JP2021141157A - Processing device - Google Patents

Abstract

To provide a processing device in which used tape is neatly stacked in a trash box.SOLUTION: A projection 24 is provided inside a side plate 22 of a trash box 2. An opposite surface of an adhesive layer of tape 111 is made adhere to a suction cup 32 of transport means 3, the transport means 3 is made to enter the trash box 2. The projection 24 is brought into contact with an outer-peripheral edge of the tape 111, thereby preventing an outer peripheral part of the tape 111 stacked in the trash box 2 from being swollen.SELECTED DRAWING: Figure 5

Description

The present invention relates to a processing device capable of stacking discarded tapes in a trash can.

A rectangular tape is attached to a circular workpiece such as a semiconductor wafer by providing a protruding portion protruding from the outer peripheral edge of the workpiece, and the gripping portion grips the protruding portion of the attached rectangular tape. By expanding the tape by moving the outer peripheral edges including the facing protrusions in a direction away from each other, the workpiece is divided and divided at the division starting point formed along the planned division line of the workpiece. There is a processing device that forms a gap between the later adjacent chips. (See, for example, Patent Documents 1 and 2)

In the processing apparatus as described above, after the tape is expanded to form a gap between adjacent chips, the expanded tape is provided in a state where the workpiece is placed in the opening of the ring frame having an opening capable of accommodating the workpiece. Is attached to the ring frame and the work piece to fix the gap between the chips.
After attaching the tape to the ring frame and the work piece, the tape of the part of the tape attached to the ring frame is cut into a circle centered on the center of the opening within the width of the ring frame. , The tape outside the cut part is discarded in the trash can. Therefore, the tape to be discarded has a rectangular outer circumference and a circular opening in the center.

The tape to be discarded in this way is held by the transport means and transported to the trash can. The transport means sucks the four corners of the surface opposite to the surface provided with the adhesive layer of the tape with suction cups, allows the transport means to enter through the opening of the rectangular parallelepiped trash can with the top plate opened, and pushes it into the trash can. By this pushing, the adhesive layer of the tape to be put into the trash can is attached to the tape put into the trash can first, and the tapes are integrated to reduce the volume of the tape trash.

JP-A-2018-006370 Japanese Unexamined Patent Publication No. 2019-10188

In the tape put into the trash can, unevenness is generated in the portion gripped by the gripping portion when the tape is expanded. Therefore, when a plurality of tapes are stacked, the outer peripheral portion is stacked higher than the central portion. Further, since the tape has an opening in the center, the stacked tapes have a height difference between the outer peripheral portion and the central portion.

Further, as described above, due to the difference in height between the outer peripheral portion and the central portion of the tape, the tape to be inserted later is not attached to the tape in the trash can, and a plurality of inserted tapes are prevented from being attached to the tape in the trash can. May not be able to be integrated. Then, because the tapes cannot be integrated, when the conveying means pushes the tape, the adhesive layer of the inserted tape may adhere to the suction cup of the conveying means.

Therefore, in a processing device that disposes of tape in a trash can, there is a problem to be solved that the tape is neatly stacked in the trash can.

The present invention is a rectangular parallelepiped trash can having an opening at the top, a circular opening at the center, a rectangular outer shape, and an adhesive layer on one side for discarding, and a transport means for transporting the tape to the trash can. When,
A processing device including at least a lifting means for relatively raising and lowering the trash can and the transporting means, wherein the transporting means is arranged with a suction cup that sucks and holds the opposite surface of the adhesive layer and the suction cup. The trash can is provided with a bottom plate, a side plate erected from the outer periphery of the bottom plate, and a protrusion extending inward from the inner surface of the side plate. By using means to move the transport means that sucks and holds the tape and the trash can in a direction in which they are relatively close to each other, the tape held by the transport pad is allowed to enter the trash can and is placed in the trash can. A control means for stacking the tapes and sticking the tapes to each other is provided, and the protrusions are brought into contact with the outer peripheral edge of the tapes that have entered the trash can to prevent the outer peripheral portion of the tapes stacked in the trash can from swelling. It is characterized by that.
The processing device uses the elevating means to move the transport means and the trash can in a direction in which they are relatively close to each other, and detects a predetermined force when the transport means pushes the bottom plate of the trash can. The control means includes a stop control unit that stops the movement of the transport means and the trash can in the relatively approaching direction by detecting the predetermined force by the detection means, and the relative. An opening control unit that opens the suction cup to the atmosphere after stopping the movement in the direction approaching the suction cup, and a separation control unit that moves the transport means and the trash can in a direction that is relatively separated from each other after the suction cup is opened to the atmosphere. And, it is desirable to provide.
Further, the detection means is composed of a load sensor arranged in the transport means or the trash can, and a determination unit that determines that the value detected by the load sensor is pressed by the predetermined force when the value detected by the load sensor reaches a preset value. It is desirable to be configured.

In this processing apparatus, the tapes can be neatly stacked because the protrusions are brought into contact with the outer peripheral edge of the tape that has entered the trash can to prevent the outer peripheral portion of the tape from swelling. Therefore, more tape can be stored in the trash can. Further, since it is possible to prevent the adhesive surface which is the lower surface of the tape from being exposed, it is possible to prevent the adhesive of the tape from adhering to the suction cup. Further, since the tapes are attached to each other and the swelling on the outer peripheral side is suppressed, the tapes housed in the trash can are integrated, so that the number of times the tape is discarded from the trash can can be reduced.
A detection means that detects a predetermined force when the transport means pushes the bottom plate of the trash can, and a stop control unit that stops the movement of the transport means and the trash can in a relatively close direction by detecting the predetermined force. An opening control unit that opens the suction cup to the atmosphere after the movement in the relatively approaching direction is stopped, and a separation control unit that moves the transport means and the trash can in a direction that is relatively separated after the suction cup is opened to the atmosphere. By providing the above, the suction by the suction cup can be released when the tape is pressed with a constant force, so that the tape can be stably stacked.

It is an exploded perspective view which shows the example of a processing apparatus. It is a perspective view which shows the state which the workpiece is attached to the tape. It is sectional drawing which shows the state which cuts the tape attached to a frame. It is a top view which shows the tape which has a circular opening in the center, and the outer shape is rectangular. It is sectional drawing which shows the state which the transport means stores a tape in a trash can. It is a perspective view which shows another example of a transport means.

The processing device 1 shown in FIG. 1 is a device for processing a work piece attached to a tape, and is a trash can 2 for accommodating a tape peeled off from the work piece after processing and a transport for transporting the tape to the trash can 2. The means 3 and the elevating means 4 for relatively raising and lowering the transporting means 3 and the trash can 2 are provided. Although the elevating means 4 in the example of FIG. 1 has a function of elevating and lowering the transport means 3, the elevating means 4 may be configured to raise and lower the trash can 2. The operation of the elevating means 4 is controlled by the control means 5.

The trash can 2 includes a rectangular bottom plate 21 and four side plates 22 erected from each side of the outer circumference of the bottom plate 21, and a region surrounded by the upper ends of the side plates 22 forms a rectangular opening 23. doing. The opening 23 serves as an entrance for the tape when accommodating the tape.

On the inner surface (inner surface) 221 of the side plate 22, a plurality of protrusions 24 extending inside the trash can 22, that is, toward the facing side plates 22 are formed. Each of the protrusions 24 is formed in a skewer shape, and in the illustrated example, the protrusions 24 are formed in a plurality of stages in a row in the horizontal direction (XY plane direction). The individual protrusions 24 may be formed of a flexible member such as rubber, or may be formed of a hard member.

The shape and arrangement of the protrusions are not limited to the illustrated examples. For example, the plurality of protrusions 24 may have irregular shapes or may have different positions in the horizontal direction. Further, the protrusions may be connected in the horizontal direction to form one annular plate.

A plurality of load sensors 61 are arranged on the lower surface 211 of the bottom plate 21. In the illustrated example, the load sensor 61 is arranged at the four corners of the lower surface 211 of the bottom plate 21, but is not limited to this position.
The plurality of load sensors 61 are connected to the determination unit 62, and the load sensor 61 and the determination unit 62 constitute a detection means 6 for detecting a predetermined force when the bottom plate 21 is pushed by the transport means 3. ..

The transport means 3 includes a transport pad 31 that is driven by the elevating means 4 to move up and down, and a plurality of suction cups 32 arranged on the lower surface 311 of the transport pad 31. The transport pad 31 is formed in a rectangular shape having an opening 33 formed therein, and an erection portion 34 is formed in the opening 33. The erection portion 34 is supported by the elevating means 4.
The suction cup 32 is connected to the suction source 36 via a valve 35. The valve 35 can selectively communicate the suction cup 32 with the suction source 36 and the atmosphere.

The control means 5 has a function of relatively moving the transport means 3 in the direction of approaching the trash can 2 and the direction of moving away from the trash can 2, and stops the movement of the transport means 3 in the direction of approaching the trash can 2. It includes a stop control unit 51, an opening control unit 52 that opens the suction cup 32 to the atmosphere under the control of a valve 35, and a separation control unit 53 that moves the transport means 3 in a direction away from the trash can 2.

The processing apparatus 1 is provided with a tool for processing the workpiece attached to the tape, but the tool is not shown.

The tape 100 shown in FIG. 2 has a rectangular outer shape. The tape 100 is attached so as to close the opening 102 of the ring frame 101, and the workpiece 104 is attached to the adhesive surface 103 of the tape 100 located at the opening 102. The workpiece 104 in the illustrated example is divided into individual chips 107 by forming a cutting groove 106 by cutting the scheduled division line 105, and further, the cutting groove 106 is expanded by extending the tape 100. ing.

After the individual chips 107 are picked up from the tape 100, they are turned inside out as shown in FIG. Then, while rotating the tape 100 and the ring frame 101 around an axis 108 that is perpendicular to the surface direction of the ring frame 101 and passes through the center of the ring frame 101, the back surface 109 of the ring frame 101 exceeds the tape 100. The tip of the cutter 112 is pressed against the tape 100 to cut the tape 100 into a circle. Then, as shown in FIG. 4, the used tape 111 having a rectangular outer shape and a circular opening 110 formed at the center thereof is cut out.
The cutter 112 may be rotated around the axis by an axis passing through the center of the opening 110 to cut the tape 100 in a circular shape.

Next, as shown in FIG. 5, the suction cup 32 of the conveying means 3 is pressed against the upper surface of the tape 111 (the surface opposite to the adhesive layer), and the suction cup 32 is sucked by opening the valve 35 shown in FIG. The tape 111 is sucked and held by communicating with the source 36 and exerting a suction force on the suction cup 32. Then, the tape 111 is positioned above the opening 23 of the trash can 2, the transport means 3 is lowered by the elevating means 4 under the control of the control means 4, and the transport means 4 and the trash can 2 are relatively close to each other. Let the tape 111 enter the trash can 2. Then, the outer peripheral end portion of the tape 111 comes into contact with the protrusion 24 protruding from the inner surface of the side plate 22, but when the transport means 3 is lowered thereafter, the tape 111 is further lowered.

When the transport means 3 is further lowered in the direction approaching the trash can 2 and reaches a position where it cannot be lowered any further, that is, when no tape 111 is housed in the trash can 2, the transport means 3 sucks. When the held tape 111 comes into contact with the bottom plate 21 of the trash can 2, if one or more tapes 111 are housed in the trash can 2, the tape sucked and held by the conveying means 3 on the tape located at the top of the tape 111. When the 111 comes into contact with each other, the downward pressing force of the transport means 3 causes the value measured by the load sensor 61 to reach a predetermined value set in advance. Then, the detection means 6 detects this, and the stop control unit 51 of the control means 5 stops the descent of the transport means 3 in response to this. Since the lower surface of the tape 111 is an adhesive surface, if no tape 111 is housed in the trash can 2, the tape 111 sucked and held by the transport means 3 is attached to the bottom plate 21 of the trash can 2 and is attached to the trash can 2. When one or more tapes 111 are housed, the tapes 111 are attached to the non-adhesive surface of the tape located at the top of the tapes 111.

Next, the release control unit 52 of the control means 5 releases the valve 35 to open the suction cup 32 to the atmosphere. Next, the separation control unit 53 of the control means 5 moves the transport means 3 in a direction relatively separated from the trash can 2. As a result, the tape 111 that has been sucked and held is separated from the suction cup 32, and the tape 111 is housed in the trash can 2 in a state of being pressed by the protrusion 24. After that, the transport means 3 retracts upward from the opening 23 of the trash can 2.

When the plurality of tapes 111 are sequentially laminated in this way, since the opening 110 is formed in the central portion of the tape 111, the outer peripheral side thereof becomes relatively bulky with respect to the opening 110. However, the outer peripheral end of the tape 111 is pressed by the protrusion 24. When the protrusion 24 is made of a flexible material, the protrusion 24 is deformed and presses the tape 111.

When the tape 100 shown in FIG. 2 is expanded, unevenness is generated in the portion gripped by the grip portion of the expansion device, but the protrusion 24 suppresses the swelling on the outer peripheral side of the tape 111, so that the tape 111 is neatly arranged. It can be stacked and more tapes 111 can be stored in the trash can 2. Further, since the tape 111 housed in the trash can 2 is integrated by suppressing the swelling on the outer peripheral side of the tape 111, it becomes easy to dispose of the tape 111 later.

The measured value of the load sensor 61 shows a large value each time the tapes 111 are stacked. Therefore, immediately before the tape 111 is put into the trash can 2, the measured value detected by the load sensor 61 is stored as a reference value, and when the tape 111 is brought into the trash can 2 by the transport means 3, the transport means 3 When the increment of the measured value of the load sensor 61 by pressing the tape 111 downward from the reference value reaches a predetermined value, it is determined that the pressing has been performed with the predetermined pressing force, and the stop control unit is used. 51 may stop the lowering of the transport means 3. The predetermined value is a value obtained by adding a constant value each time one tape 111 is stored in the trash can 2.
Further, without providing the load sensor, the transport means 3 counts the number of times the tape is transported to the trash can 2, and the stop control unit 51 controls to raise the stop position of the transport means 3 according to the counted number of times. You may try to do it.
The measured value detected by the load sensor 61 immediately before the tape 111 is put into the trash can 2 is the measured value when the trash can 2 is empty or the tape 111 is put into the trash can 2. Shows the measured value.

In the above embodiment, the load sensor 61 is provided in the trash can 2, but the load sensor may be provided on the transport means side. For example, instead of the transport means 3 shown in FIG. 1, the transport means 7 shown in FIG. 6 can be used. Hereinafter, in the transport means 7, the same reference numerals will be given to the parts having the same structure as that of the transport means 3 shown in FIG. 1, and the description thereof will be omitted.

A spring 71 is interposed between the transport pad 31 and the suction cup 32. Above the spring 71, a circular rotating plate 72 whose lower surface is in contact with the upper surface of the transport pad 31 is arranged. The rotating plate 72 is provided with a protrusion protruding toward the outer periphery. Further, a lock member 73 that fits into the protrusion is arranged on the upper surface of the transport pad 31.

In the transport means 7, when the tape 111 is sucked and the bottom plate 21 of the trash can 2 or the tape located at the top is pressed, the spring 71 contracts. Then, when the pressing force reaches a predetermined force, the spring 71 contracts by a certain amount or more, the dog 72 is lifted, and the dog has entered the U-shape between the light emitting portion and the light receiving portion of the sensor 73. Since the 72 is separated from the sensor 73, the light receiving unit receives the light emitted from the light emitting unit and detects that the dog 27 has been lifted. Upon this detection, the stop control unit 51 stops the lowering of the transport means 3. Further, the valve 35 is opened to the atmosphere, the suction cup 32 is opened to the atmosphere, and the suction cup 32 releases the suction of the tape 111.

For example, a proximity sensor for detecting that the transport pad 31 or the suction cup 32 has been moved upward is provided, and the transport pad 31 presses the bottom plate 21 of the trash can 2 or the tape located at the top with a predetermined pressing force. The suction cup 32 may release the suction of the tape 111 when the tape 111 is pressed toward the surface.

1: Processing device 2: Garbage box 21: Bottom plate 211: Bottom surface 22: Side plate 221: Inner surface 23: Opening 24: Projection 3: Conveying means 31: Conveying pad 32: Sucker 33: Opening 34: Elevation part 35: Valve 36: Suction source 4: Lifting means 5: Control means 51: Stop control unit 52: Release control unit 53: Separation control unit 6: Detection means 61: Load sensor 62: Judgment unit 7: Transport means 71: Spring 72: Dog 73: Sensor 100: Tape 101: Frame 102: Opening 103: Adhesive surface 104: Work piece 105: Scheduled division line 106: Cutting groove 107: Tip 108: Axis 109: Back surface 110: Opening 111: Used tape 112: Cutter

Claims (3)

A rectangular parallelepiped trash can with an opening at the top, a circular opening at the center, a rectangular outer shape, and an adhesive layer on one side where tape is discarded.
A transport means for transporting the tape to the trash can and
An elevating means for relatively raising and lowering the trash can and the transport means,
It is a processing device equipped with at least
The transport means includes a suction cup that sucks and holds the opposite surface of the adhesive layer, and a transport pad on which the suction cup is arranged.
The trash can includes a bottom plate, a side plate erected from the outer periphery of the bottom plate, and a protrusion extending inward from the inner surface of the side plate.
By using the elevating means to move the transport means that sucks and holds the tape and the trash can in a direction that is relatively close to each other, the tape held by the transport pad is allowed to enter the trash can, and the trash can. Equipped with a control means for stacking tapes inside and sticking the tapes together
A processing apparatus characterized in that the protrusions are brought into contact with the outer peripheral edge of the tape that has entered the trash can to prevent the outer peripheral portion of the tape stacked in the trash can from swelling. A detecting means for detecting a predetermined force when the transporting means pushes the bottom plate of the trash can by moving the transporting means and the trash can in a direction relatively close to each other by using the elevating means.
The control means
A stop control unit that stops the movement of the transport means and the trash can in the relatively close direction by detecting the predetermined force by the detection means.
An opening control unit that opens the suction cup to the atmosphere after the movement in the relatively approaching direction is stopped.
After the suction cup is opened to the atmosphere, a separation control unit that moves the transport means and the trash can in a direction that is relatively separated from each other.
The processing apparatus according to claim 1. The detection means
With the load sensor arranged in the transport means or the trash can,
The processing apparatus according to claim 2, wherein when the value detected by the load sensor reaches a preset value, the processing apparatus includes a determination unit that determines that the load sensor has pressed the load sensor.

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