JP7401899B2 - 中性子発生用リチウムターゲット及びその製造方法 - Google Patents
中性子発生用リチウムターゲット及びその製造方法 Download PDFInfo
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- JP7401899B2 JP7401899B2 JP2019233959A JP2019233959A JP7401899B2 JP 7401899 B2 JP7401899 B2 JP 7401899B2 JP 2019233959 A JP2019233959 A JP 2019233959A JP 2019233959 A JP2019233959 A JP 2019233959A JP 7401899 B2 JP7401899 B2 JP 7401899B2
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- lithium
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- chromium
- forming
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- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical compound [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 title claims description 80
- 229910052744 lithium Inorganic materials 0.000 title claims description 80
- 238000004519 manufacturing process Methods 0.000 title claims description 19
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 claims description 71
- 229910052804 chromium Inorganic materials 0.000 claims description 71
- 239000011651 chromium Substances 0.000 claims description 71
- 229910052751 metal Inorganic materials 0.000 claims description 57
- 239000002184 metal Substances 0.000 claims description 57
- CXOWYMLTGOFURZ-UHFFFAOYSA-N azanylidynechromium Chemical compound [Cr]#N CXOWYMLTGOFURZ-UHFFFAOYSA-N 0.000 claims description 24
- 238000000034 method Methods 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 22
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 20
- 239000001301 oxygen Substances 0.000 claims description 20
- 229910052760 oxygen Inorganic materials 0.000 claims description 20
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 239000010949 copper Substances 0.000 claims description 7
- 229910052757 nitrogen Inorganic materials 0.000 claims description 7
- 239000010410 layer Substances 0.000 description 135
- 238000010586 diagram Methods 0.000 description 11
- 230000000694 effects Effects 0.000 description 11
- 239000002245 particle Substances 0.000 description 8
- 125000004429 atom Chemical group 0.000 description 6
- 238000004544 sputter deposition Methods 0.000 description 6
- 206010028980 Neoplasm Diseases 0.000 description 5
- 201000011510 cancer Diseases 0.000 description 5
- 239000011229 interlayer Substances 0.000 description 5
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 4
- 229910052796 boron Inorganic materials 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000010030 laminating Methods 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 238000005096 rolling process Methods 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052790 beryllium Inorganic materials 0.000 description 1
- ATBAMAFKBVZNFJ-UHFFFAOYSA-N beryllium atom Chemical compound [Be] ATBAMAFKBVZNFJ-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000032798 delamination Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 238000011835 investigation Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005121 nitriding Methods 0.000 description 1
- 125000004430 oxygen atom Chemical group O* 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000001004 secondary ion mass spectrometry Methods 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000002560 therapeutic procedure Methods 0.000 description 1
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- Particle Accelerators (AREA)
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019233959A JP7401899B2 (ja) | 2019-12-25 | 2019-12-25 | 中性子発生用リチウムターゲット及びその製造方法 |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019233959A JP7401899B2 (ja) | 2019-12-25 | 2019-12-25 | 中性子発生用リチウムターゲット及びその製造方法 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021103104A JP2021103104A (ja) | 2021-07-15 |
| JP2021103104A5 JP2021103104A5 (https=) | 2022-10-31 |
| JP7401899B2 true JP7401899B2 (ja) | 2023-12-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2019233959A Active JP7401899B2 (ja) | 2019-12-25 | 2019-12-25 | 中性子発生用リチウムターゲット及びその製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP7401899B2 (https=) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20230164717A (ko) * | 2021-04-02 | 2023-12-04 | 티에이이 테크놀로지스, 인크. | 대상 재료들의 보호를 위한 재료들 및 구성들 |
| JP7839770B2 (ja) * | 2023-08-15 | 2026-04-02 | 日本碍子株式会社 | 中性子発生用ターゲット及びその製造方法。 |
| CN121204615B (zh) * | 2025-11-26 | 2026-03-17 | 北京健联医疗科技有限公司 | 一种合金相真空蒸镀锂膜的方法 |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002338267A (ja) | 2001-05-16 | 2002-11-27 | Olympus Optical Co Ltd | 光学素子成形用型 |
| JP2003328894A (ja) | 2002-05-13 | 2003-11-19 | Hitachi Unisia Automotive Ltd | 燃料噴射弁 |
| US20100067640A1 (en) | 2008-09-12 | 2010-03-18 | Willis Carl A | High-Power-Density Lithium Target for Neutron Production |
| JP2011246778A (ja) | 2010-05-28 | 2011-12-08 | Jx Nippon Mining & Metals Corp | 表面処理ステンレス鋼材料及びその製造方法 |
| JP2014044098A (ja) | 2012-08-27 | 2014-03-13 | Natl Inst Of Radiological Sciences | 荷電粒子照射ターゲット冷却装置、荷電粒子照射ターゲット、および中性子発生方法 |
| JP2014099342A (ja) | 2012-11-15 | 2014-05-29 | Japan Atomic Energy Agency | 医療用加速器駆動型小型中性子源用リチウムターゲットの製造方法 |
| JP2019160418A (ja) | 2018-03-07 | 2019-09-19 | 株式会社アルバック | リチウムターゲットの製造方法及び製造装置 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07109561A (ja) * | 1993-10-07 | 1995-04-25 | Nissin Electric Co Ltd | 窒化クロム膜被覆基体 |
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2019
- 2019-12-25 JP JP2019233959A patent/JP7401899B2/ja active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002338267A (ja) | 2001-05-16 | 2002-11-27 | Olympus Optical Co Ltd | 光学素子成形用型 |
| JP2003328894A (ja) | 2002-05-13 | 2003-11-19 | Hitachi Unisia Automotive Ltd | 燃料噴射弁 |
| US20100067640A1 (en) | 2008-09-12 | 2010-03-18 | Willis Carl A | High-Power-Density Lithium Target for Neutron Production |
| JP2011246778A (ja) | 2010-05-28 | 2011-12-08 | Jx Nippon Mining & Metals Corp | 表面処理ステンレス鋼材料及びその製造方法 |
| JP2014044098A (ja) | 2012-08-27 | 2014-03-13 | Natl Inst Of Radiological Sciences | 荷電粒子照射ターゲット冷却装置、荷電粒子照射ターゲット、および中性子発生方法 |
| JP2014099342A (ja) | 2012-11-15 | 2014-05-29 | Japan Atomic Energy Agency | 医療用加速器駆動型小型中性子源用リチウムターゲットの製造方法 |
| JP2019160418A (ja) | 2018-03-07 | 2019-09-19 | 株式会社アルバック | リチウムターゲットの製造方法及び製造装置 |
Non-Patent Citations (1)
| Title |
|---|
| 山河 享平，加速器BNCT用リチウムターゲットの開発 (Li(p,n)Be 中性子発生装置とLi拡散防止技術の開発），放射線医学総合研究所共用施設(PASTA&SPICE、NASBEE)共同成果報告会・報告集，日本，平成26年度放射線医学総合研究所 第5回共用施設，2015年10月，p.57-58 |
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| Publication number | Publication date |
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| JP2021103104A (ja) | 2021-07-15 |
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