JP7417286B2 - 圧電トランシーバーを有する画像処理装置 - Google Patents
圧電トランシーバーを有する画像処理装置 Download PDFInfo
- Publication number
- JP7417286B2 JP7417286B2 JP2021133543A JP2021133543A JP7417286B2 JP 7417286 B2 JP7417286 B2 JP 7417286B2 JP 2021133543 A JP2021133543 A JP 2021133543A JP 2021133543 A JP2021133543 A JP 2021133543A JP 7417286 B2 JP7417286 B2 JP 7417286B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- mut
- axis
- piezoelectric layer
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000003384 imaging method Methods 0.000 claims description 43
- 239000000758 substrate Substances 0.000 claims description 21
- 238000002604 ultrasonography Methods 0.000 claims description 16
- 239000012528 membrane Substances 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 5
- 229910013336 LiNiO3 Inorganic materials 0.000 claims description 3
- 239000002033 PVDF binder Substances 0.000 claims description 3
- 229920002981 polyvinylidene fluoride Polymers 0.000 claims description 3
- 230000004044 response Effects 0.000 description 34
- 239000010410 layer Substances 0.000 description 10
- 210000000056 organ Anatomy 0.000 description 8
- 210000001835 viscera Anatomy 0.000 description 6
- 230000006870 function Effects 0.000 description 5
- 239000011247 coating layer Substances 0.000 description 4
- 238000004891 communication Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 241001465754 Metazoa Species 0.000 description 2
- 238000010521 absorption reaction Methods 0.000 description 2
- 210000001367 artery Anatomy 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 210000003462 vein Anatomy 0.000 description 2
- 230000017531 blood circulation Effects 0.000 description 1
- 230000003750 conditioning effect Effects 0.000 description 1
- 238000013016 damping Methods 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- APTZNLHMIGJTEW-UHFFFAOYSA-N pyraflufen-ethyl Chemical compound C1=C(Cl)C(OCC(=O)OCC)=CC(C=2C(=C(OC(F)F)N(C)N=2)Cl)=C1F APTZNLHMIGJTEW-UHFFFAOYSA-N 0.000 description 1
- 210000001519 tissue Anatomy 0.000 description 1
- 238000012285 ultrasound imaging Methods 0.000 description 1
Classifications
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01H—MEASUREMENT OF MECHANICAL VIBRATIONS OR ULTRASONIC, SONIC OR INFRASONIC WAVES
- G01H11/00—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties
- G01H11/06—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means
- G01H11/08—Measuring mechanical vibrations or ultrasonic, sonic or infrasonic waves by detecting changes in electric or magnetic properties by electric means using piezoelectric devices
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/0292—Electrostatic transducers, e.g. electret-type
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
- G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
- G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
- G01S7/52079—Constructional features
- G01S7/5208—Constructional features with integration of processing functions inside probe or scanhead
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/08—Detecting organic movements or changes, e.g. tumours, cysts, swellings
- A61B8/0883—Detecting organic movements or changes, e.g. tumours, cysts, swellings for diagnosis of the heart
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4427—Device being portable or laptop-like
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4488—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer the transducer being a phased array
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B8/00—Diagnosis using ultrasonic, sonic or infrasonic waves
- A61B8/44—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device
- A61B8/4483—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer
- A61B8/4494—Constructional features of the ultrasonic, sonic or infrasonic diagnostic device characterised by features of the ultrasound transducer characterised by the arrangement of the transducer elements
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
- B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
- B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
- B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
- B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
- B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/06—Visualisation of the interior, e.g. acoustic microscopy
- G01N29/0654—Imaging
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/04—Analysing solids
- G01N29/07—Analysing solids by measuring propagation velocity or propagation time of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2406—Electrostatic or capacitive probes, e.g. electret or cMUT-probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/02—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
- G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
- G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
- G01S15/8925—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
- G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
- G01S15/88—Sonar systems specially adapted for specific applications
- G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
- G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
- G01S15/899—Combination of imaging systems with ancillary equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01G—CAPACITORS; CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES, LIGHT-SENSITIVE OR TEMPERATURE-SENSITIVE DEVICES OF THE ELECTROLYTIC TYPE
- H01G5/00—Capacitors in which the capacitance is varied by mechanical means, e.g. by turning a shaft; Processes of their manufacture
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2047—Membrane type
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/30—Piezoelectric or electrostrictive devices with mechanical input and electrical output, e.g. functioning as generators or sensors
- H10N30/302—Sensors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/852—Composite materials, e.g. having 1-3 or 2-2 type connectivity
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Radar, Positioning & Navigation (AREA)
- Remote Sensing (AREA)
- General Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Pathology (AREA)
- General Health & Medical Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Computer Networks & Wireless Communication (AREA)
- Analytical Chemistry (AREA)
- Immunology (AREA)
- Biochemistry (AREA)
- Surgery (AREA)
- Molecular Biology (AREA)
- Veterinary Medicine (AREA)
- Public Health (AREA)
- Animal Behavior & Ethology (AREA)
- Biophysics (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Radiology & Medical Imaging (AREA)
- Biomedical Technology (AREA)
- Heart & Thoracic Surgery (AREA)
- Medical Informatics (AREA)
- Mechanical Engineering (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Gynecology & Obstetrics (AREA)
- Computer Hardware Design (AREA)
- Composite Materials (AREA)
- Materials Engineering (AREA)
- Cardiology (AREA)
- Transducers For Ultrasonic Waves (AREA)
- Ultra Sonic Daignosis Equipment (AREA)
- Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
- Medicines Containing Antibodies Or Antigens For Use As Internal Diagnostic Agents (AREA)
Description
図3Bは、本開示の実施形態に係るトランシーバータイル(210)の平面図を示す。実施形態では、アレイ(200)は1枚以上のトランシーバータイル(210)を備えてもよい。描かれている通り、トランシーバーアレイ(200)は所定様式通りに整えられた1枚以上のトランシーバータイル(210)を備えてもよい。例えば、図3Aに描かれている通り、トランシーバータイル(または、短縮して、タイル)(210)は曲線状のトランシーバーアレイをさらに形成するために物理的に曲げられ、画像装置(120)に配置されてもよい。画像装置(120)は任意の適切な個数のタイルも備えてもよく、タイルは任意の適切な方法で整えることができ、また、各タイル(210)には、任意の適切な個数の圧電気要素(302)がトランシーバー基板(304)に配置されてもよいことが、当業者に明白であろう。基板(304)において、1つまたは複数の温度センサー(320)が作動中にトランシーバータイル(210)の温度を監視するために設置されてもよい。実施形態では、トランシーバーアレイ(200)は基板から作られたマイクロマシンアレイであっても良い。
Claims (15)
- 基板と、
前記基板に結合された第1の電極であって、当該第1の電極が第1の軸に対して対称であり、該第1の軸に垂直である第2の軸に対して非対称であり、該第1の軸が、前記第1の電極がもっとも長い寸法を有する方向に沿って延び、該第2の軸が、前記第1の軸上の前記第1の電極の二つの端部の間の中間点を通過してなる、第1の電極と、
前記基板に結合され、かつ前記第1の電極と面一でない第2の電極と、
を含んでなるマイクロマシン超音波トランスデューサ(MUT)であって、
前記第1の電極と前記第2の電極が、互いに垂直方向に分離されるとともに、前記基板上に設けられた膜層の上側に位置しており、
前記第1の電極が上部電極を含み、前記第2の電極が下部電極を含んでなる、
ことを特徴とするマイクロマシン超音波トランスデューサ(MUT)。 - 圧電気層を更に含み、前記第1の電極および前記第2の電極が前記圧電気層上に配されてなる、請求項1に記載のマイクロマシン超音波トランスデューサ(MUT)。
- 前記第1の電極が前記圧電気層の第1の側に配され、前記第2の電極が該第1の側の反対の方向に向く、前記圧電気層の第2の側に配されてなる、請求項2に記載のマイクロマシン超音波トランスデューサ(MUT)。
- 複数のマイクロマシン超音波トランスデューサ(MUT)を含むトランスデューサアレイを含んでなる画像装置であって、前記複数のマイクロマシン超音波トランスデューサ(MUT)の各々が、
基板と、
前記基板に結合された第1の電極であって、当該第1の電極が第1の軸に対して対称であり、該第1の軸に垂直である第2の軸に対して非対称であり、該第1の軸が、前記第1の電極がもっとも長い寸法を有する方向に沿って延び、該第2の軸が、前記第1の軸上の前記第1の電極の二つの端部の間の中間点を通過してなる、第1の電極と、
前記基板に結合され、かつ前記第1の電極と面一でない第2の電極と、
を含んでなるマイクロマシン超音波トランスデューサ(MUT)であって、
前記第1の電極と前記第2の電極が、互いに垂直方向に分離されるとともに、前記基板上に設けられた膜層の上側に位置しており、
前記第1の電極が上部を含み、前記第2の電極が下部電極を含んでなる、
ことを特徴とする画像装置。 - 前記複数のマイクロマシン超音波トランスデューサ(MUT)の各々が、圧電気層を更に含み、前記第1の電極および前記第2の電極が前記圧電気層上に配されてなる、請求項4に記載の画像装置。
- 前記第1の電極が前記圧電気層の第1の側に配され、前記第2の電極が該第1の側の反対の方向に向く、前記圧電気層の第2の側に配されてなる、請求項5に記載の画像装置。
- 基板と、
前記基板に結合された第1の電極であって、当該第1の電極が第1の軸に対して対称であり、該第1の軸に垂直である第2の軸に対して非対称であり、該第1の軸が、前記第1の電極がもっとも長い寸法を有する方向に沿って延び、該第2の軸が、前記第1の軸上の前記第1の電極の二つの端部の間の中間点を通過してなる、第1の電極と、
前記基板に結合され、かつ前記第1の電極と面一でない第2の電極と、
圧電気層と、
を含んでなるマイクロマシン超音波トランスデューサ(MUT)であって、
前記第1の電極および前記第2の電極が前記圧電気層上に配され、
前記第1の電極および前記第2の電極が前記基板上に設けられた膜層の上側に位置しており、
前記第1の電極が前記圧電気層の第1の側に配され、前記第2の電極が該第1の側の反対の方向に向く、前記圧電気層の第2の側に配されてなる、
ことを特徴とするマイクロマシン超音波トランスデューサ(MUT)。 - 前記第1の電極と前記第2の電極が、前記第1の軸および前記第2の軸の両方に対して垂直な第3の軸に沿って互いに分離されてなる請求項7に記載のマイクロマシン超音波トランスデューサ(MUT)。
- 複数のマイクロマシン超音波トランスデューサ(MUT)を含むトランスデューサアレイを含んでなる画像装置であって、前記複数のマイクロマシン超音波トランスデューサ(MUT)の各々が、
基板と、
前記基板上に設けられた膜層と、
前記基板に結合された第1の電極であって、当該第1の電極が第1の軸に対して対称であり、該第1の軸に垂直である第2の軸に対して非対称であり、該第1の軸が、前記第1の電極がもっとも長い寸法を有する方向に沿って延び、該第2の軸が、前記第1の軸上の前記第1の電極の二つの端部の間の中間点を通過してなる、第1の電極と、
前記基板に結合され、かつ前記第1の電極と面一でない第2の電極と、
圧電気層と、
を含んでなる画像装置であって、
前記第1の電極および前記第2の電極が前記圧電気層上に配され、
前記第1の電極および前記第2の電極が前記膜層の上側に位置しており、
前記第1の電極が前記圧電気層の第1の側に配され、前記第2の電極が該第1の側の反対の方向に向く、前記圧電気層の第2の側に配されてなる、
ことを特徴とする画像装置。 - 前記マイクロマシン超音波トランスデューサ(MUT)は、静電容量型変換(cMUT)または圧電変換(pMUT)である、請求項1又は7に記載のマイクロマシン超音波トランスデューサ(MUT)。
- 前記複数のマイクロマシン超音波トランスデューサ(MUT)の各々が、静電容量型変換(cMUT)または圧電変換(pMUT)である、請求項4又は9に記載の画像装置。
- 前記圧電気層が、PZT、KNN、PZT-N、PMN-Pt、AIN、PVDF及びLiNiO3の少なくとも1つから形成される、請求項2又は7に記載のマイクロマシン超音波トランスデューサ(MUT)。
- 前記圧電気層が、PZT、KNN、PZT-N、PMN-Pt、AIN、PVDF及びLiNiO3の少なくとも1つから形成される、請求項5又は9に記載の画像装置。
- 前記第1及び前記第2の電極が、前記第1及び前記第2の軸に対して垂直の第3の軸に沿って互いに分離されてなる請求項1又は7に記載のマイクロマシン超音波トランスデューサ(MUT)。
- 前記第1及び前記第2の電極が、前記第1及び前記第2の軸に対して垂直の第3の軸に沿って互いに分離されてなる請求項4又は9に記載の画像装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2023149820A JP2023169292A (ja) | 2018-04-11 | 2023-09-15 | 圧電トランシーバーを有する画像処理装置 |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US15/951,121 | 2018-04-11 | ||
US15/951,121 US10648852B2 (en) | 2018-04-11 | 2018-04-11 | Imaging devices having piezoelectric transceivers |
JP2020555166A JP6937092B2 (ja) | 2018-04-11 | 2019-03-09 | 圧電トランシーバーを有する画像処理装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020555166A Division JP6937092B2 (ja) | 2018-04-11 | 2019-03-09 | 圧電トランシーバーを有する画像処理装置 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023149820A Division JP2023169292A (ja) | 2018-04-11 | 2023-09-15 | 圧電トランシーバーを有する画像処理装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2021185700A JP2021185700A (ja) | 2021-12-09 |
JP7417286B2 true JP7417286B2 (ja) | 2024-01-18 |
Family
ID=68161443
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020555166A Active JP6937092B2 (ja) | 2018-04-11 | 2019-03-09 | 圧電トランシーバーを有する画像処理装置 |
JP2021133543A Active JP7417286B2 (ja) | 2018-04-11 | 2021-08-18 | 圧電トランシーバーを有する画像処理装置 |
JP2023149820A Pending JP2023169292A (ja) | 2018-04-11 | 2023-09-15 | 圧電トランシーバーを有する画像処理装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020555166A Active JP6937092B2 (ja) | 2018-04-11 | 2019-03-09 | 圧電トランシーバーを有する画像処理装置 |
Family Applications After (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2023149820A Pending JP2023169292A (ja) | 2018-04-11 | 2023-09-15 | 圧電トランシーバーを有する画像処理装置 |
Country Status (7)
Country | Link |
---|---|
US (4) | US10648852B2 (ja) |
EP (2) | EP4333603A3 (ja) |
JP (3) | JP6937092B2 (ja) |
KR (4) | KR102278330B1 (ja) |
CN (2) | CN113729773A (ja) |
IL (3) | IL296792B2 (ja) |
WO (1) | WO2019199397A1 (ja) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US11039814B2 (en) | 2016-12-04 | 2021-06-22 | Exo Imaging, Inc. | Imaging devices having piezoelectric transducers |
US10656007B2 (en) | 2018-04-11 | 2020-05-19 | Exo Imaging Inc. | Asymmetrical ultrasound transducer array |
US10648852B2 (en) | 2018-04-11 | 2020-05-12 | Exo Imaging Inc. | Imaging devices having piezoelectric transceivers |
WO2019226547A1 (en) | 2018-05-21 | 2019-11-28 | Exo Imaging, Inc. | Ultrasonic transducers with q spoiling |
US10760949B2 (en) * | 2018-09-11 | 2020-09-01 | Acertara Acoustic Laboratories, LLC | Piezoelectric pressure wave analysis |
JP2022500094A (ja) | 2018-09-25 | 2022-01-04 | エクソ イメージング,インコーポレイテッド | 選択的に変更可能な特性を有する撮像デバイス |
EP4029068A4 (en) | 2019-09-12 | 2023-12-13 | Exo Imaging Inc. | IMPROVING MUT'S COUPLING EFFICIENCY AND BANDWIDTH VIA AN EDGE GROOVE, VIRTUAL PIVOTS AND FREE BOUNDARIES |
JP7376376B2 (ja) * | 2020-01-28 | 2023-11-08 | 株式会社日立製作所 | 音波制御器 |
CA3135281C (en) * | 2020-03-05 | 2022-03-01 | Exo Imaging, Inc. | Ultrasonic imaging device with programmable anatomy and flow imaging |
US11819881B2 (en) | 2021-03-31 | 2023-11-21 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
JP2024511654A (ja) * | 2021-03-31 | 2024-03-14 | エコー イメージング,インク. | 高調波特性を備えた圧電トランシーバを有するイメージングデバイス |
US11951512B2 (en) | 2021-03-31 | 2024-04-09 | Exo Imaging, Inc. | Imaging devices having piezoelectric transceivers with harmonic characteristics |
CA3213653A1 (en) * | 2021-03-31 | 2022-10-06 | Haesung Kwon | Imaging devices having piezoelectric transceivers with harmonic characteristics |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008510324A (ja) | 2004-03-11 | 2008-04-03 | ジョージア テック リサーチ コーポレイション | 非対称薄膜cMUT素子及び製作方法 |
WO2010100861A1 (ja) | 2009-03-05 | 2010-09-10 | 株式会社日立メディコ | 超音波トランスデューサ、その製造方法、および、それを用いた超音波探触子 |
JP2015521409A (ja) | 2012-05-01 | 2015-07-27 | フジフィルム ディマティックス, インコーポレイテッド | 二重電極を有する超広帯域幅変換器 |
JP2018502467A (ja) | 2014-10-15 | 2018-01-25 | クアルコム,インコーポレイテッド | 3ポート圧電超音波トランスデューサ |
Family Cites Families (119)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2808522A (en) | 1953-02-26 | 1957-10-01 | Gulton Ind Inc | Accelerometer |
US3088323A (en) | 1960-02-10 | 1963-05-07 | Gulton Ind Inc | Piezoresistive transducer |
GB1515287A (en) | 1974-05-30 | 1978-06-21 | Plessey Co Ltd | Piezoelectric transducers |
US4211949A (en) | 1978-11-08 | 1980-07-08 | General Electric Company | Wear plate for piezoelectric ultrasonic transducer arrays |
US4375042A (en) | 1980-11-24 | 1983-02-22 | Eastman Kodak Company | Temperature gradient method of nonuniformly poling a body of polymeric piezoelectric material and novel flexure elements produced thereby |
US4445063A (en) | 1982-07-26 | 1984-04-24 | Solid State Systems, Corporation | Energizing circuit for ultrasonic transducer |
US4517842A (en) | 1982-11-02 | 1985-05-21 | Slope Indicator Co. | Fluid pressure transducer |
GB2166022A (en) | 1984-09-05 | 1986-04-23 | Sawafuji Dynameca Co Ltd | Piezoelectric vibrator |
US4630465A (en) | 1984-11-19 | 1986-12-23 | Eaton Corporation | Low viscous drag knock sensor |
JPS61223683A (ja) | 1985-03-29 | 1986-10-04 | Nec Corp | 超音波素子および超音波素子の駆動方法 |
US4668906A (en) | 1985-07-11 | 1987-05-26 | Ekstrand John P | Switched resistor regulator |
JPS6276392A (ja) | 1985-09-28 | 1987-04-08 | Victor Co Of Japan Ltd | モ−シヨナルフイ−ドバツクシステム |
US4709360A (en) | 1985-11-12 | 1987-11-24 | Sparton Corporation | Hydrophone transducer with negative feedback system |
JPH02218983A (ja) | 1989-02-20 | 1990-08-31 | Omron Tateisi Electron Co | 超音波センサ |
US5329496A (en) | 1992-10-16 | 1994-07-12 | Duke University | Two-dimensional array ultrasonic transducers |
JP3318687B2 (ja) | 1993-06-08 | 2002-08-26 | 日本碍子株式会社 | 圧電/電歪膜型素子及びその製造方法 |
US5488956A (en) | 1994-08-11 | 1996-02-06 | Siemens Aktiengesellschaft | Ultrasonic transducer array with a reduced number of transducer elements |
US5520187A (en) | 1994-11-25 | 1996-05-28 | General Electric Company | Ultrasonic probe with programmable multiplexer for imaging systems with different channel counts |
US5825117A (en) | 1996-03-26 | 1998-10-20 | Hewlett-Packard Company | Second harmonic imaging transducers |
US5945770A (en) | 1997-08-20 | 1999-08-31 | Acuson Corporation | Multilayer ultrasound transducer and the method of manufacture thereof |
US6108121A (en) | 1998-03-24 | 2000-08-22 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined high reflectance deformable mirror |
US6051895A (en) | 1998-04-17 | 2000-04-18 | Milltronics Ltd. | Electronic switch relay |
TW469657B (en) | 2000-11-30 | 2001-12-21 | Ind Tech Res Inst | Piezoelectric-actuated adjustable electronic device |
EP1511442B1 (en) | 2002-06-12 | 2010-01-06 | Boston Scientific Limited | Medical slings |
US7061158B2 (en) | 2002-07-25 | 2006-06-13 | Nanomotion Ltd. | High resolution piezoelectric motor |
US6958255B2 (en) | 2002-08-08 | 2005-10-25 | The Board Of Trustees Of The Leland Stanford Junior University | Micromachined ultrasonic transducers and method of fabrication |
DE10254894B3 (de) | 2002-11-20 | 2004-05-27 | Dr. Hielscher Gmbh | Vorrichtung zur Kühlung von Ultraschallwandlern |
CN1445872A (zh) * | 2003-03-25 | 2003-10-01 | 西安康鸿信息技术股份有限公司 | 一种非对称驱动型压电陶瓷变压器 |
US7149515B2 (en) | 2003-10-17 | 2006-12-12 | Motorola, Inc. | Vocoder selection method |
US7800595B2 (en) | 2003-12-18 | 2010-09-21 | 3M Innovative Properties Company | Piezoelectric transducer |
US7285897B2 (en) | 2003-12-31 | 2007-10-23 | General Electric Company | Curved micromachined ultrasonic transducer arrays and related methods of manufacture |
US7052464B2 (en) | 2004-01-01 | 2006-05-30 | General Electric Company | Alignment method for fabrication of integrated ultrasonic transducer array |
US7612483B2 (en) * | 2004-02-27 | 2009-11-03 | Georgia Tech Research Corporation | Harmonic cMUT devices and fabrication methods |
US7646133B2 (en) * | 2004-02-27 | 2010-01-12 | Georgia Tech Research Corporation | Asymmetric membrane cMUT devices and fabrication methods |
JP5275565B2 (ja) * | 2004-06-07 | 2013-08-28 | オリンパス株式会社 | 静電容量型超音波トランスデューサ |
US7888709B2 (en) * | 2004-09-15 | 2011-02-15 | Sonetics Ultrasound, Inc. | Capacitive micromachined ultrasonic transducer and manufacturing method |
EP1882127A2 (en) | 2005-05-18 | 2008-01-30 | Kolo Technologies, Inc. | Micro-electro-mechanical transducers |
US20070103697A1 (en) | 2005-06-17 | 2007-05-10 | Degertekin Fahrettin L | Integrated displacement sensors for probe microscopy and force spectroscopy |
JP2007082324A (ja) | 2005-09-14 | 2007-03-29 | Matsushita Electric Ind Co Ltd | 電源装置とその制御方法及び前記電源装置を用いた電子機器 |
JP2007088805A (ja) | 2005-09-22 | 2007-04-05 | Sanyo Electric Co Ltd | 超音波レーダ |
US7532093B1 (en) | 2006-02-06 | 2009-05-12 | The United States Of America As Represented By The Secretary Of The Army | RF MEMS series switch using piezoelectric actuation and method of fabrication |
US20070197922A1 (en) | 2006-02-17 | 2007-08-23 | Honeywell International Inc. | Disposable pressure sensor systems and packages therefor |
US7750536B2 (en) | 2006-03-02 | 2010-07-06 | Visualsonics Inc. | High frequency ultrasonic transducer and matching layer comprising cyanoacrylate |
JP4804961B2 (ja) | 2006-03-03 | 2011-11-02 | オリンパスメディカルシステムズ株式会社 | 超音波振動子及びそれを搭載した体腔内超音波診断装置 |
JP4839099B2 (ja) | 2006-03-03 | 2011-12-14 | オリンパスメディカルシステムズ株式会社 | マイクロマシンプロセスにより製造された超音波振動子、超音波振動子装置、その体腔内超音波診断装置、及びその制御方法 |
JP4839136B2 (ja) | 2006-06-02 | 2011-12-21 | 富士フイルム株式会社 | 超音波トランスデューサアレイ、超音波用探触子、超音波内視鏡、超音波診断装置 |
US7741686B2 (en) | 2006-07-20 | 2010-06-22 | The Board Of Trustees Of The Leland Stanford Junior University | Trench isolated capacitive micromachined ultrasonic transducer arrays with a supporting frame |
CN101662989B (zh) | 2006-11-03 | 2013-10-30 | 研究三角协会 | 使用挠曲模式压电换能器的增强的超声成像探头 |
DE102007008120A1 (de) | 2007-02-19 | 2008-08-21 | Siemens Ag | Piezostapel und Verfahren zum Herstellen eines Piezostapels |
JP2009165212A (ja) | 2007-12-28 | 2009-07-23 | Panasonic Corp | 圧電体を用いた発電素子およびそれを用いた発電装置 |
US8084750B2 (en) | 2009-05-28 | 2011-12-27 | Agilent Technologies, Inc. | Curved ion guide with varying ion deflecting field and related methods |
US9327316B2 (en) | 2009-06-30 | 2016-05-03 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Multi-frequency acoustic array |
US8659921B2 (en) | 2009-08-28 | 2014-02-25 | General Electric Company | Power supply with a piezoelectric transformer and method for power conversion |
WO2011026187A1 (en) | 2009-09-03 | 2011-03-10 | Monash University | Navigable system for catheter based endovascular neurosurgery |
WO2011033887A1 (ja) * | 2009-09-17 | 2011-03-24 | 株式会社日立メディコ | 超音波探触子及び超音波撮像装置 |
US8563345B2 (en) | 2009-10-02 | 2013-10-22 | National Semiconductor Corporated | Integration of structurally-stable isolated capacitive micromachined ultrasonic transducer (CMUT) array cells and array elements |
KR101573517B1 (ko) * | 2009-10-12 | 2015-12-02 | 삼성전자주식회사 | 압전형 마이크로 스피커 |
WO2011091423A2 (en) | 2010-01-25 | 2011-07-28 | The Arizona Board Of Regents On Behalf Of The University Of Arizona | Ultrasonic/photoacoustic imaging devices and methods |
CN102771046A (zh) * | 2010-02-24 | 2012-11-07 | 住友电气工业株式会社 | 放大器装置、信号处理装置、无线电通信装置、连接器安装结构及同轴连接器 |
US8626295B2 (en) | 2010-03-04 | 2014-01-07 | Cardiac Pacemakers, Inc. | Ultrasonic transducer for bi-directional wireless communication |
CN102822084B (zh) | 2010-07-28 | 2015-06-10 | 歌尔声学股份有限公司 | Cmos兼容的mems麦克风及其制造方法 |
US20120127136A1 (en) | 2010-08-18 | 2012-05-24 | Kent Displays Incorporated | Display device including piezoelectric and liquid crystal layers |
JP5677016B2 (ja) | 2010-10-15 | 2015-02-25 | キヤノン株式会社 | 電気機械変換装置及びその作製方法 |
JP5603739B2 (ja) | 2010-11-02 | 2014-10-08 | キヤノン株式会社 | 静電容量型電気機械変換装置 |
WO2012069882A1 (en) | 2010-11-25 | 2012-05-31 | Nokia Corporation | Piezoelectric resonator |
JP2012129662A (ja) | 2010-12-13 | 2012-07-05 | Ingen Msl:Kk | 超音波探触子 |
US9070862B2 (en) | 2011-02-15 | 2015-06-30 | Fujifilm Dimatix, Inc. | Piezoelectric transducers using micro-dome arrays |
JP2014094886A (ja) | 2011-02-28 | 2014-05-22 | Nippon Chemiphar Co Ltd | Gpr119作動薬 |
US20130331705A1 (en) | 2011-03-22 | 2013-12-12 | Koninklijke Philips Electronics N.V. | Ultrasonic cmut with suppressed acoustic coupling to the substrate |
US20120250454A1 (en) * | 2011-04-04 | 2012-10-04 | Robert Nicholas Rohling | Method and system for shaping a cmut membrane |
WO2013006261A1 (en) | 2011-06-17 | 2013-01-10 | Georgia Tech Research Corporation | Systems and methods for harmonic reduction in capacitive micromachined ultrasonic transducers by gap feedback linearization |
WO2013043906A1 (en) | 2011-09-20 | 2013-03-28 | Sunnybrook Health Sciences Centre | Ultrasound transducer and method for making the same |
US8811636B2 (en) | 2011-11-29 | 2014-08-19 | Qualcomm Mems Technologies, Inc. | Microspeaker with piezoelectric, metal and dielectric membrane |
JP2013123150A (ja) | 2011-12-12 | 2013-06-20 | Konica Minolta Inc | 圧電デバイスおよび超音波探触子 |
KR101386101B1 (ko) | 2012-03-07 | 2014-04-16 | 삼성메디슨 주식회사 | 초음파 흡음 소자, 이를 포함하는 트랜스듀서 및 초음파 프로브 |
US20130278111A1 (en) | 2012-04-19 | 2013-10-24 | Masdar Institute Of Science And Technology | Piezoelectric micromachined ultrasound transducer with patterned electrodes |
US10106397B1 (en) * | 2012-04-23 | 2018-10-23 | University Of Southern California | Acoustic tweezers |
US9061320B2 (en) | 2012-05-01 | 2015-06-23 | Fujifilm Dimatix, Inc. | Ultra wide bandwidth piezoelectric transducer arrays |
JP6065421B2 (ja) | 2012-06-15 | 2017-01-25 | セイコーエプソン株式会社 | 超音波プローブおよび超音波検査装置 |
US20140019072A1 (en) | 2012-07-16 | 2014-01-16 | Verlitics, Inc. | Preprocessor for removing masking signals in a time trace disaggregation process |
US9660170B2 (en) | 2012-10-26 | 2017-05-23 | Fujifilm Dimatix, Inc. | Micromachined ultrasonic transducer arrays with multiple harmonic modes |
US8940639B2 (en) | 2012-12-18 | 2015-01-27 | Analog Devices, Inc. | Methods and structures for using diamond in the production of MEMS |
JP6182859B2 (ja) | 2012-12-27 | 2017-08-23 | セイコーエプソン株式会社 | 超音波トランスデューサーデバイス、超音波測定装置、プローブ及び超音波診断装置、電子機器 |
US9375850B2 (en) | 2013-02-07 | 2016-06-28 | Fujifilm Dimatix, Inc. | Micromachined ultrasonic transducer devices with metal-semiconductor contact for reduced capacitive cross-talk |
US11389832B2 (en) | 2013-06-24 | 2022-07-19 | ZetrOZ Systems, LLC | Low-profile, low-frequency, and low-impedance broad-band ultrasound transducer and methods thereof |
WO2014207654A2 (en) | 2013-06-26 | 2014-12-31 | Koninklijke Philips N.V. | Integrated circuit arrangement for an ultrasound transducer array |
US9475093B2 (en) | 2013-10-03 | 2016-10-25 | Fujifilm Dimatix, Inc. | Piezoelectric ultrasonic transducer array with switched operational modes |
EP3110628B1 (en) | 2014-02-28 | 2019-07-03 | The Regents of the University of California | Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (pmut) |
KR102205505B1 (ko) | 2014-03-04 | 2021-01-20 | 삼성메디슨 주식회사 | 초음파 프로브의 제조 방법 및 그 초음파 프로브 |
US10605903B2 (en) | 2014-03-18 | 2020-03-31 | Duke University | pMUT array for ultrasonic imaging, and related apparatuses, systems, and methods |
WO2015171224A1 (en) | 2014-05-09 | 2015-11-12 | Chirp Microsystems, Inc. | Micromachined ultrasound transducer using multiple piezoelectric materials |
US9067779B1 (en) | 2014-07-14 | 2015-06-30 | Butterfly Network, Inc. | Microfabricated ultrasonic transducers and related apparatus and methods |
JP6424507B2 (ja) | 2014-07-28 | 2018-11-21 | コニカミノルタ株式会社 | 超音波トランスデューサ及び超音波診断装置 |
JP6299511B2 (ja) | 2014-07-31 | 2018-03-28 | セイコーエプソン株式会社 | 超音波デバイス並びにプローブおよび電子機器 |
KR20160021559A (ko) | 2014-08-18 | 2016-02-26 | 삼성전자주식회사 | 나노필라 구조를 가진 정전용량 미세가공 초음파 변환기 및 그 제조방법 |
EP3201122B1 (en) | 2014-10-02 | 2022-12-28 | InvenSense, Inc. | Micromachined ultrasonic transducers with a slotted membrane structure |
US9743191B2 (en) | 2014-10-13 | 2017-08-22 | Knowles Electronics, Llc | Acoustic apparatus with diaphragm supported at a discrete number of locations |
CN106999163B (zh) | 2014-12-11 | 2021-01-26 | 皇家飞利浦有限公司 | 具有交错列的微加工超声换能器的导管换能器 |
JP6365690B2 (ja) | 2015-01-13 | 2018-08-01 | 株式会社村田製作所 | 圧電デバイスの製造方法 |
US10864553B2 (en) * | 2015-01-16 | 2020-12-15 | The Regents Of The University Of California | Piezoelectric transducers and methods of making and using the same |
US9479875B2 (en) | 2015-01-23 | 2016-10-25 | Silicon Audio Directional, Llc | Multi-mode microphones |
US10820888B2 (en) | 2015-03-10 | 2020-11-03 | The Regents Of The University Of California | Miniature ultrasonic imaging system |
US10427188B2 (en) | 2015-07-30 | 2019-10-01 | North Carolina State University | Anodically bonded vacuum-sealed capacitive micromachined ultrasonic transducer (CMUT) |
JP6767474B2 (ja) * | 2015-08-11 | 2020-10-14 | コーニンクレッカ フィリップス エヌ ヴェKoninklijke Philips N.V. | 増加される寿命を備える容量性マイクロマシン超音波トランスデューサ |
JP2017047180A (ja) | 2015-09-04 | 2017-03-09 | キヤノン株式会社 | 探触子アレイ、および、該探触子アレイを備えた音響波測定装置。 |
CN113729764A (zh) | 2016-01-27 | 2021-12-03 | 毛伊图像公司 | 具有稀疏阵列探测器的超声成像 |
WO2017182344A1 (en) | 2016-04-19 | 2017-10-26 | Koninklijke Philips N.V. | Ultrasound transducer positioning |
US10656255B2 (en) | 2016-05-04 | 2020-05-19 | Invensense, Inc. | Piezoelectric micromachined ultrasonic transducer (PMUT) |
EP3468726B1 (en) | 2016-06-13 | 2023-11-15 | Koninklijke Philips N.V. | Broadband ultrasound transducer |
JP6776074B2 (ja) * | 2016-09-16 | 2020-10-28 | 株式会社東芝 | 圧電デバイスおよび超音波装置 |
US11039814B2 (en) | 2016-12-04 | 2021-06-22 | Exo Imaging, Inc. | Imaging devices having piezoelectric transducers |
WO2019002231A1 (en) | 2017-06-30 | 2019-01-03 | Koninklijke Philips N.V. | INTRALUMINAL ULTRASONIC IMAGING DEVICE COMPRISING A SUBSTRATE SEPARATED IN A PLURALITY OF SPACED SEGMENTS, INTRALUMINAL ULTRASONIC IMAGING DEVICE COMPRISING A TRENCH, AND METHOD OF MANUFACTURING |
US11623246B2 (en) | 2018-02-26 | 2023-04-11 | Invensense, Inc. | Piezoelectric micromachined ultrasound transducer device with piezoelectric barrier layer |
US10648852B2 (en) | 2018-04-11 | 2020-05-12 | Exo Imaging Inc. | Imaging devices having piezoelectric transceivers |
US10656007B2 (en) | 2018-04-11 | 2020-05-19 | Exo Imaging Inc. | Asymmetrical ultrasound transducer array |
WO2019226547A1 (en) | 2018-05-21 | 2019-11-28 | Exo Imaging, Inc. | Ultrasonic transducers with q spoiling |
WO2020028580A1 (en) | 2018-08-01 | 2020-02-06 | Exo Imaging, Inc. | Systems and methods for integrating ultrasonic transducers with hybrid contacts |
EP4029068A4 (en) | 2019-09-12 | 2023-12-13 | Exo Imaging Inc. | IMPROVING MUT'S COUPLING EFFICIENCY AND BANDWIDTH VIA AN EDGE GROOVE, VIRTUAL PIVOTS AND FREE BOUNDARIES |
US20220304659A1 (en) | 2021-03-29 | 2022-09-29 | Exo Imaging, Inc. | Trenches for the reduction of cross-talk in mut arrays |
-
2018
- 2018-04-11 US US15/951,121 patent/US10648852B2/en active Active
-
2019
- 2019-03-09 CN CN202111051912.8A patent/CN113729773A/zh active Pending
- 2019-03-09 KR KR1020207031591A patent/KR102278330B1/ko active IP Right Grant
- 2019-03-09 KR KR1020237011375A patent/KR20230049766A/ko not_active Application Discontinuation
- 2019-03-09 KR KR1020217017066A patent/KR102315801B1/ko active IP Right Grant
- 2019-03-09 IL IL296792A patent/IL296792B2/en unknown
- 2019-03-09 EP EP24153115.1A patent/EP4333603A3/en active Pending
- 2019-03-09 WO PCT/US2019/021501 patent/WO2019199397A1/en unknown
- 2019-03-09 CN CN201980039393.8A patent/CN112368085B/zh active Active
- 2019-03-09 EP EP19784517.5A patent/EP3774080B1/en active Active
- 2019-03-09 JP JP2020555166A patent/JP6937092B2/ja active Active
- 2019-03-09 KR KR1020217033215A patent/KR102519309B1/ko active IP Right Grant
-
2020
- 2020-03-27 US US16/833,333 patent/US10969270B2/en active Active
- 2020-10-08 IL IL277897A patent/IL277897B/en unknown
-
2021
- 2021-02-19 US US17/180,308 patent/US11313717B2/en active Active
- 2021-08-18 JP JP2021133543A patent/JP7417286B2/ja active Active
- 2021-10-26 IL IL287591A patent/IL287591B2/en unknown
-
2022
- 2022-03-17 US US17/697,837 patent/US11774280B2/en active Active
-
2023
- 2023-09-15 JP JP2023149820A patent/JP2023169292A/ja active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2008510324A (ja) | 2004-03-11 | 2008-04-03 | ジョージア テック リサーチ コーポレイション | 非対称薄膜cMUT素子及び製作方法 |
WO2010100861A1 (ja) | 2009-03-05 | 2010-09-10 | 株式会社日立メディコ | 超音波トランスデューサ、その製造方法、および、それを用いた超音波探触子 |
JP2015521409A (ja) | 2012-05-01 | 2015-07-27 | フジフィルム ディマティックス, インコーポレイテッド | 二重電極を有する超広帯域幅変換器 |
JP2018502467A (ja) | 2014-10-15 | 2018-01-25 | クアルコム,インコーポレイテッド | 3ポート圧電超音波トランスデューサ |
Also Published As
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP7417286B2 (ja) | 圧電トランシーバーを有する画像処理装置 | |
US20230015764A1 (en) | Maging devices having piezoelectric transceivers with harmonic characteristics | |
US11819881B2 (en) | Imaging devices having piezoelectric transceivers with harmonic characteristics | |
AU2021437097A1 (en) | Imaging devices having piezoelectric transceivers with harmonic characteristics | |
AU2021437908A1 (en) | Imaging devices having piezoelectric transceivers with harmonic characteristics | |
TW202310461A (zh) | 具有具諧波特性之壓電收發器之成像裝置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20210913 |
|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20210917 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20220916 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221019 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230119 |
|
RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20230309 |
|
RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20230310 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20230515 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230915 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20230926 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20231129 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20231225 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7417286 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |