps Electric Co Ltd スピンバルブ型薄膜磁気素子およびこのスピンバルブ型薄膜磁気素子を備えた薄膜磁気ヘッド
JP2003318460A (ja) 2002-04-24 2003-11-07 Alps Electric Co Ltd 磁気検出素子及びその製造方法
JP2018155719A (ja) 2017-03-21 2018-10-04 株式会社東芝 磁気センサ、生体細胞検出装置及び診断装置
JP2019132719A (ja) 2018-01-31 2019-08-08 旭化成エレクトロニクス株式会社 磁気検出装置
JP2019207167A (ja) 2018-05-29 2019-12-05 株式会社東芝 磁気センサ及び診断装置
JP2020170838A (ja) 2019-04-02 2020-10-15 株式会社東芝 磁気センサ、センサモジュール及び診断装置
JP7316719B2 (ja) 2020-08-25 2023-07-28 株式会社東芝 磁気センサ及び検査装置
JP7319683B2 (ja) 2020-09-01 2023-08-02 株式会社東芝 磁気センサ及び診断装置
JP7284739B2 (ja) 2020-09-14 2023-05-31 株式会社東芝 磁気センサ及び検査装置

Also Published As

Publication number Publication date
US20220233087A1 (en) 2022-07-28
JP2022114102A (ja) 2022-08-05
US11759118B2 (en) 2023-09-19

Similar Documents

Publication Publication Date Title
JP7284739B2 (ja) 磁気センサ及び検査装置
JP7316719B2 (ja) 磁気センサ及び検査装置
US11119161B2 (en) Magnetic sensor and diagnostic device
JP7393319B2 (ja) 磁気センサ及び検査装置
JP7482046B2 (ja) 磁気センサ及び検査装置
JP7426958B2 (ja) 磁気センサ及び検査装置
JP7426955B2 (ja) 磁気センサ及び検査装置
JP7414703B2 (ja) 磁気センサ及び検査装置
JP7426956B2 (ja) 磁気センサ及び検査装置
JP7496089B2 (ja) 磁気センサ及び検査装置
US11726149B2 (en) Magnetic sensor and inspection device
JP7746227B2 (ja) センサ及び検査装置
JP7431780B2 (ja) センサ及び検査装置
JP7422709B2 (ja) センサ及び検査装置
JP7746233B2 (ja) 磁気センサ及び検査装置
JP7783148B2 (ja) センサ及び検査装置
JP2024160725A (ja) センサ及び検査装置
JP2024030899A (ja) 磁気センサ及び検査装置

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20230214

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20230421

RD01 Notification of change of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7421

Effective date: 20230616

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20230829

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20230901

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20231005

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20231225

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20240123

R151 Written notification of patent or utility model registration

Ref document number: 7426958

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R151