JP7401347B2 - processing equipment - Google Patents

Description

The present invention relates to a processing device that allows tapes to be discarded to be stacked in a trash can.

A rectangular tape is attached to a circular workpiece such as a semiconductor wafer with a protruding part protruding from the outer periphery of the workpiece, and the gripping part grips the protruding part of the attached rectangular tape. , the workpiece is divided at a dividing starting point formed along the dividing line of the workpiece by moving the outer peripheral edges including the opposing protruding parts in a direction away from each other to expand the tape. There is a processing device that forms a gap between subsequent adjacent chips. (For example, see Patent Documents 1 and 2)

In the above-mentioned processing device, after expanding the tape to form a gap between adjacent chips, the expanded tape is expanded with the workpiece placed in the opening of a ring frame that has an opening capable of accommodating the workpiece. is attached to the ring frame and workpiece to fix the gap between the chips.
Also, after pasting the tape on the ring frame and the workpiece, cut the part of the tape pasted on the ring frame into a circle centered on the center of the opening within the width of the ring frame. , the tape outside the cut part is discarded in the trash. Therefore, the tape to be discarded has a rectangular outer circumference and a circular opening in the center.

The tape to be discarded in this manner is held by a conveyance means and conveyed to a trash can. The conveyance means uses suction cups to suck the four corners of the surface opposite to the surface provided with the adhesive layer of the tape, enters the conveyance means through the opening of a rectangular parallelepiped trash can with an open top plate, and pushes the tape into the trash can. By this pushing, the adhesive layer of the tape to be thrown in sticks to the tape that was put in the trash can first, making the tapes integrated and reducing the volume of tape waste.

Japanese Patent Application Publication No. 2018-006370 JP 2019-110188 Publication

In a tape that is thrown into a trash can, unevenness occurs in the portion gripped by the gripping section when the tape is expanded. Therefore, when multiple tapes are stacked, the outer periphery is stacked higher than the center. Furthermore, since the tapes have an opening in the center, the stacked tapes have a height difference between the outer circumferential portion and the central portion.

Additionally, as mentioned above, due to the difference in height between the outer periphery and the center of the tape, tapes that are thrown in later will not stick to the tape in the trash can, and multiple tapes that are thrown in will It may not be possible to integrate the two. Since the tapes cannot be integrated, when the tape is pushed in by the conveying means, the adhesive layer of the tape being thrown in may adhere to the suction cup of the conveying means.

Therefore, in a processing device that discards tapes in a trash can, there is a problem to be solved in stacking the tapes neatly in the trash can.

The present invention provides a rectangular parallelepiped trash can that has an opening at the top, a circular opening in the center, a rectangular outer shape, and an adhesive layer on one side, in which tape is discarded, and a conveying means for transporting the tape to the trash can. and,
A processing device comprising at least an elevating means for relatively elevating the trash can and the conveying means, the conveying means comprising: a suction cup that sucks and holds an opposite surface of the adhesive layer; and a suction cup arranged on the suction cup. The trash can includes a bottom plate, a side plate erected from the outer periphery of the bottom plate, and a protrusion extending inward from the inner surface of the side plate. The tape held by the transport pad is moved into the trash can by using a means to move the transport means holding the tape under suction and the trash can in a direction in which they approach each other relatively. The control means includes a control means for stacking tapes and adhering the tapes to each other, and brings the protrusion into contact with the outer periphery of the tape that has entered the trash can, thereby preventing the outer periphery of the stacked tapes from expanding in the trash can. It is characterized by
This processing device includes a mechanism for moving the transport means and the trash can in a direction in which they approach each other relatively using the lifting means and detecting a predetermined force when the transport means pushes the bottom plate of the trash can. The control means includes a stop control section that stops the movement of the transport means and the trash can in the direction in which they approach each other by detecting the predetermined force by the detection means; an opening control section that releases the suction cup to the atmosphere after stopping movement in the direction toward the container; and a separation control section that moves the conveyance means and the trash can in a direction that relatively separates them after the suction cup is released to the atmosphere. It is desirable to have the following.
The detection means includes a load sensor disposed on the transport means or the trash can, and a determination unit that determines that the container has been pressed with the predetermined force when the value detected by the load sensor reaches a preset value. It is preferable that it be configured.

In this processing device, the protrusions are brought into contact with the outer periphery of the tape that has entered the trash can to prevent the outer periphery of the tape from bulging, so the tapes can be neatly stacked. Therefore, more tapes can be stored in the trash can. Furthermore, since the adhesive surface, which is the lower surface of the tape, can be prevented from being exposed, it is possible to prevent the adhesive of the tape from adhering to the suction cup. Furthermore, since the tapes are adhered to each other and the swelling of the outer periphery is suppressed, the tapes housed in the trash can are integrated, so the number of times tapes are discarded from the trash can can be reduced.
a detection means for detecting a predetermined force when the transport means presses the bottom plate of the trash can; and a stop control section that stops the relative movement of the transport means and the trash can by detecting the predetermined force. , an opening control section that opens the suction cup to the atmosphere after the movement in the direction of relative approach has stopped, and a separation control section that moves the conveyance means and the trash can in a direction that moves them apart from each other after the suction cup is released to the atmosphere. By providing , it is possible to release the suction by the suction cup when the tape is pressed with a certain force, so that the tape can be stacked stably.

FIG. 2 is an exploded perspective view showing an example of a processing device. FIG. 3 is a perspective view showing a state in which a workpiece is attached to a tape. FIG. 3 is a cross-sectional view showing a state in which the tape attached to the frame is cut. FIG. 2 is a plan view showing a tape having a circular opening in the center and a rectangular outer shape. FIG. 6 is a sectional view showing a state in which the conveying means stores the tape in a trash can. It is a perspective view which shows another example of a conveyance means.

A processing device 1 shown in FIG. 1 is a device for processing a workpiece attached to a tape, and includes a trash can 2 that stores the tape that has been peeled off from the workpiece after processing, and a conveyor that transports the tape to the trash can 2. and a lifting means 4 for relatively raising and lowering the conveying means 3 and the trash can 2. Although the elevating means 4 in the example of FIG. 1 has the function of elevating the conveying means 3, the elevating means 4 may also be configured to elevate the trash can 2. The operation of the lifting means 4 is controlled by the control means 5.

The trash can 2 includes a rectangular bottom plate 21 and four side plates 22 erected from each side of the outer periphery of the bottom plate 21, and an area surrounded by the upper end of the side plates 22 forms a rectangular opening 23. are doing. The opening 23 serves as a tape entrance when storing the tape.

A plurality of protrusions 24 are formed on the inner surface (inner surface) 221 of the side plate 22 and extend toward the inside of the trash can 22, that is, toward the facing side plate 22. The protrusions 24 are each formed into a skewer shape, and in the illustrated example, are formed in a plurality of rows in the horizontal direction (XY plane direction). Each protrusion 24 may be formed of a flexible member such as rubber, or may be formed of a hard member.

The shape and arrangement of the protrusions are not limited to the illustrated example. For example, the plurality of protrusions 24 may have irregular shapes or may have different positions in the horizontal direction. Furthermore, the protrusions may be arranged in a row in the horizontal direction to form one annular plate.

A plurality of load sensors 61 are arranged on the lower surface 211 of the bottom plate 21 . In the illustrated example, the load sensors 61 are disposed at the four corners of the lower surface 211 of the bottom plate 21, but are not limited to these positions.
The plurality of load sensors 61 are connected to a judgment section 62, and the load sensors 61 and judgment section 62 constitute a detection means 6 that detects a predetermined force when pushing the bottom plate 21 by the conveyance means 3. .

The conveyance means 3 includes a conveyance pad 31 that is driven by the elevating means 4 to move up and down, and a plurality of suction cups 32 arranged on a lower surface 311 of the conveyance pad 31. The transport pad 31 is formed in a rectangular shape with an opening 33 formed therein, and a construction portion 34 is formed in the opening 33 . The construction part 34 is supported by the elevating means 4.
The suction cup 32 is connected to a suction source 36 via a valve 35. Valve 35 can selectively communicate suction cup 32 with suction source 36 and the atmosphere.

The control means 5 has a function of relatively moving the conveying means 3 in the direction toward the garbage can 2 and in the direction away from the garbage can 2, and stops the movement of the conveying means 3 in the direction in which it approaches the garbage can 2. It includes a stop control section 51, an opening control section 52 that opens the suction cup 32 to the atmosphere by controlling the valve 35, and a separation control section 53 that moves the conveying means 3 in a direction away from the trash can 2.

Note that the processing device 1 is equipped with a tool for processing the workpiece stuck to the tape, but the tool is not shown.

The tape 100 shown in FIG. 2 has a rectangular outer shape. The tape 100 is attached to the ring frame 101 so as to close the opening 102, and the workpiece 104 is attached to the adhesive surface 103 of the tape 100 located at the opening 102. In the illustrated example, the workpiece 104 is divided into individual chips 107 by cutting a dividing line 105 to form a cutting groove 106, and further expanding the cutting groove 106 by stretching the tape 100. ing.

After the individual chips 107 are picked up from the tape 100, the whole is turned over, as shown in FIG. Then, while rotating the tape 100 and the ring frame 101 around the axis 108 that is perpendicular to the surface direction of the ring frame 101 and passes through the center of the ring frame 101, Press the tip of the cutter 112 to cut the tape 100 into a circular shape. Then, as shown in FIG. 4, a used tape 111 having a rectangular outer shape and a circular opening 110 formed in the center is cut out.
Note that the cutter 112 may be rotated around an axis passing through the center of the opening 110 to cut the tape 100 in a circular shape.

Next, as shown in FIG. 5, the suction cup 32 of the conveying means 3 is pressed against the upper surface of the tape 111 (the surface opposite to the adhesive layer), and the suction cup 32 is sucked by opening the valve 35 shown in FIG. The tape 111 is held in suction by being communicated with a source 36 and the suction cup 32 exerts suction force. Then, the tape 111 is positioned above the opening 23 of the trash can 2, and the transport means 3 is lowered by the lifting means 4 under the control of the control means 4, so that the transport means 4 and the trash can 2 are brought relatively close to each other. The tape 111 is put into the trash can 2. Then, the outer peripheral end of the tape 111 comes into contact with the protrusion 24 protruding from the inner surface of the side plate 22, but as the conveying means 3 continues to descend thereafter, the tape 111 further descends.

When the conveyance means 3 is further lowered in the direction approaching the trash can 2 and reaches a position where it cannot be lowered any further, that is, when there is no tape 111 stored in the trash can 2, the conveyance means 3 is moved by suction. When the held tape 111 comes into contact with the bottom plate 21 of the trash can 2, if one or more tapes 111 are stored in the trash can 2, the tape held by the transport means 3 by suction is placed on the topmost tape among them. When the load sensor 111 comes into contact with the load sensor 111, the measured value by the load sensor 61 reaches a predetermined value due to the downward pressing force of the conveyance means 3. Then, the detection means 6 detects this, and in response to this, the stop control section 51 of the control means 5 stops the descent of the conveyance means 3. Since the bottom surface of the tape 111 is an adhesive surface, if there is no tape 111 stored in the trash can 2, the tape 111 sucked and held by the conveying means 3 will be stuck to the bottom plate 21 of the trash can 2, and the tape 111 will be attached to the bottom plate 21 of the trash can 2. If one or more tapes 111 are stored, the tape 111 is stuck to the non-adhesive surface of the tape located at the top.

Next, the release control section 52 of the control means 5 releases the valve 35 to open the suction cup 32 to the atmosphere. Then, the separation control section 53 of the control means 5 moves the conveyance means 3 in a direction in which it is relatively separated from the trash can 2. As a result, the tape 111 that has been suctioned and held is separated from the suction cup 32, and the tape 111 is stored in the trash can 2 while being pressed by the protrusion 24. Thereafter, the conveying means 3 retreats from the opening 23 of the trash can 2 above.

When a plurality of tapes 111 are stacked one after another in this way, since the opening 110 is formed in the center of the tape 111, the outer circumferential side becomes bulkier relative to the opening 110. However, the outer peripheral end of the tape 111 is pressed by the protrusion 24. When the protrusion 24 is made of a flexible material, the protrusion 24 presses the tape 111 while being deformed.

When expanding the tape 100 shown in FIG. 2, unevenness occurs in the portion gripped by the gripping section of the expansion device, but the protrusions 24 suppress the swelling of the outer circumferential side of the tape 111, so the tape 111 can be neatly expanded. They can be stacked and more tapes 111 can be stored in the trash can 2. Moreover, by suppressing the swelling of the outer circumferential side of the tape 111, the tape 111 accommodated in the trash can 2 is integrated, making it easier to dispose of it later.

Note that the measured value of the load sensor 61 becomes larger each time the tapes 111 are stacked. Therefore, the measurement value detected by the load sensor 61 is stored as a reference value immediately before the tape 111 is put into the trash can 2, and when the tape 111 is carried into the trash can 2 by the transport means 3, the transport means 3 When the increment of the measurement value of the load sensor 61 from the reference value due to the downward pressing of the tape 111 reaches a predetermined value, it is determined that the pushing has been performed with a predetermined pressing force, and the stop control unit 51 may stop the lowering of the conveying means 3. The predetermined value is a value to which a fixed value is added each time one tape 111 is stored in the trash can 2.
Furthermore, without a load sensor, the number of times the transport means 3 transports the tape to the trash can 2 is counted, and the stop control unit 51 performs control to raise the stop position of the transport means 3 according to the counted number of times. You may also do so.
Note that the measured value detected by the load sensor 61 immediately before the tape 111 is put into the trash can 2 is the measured value when the trash can 2 is empty or when the tape 111 is put into the trash can 2. Indicates the measured value.

In the above embodiment, the load sensor 61 is provided in the trash can 2, but the load sensor may be provided on the conveyance means side. For example, instead of the conveying means 3 shown in FIG. 1, the conveying means 7 shown in FIG. 6 can be used. In the following, parts of this conveyance means 7 that are configured similarly to the conveyance means 3 shown in FIG.

A spring 71 is interposed between the transport pad 31 and the suction cup 32. A circular rotating plate 72 whose lower surface is in contact with the upper surface of the transport pad 31 is disposed above the spring 71 . The rotating plate 72 is provided with a protrusion that protrudes toward the outer circumference. Furthermore, a locking member 73 is provided on the upper surface of the transport pad 31 and fits into the protrusion of the transport pad 31 .

In this conveying means 7, when the tape 111 is attracted and the bottom plate 21 of the trash can 2 or the tape located at the top is pressed, the spring 71 contracts. When the pressing force reaches a predetermined value, the spring 71 contracts beyond a certain level, the dog 72 is lifted, and the dog 72 that has entered the U-shape between the light emitting part and the light receiving part of the sensor 73 is removed. 72 is separated from the sensor 73, the light receiving section receives the light emitted from the light projecting section and detects that the dog 27 has been lifted. Upon this detection, the stop control section 51 stops the descending of the conveying means 3. Further, the valve 35 is opened to the atmosphere, the suction cup 32 is opened to the atmosphere, and the suction cup 32 releases the tape 111 from adsorption.

Note that, for example, a proximity sensor that detects that the transport pad 31 or the suction cup 32 has been moved upward is provided, and the transport pad 31 presses the bottom plate 21 of the trash can 2 or the uppermost tape with a predetermined pressing force. The suction of the tape 111 by the suction cup 32 may be released when the tape 111 is pressed toward the tape 111.

1: Processing device 2: Trash can 21: Bottom plate 211: Bottom surface 22: Side plate 221: Inner surface 23: Opening 24: Protrusion 3: Transport means 31: Transport pad 32: Suction cup 33: Opening 34: Erection part 35: Valve 36: Suction source 4: Lifting means 5: Control means 51: Stop control section 52: Release control section 53: Separation control section 6: Detection means 61: Load sensor 62: Judgment section 7: Conveyance means 71: Spring 72: Dog 73: Sensor 100: Tape 101: Frame 102: Opening 103: Adhesive surface 104: Workpiece 105: Planned dividing line 106: Cutting groove 107: Chip 108: Shaft 109: Back side 110: Opening 111: Used tape 112: Cutter

Claims (3)

A rectangular parallelepiped trash can with an opening at the top, a circular opening in the center, a rectangular outer shape, and an adhesive layer on one side for discarding tape;
a conveying means for conveying the tape to the trash can;
Lifting means for relatively lifting and lowering the trash can and the conveying means;
A processing device comprising at least
The conveying means includes a suction cup that sucks and holds the opposite side of the adhesive layer, and a conveyance pad on which the suction cup is arranged,
The trash can includes a bottom plate, a side plate erected from the outer periphery of the bottom plate, and a protrusion extending inward from the inner surface of the side plate,
By using the elevating means to move the transport means holding the tape under suction and the trash can in a direction in which they approach each other relatively, the tape held by the transport pad enters the trash can, and the trash can is removed. It is equipped with a control means for stacking the tapes inside and sticking the tapes together,
A processing device characterized in that the protrusion is brought into contact with the outer periphery of the tape that has entered the trash can to prevent the outer periphery of the tapes stacked in the trash can from expanding. comprising a detection means for detecting a predetermined force when the transport means pushes the bottom plate of the trash can by using the lifting means to move the transport means and the trash can in a direction in which they approach each other relatively;
The control means includes:
a stop control unit that stops movement of the transport means and the trash can in the direction in which they approach each other by detecting the predetermined force by the detection means;
an opening control unit that opens the suction cup to the atmosphere after stopping the movement in the direction of relatively approaching;
a separation control unit that moves the conveyance means and the trash can in a direction in which they are relatively separated after the suction cup is exposed to the atmosphere;
The processing apparatus according to claim 1, comprising: The detection means is
a load sensor disposed on the transport means or the trash can;
3. The processing apparatus according to claim 2, further comprising a determining section that determines that the predetermined force has been applied when the value detected by the load sensor reaches a preset value.

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